WO2005053053A1 - Dispositif emetteur de lumiere comportant une couche de protection contre la gravure - Google Patents
Dispositif emetteur de lumiere comportant une couche de protection contre la gravure Download PDFInfo
- Publication number
- WO2005053053A1 WO2005053053A1 PCT/IB2004/052380 IB2004052380W WO2005053053A1 WO 2005053053 A1 WO2005053053 A1 WO 2005053053A1 IB 2004052380 W IB2004052380 W IB 2004052380W WO 2005053053 A1 WO2005053053 A1 WO 2005053053A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- light
- emitting device
- etch
- anode
- Prior art date
Links
- 239000011241 protective layer Substances 0.000 title claims abstract description 16
- 239000010410 layer Substances 0.000 claims abstract description 125
- 229910052751 metal Inorganic materials 0.000 claims abstract description 32
- 239000002184 metal Substances 0.000 claims abstract description 32
- 230000004888 barrier function Effects 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 239000013047 polymeric layer Substances 0.000 claims abstract description 5
- 238000005530 etching Methods 0.000 claims description 16
- 229910052782 aluminium Inorganic materials 0.000 claims description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 10
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052750 molybdenum Inorganic materials 0.000 claims description 7
- 239000011733 molybdenum Substances 0.000 claims description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical group [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical group O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910000484 niobium oxide Inorganic materials 0.000 claims description 2
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 2
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 claims description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 2
- 229910001930 tungsten oxide Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 description 26
- -1 silicon nitrides Chemical class 0.000 description 20
- 239000000203 mixture Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 229920000642 polymer Polymers 0.000 description 8
- 230000001681 protective effect Effects 0.000 description 7
- 150000002739 metals Chemical class 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 5
- 239000000956 alloy Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 4
- 238000002955 isolation Methods 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 125000005210 alkyl ammonium group Chemical group 0.000 description 3
- 229910052791 calcium Inorganic materials 0.000 description 3
- 239000011575 calcium Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 3
- 238000002207 thermal evaporation Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- 229920000265 Polyparaphenylene Polymers 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- DZBUGLKDJFMEHC-UHFFFAOYSA-N acridine Chemical compound C1=CC=CC2=CC3=CC=CC=C3N=C21 DZBUGLKDJFMEHC-UHFFFAOYSA-N 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 150000001342 alkaline earth metals Chemical class 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- WDECIBYCCFPHNR-UHFFFAOYSA-N chrysene Chemical compound C1=CC=CC2=CC=C3C4=CC=CC=C4C=CC3=C21 WDECIBYCCFPHNR-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 229920001600 hydrophobic polymer Polymers 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical compound C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229920000307 polymer substrate Polymers 0.000 description 2
- 229920002689 polyvinyl acetate Polymers 0.000 description 2
- 239000011118 polyvinyl acetate Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- BBEAQIROQSPTKN-UHFFFAOYSA-N pyrene Chemical compound C1=CC=C2C=CC3=CC=CC4=CC=C1C2=C43 BBEAQIROQSPTKN-UHFFFAOYSA-N 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007736 thin film deposition technique Methods 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- KLCLIOISYBHYDZ-UHFFFAOYSA-N 1,4,4-triphenylbuta-1,3-dienylbenzene Chemical compound C=1C=CC=CC=1C(C=1C=CC=CC=1)=CC=C(C=1C=CC=CC=1)C1=CC=CC=C1 KLCLIOISYBHYDZ-UHFFFAOYSA-N 0.000 description 1
- GKWLILHTTGWKLQ-UHFFFAOYSA-N 2,3-dihydrothieno[3,4-b][1,4]dioxine Chemical compound O1CCOC2=CSC=C21 GKWLILHTTGWKLQ-UHFFFAOYSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- 230000001464 adherent effect Effects 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 229920000109 alkoxy-substituted poly(p-phenylene vinylene) Polymers 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- SMWDFEZZVXVKRB-UHFFFAOYSA-N anhydrous quinoline Natural products N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 1
- 150000001454 anthracenes Chemical class 0.000 description 1
- 150000001491 aromatic compounds Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N benzo-alpha-pyrone Natural products C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- KAKZBPTYRLMSJV-UHFFFAOYSA-N butadiene group Chemical group C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 235000001671 coumarin Nutrition 0.000 description 1
- 150000004775 coumarins Chemical class 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000000313 electron-beam-induced deposition Methods 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 125000005678 ethenylene group Chemical group [H]C([*:1])=C([H])[*:2] 0.000 description 1
- GVEPBJHOBDJJJI-UHFFFAOYSA-N fluoranthrene Natural products C1=CC(C2=CC=CC=C22)=C3C2=CC=CC3=C1 GVEPBJHOBDJJJI-UHFFFAOYSA-N 0.000 description 1
- RMBPEFMHABBEKP-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2C3=C[CH]C=CC3=CC2=C1 RMBPEFMHABBEKP-UHFFFAOYSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N o-biphenylenemethane Natural products C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920000123 polythiophene Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
- 150000001629 stilbenes Chemical class 0.000 description 1
- 235000021286 stilbenes Nutrition 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- JFLKFZNIIQFQBS-FNCQTZNRSA-N trans,trans-1,4-Diphenyl-1,3-butadiene Chemical compound C=1C=CC=CC=1\C=C\C=C\C1=CC=CC=C1 JFLKFZNIIQFQBS-FNCQTZNRSA-N 0.000 description 1
- 229910000314 transition metal oxide Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000002061 vacuum sublimation Methods 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
- H10K77/111—Flexible substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
- H10K50/814—Anodes combined with auxiliary electrodes, e.g. ITO layer combined with metal lines
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/311—Flexible OLED
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
- H10K85/113—Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
- H10K85/113—Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
- H10K85/1135—Polyethylene dioxythiophene [PEDOT]; Derivatives thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
- H10K85/114—Poly-phenylenevinylene; Derivatives thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
Definitions
- Light-emitting device comprising an etch-protective layer
- the present invention relates to a light-emitting device comprising a stack of layers of a substrate comprising at least one polymeric layer and at least an inorganic barrier layer, an anode layer, a light-emitting layer, a cathode layer, and optionally metal shunts, at least the anode layer or metal shunts being patterned.
- the present invention also relates to a stack of said layers as such. Electroluminescent devices such as LED's are known in the art. In US 5,952,778 an encapsulated organic light-emitting device was disclosed comprising an organic light-emitting material sandwiched between a first (anode) electrode and a second (cathode) electrode.
- the outer surface of the first electrode is suitably contiguous to a substrate preferably transparent e.g., glass.
- the outer surface of the second electrode is contiguous to a protective cover layer.
- the second electrode comprises an alkali metal, alkaline earth metal, rare earth metal or alloys thereof.
- the protective cover layer shields the device from ambient contaminants, oxygen, and water to prevent its oxidation and degradation.
- the protective cover layer may comprise three contiguous layers as follows: a first layer of thin film deposited passivation metal, a second layer of thin film deposited dielectric material, such as silicon dioxide or silicon nitride and a third layer of a hydrophobic polymer.
- the protective cover layer protects the organic electroluminescent material and the reactive electrode from oxidative and hydrolytic degradation in an ambient environment, thereby substantially improving the lifetime of the device.
- Such device is made on a glass substrate.
- flexible poly-LED's polymer light emitting diodes
- Organic electroluminescent devices materials and structure are known in the art, for instance as disclosed in Tang, US Pat. No. 4,356,429, Shi et al, U.S. Pat. No. 5,593,788, and Heeger, U.S. Pat. No. 5,408,109, the disclosures of which are incorporated herein by reference for all purposes.
- Organic electroluminescent devices generally comprise an organic electroluminescent material sandwiched between two electrodes.
- the organic electroluminescent material is a multilayer structure comprising an electron transport layer, PHNL031371 p c ⁇ /
- the material Upon application of an electrical current, the material radiates light generated by recombination of electrons and holes in the organic material.
- the organic luminescent materials are sensitive to contamination, oxidation and humidity.
- the electrodes are also sensitive to contamination, oxidation, and humidity.
- Heeger teaches fabricating the OLED cathode electrode from a low work function metal such as calcium.
- the invention pertains to a light-emitting device comprising a stack of layers of a substrate comprising at least one polymeric layer and at least an inorganic barrier layer, an anode layer, a light-emitting layer, a cathode layer, and optionally metal shunts, at least the anode layer or metal shunts being patterned, wherein sandwiched between the barrier layer and the anode an etch-protective layer is provided.
- the substrate preferably is a flexible substrate.
- the device further may have an optional cover layer.
- the stack of layers as such is a subject of the' invention.
- the etch-protective layer is etch-resistant to etchants capable of etching indium tin oxide layers, metal layers, in particular to metal layers used in the shunts, and the inorganic barrier layer.
- the etch-protective layer may consist of a single layer or a multitude of layers. Suitable materials are inorganic compounds like metal oxides (such as titanium oxide, niobium oxide, or tungsten oxide), silicon oxides, silicon nitrides, and silicon oxi-nitrides, and combinations thereof. This layer protects the inorganic barrier layer during the processing with etching agents like HCl, H 3 P0 , HN0 3 , and alkaline solutions.
- etching agents are typically used to pattern indium tinoxide layers and shunt metal layers.
- These protective layers can be obtained by known PVD, CVD, PECVD, evaporation, spraying, spin coating, printing (screen-printing), or Blade coating techniques, and the like.
- the barrier layer is a water and gas impermeable layer, which may consist of a single layer or a multitude of layers. Suitable materials are metal oxides such as aluminum oxide and polymers such as poly(meth)acrylate. Most preferably, the barrier layer is made of aluminum oxide. These barrier layers can be obtained by known PVD, CVD, PECVD, evaporation, spraying, spin coating, printing (screen-printing), or Blade coating techniques, and the like.
- a multilayered barrier layer that consists of, for instance six thin aluminum oxide layers of 20-40 ⁇ m alternated with polyacrylate layers of about 40-60 ⁇ m.
- the barrier layer and the protective layer can be blanket deposited onto a substrate.
- the ITO (anode) as well as the optional metal layer (shunts) are applied and patterned by lithographic techniques and etching.
- These metals preferably have a lower resistivity than ITO, and are selected from copper, silver, aluminum, gold, tungsten, molybdenum, and the like, or combinations thereof.
- a photo-resist layer and cathode isolation resist lines (paddo lines) the pixel pattern of the device may be formed. This completes the backplane process.
- the devices may be covered with a hole-transporting material, such as poly-ethylendioxythiophene (PEDOT).
- PEDOT poly-ethylendioxythiophene
- a layer of light- emissive material such as a light emitting polymer or a low molecular weight emissive material is then deposited and on top of this the cathode is evaporated.
- a barrier layer is used in order to protect the cathode materials and light-emissive material from oxidation by air and or hydrolysis by water vapor.
- a variety of organic light-emitting compositions can be utilized in the present invention such as those disclosed in the above-mentioned patents.
- the composition can be of low molecular weight or polymeric.
- Suitable light-emitting low molecular weight compositions include aromatic compounds such as derivatives of anthracene, naphthalene, phenanthrene, pyrene, chrysene and perylene; butadienes such as 1,4-diphenylbutadiene and tetraphenylbutadiene; coumarins; acridine; stilbenes such as transtilbene; and metallo- quinoline such as tris-hydroxy quinolinate aluminum and other metal chelates and host- dopant combinations such as described in Appl. Phys. Letter 67, 3853 and Appl. Phys. Letter 69, 3309, the disclosures of which are incorporated herein by reference.
- These low molecular weight light-emitting materials may be deposited by standard thin-film preparation techniques including vacuum evaporation or sublimation. These light-emitting low molecular weight compounds can also be dispersed in a polymeric binder. Suitable binders include poly(vinylcarbazole), poly(vinyltoluene), poly(methylmethacrylate), poly(acrylonitrile), and poly(vinylacetate); and condensation polymers such as polyesters, polycarbonates, polyimides, and polysulfones. Optionally, the polymer can itself exhibit light-emitting properties (e.g., side chain bonding of light-emitting substituent). The light-emitting composition can also be polymeric.
- Suitable polymers for use in the composition of the present invention are (derivatives of) poly( ⁇ henylene vinylene) e.g., poly(l,4-phenylene vinylene); poly(2,5-dialkoxy-l,4-phenylene vinylene); poly(2,5- dialkyl-l,4-phenylene vinylene); poly(phenylene) poly(2,5-dialkyl-l,4-phenylene); poly((p- phenylene); poly(thiophene) e.g., poly(3-alkylthiophene); poly(fluorene) e.g., poly(9,9- dialkyl fluorene), and copolymers of the above functionalities where the alkyl and alkoxy substituents have 1 -20 carbon atoms.
- poly( ⁇ henylene vinylene) e.g., poly(l,4-phenylene vinylene); poly(2,5-dialkoxy-l,4-phenylene vinyl
- the polymers can also be substituted with aryl substituents e.g., phenyl and benzyl.
- a preferred composition is poly(2-methoxy, 5-(2-ethyl- hexyloxy)-l,4-phenylene vinylene (MEH-PPV).
- organic salts can be dispersed in the composition. Suitable organic salts are tetra-alkyl, aryl, or hetero-aryl quaternary ammonium salts including tetra Cl-6 alkyl ammonium toluenesulfonate, tetra Cl-6 alkyl ammonium tetrafluoroborate, and tetra Cl-6 alkyl ammonium tetraphenylborate.
- the hole conducting-injecting material comprises poly(3,4-ethylene dioxythiophene (PEDOT) and the light-emitting material comprises poly(p-arylene vinylene).
- the light-emitting device can comprise a multi-layered organic structure (e.g., from 3 to 9 layers) with the organic hole injecting and/or transporting materials contiguous to the anode and the organic electron injecting and/or transporting materials adjacent to the cathode.
- the anode electrode suitably comprises transparent indium tin oxide or doped tin oxide or aluminum doped zinc oxide.
- the anode electrode is suitably supported on a polymeric transparent substrate such as a polymer substrate such as polyethylene tere- phthalate or polyvinyl acetate.
- the anode layer is typically patterned.
- the cathode layer electrode comprises a metal with a low work function (e.g., less than 4.0 eV, preferably less than 3.5 eV) selected from alkali metals, alkaline earth metal, or rare earth metal, or alloys thereof.
- Preferred metals are barium, calcium or alloys such as magnesium/silver; lithium/aluminum; or magnesium/aluminum. These metals provide low work function and thus enhanced quantum efficiency for the device.
- the protective cover layer which may be present, is preferably contiguous to cathode layer electrode. It may contain more layers, for instance three. If containing three layers, the first layer of the protective cover layer contiguous to the electrode layer comprises a relatively stable metal, preferably aluminum or a transition metal, to passivate the reactive metal cathode layer.
- the metal will preferably be deposited onto the electrode using thin film deposition techniques without breaking vacuum through the same mask utilized to deposit the electrode onto the layer of the organic composition. Suitable metals include gold, silver, aluminum, and indium. Thin film, deposition technique are well known to those skilled in the art such as ion beam deposition, electron beam deposition chemical vapor deposition, thermal evaporation, plasma beam deposition, and sputter deposition.
- the metal layer is preferably deposited by thermal evaporation.
- the second layer comprises a dielectric material, preferably deposited by thin film deposition techniques. Suitable inorganic dielectric materials include silicon oxide (e.g., silicon monoxide or silicon dioxide), silicon nitride, germanium oxide, and insulating transition metal oxide (e.g., zirconium oxide). Preferably, the second layer is silicon nitride.
- the second layer is also suitably deposited by thermal or chemical vapor deposition (e.g., plasma enhanced CVD). The second layer is preferably deposited to a thickness less than 500 ran, preferably about 50 nm to 200 nm, to avoid cracking associated with thicker beam deposited layers of inorganic dielectric materials.
- the third layer of the protective cover layer comprises a hydrophobic polymer.
- Suitable hydrophobic materials include polysiloxanes, polytetrafluoethylene (Teflon®), and branched polyolefins, e.g. polyethylene and polypropylene.
- the polymers are preferably adherent, so that they will adhere to the second layer.
- the optional metal shunts may be a metal selected from Group III or IB metals and transition metals such as silver, gold, copper, aluminum, tungsten, molybdene, chromium, and the like, and are preferably patterned. Combinations and alloys of these metals are very suitable, such as molybdenum chrome / aluminum / molybdenum chrome (MAM).
- the metal shunts are provided to reduce the line resistance of the anode layer (ITO) and/or the cathode layer. Shunts may be provided in cathodes and/or anodes by commonly known sputtering and etching methods.
- the etch-protective layer cooperates to effectively protect the barrier layer during the processing of the device, especially against the normal etching procedures that are used to etch the anode layer and/or the shunts.
- Fig. 1 is a top view of an embodiment of the light-emitting device of the present invention.
- Fig. 2 is a cross-sectional view of the embodiment of FIG. 1.
- Fig. 3 is a graph showing the decrease of the layer thickness as function of the etching time.
- the present invention generally relates to an encapsulated light-emitting device comprising an organic light-emitting composition disposed between a first and second electrode.
- Fig. 1 and 2 there is shown an embodiment of the device comprising the light-emitting layer 1 sandwiched between and contiguous with cathode layer 2 and transparent anode layer 3.
- the anode electrode is supported on a substrate 4.
- An optional cover layer 5 is contiguous to cathode layer 2.
- When a voltage is applied to electrodes 2 and 3 light is emitted from light-emitting layer 1 and radiates from the device through transparent anode layer 3 and substrate 4.
- the device according to this figure contains the optional metal shunts 6.
- the anode or the cathode layer or both may be provided with the optional shunts 6, which are separated from the cathode layer by isolation resist lines 9.
- an inorganic barrier layer 7 is placed between the substrate 4 and anode layer 3 .
- the barrier layer 7 is protected with an etch-protective layer 8.
- the layer 8 protects the barrier layer 7 against processing steps, such as etching the anode layer 3 and the shunts 6.
- Fig. 1 the isolation resist 9 and the cathode isolation resist lines (10) are shown.
- the invention enables using materials with suitable barrier properties, which include materials that may dissolve under such etching conditions. Common etching procedures include treatment with inorganic or organic acids, caustic materials, and the like.
- the etch-protective layer is resistant to the materials of these treatments and protects the barrier layer from contact with such materials.
- the following example is a detailed description of certain device of the present invention. The detailed description falls within the scope of, and serves to exemplify, the more generally described devices set forth above. The example is presented for illustrative purposes only, and is not intended as a restriction of the scope of the invention.
- a polymer substrate was provided with a sputtered A1 2 0 3 layer as barrier layer. This layer was exposed to the etching agent for structuring the metal stack (molybdenum/aluminum/molybdenum).
- the graph drawn in Fig. 3 shows the decrease of the layer thickness d (in Ang) as function of the etching time t (in minutes).
- a decrease was found from about 1180 A (118 nm) to about 720 A (72 nm) after 20 min of etching time.
- This test was repeated with a similar system but wherein on the barrier layer a 50 nm thick Si0 2 etch-protective layer was provided, which was deposited by PECVD (plasma enhanced chemical vapor deposition). Etching did not affect the layer thickness of the A1 2 0 3 layer and after 20 min etching time the layer thickness was unchanged at about 1180 A (dotted line)(see Fig. 3).
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03104381 | 2003-11-26 | ||
EP03104381.3 | 2003-11-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005053053A1 true WO2005053053A1 (fr) | 2005-06-09 |
Family
ID=34626413
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/IB2004/052380 WO2005053053A1 (fr) | 2003-11-26 | 2004-11-11 | Dispositif emetteur de lumiere comportant une couche de protection contre la gravure |
Country Status (2)
Country | Link |
---|---|
TW (1) | TW200526071A (fr) |
WO (1) | WO2005053053A1 (fr) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007111763A2 (fr) * | 2006-03-20 | 2007-10-04 | General Electric Company | Dispositifs opto-électroniques présentant une meilleure efficacité |
WO2008029060A2 (fr) * | 2006-09-07 | 2008-03-13 | Saint-Gobain Glass France | Substrat pour dispositif electroluminescent organique, utilisation et procede de fabrication de ce substrat, ainsi que dispositif electroluminescent organique. |
WO2008059185A2 (fr) * | 2006-11-17 | 2008-05-22 | Saint-Gobain Glass France | Electrode pour dispositif electroluminescent organique, sa gravure acide, ainsi que dispositif electroluminescent organique l'incorporant |
WO2008090493A1 (fr) | 2007-01-22 | 2008-07-31 | Philips Intellectual Property & Standards Gmbh | Dispositif émettant de la lumière |
WO2008132655A2 (fr) | 2007-04-27 | 2008-11-06 | Koninklijke Philips Electronics N.V. | Dispositif photoémetteur à métallisation anodisée |
WO2008135898A1 (fr) | 2007-05-02 | 2008-11-13 | Philips Intellectual Property & Standards Gmbh | Dispositif d'émission de lumière faisant appel à des panneaux oled dans une configuration pliée ou déployée |
US8334651B2 (en) | 2009-02-05 | 2012-12-18 | Koninklijke Philips Electronics N.V. | Electroluminescent device with electrical shunt |
US8563967B2 (en) | 2007-07-11 | 2013-10-22 | Koninklijke Philips N.V. | Organic functional device and manufacturing method therefor |
US8593055B2 (en) | 2007-11-22 | 2013-11-26 | Saint-Gobain Glass France | Substrate bearing an electrode, organic light-emitting device incorporating it, and its manufacture |
US8753906B2 (en) | 2009-04-02 | 2014-06-17 | Saint-Gobain Glass France | Method for manufacturing a structure with a textured surface for an organic light-emitting diode device, and structure with a textured surface |
US8786176B2 (en) | 2007-12-27 | 2014-07-22 | Saint-Gobain Glass France | Substrate for organic light-emitting device, and also organic light-emitting device incorporating it |
US8808790B2 (en) | 2008-09-25 | 2014-08-19 | Saint-Gobain Glass France | Method for manufacturing a submillimetric electrically conductive grid coated with an overgrid |
US9108881B2 (en) | 2010-01-22 | 2015-08-18 | Saint-Gobain Glass France | Glass substrate coated with a high-index layer under an electrode coating, and organic light-emitting device comprising such a substrate |
US9114425B2 (en) | 2008-09-24 | 2015-08-25 | Saint-Gobain Glass France | Method for manufacturing a mask having submillimetric apertures for a submillimetric electrically conductive grid, mask having submillimetric apertures and submillimetric electrically conductive grid |
WO2015162367A1 (fr) | 2014-04-22 | 2015-10-29 | Saint-Gobain Glass France | Electrode supportee transparente pour oled |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1182910A1 (fr) * | 1999-04-02 | 2002-02-27 | Idemitsu Kosan Co., Ltd. | Ecran electroluminescent organique et son procede de fabrication |
US20020158835A1 (en) * | 2001-04-20 | 2002-10-31 | Michiya Kobayashi | Display device and method of manufacturing the same |
JP2003059643A (ja) * | 2001-08-22 | 2003-02-28 | Dainippon Printing Co Ltd | エレクトロルミネッセント素子 |
US20030203210A1 (en) * | 2002-04-30 | 2003-10-30 | Vitex Systems, Inc. | Barrier coatings and methods of making same |
-
2004
- 2004-11-11 WO PCT/IB2004/052380 patent/WO2005053053A1/fr active Application Filing
- 2004-11-23 TW TW093135996A patent/TW200526071A/zh unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1182910A1 (fr) * | 1999-04-02 | 2002-02-27 | Idemitsu Kosan Co., Ltd. | Ecran electroluminescent organique et son procede de fabrication |
US20020158835A1 (en) * | 2001-04-20 | 2002-10-31 | Michiya Kobayashi | Display device and method of manufacturing the same |
JP2003059643A (ja) * | 2001-08-22 | 2003-02-28 | Dainippon Printing Co Ltd | エレクトロルミネッセント素子 |
US20030203210A1 (en) * | 2002-04-30 | 2003-10-30 | Vitex Systems, Inc. | Barrier coatings and methods of making same |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 2003, no. 06 3 June 2003 (2003-06-03) * |
Cited By (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007111763A3 (fr) * | 2006-03-20 | 2008-02-28 | Gen Electric | Dispositifs opto-électroniques présentant une meilleure efficacité |
WO2007111763A2 (fr) * | 2006-03-20 | 2007-10-04 | General Electric Company | Dispositifs opto-électroniques présentant une meilleure efficacité |
JP2010503166A (ja) * | 2006-09-07 | 2010-01-28 | サン−ゴバン グラス フランス | 有機発光デバイス用基板、基板の使用法およびを製造プロセス、ならびに有機発光デバイス |
WO2008029060A2 (fr) * | 2006-09-07 | 2008-03-13 | Saint-Gobain Glass France | Substrat pour dispositif electroluminescent organique, utilisation et procede de fabrication de ce substrat, ainsi que dispositif electroluminescent organique. |
WO2008029060A3 (fr) * | 2006-09-07 | 2008-04-24 | Saint Gobain | Substrat pour dispositif electroluminescent organique, utilisation et procede de fabrication de ce substrat, ainsi que dispositif electroluminescent organique. |
US8339031B2 (en) | 2006-09-07 | 2012-12-25 | Saint-Gobain Glass France | Substrate for an organic light-emitting device, use and process for manufacturing this substrate, and organic light-emitting device |
EP2381743A1 (fr) * | 2006-09-07 | 2011-10-26 | Saint-Gobain Glass France | Substrat pour dispositif electroluminescent organique, utilisation et procede de fabrication de ce substrat, ainsi que dispositif electroluminescent organique |
EP2381745A1 (fr) * | 2006-09-07 | 2011-10-26 | Saint-Gobain Glass France | Substrat pour dispositif electroluminescent organique, utilisation et procede de fabrication de ce substrat, ainsi que dispositif electroluminescent organique |
EP2381744A1 (fr) * | 2006-09-07 | 2011-10-26 | Saint-Gobain Glass France | Substrat pour dispositif electroluminescent organique, utilisation et procede de fabrication de ce substrat, ainsi que dispositif electroluminescent organique |
EP2062462A2 (fr) * | 2006-09-07 | 2009-05-27 | Saint-Gobain Glass France | Substrat pour dispositif electroluminescent organique, utilisation et procede de fabrication de ce substrat, ainsi que dispositif electroluminescent organique. |
WO2008059185A2 (fr) * | 2006-11-17 | 2008-05-22 | Saint-Gobain Glass France | Electrode pour dispositif electroluminescent organique, sa gravure acide, ainsi que dispositif electroluminescent organique l'incorporant |
CN102941711A (zh) * | 2006-11-17 | 2013-02-27 | 法国圣-戈班玻璃公司 | 用于有机发光装置的电极、其酸蚀刻以及包括它的有机发光装置 |
US9099673B2 (en) | 2006-11-17 | 2015-08-04 | Saint-Gobain Glass France | Electrode for an organic light-emitting device, acid etching thereof and also organic light-emitting device incorporating it |
WO2008059185A3 (fr) * | 2006-11-17 | 2008-07-10 | Saint Gobain | Electrode pour dispositif electroluminescent organique, sa gravure acide, ainsi que dispositif electroluminescent organique l'incorporant |
EP2408269A1 (fr) * | 2006-11-17 | 2012-01-18 | Saint-Gobain Glass France | Electrode pour dispositif electroluminescent organique, sa gravure acide, ainsi que dispositif electroluminescent organique l'incorporant |
EP2408268A1 (fr) * | 2006-11-17 | 2012-01-18 | Saint-Gobain Glass France | Electrode pour dispositif electroluminescent organique, sa gravure acide, ainsi que dispositif electroluminescent organique l'incorporant |
WO2008090493A1 (fr) | 2007-01-22 | 2008-07-31 | Philips Intellectual Property & Standards Gmbh | Dispositif émettant de la lumière |
US8179036B2 (en) | 2007-01-22 | 2012-05-15 | Koninklijke Philips Electronics N.V. | Light emitting device with a shunt |
WO2008132655A2 (fr) | 2007-04-27 | 2008-11-06 | Koninklijke Philips Electronics N.V. | Dispositif photoémetteur à métallisation anodisée |
US8004188B2 (en) | 2007-04-27 | 2011-08-23 | Koninklijke Philips Electronics N.V. | Light emitting device with anodized metallization |
WO2008135898A1 (fr) | 2007-05-02 | 2008-11-13 | Philips Intellectual Property & Standards Gmbh | Dispositif d'émission de lumière faisant appel à des panneaux oled dans une configuration pliée ou déployée |
US8563967B2 (en) | 2007-07-11 | 2013-10-22 | Koninklijke Philips N.V. | Organic functional device and manufacturing method therefor |
US8593055B2 (en) | 2007-11-22 | 2013-11-26 | Saint-Gobain Glass France | Substrate bearing an electrode, organic light-emitting device incorporating it, and its manufacture |
US8786176B2 (en) | 2007-12-27 | 2014-07-22 | Saint-Gobain Glass France | Substrate for organic light-emitting device, and also organic light-emitting device incorporating it |
US9114425B2 (en) | 2008-09-24 | 2015-08-25 | Saint-Gobain Glass France | Method for manufacturing a mask having submillimetric apertures for a submillimetric electrically conductive grid, mask having submillimetric apertures and submillimetric electrically conductive grid |
US8808790B2 (en) | 2008-09-25 | 2014-08-19 | Saint-Gobain Glass France | Method for manufacturing a submillimetric electrically conductive grid coated with an overgrid |
US8334651B2 (en) | 2009-02-05 | 2012-12-18 | Koninklijke Philips Electronics N.V. | Electroluminescent device with electrical shunt |
US8753906B2 (en) | 2009-04-02 | 2014-06-17 | Saint-Gobain Glass France | Method for manufacturing a structure with a textured surface for an organic light-emitting diode device, and structure with a textured surface |
US9108881B2 (en) | 2010-01-22 | 2015-08-18 | Saint-Gobain Glass France | Glass substrate coated with a high-index layer under an electrode coating, and organic light-emitting device comprising such a substrate |
WO2015162367A1 (fr) | 2014-04-22 | 2015-10-29 | Saint-Gobain Glass France | Electrode supportee transparente pour oled |
US10319934B2 (en) | 2014-04-22 | 2019-06-11 | Saint-Gobain Glass France | Transparent supported electrode for OLED |
Also Published As
Publication number | Publication date |
---|---|
TW200526071A (en) | 2005-08-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5952778A (en) | Encapsulated organic light emitting device | |
JP6001595B2 (ja) | 有機エレクトロルミネセンスデバイス | |
Bulović et al. | A surface-emitting vacuum-deposited organic light emitting device | |
JP5638176B2 (ja) | 有機電子デバイス用の金属化合物−金属多層電極 | |
JP4981242B2 (ja) | 有機el素子 | |
JP5124083B2 (ja) | 有機電界発光表示装置及びその製造方法 | |
WO2005053053A1 (fr) | Dispositif emetteur de lumiere comportant une couche de protection contre la gravure | |
JPH10144957A (ja) | 有機発光ダイオード構造中の光学的に透明な拡散バリアおよび上部電極 | |
JP2005183406A (ja) | 有機発光デバイス | |
JP2005197210A (ja) | 有機発光デバイス及びその製造方法 | |
JP2004273420A (ja) | 有機電子デバイスにおける欠陥の影響を軽減する電極 | |
JP2006156390A (ja) | 有機電界発光素子及びその製造方法 | |
WO2003047317A1 (fr) | Diode organique electroluminescente (oled) | |
US8241467B2 (en) | Making a cathode structure for OLEDs | |
JP4048830B2 (ja) | 有機電子デバイス素子 | |
JP2005063928A (ja) | エレクトロルミネッセンス素子及びエレクトロルミネッセンスパネル | |
US6995391B2 (en) | Electrode structure for electronic and opto-electronic devices | |
EP1872385A1 (fr) | Diode organique electroluminescente (oled) a stabilite, luminance et rendement accrus | |
JP2013251191A (ja) | 有機エレクトロルミネッセンス素子 | |
JP4527935B2 (ja) | 有機エレクトロルミネッセント画像表示装置 | |
KR100615221B1 (ko) | 유기 전계 발광 표시 장치 및 이의 제조 방법 | |
EP1549109A2 (fr) | Dispositif électroluminescent | |
JP4491894B2 (ja) | 有機エレクトロルミネッセンス表示素子およびその製造方法 | |
KR100553765B1 (ko) | 유기 전계 발광 표시 장치 및 이의 제조 방법 | |
KR100615223B1 (ko) | 유기 전계 발광 표시 장치 및 이의 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWW | Wipo information: withdrawn in national office |
Country of ref document: DE |
|
122 | Ep: pct application non-entry in european phase |