WO2005040614A1 - Pompe a vide multicellulaire presentant un rendement ameliore - Google Patents

Pompe a vide multicellulaire presentant un rendement ameliore Download PDF

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Publication number
WO2005040614A1
WO2005040614A1 PCT/GB2004/004277 GB2004004277W WO2005040614A1 WO 2005040614 A1 WO2005040614 A1 WO 2005040614A1 GB 2004004277 W GB2004004277 W GB 2004004277W WO 2005040614 A1 WO2005040614 A1 WO 2005040614A1
Authority
WO
WIPO (PCT)
Prior art keywords
pump
pumping stage
valve
outlet
exhaust gases
Prior art date
Application number
PCT/GB2004/004277
Other languages
English (en)
Inventor
Neil A. Turner
Peter Hugh Birch
Allan Edmiston Mcdiarmid
Original Assignee
The Boc Group Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The Boc Group Plc filed Critical The Boc Group Plc
Publication of WO2005040614A1 publication Critical patent/WO2005040614A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/18—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/56—Number of pump/machine units in operation

Definitions

  • This invention relates to improvements in pumping efficiency, and in particular to a vacuum pumping system, which can reduce power consumption of the pumping system at both high and low pump inlet pressures.
  • Vacuum pumps are known which are oil-free in their vacuum chambers and which are therefore useful in clean environments such as those found in the semiconductor industry in which any lubricants present in the vacuum chambers might cause contamination.
  • Such "dry" vacuum pumps are commonly multi-stage positive displacement pumps employing inter-meshing rotors.
  • the rotors may have the same type of profile in each stage or the profile may change from stage to stage.
  • our European patent application number 0,793,021 describes a multi-stage vacuum pump in which the stage adjacent the pump inlet has a "Roots"-type profile, the stage adjacent the pump outlet also has a Roots-type profile, and the intermediate stages have a "Northey" or "claw"-type profile.
  • a feature that influerices the power drawn by a vacuum pump at low inlet pressure is the size of the stage adjacent the pump outlet; the smaller the stage, the lower the power consumption.
  • a smaller stage adjacent the pump outlet restricts fluid throughput at high inlet pressures, thereby increasing the power consumption of the pump at high inlet pressures.
  • the Ulvac Eco-Shock attachment which is in the form of a box externally attached to the vacuum pump outlet.
  • the attachment provides an additional pump for selectively pumping gases exhaust from the vacuum pump.
  • the attachment includes a motor for driving the additional pump, and thus requires a separate power supply.
  • the attachment also significantly increases the footprint of the pumping system (comprising both the pump and the attachment).
  • the external connection of the attachment to the pump increases the likelihood of gas leakages developing in the system.
  • the present invention provides a vacuum pumping system, which comprises a vacuum pump having an outlet for exhausting pumped gases from the pump, and at least one pumping stage; means for driving said at least one pumping stage; and, downstream of the pump outlet, a valve connected to the pump outlet for receiving the exhaust gases therefrom, and an additional pumping stage, the valve being arranged to selectively convey the received exhaust gases towards and/or away from the additional pumping stage, wherein the driving means is arranged to drive said additional stage.
  • the "final" pumping stage of the vacuum pump can be effectively toggled between the pumping stage of the pump which is adjacent the pump outlet, and the, or the final, pumping stage of the exhaust gas pumping apparatus. If these two stages are of different size, then, using the valve, the most appropriate "final” pumping stage for the inlet fluid pressure can be provided to minimise power consumption.
  • a vacuum pump including a "blow-off" valve between stages in the pump, which valve is not connected downstream from the pump outlet, but is instead connected upstream from the pump outlet.
  • the additional pumping stage provided in the present invention is not critical in achieving the ultimate vacuum of the vacuum pump. Accordingly, should the valve fail, or partly fail, to direct the exhaust gases to the additional pumping stage when required to reduce power consumption, the effect would be that this reduction in power consumption would not be obtained but without critically affecting the performance of the pump. Subsequently, once the fault has been detected, the valve or the pumping system can be replaced at a convenient time for the operator in order to re-gain optimum power consumption. In contrast, should a blow-off valve fail to direct gas to the final pumping stage(s) of a vacuum pump, the ultimate vacuum provided by the pump is severely compromised.
  • the number of components of the pumping system is reduced in comparison to the known Eco-Shock system.
  • the addition to a vacuum pump of a valve and an additional pumping stage would not significantly increase the footprint of the vacuum pumping system.
  • the pumping stage has a pumping stage inlet for receiving the exhaust gases from a first valve outlet of the valve and a pumping stage outlet for outputting pumped exhaust gases, the valve having a second valve outlet for outputting the received exhaust gases away from the pumping stage.
  • the valve is preferably arranged to convey the received exhaust gases towards and/or away from the additional pumping stage depending on the pressure of the exhaust gases.
  • the apparatus preferably comprises means in fluid communication with both the second valve outlet and the pumping stage outlet for conveying the exhaust gases and the pumped exhaust gases away from second valve outlet and the pumping stage outlet, respectively.
  • the valve comprises a three-way valve for selectively outputting the received exhaust gases either towards or away from the additional pumping stage.
  • the valve may be arranged to convey exhaust gases towards the additional pumping stage, and, when the pressure of the exhaust gases exceeds a given pressure level, to additionally convey a portion of the exhaust gases away from the additional pumping stage.
  • the drive means may comprise a drive shaft having arranged thereon at least one rotor of the pump and at least one rotor of the additional pumping stage, and/or the drive means may comprise a motor for driving both the pump and the additional pumping stage.
  • the size of the additional pumping stage is preferably different from that of the pumping stage of the pump which is adjacent the pump outlet.
  • the additional pumping stage may be smaller than the pumping stage of the pump which is adjacent the pump outlet.
  • the present invention also provides vacuum pumping system, comprising a vacuum pump having an outlet for exhausting pumped gases from the pump; downstream of the pump outlet, a valve connected to the pump outlet for receiving the exhaust gases therefrom, and a pumping stage, the valve being arranged to selectively convey the received exhaust gases towards and/or away from the pumping stage; and a housing for housing the vacuum pump, the valve and the pumping stage.
  • the invention also provides a method of vacuum pumping a chamber, comprising providing a vacuum pumping system comprising a vacuum pump, a valve and a pumping stage, driving together the vacuum pump and the pumping stage to evacuate the chamber to a pressure at or below a desired level, receiving gas from the chamber at the vacuum pump and exhausting from the pump exhaust gases, receiving at a valve the exhaust gases, and selectively conveying the received exhaust gases from the valve towards and/or away the additional pumping stage depending on the pressure of the received exhaust gases whilst maintaining the pressure in the chamber at or below the desired level.
  • Figure 1 is a schematic cross-section of a vacuum pumping system
  • Figure 2 illustrates the drive mechanism for the pumping system.
  • the vacuum pumping system 10 comprises a vacuum pump 12, such as a dry vacuum pump, having a pump inlet 14 for receiving a fluid flow and a pump outlet 16 for exhausting pumped fluid.
  • a valve 18 has a valve inlet 20 connected to the pump outlet 16 for receiving the exhausted fluid.
  • the valve 18 also has a first valve outlet 22, and a second valve outlet 24.
  • the first valve outlet 22 is connected to an inlet 26 of an additional pumping stage 28. This stage 28 has an outlet 30 for exhausting fluid pumped thereby.
  • the second valve outlet 24 and the backing pump outlet 30 are connected to a conduit 32 for conveying fluid away from both the valve 18 and the backing pump 28.
  • the vacuum pump 12, valve 18 and backing pump 28 may be housed in a common housing 34.
  • the vacuum pump 12 comprises at least one pumping stage.
  • the vacuum pump 12 comprises three stages 36a, 36b, 36c, although any number of stages may be provided.
  • each stage comprises a set of rotors 38a, 38b.
  • a motor 40 drives a pair of shafts 42a, 42b carrying respectively rotors 38a and rotors 38b; timing gears 43 connect shaft 42a to shaft 42b.
  • the rotors 44a, 44b of the additional pumping stage 28 are also mounted on the shafts 42a, 42b, and thus are also driven by the motor 40.
  • the rotors 44a, 44b of the additional stage 28 are smaller than the rotors 38a, 38b of the pumping stage 36c adjacent the pump outlet 16.
  • the valve 18 is preferably in the form of a three-way valve for outputting the received fluid either from the first outlet 22 towards the backing pump 28, or from the second outlet 24 directly to the conduit 32.
  • the valve 18 opens the first outlet 22 and to close the second outlet 24. Accordingly, fluid exhausted from the vacuum pump 12 is also pumped by the additional stage 28 prior to its exhaust from the conduit 32, which thus effectively provides the "final" pumping stage for the pumped fluid.
  • the valve 18 closes the first outlet 22 and to open the second outlet 24.
  • the pumping stage 36c of the vacuum pump 12 adjacent the pump outlet 16 provides the "final" pumping stage for the pumped fluid. This can allow the size of the final pumping stage to be changed depending on the inlet pressure, and thus enable power consumption to be minimised at both low and high inlet pressures.
  • vacuum pumping system (10) comprises a vacuum pump (12) having an outlet (16) for exhausting pumped gases from the pump, and at least one pumping stage (36c); means (40; 42a, 42b) for driving said at least one pumping stage (36c); and, downstream of the pump outlet, a valve (18) connected to the pump outlet (16) for receiving the exhaust gases therefrom, and an additional pumping stage (28), the valve being arranged to selectively convey the received exhaust gases towards and/or away from the additional pumping stage (28) to minimise power consumption of the driving means, wherein the driving means (40; 42a, 42b) is arranged to drive said additional stage.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L'invention concerne un système de pompage à vide (10) comprenant une pompe à vide (12) qui présente une sortie (16) pour évacuer les gaz pompés de la pompe, et au moins un étage de pompage (36c); des moyens (40; 42a, 42b) servant à commander le ou les étages de pompage (36c); et, en aval de la sortie de pompe, une soupape (18) connectée à la sortie de pompe (16) servant à recevoir les gaz évacués de cette dernière, ainsi qu'un étage de pompage supplémentaire (28), la soupape étant agencée de façon à acheminer de manière sélective les gaz évacués reçus en direction de l'étage de pompage supplémentaire (28) et/ou à les évacuer de ce dernier, les moyens de commande (40; 42a, 42b) étant agencés pour commander ledit étage supplémentaire.
PCT/GB2004/004277 2003-10-14 2004-10-08 Pompe a vide multicellulaire presentant un rendement ameliore WO2005040614A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0324068.6 2003-10-14
GB0324068A GB0324068D0 (en) 2003-10-14 2003-10-14 Improvements in pumping efficiency

Publications (1)

Publication Number Publication Date
WO2005040614A1 true WO2005040614A1 (fr) 2005-05-06

Family

ID=29559275

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2004/004277 WO2005040614A1 (fr) 2003-10-14 2004-10-08 Pompe a vide multicellulaire presentant un rendement ameliore

Country Status (2)

Country Link
GB (1) GB0324068D0 (fr)
WO (1) WO2005040614A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1906024A2 (fr) * 2006-09-12 2008-04-02 Anest Iwata Corporation Dispositif de commande de fonctionnement et procédé de pompes à vide
FR3001263A1 (fr) * 2013-01-18 2014-07-25 Adixen Vacuum Products Pompe a vide multi-etagee de type seche
EP3447297A1 (fr) * 2010-04-19 2019-02-27 Ebara Corporation Appareil de pompe à vide sèche

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61123777A (ja) * 1984-11-16 1986-06-11 Hitachi Ltd 真空ポンプ
DE4129897A1 (de) * 1991-09-09 1993-03-11 Koterewa Katharina Vorrichtung zur steuerung des verbundes mehrstufiger vakuumpumpen
JPH06147166A (ja) * 1992-10-30 1994-05-27 Shin Nippon Zoki Kk ２段型液封式真空ポンプ
EP0730093A1 (fr) * 1995-02-28 1996-09-04 Iwata Air Compressor Mfg. Co.,Ltd. Système de contrÔle d'une pompe à vide à deux étages

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61123777A (ja) * 1984-11-16 1986-06-11 Hitachi Ltd 真空ポンプ
DE4129897A1 (de) * 1991-09-09 1993-03-11 Koterewa Katharina Vorrichtung zur steuerung des verbundes mehrstufiger vakuumpumpen
JPH06147166A (ja) * 1992-10-30 1994-05-27 Shin Nippon Zoki Kk ２段型液封式真空ポンプ
EP0730093A1 (fr) * 1995-02-28 1996-09-04 Iwata Air Compressor Mfg. Co.,Ltd. Système de contrÔle d'une pompe à vide à deux étages
EP1101943A2 (fr) * 1995-02-28 2001-05-23 Anest Iwata Corporation Système de contrôle d'une pompe à vide à deux étages

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 010, no. 315 (M - 529) 25 October 1986 (1986-10-25) *
PATENT ABSTRACTS OF JAPAN vol. 018, no. 465 (M - 1665) 30 August 1994 (1994-08-30) *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1906024A2 (fr) * 2006-09-12 2008-04-02 Anest Iwata Corporation Dispositif de commande de fonctionnement et procédé de pompes à vide
EP1906024A3 (fr) * 2006-09-12 2012-06-13 Anest Iwata Corporation Dispositif de commande de fonctionnement et procédé de pompes à vide
EP3447297A1 (fr) * 2010-04-19 2019-02-27 Ebara Corporation Appareil de pompe à vide sèche
FR3001263A1 (fr) * 2013-01-18 2014-07-25 Adixen Vacuum Products Pompe a vide multi-etagee de type seche
EP2767717A1 (fr) * 2013-01-18 2014-08-20 Adixen Vacuum Products Pompe à vide multi-étagée de type sèche

Also Published As

Publication number Publication date
GB0324068D0 (en) 2003-11-19

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