WO2005019900A1 - Reducteur de coherence a miroir etage et procede de production d'un reducteur de coherence - Google Patents

Reducteur de coherence a miroir etage et procede de production d'un reducteur de coherence Download PDF

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Publication number
WO2005019900A1
WO2005019900A1 PCT/EP2004/008118 EP2004008118W WO2005019900A1 WO 2005019900 A1 WO2005019900 A1 WO 2005019900A1 EP 2004008118 W EP2004008118 W EP 2004008118W WO 2005019900 A1 WO2005019900 A1 WO 2005019900A1
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WIPO (PCT)
Prior art keywords
end faces
rods
optics
coherence
mirror element
Prior art date
Application number
PCT/EP2004/008118
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German (de)
English (en)
Inventor
Alexander Menck
Original Assignee
Carl Zeiss Sms Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Sms Gmbh filed Critical Carl Zeiss Sms Gmbh
Publication of WO2005019900A1 publication Critical patent/WO2005019900A1/fr

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/12—Beam splitting or combining systems operating by refraction only
    • G02B27/123—The splitting element being a lens or a system of lenses, including arrays and surfaces with refractive power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/144—Beam splitting or combining systems operating by reflection only using partially transparent surfaces without spectral selectivity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/48—Laser speckle optics
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70583—Speckle reduction, e.g. coherence control or amplitude/wavefront splitting

Definitions

  • COHERENCE REDUCER WITH LEVEL MIRROR AND METHOD FOR PRODUCING A COHERENCE REDUCER
  • the invention relates to a coherence reducer with a mirror element and to a manufacturing method of such a coherence reducer.
  • Such a coherence reducer is known for example from WO 03/029875 A2.
  • two step-shaped step mirrors are used as coherence reducers, which are rotated relative to one another and must be mapped onto one another. This is relatively expensive.
  • the mirror elements by means of microstructuring techniques, such as those e.g. can be used in semiconductor manufacturing, manufactured and, if necessary, mirrored. This is also a relatively complex way of producing step mirrors
  • the object is achieved by a coherence reducer with a step mirror element, in which the step mirror element comprises a plurality of rods with reflective end faces arranged essentially parallel to one another, the reflective end faces being offset with respect to one another in the longitudinal direction of the rods.
  • glass fibers with a round cross section
  • glass rods with a square cross section
  • coherence reducer without complicated microstructuring techniques
  • all reflective end faces are parallel to one another. It is thereby achieved that, seen in plan view of the reflective end surfaces, a flat mirror surface is provided, so that the step mirror element essentially acts as a flat mirror (with the exception of the phase shifts generated by the displacement of the end surfaces in the longitudinal direction).
  • the steps formed by the mutually offset reflective end faces are selected such that the step heights between end faces, the lateral distance of which is smaller than the lateral coherence length of a coherent beam supplied, are greater than half the time coherence length of the supplied Are rays.
  • This can be implemented particularly well in the case of coherent bundles of rays whose temporal coherence length (coherence length in the direction of propagation of the bundle of rays) is relatively short.
  • multimode lasers e.g. excimer lasers.
  • an argon fluoride excimer laser emits a bundle of rays with a wavelength of approximately 193 nm and a temporal coherence length of approximately 100 ⁇ m.
  • the temporal coherence length is understood to mean a minimum (preferably the first minimum) of the temporal coherence function.
  • the interference contrast is thus minimal when two beams are superimposed, which have a phase shift by the time coherence length.
  • the specified choice of the offset of the reflective end faces ensures that the path difference for two partial beam bundles reflected by adjacent reflective end faces corresponds at least to the temporal coherence length.
  • the rods can have a square cross-section, so that the end faces are also square and form a two-dimensional square grid when viewed in a top view of the end faces.
  • a continuous mirror surface is provided when viewed in plan view of the end surfaces.
  • the rods and thus the end faces can also have a round (in particular a circular) cross section and be arranged such that they form a two-dimensional hexagonal lattice when viewed in a top view of the end faces.
  • An extremely densely packed arrangement and thus an extremely large mirror surface can thus be provided.
  • the step height is statistically distributed between adjacent end faces. Excellent coherence reduction is also achieved with this.
  • the step height between adjacent end faces is different in two different lateral directions (directions that are, for example, transverse to the beam propagation direction).
  • the step heights are preferably constant in each of the two lateral directions. In this way it can be ensured very easily that at distances between the end faces which are smaller than lateral coherence lengths, the reflected partial bundles of a supplied beam cannot interfere with one another.
  • the bars can be flexible or rigid. If they are flexible, they are preferably connected or held together in such a way that the reflective end faces are fixed in their position and are not movable. Furthermore, the length of the rods is preferably not changeable, so that the position of the reflective end surfaces is also constant in the direction of their surface normal. Glass rods with a circular cross section and a diameter of 100 ⁇ m to 1 mm or glass rods with a square cross section and an edge length of 100 ⁇ m to 2 mm are preferably used as rods.
  • the object is also achieved by a method for producing the coherence reducer with a mirror element, in which a plurality of rods with first end faces are combined to form a bundle for producing the step mirror element and the individual rods are shifted relative to one another in the longitudinal direction of the rods so that their first End faces are offset from one another in the longitudinal direction.
  • the first end faces can be mirrored.
  • the mirroring of the end faces can preferably be carried out after the displacement step. This ensures that no damage to the reflecting layer (which has not yet been applied) can occur during the previous steps.
  • first end faces can be polished (smooth) before the shifting step and the step in which they are combined into a bundle in order to have the first end face as smooth as possible. This makes a very good mirroring possible.
  • the rods are connected to one another after the displacement step in such a way that the position of the first end faces is fixed.
  • This can be done, for example, with common adhesive technologies.
  • multi-component adhesives can be used.
  • the mirroring can be achieved by Al vapor deposition and subsequent application of a protective MgF 2 coating. Evaporation is also possible in such a way that the desired mirror surface is realized by the application of dielectric layers. In this case, of course, a protective coating can also be applied if necessary.
  • rods of different lengths are combined to form a bundle and the rods are then placed with their second end faces (the end faces opposite the first end faces) on a flat surface in the shifting step, the longitudinal direction of the rods preferably being perpendicular to the area. Step heights are thus realized which essentially depend on the different lengths of the bars.
  • the displacement step is carried out in such a way that the steps between the individual first end faces are selected such that the step heights between first end faces, the lateral distance of which is smaller than the lateral coherence length of a beam to be supplied, are greater than half the time Are the coherence length of the beam.
  • the bars have a square cross section, they are preferably combined in the bundling step in such a way that, when viewed in plan view of the first end faces, they form a two-dimensional grid.
  • the rods have a round, preferably circular cross-section
  • the rods can in particular be combined in such a way that, viewed in plan view of the first end faces, a two-dimensional hexagonal Grid is formed. In this way, the densest possible pack shape is realized with such rods, whereby the largest possible mirror surface can be provided.
  • a coherent ray bundle is understood here to mean a ray bundle that has a finite temporal coherence length and that is partially or completely coherent spatially or laterally (ie in the beam cross section).
  • the coherence reducer according to the invention can preferably be provided in a lighting arrangement which has a lighting optic arranged downstream of the coherence reducer, which comprises micro-optics with a multiplicity of optical elements which are arranged in a grid-like manner and one imaging optics arranged downstream of the micro-optics, the step mirror element of the coherence reducer being supplied to a coherent beam impresses different phase shifts depending on the position in the beam cross-section by means of the reflective end faces and emits them as an illuminating beam which strikes the micro-optics and thus emits a beam from each optical element which can be used to illuminate an object field by means of the imaging optics.
  • an illumination arrangement which can be used in particular as microscope illumination, is provided in which the coherence of the supplied beam can be reduced to such an extent that undesired interference phenomena and speckle do not occur in the object field as far as possible.
  • the optical elements of the micro-optics are preferably arranged in a matrix or grid-like manner in one plane. Therefore, the micro-optics can easily be arranged transversely to the direction of propagation of the illuminating beam, so that each optical element is hit by a plane wavefront at the same time.
  • the coherence reducer in the lighting arrangement according to the invention can be designed such that a predetermined phase shift is impressed on the beam for each optical element of the micro-optics.
  • the phase of a wave front of the radiation which strikes all optical elements can be set for each optical element in such a way that the interfering interference effects in the object field are suppressed as completely as possible.
  • the optical elements of the micro-optics are arranged in rows and columns and the step mirror element is designed such that a different phase shift is impressed on the beam supplied for the optical elements of each row and / or each column.
  • the illuminating beam bundle for optical elements in adjacent rows or columns that strikes the optical elements has a phase that changes in a step-like manner so that interference effects of the partial beam emanating from the optical elements arranged in adjacent rows are reduced.
  • An individual (step-shaped or discontinuous) phase shift for each optical element can be achieved, for example, by assigning exactly one reflective end face of the step mirror element to each optical element.
  • the desired phase shift can thus be achieved with only a single step mirror element, so that the lighting arrangement can be made compact.
  • Each reflective end surface of the step mirror element can also be assigned to exactly one optical element, with a plurality of reflective end surfaces being assigned to the same optical element.
  • the plurality of reflective end faces are selected so that even with a certain misalignment of, for example, the step mirror element, only radiation with the desired phase shift hits the individual optical elements and the radiation from misaligned reflective end faces preferably hits dead zones (the radiation striking it is shadowed and elongated, for example does not lead to subsequent condenser optics) between the optical elements. In the event of a misalignment, this ensures that coherent radiation does not strike neighboring optical elements, so that the adjustment is simplified.
  • a first intermediate optics (preferably a 1: 1 imaging optics) can be arranged between the stepped mirror and the micro-optics, which images the stepped mirror element onto the micro-optics.
  • the micro-optics can have all the same optical elements and can be designed, for example, as a microlens or shadow mask array.
  • micro-optics which is also called multi-aperture optics, it is ensured, in particular when using the illumination optics in a microscope, that quasi-continuous illumination is present in the pupil plane.
  • the beam of rays supplied strikes the step mirror element at an angle of incidence which is in the range from 0 ° to 20 °.
  • the step mirror element is preceded by a beam splitter (such as a partially transparent or semi-transparent plate that is 45 ° from the direction of propagation of the beam) is inclined).
  • a beam splitter such as a partially transparent or semi-transparent plate that is 45 ° from the direction of propagation of the beam.
  • the coherence reducer and the lighting arrangement with the coherence reducer can be used wherever a field is to be illuminated as homogeneously as possible. This can be the case, for example, in microscopy, in the case of steppers in semiconductor production or in material processing.
  • lasers such as e.g. Excimer laser can be used.
  • 1 is a schematic view of an embodiment of the lighting arrangement with a coherence reducer
  • Fig. 3 is a plan view of the step mirror element of Fig. 2;
  • FIG. 5 is a perspective view for explaining a manufacturing process of the step mirror element
  • FIG. 6 is a perspective view for explaining a manufacturing process of the step mirror element
  • Fig. 7 is a sectional view of another coherence reducer.
  • the lighting arrangement according to the invention comprises a coherence reducer 1, which has a step mirror or step mirror element 2 and a 4f imaging lens 3 arranged downstream of the step mirror 2, as well as a lighting lens with a microlens array 4 and a condenser lens 5.
  • the step mirror 2 is formed from a multiplicity of rods 6 with a square cross section, the end surfaces 8 of the rods 6 facing the imaging optics 3 being mirrored.
  • the step mirror element is formed from a total of 25 bars
  • the number of rods 6 is selected such that exactly one rod 6 and thus one reflective end surface 8 is provided for each microlens 9 of the microlens array 4.
  • the microlens array 4 thus also has five lenses in the y direction and five lenses in the x direction (only the five microlenses 9 in the x direction are shown in the schematic sectional view of FIG. 1).
  • the microlens array 4 is approximately 3 ⁇ 6 mm in size and the diameter of the microlenses 9 is approximately 150 ⁇ m.
  • the step height H1 between adjacent bars in the x-direction is now selected so that it corresponds to half the time coherence length of a beam 10 supplied. With the radiation from an argon fluoride excimer laser, the temporal coherence length corresponds to approximately 100 ⁇ m, so that a step offset of approximately 50 ⁇ m is selected.
  • the step height H2 in the y direction is chosen so that it is larger. In particular, it is chosen such that the partial beams reflected by the individual reflective end faces 8 are no longer capable of interference, provided that the distance between the corresponding reflective end faces is smaller than the lateral coherence length of the supplied beam 10.
  • a coherent (or also partially coherent) beam 10 strikes the step mirror element 2 and is reflected by it towards the microlens array 4. Due to the steps of the step mirror element 2, there is an inconsistent or discontinuous phase shift in the reflected beam 11.
  • a wave front W of the same phase of the incident beam 10 is shown, which for the reflected beam 11 due to the path differences generated by the step mirror 2 for each from the stages of the step mirror element 2 partial beams S1 to S5 (which form the reflected beam 11) is offset relative to the partial beams S1 to S5 in the direction of propagation. This is shown by the position of the wave fronts W1 to W5 of the same phase in the partial beams S1 to S5.
  • each sub-beam S1 to S5 thus represents five sub-beams (number of reflective end faces in the y direction (perpendicular to the plane of the drawing in FIG. 1)). Since the step height in the x-direction is approximately 50 ⁇ m here, the reflection results in a path difference of approximately 100 ⁇ m for adjacent partial beams in the x-direction, the path difference being somewhat larger due to the oblique incidence of the beam 10. The angle of incidence of the beam 10 on the reflective end faces 8 (based on the surface normal N) is 20 ° here. For partial beams that are adjacent in the y direction, there is of course a larger path difference due to the larger step height H2. The steps of the step mirror 2 are shown greatly enlarged in the figures in order to be able to represent the step-shaped phase shift in the reflected beam 11.
  • the reflected beam 11 thus contains a plurality of cells (in cross section here 25 of the 25 mutually offset reflective end faces) which are incoherent with one another.
  • the 25 partial beams S1 to S5 are therefore no longer capable of interference, even if there is a relatively large lateral or spatial coherence length in the beam 10.
  • the lateral coherence length (coherence length in the beam cross section) can be over 500 ⁇ m. Due to the described generation of cells in the beam 11 which are offset in the direction of propagation, the lateral or spatial coherence is thus reduced or, if possible, almost completely eliminated by using the temporal coherence.
  • the 4f imaging optics comprise a first and a second lens 12, 13, each of which has a focal length f on the object and image side.
  • the distance between the first lens 12 and the step mirror 2 and the distance between the second lens 13 and the microlens array 4 is f and the two lenses 12, 13 are spaced apart by 2f.
  • the 4f imaging optics 3 (in FIG. 1 only the beam path of the partial beam bundle S1 is shown in the 4f imaging optics 3 for better clarity), the microlenses 9 are exposed to the illuminating beam bundle in such a way that each microlens 9 each has the partial beam bundle of a reflective end face 8 is illuminated.
  • a wave front striking the microlens array 4 at a time has reduced coherence, since this wave front is composed of different cells (which are not capable of interference).
  • the beam bundles M1 to M5 emanating from the microlenses 4 are then imaged by means of the condenser optics 5 onto an object field 14 (which is preferably spaced apart from the focal length of the condenser optics 5) in such a way that it is homogeneously illuminated. Due to the phase shifts in the partial beams, it can be achieved that the (here 25) beams M1 to M5 do not interfere with one another, so that no disturbing speckle or disturbing interferences occur. It is Of course, it is also possible to omit the 4f imaging optics 3 and to apply the partial beam bundles S1 to S5 directly to the microlens array.
  • a pupil plane P which lies between the microlens array 4 and the condenser optics 5
  • an adjustable diaphragm (not shown) can also be provided, with which the brightness of the illumination in the object field 14 and the angle spectrum of the the object field rays is adjustable.
  • the pupil plane P lies here preferably in the focal plane of the microlenses 9, so that the distance between the main plane of the microlenses 9 and the pupil plane corresponds to the focal length of the microlenses.
  • the described illumination optics is a so-called diffractive microlens homogenizer.
  • the illumination optics can also be designed as an imaging microlens homogenizer.
  • a further microlens array is to be arranged between the microlens array 4 and the condenser optics 5, which preferably has the same number of microlenses as the microlens array 4, in particular a 1: 1 assignment between the microlenses of the two microlens arrays.
  • the further microlens array can be designed in the same way as the microlens array 4.
  • the oblique incidence of the beam 10 on the step mirror element 2 also results in an enlargement of the beam cross section in the plane of the drawing.
  • This can be used, for example, to convert the approximately rectangular cross section of the radiation from the argon fluoride excimer laser into an approximately square shape.
  • the stepped mirror element 2 can also be used to adapt the beam cross section to the shape of the microlens array 4, if this is desired.
  • beam 11 falls on the step mirror element 2 and is reflected as beam 10
  • the step mirror element 2 can thus be used to change the cross section.
  • the step heights in the x and y directions are preferably selected so that an equal phase shift occurs at the earliest at beam positions whose spacing is greater than the spatial coherence length.
  • the rods 6 are preferably arranged so that, seen in a plan view of the end faces 8, a two-dimensional square grid is formed. This provides a practically continuous mirror surface, seen in plan view. If instead of rods with a square cross-section, rods with a circular cross-section are used, it is preferred that they be arranged in such a way that, seen in a plan view of the reflective end faces, a two-dimensional hexagonal grid is formed, as shown in FIG. 4. This results in a packing that is as dense as possible, so that the largest possible mirror surface can be realized with bars with a circular cross-section.
  • the step mirror element 2 can, for example, be produced in such a way that rods of the same length are combined into a bundle in which they are already packed, as shown in FIG. 3 or 4. This bundle is then placed with the second end surfaces 7 of the rods 6 opposite the end surfaces 8 on an inclined surface 15 of an adjusting device 16, so that, as indicated in FIG. 5, the end surfaces 8 of the rods remote from the surface 15 are offset from one another ,
  • FIG. 5 only five bars in each of the x and y directions are shown schematically in order to simplify the illustration.
  • the slope of the surface in the x and y directions is selected differently, so that the step offset in these directions is also different.
  • a height gradation in the x direction of 75 ⁇ m can be achieved in that the pitch angle ⁇ is 26 °.
  • a height gradation of 350 ⁇ m is then preferably set in the y direction, which corresponds to a pitch angle ⁇ of 66 °.
  • the bundle with the steps thus formed is then fixed (for example by means of suitable adhesives). Then the end faces 8 are mirrored and, if desired, covered with a protective layer.
  • the step mirror element 2 is then completed.
  • the data need only be scaled accordingly if the step mirror element is imaged on the microlens array 4 in a reduced manner.
  • step heights you can choose a purely statistical distribution of the step heights.
  • rods with randomly different lengths are selected, the length difference being greater than half the time coherence length (preferably greater than the time coherence length).
  • These rods are then combined into a bundle (for example as can be seen in FIG. 3 or 4) and then placed on a flat surface 17, as indicated in FIG. 6.
  • This bundle is then fixed again (using suitable connecting or adhesive agents).
  • This is followed by mirroring the end faces 8, so that the step mirror element 2 is completed.
  • FIG. 7 A further embodiment of the lighting arrangement is shown in FIG. 7.
  • the beam 10 strikes the step mirror element 2 perpendicularly.
  • a beam splitter 18 is provided, which is arranged upstream of the step mirror element 2.
  • the beam splitter 18 can be a partially transparent plate that transmits 50% of the incident radiation and reflects the other half. 7 shows only the beam path for the radiation that can be used to illuminate the object field 14. Furthermore, the same elements as in the embodiment shown in FIG. 1 are denoted by the same reference numerals.
  • the desired phase shift is also produced in this embodiment, shading effects on the step mirror element practically being eliminated due to the vertical incidence of radiation.
  • the coherence reducer shown in FIG. 7 can be used in the lighting arrangement of FIG. 1.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Telescopes (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

L'invention concerne un réducteur de cohérence à élément de miroir étagé (2). Ledit élément de miroir étagé (2) comporte une pluralité de tiges (6) sensiblement parallèles les unes aux autres, munies de surfaces terminales réfléchissantes (8). Lesdites surfaces réfléchissantes (8) sont disposées de manière décalée les unes par rapport aux autres dans le sens longitudinal des tiges (6).
PCT/EP2004/008118 2003-08-20 2004-07-20 Reducteur de coherence a miroir etage et procede de production d'un reducteur de coherence WO2005019900A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2003138244 DE10338244A1 (de) 2003-08-20 2003-08-20 Kohärenzminderer und Herstellungsverfahren eines Kohärenzminderers
DE10338244.5 2003-08-20

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WO2005019900A1 true WO2005019900A1 (fr) 2005-03-03

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EP1925965A1 (fr) * 2006-11-24 2008-05-28 Winlight Optics Procédé de fabrication de surfaces optiques pour la réalisation d'assemblages aptes à réarranger un ou des faisceau(x) optique(s)
CN100460977C (zh) * 2007-01-05 2009-02-11 北京工业大学 实现大功率激光二极管堆光束整形的装置
US7532403B2 (en) 2006-02-06 2009-05-12 Asml Holding N.V. Optical system for transforming numerical aperture
WO2010094468A1 (fr) * 2009-02-18 2010-08-26 Limo Patentverwaltung Gmbh & Co. Kg Dispositif d'homogénéisation d'un faisceau laser
US8159651B2 (en) 2005-12-02 2012-04-17 Asml Holding N.V. Illumination system coherence remover with a series of partially reflective surfaces

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8159651B2 (en) 2005-12-02 2012-04-17 Asml Holding N.V. Illumination system coherence remover with a series of partially reflective surfaces
US8164740B2 (en) 2005-12-02 2012-04-24 Asml Holding N.V. Illumination system coherence remover with two sets of stepped mirrors
US7532403B2 (en) 2006-02-06 2009-05-12 Asml Holding N.V. Optical system for transforming numerical aperture
US7859756B2 (en) 2006-02-06 2010-12-28 Asml Holding N.V. Optical system for transforming numerical aperture
EP1925965A1 (fr) * 2006-11-24 2008-05-28 Winlight Optics Procédé de fabrication de surfaces optiques pour la réalisation d'assemblages aptes à réarranger un ou des faisceau(x) optique(s)
FR2909190A1 (fr) * 2006-11-24 2008-05-30 Winlight Optics Sarl Procede de fabrication de surfaces optiques pour la realisation d'assemblages aptes a rearranger un ou des faisceau(x) optique(s).
CN100460977C (zh) * 2007-01-05 2009-02-11 北京工业大学 实现大功率激光二极管堆光束整形的装置
WO2010094468A1 (fr) * 2009-02-18 2010-08-26 Limo Patentverwaltung Gmbh & Co. Kg Dispositif d'homogénéisation d'un faisceau laser
CN102292663A (zh) * 2009-02-18 2011-12-21 Limo专利管理有限及两合公司 用于使激光辐射均匀化的设备
CN102292663B (zh) * 2009-02-18 2013-10-23 Limo专利管理有限及两合公司 用于使激光辐射均匀化的设备
US8724223B2 (en) 2009-02-18 2014-05-13 Limo Patentverwaltung Gmbh & Co. Kg Device for homogenizing laser radiation

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