WO2005015602A3 - Vorrichtung zur erzeugung von euv- und weicher röntgenstrahlung - Google Patents

Vorrichtung zur erzeugung von euv- und weicher röntgenstrahlung Download PDF

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Publication number
WO2005015602A3
WO2005015602A3 PCT/IB2004/051323 IB2004051323W WO2005015602A3 WO 2005015602 A3 WO2005015602 A3 WO 2005015602A3 IB 2004051323 W IB2004051323 W IB 2004051323W WO 2005015602 A3 WO2005015602 A3 WO 2005015602A3
Authority
WO
WIPO (PCT)
Prior art keywords
soft
extreme
gas
ray generator
diaphragm
Prior art date
Application number
PCT/IB2004/051323
Other languages
English (en)
French (fr)
Other versions
WO2005015602A2 (de
Inventor
Klaus Bergmann
Willi Neff
Original Assignee
Koninkl Philips Electronics Nv
Klaus Bergmann
Willi Neff
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv, Klaus Bergmann, Willi Neff filed Critical Koninkl Philips Electronics Nv
Priority to JP2006522465A priority Critical patent/JP4814093B2/ja
Priority to US10/567,038 priority patent/US7734014B2/en
Priority to DE502004009224T priority patent/DE502004009224D1/de
Priority to EP04744676A priority patent/EP1654914B8/de
Priority to KR1020067002392A priority patent/KR101058068B1/ko
Publication of WO2005015602A2 publication Critical patent/WO2005015602A2/de
Publication of WO2005015602A3 publication Critical patent/WO2005015602A3/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Reciprocating Pumps (AREA)

Abstract

Die Erfindung betrifft eine Gasentladungsquelle, insbesondere zur Erzeugung von Extrem-Ultraviolett- und/oder weicher Röntgenstrahlung, bei der sich zwischen zwei Elektroden (1, 2) ein gasgefüllter Elektrodenzwischenraum (3) befindet, bei der Vorrichtungen zum Einlassen und Abpumpen von Gas vorhanden sind und bei der eine Elektrode (1) eine eine Symmetrieachse (4) definierende und für den Austritt von Strahlung vorgesehene Öffnung (5) aufweist. Die vorgeschlagenen Verbesserungen bestehen darin, dass zwischen den beiden Elektroden (1, 2) eine zumindest eine Öffnung (7) auf der Symmetrieachse (4) aufweisende und als differentielle Pumpstufe wirkende Blende (6) vorhanden ist.
PCT/IB2004/051323 2003-08-07 2004-07-29 Vorrichtung zur erzeugung von euv- und weicher röntgenstrahlung WO2005015602A2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2006522465A JP4814093B2 (ja) 2003-08-07 2004-07-29 極紫外線及び軟ｘ線発生器
US10/567,038 US7734014B2 (en) 2003-08-07 2004-07-29 Extreme UV and soft X ray generator
DE502004009224T DE502004009224D1 (de) 2003-08-07 2004-07-29 Vorrichtung zur erzeugung von euv- und weicher röntgenstrahlung
EP04744676A EP1654914B8 (de) 2003-08-07 2004-07-29 Vorrichtung zur erzeugung von euv- und weicher röntgenstrahlung
KR1020067002392A KR101058068B1 (ko) 2003-08-07 2004-07-29 극자외선과 연질ｘ선 발생기

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10336273.8 2003-08-07
DE10336273A DE10336273A1 (de) 2003-08-07 2003-08-07 Vorrichtung zur Erzeugung von EUV- und weicher Röntgenstrahlung

Publications (2)

Publication Number Publication Date
WO2005015602A2 WO2005015602A2 (de) 2005-02-17
WO2005015602A3 true WO2005015602A3 (de) 2005-06-02

Family

ID=34129504

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2004/051323 WO2005015602A2 (de) 2003-08-07 2004-07-29 Vorrichtung zur erzeugung von euv- und weicher röntgenstrahlung

Country Status (9)

Country Link
US (1) US7734014B2 (de)
EP (1) EP1654914B8 (de)
JP (1) JP4814093B2 (de)
KR (1) KR101058068B1 (de)
CN (1) CN100482030C (de)
AT (1) ATE427026T1 (de)
DE (2) DE10336273A1 (de)
TW (1) TW200515458A (de)
WO (1) WO2005015602A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007020742B8 (de) * 2007-04-28 2009-06-18 Xtreme Technologies Gmbh Anordnung zum Schalten großer elektrischer Ströme über eine Gasentladung
US9129777B2 (en) 2011-10-20 2015-09-08 Applied Materials, Inc. Electron beam plasma source with arrayed plasma sources for uniform plasma generation
US20130098555A1 (en) * 2011-10-20 2013-04-25 Applied Materials, Inc. Electron beam plasma source with profiled conductive fins for uniform plasma generation
US8951384B2 (en) 2011-10-20 2015-02-10 Applied Materials, Inc. Electron beam plasma source with segmented beam dump for uniform plasma generation
US9443700B2 (en) 2013-03-12 2016-09-13 Applied Materials, Inc. Electron beam plasma source with segmented suppression electrode for uniform plasma generation

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4841556A (en) * 1986-03-07 1989-06-20 Hitachi, Ltd. Plasma X-ray source
US6031241A (en) * 1997-03-11 2000-02-29 University Of Central Florida Capillary discharge extreme ultraviolet lamp source for EUV microlithography and other related applications
US6389106B1 (en) * 1997-12-03 2002-05-14 Fraunhoger-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and device for producing extreme ultraviolet and soft X-rays from a gaseous discharge
US6576917B1 (en) * 1997-03-11 2003-06-10 University Of Central Florida Adjustable bore capillary discharge

Family Cites Families (23)

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Publication number Priority date Publication date Assignee Title
US3005931A (en) * 1960-03-29 1961-10-24 Raphael A Dandl Ion gun
NL298175A (de) * 1962-11-20
JPS5763755A (en) * 1980-10-03 1982-04-17 Fujitsu Ltd X-ray generating appratus
JPS61218056A (ja) * 1985-03-25 1986-09-27 Nippon Telegr & Teleph Corp <Ntt> Ｘ線発生装置
KR900003310B1 (ko) * 1986-05-27 1990-05-14 리가가구 겡큐소 이온 발생 장치
US4841197A (en) * 1986-05-28 1989-06-20 Nihon Shinku Gijutsu Kabushiki Kaisha Double-chamber ion source
US4894546A (en) * 1987-03-11 1990-01-16 Nihon Shinku Gijutsu Kabushiki Kaisha Hollow cathode ion sources
JPH01117253A (ja) * 1987-10-30 1989-05-10 Hamamatsu Photonics Kk プラズマｘ線発生装置
JP2572787B2 (ja) * 1987-11-18 1997-01-16 株式会社日立製作所 Ｘ線発生装置
JPH01243349A (ja) * 1988-03-25 1989-09-28 Hitachi Ltd プラズマ極端紫外光発生装置
DE3927089C1 (de) * 1989-08-17 1991-04-25 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
JP2819420B2 (ja) * 1989-11-20 1998-10-30 東京エレクトロン株式会社 イオン源
IT1246682B (it) * 1991-03-04 1994-11-24 Proel Tecnologie Spa Dispositivo a catodo cavo non riscaldato per la generazione dinamica di plasma
US5397956A (en) * 1992-01-13 1995-03-14 Tokyo Electron Limited Electron beam excited plasma system
US5539274A (en) * 1993-09-07 1996-07-23 Tokyo Electron Limited Electron beam excited plasma system
US5467362A (en) * 1994-08-03 1995-11-14 Murray; Gordon A. Pulsed gas discharge Xray laser
US6815700B2 (en) * 1997-05-12 2004-11-09 Cymer, Inc. Plasma focus light source with improved pulse power system
DE19962160C2 (de) * 1999-06-29 2003-11-13 Fraunhofer Ges Forschung Vorrichtungen zur Erzeugung von Extrem-Ultraviolett- und weicher Röntgenstrahlung aus einer Gasentladung
DE10051986A1 (de) * 2000-10-20 2002-05-16 Schwerionenforsch Gmbh Verfahren zum Strippen von Ionen in einer aus einem Gasentladungsplasma bestehenden Umladestrecke und Vorrichtung zur Durchführung des Verfahrens
DE10134033A1 (de) * 2001-04-06 2002-10-17 Fraunhofer Ges Forschung Verfahren und Vorrichtung zum Erzeugen von Extrem-Ultraviolettstrahlung/weicher Röntgenstrahlung
DE10139677A1 (de) * 2001-04-06 2002-10-17 Fraunhofer Ges Forschung Verfahren und Vorrichtung zum Erzeugen von extrem ultravioletter Strahlung und weicher Röntgenstrahlung
DE10151080C1 (de) * 2001-10-10 2002-12-05 Xtreme Tech Gmbh Einrichtung und Verfahren zum Erzeugen von extrem ultravioletter (EUV-)Strahlung auf Basis einer Gasentladung
US7342236B2 (en) * 2004-02-23 2008-03-11 Veeco Instruments, Inc. Fluid-cooled ion source

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4841556A (en) * 1986-03-07 1989-06-20 Hitachi, Ltd. Plasma X-ray source
US6031241A (en) * 1997-03-11 2000-02-29 University Of Central Florida Capillary discharge extreme ultraviolet lamp source for EUV microlithography and other related applications
US6576917B1 (en) * 1997-03-11 2003-06-10 University Of Central Florida Adjustable bore capillary discharge
US6389106B1 (en) * 1997-12-03 2002-05-14 Fraunhoger-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and device for producing extreme ultraviolet and soft X-rays from a gaseous discharge

Also Published As

Publication number Publication date
CN1833472A (zh) 2006-09-13
DE502004009224D1 (de) 2009-05-07
EP1654914B8 (de) 2009-08-12
JP2007501997A (ja) 2007-02-01
TW200515458A (en) 2005-05-01
US7734014B2 (en) 2010-06-08
KR20060054422A (ko) 2006-05-22
JP4814093B2 (ja) 2011-11-09
KR101058068B1 (ko) 2011-08-22
US20080143228A1 (en) 2008-06-19
DE10336273A1 (de) 2005-03-10
ATE427026T1 (de) 2009-04-15
EP1654914B1 (de) 2009-03-25
EP1654914A2 (de) 2006-05-10
CN100482030C (zh) 2009-04-22
WO2005015602A2 (de) 2005-02-17

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