WO2005005685A3 - Croissance catalytique et directionnelle de nanotubes de carbone individuels, application a des sources froides d’electrons - Google Patents

Croissance catalytique et directionnelle de nanotubes de carbone individuels, application a des sources froides d’electrons Download PDF

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Publication number
WO2005005685A3
WO2005005685A3 PCT/FR2004/001761 FR2004001761W WO2005005685A3 WO 2005005685 A3 WO2005005685 A3 WO 2005005685A3 FR 2004001761 W FR2004001761 W FR 2004001761W WO 2005005685 A3 WO2005005685 A3 WO 2005005685A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
catalytic
carbon nanotubes
electron sources
individual carbon
Prior art date
Application number
PCT/FR2004/001761
Other languages
English (en)
Other versions
WO2005005685A2 (fr
Inventor
Jean-Chretien Favreau
Thien Binh Vu
Matthieu Mauger
Original Assignee
Inanov Soc
Univ Claude Bernard Lyon
Centre Nat Rech Scient
Jean-Chretien Favreau
Thien Binh Vu
Matthieu Mauger
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inanov Soc, Univ Claude Bernard Lyon, Centre Nat Rech Scient, Jean-Chretien Favreau, Thien Binh Vu, Matthieu Mauger filed Critical Inanov Soc
Priority to EP04767596A priority Critical patent/EP1971703A2/fr
Publication of WO2005005685A2 publication Critical patent/WO2005005685A2/fr
Publication of WO2005005685A3 publication Critical patent/WO2005005685A3/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
    • D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
    • D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
    • D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
    • D01F9/1271—Alkanes or cycloalkanes
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
    • D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
    • D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
    • D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
    • D01F9/1273—Alkenes, alkynes
    • D01F9/1275—Acetylene
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/08—Aligned nanotubes

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Thermal Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Textile Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Composite Materials (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

Procédé permettant la croissance catalytique de nanotubes de carbone individuels et orientés essentiellement perpendiculairement au substrat (14) caractérisé par l'utilisation d'une première chambre (11) constituant une source d'ions de produits carbonés (13), d'une deuxième chambre (12) de croissance dans laquelle est placé ledit substrat (14) sur un support chauffant (15), lesdits ions (13) étant accélérés vers ledit substrat (14) par un optique électronique (16,17,18) dirigeant lesdits ions essentiellement perpendiculairement à la surface dudit substrat (14). La présente invention permet d'optimiser les caractéristiques des nanotubes en termes de hauteur, positionnement et direction de croissance. Les nanotubes obtenus de cette façon ont d'excellentes caractéristiques d'émission de champ, ils peuvent donc particulièrement être utilisés comme sources froides d'électrons.
PCT/FR2004/001761 2003-07-09 2004-07-07 Croissance catalytique et directionnelle de nanotubes de carbone individuels, application a des sources froides d’electrons WO2005005685A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP04767596A EP1971703A2 (fr) 2003-07-09 2004-07-07 Croissance catalytique et directionnelle de nanotubes de carbone individuels, application a des sources froides d'electrons

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR03/08365 2003-07-09
FR0308365A FR2857379A1 (fr) 2003-07-09 2003-07-09 Croissance catalytique et directionnelle de nanotubes de carbone individuels, applications a des sources froides d'electrons

Publications (2)

Publication Number Publication Date
WO2005005685A2 WO2005005685A2 (fr) 2005-01-20
WO2005005685A3 true WO2005005685A3 (fr) 2005-04-07

Family

ID=33522875

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2004/001761 WO2005005685A2 (fr) 2003-07-09 2004-07-07 Croissance catalytique et directionnelle de nanotubes de carbone individuels, application a des sources froides d’electrons

Country Status (3)

Country Link
EP (1) EP1971703A2 (fr)
FR (1) FR2857379A1 (fr)
WO (1) WO2005005685A2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100482584C (zh) * 2005-10-21 2009-04-29 鸿富锦精密工业（深圳）有限公司 碳纳米管制备设备
CN100482585C (zh) * 2005-10-24 2009-04-29 鸿富锦精密工业（深圳）有限公司 碳纳米管制备装置
JP2008056546A (ja) * 2006-09-01 2008-03-13 Ihi Corp 炭素構造体の製造装置及び製造方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5334423A (en) * 1993-01-28 1994-08-02 United Solar Systems Corp. Microwave energized process for the preparation of high quality semiconductor material
US6042900A (en) * 1996-03-12 2000-03-28 Alexander Rakhimov CVD method for forming diamond films
EP1134304A2 (fr) * 2000-03-15 2001-09-19 Samsung SDI Co. Ltd. Procédé d'alignement vertical de nanotubes de carbone sur substrats par cvd thermique avec polarisation continue
WO2001085612A2 (fr) * 2000-05-11 2001-11-15 Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of National Defence Preparation de nanotubes de carbone
US6346303B1 (en) * 1999-01-11 2002-02-12 Han-Chang Shih Process for synthesizing one-dimensional nanosubstances by electron cyclotron resonance chemical vapor deposition
US20020053864A1 (en) * 2000-11-06 2002-05-09 Akihiko Hosono Carbon body, process for producing the carbon body, and electric field emission electron source using the carbon body.
US20030064169A1 (en) * 2001-09-28 2003-04-03 Hong Jin Pyo Plasma enhanced chemical vapor deposition apparatus and method of producing carbon nanotube using the same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2811686B1 (fr) * 2000-07-17 2003-01-10 Commissariat Energie Atomique Procede de fabrication de couches de carbone aptes a emettre des electrons, par depot chimique en phase vapeur

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5334423A (en) * 1993-01-28 1994-08-02 United Solar Systems Corp. Microwave energized process for the preparation of high quality semiconductor material
US6042900A (en) * 1996-03-12 2000-03-28 Alexander Rakhimov CVD method for forming diamond films
US6346303B1 (en) * 1999-01-11 2002-02-12 Han-Chang Shih Process for synthesizing one-dimensional nanosubstances by electron cyclotron resonance chemical vapor deposition
EP1134304A2 (fr) * 2000-03-15 2001-09-19 Samsung SDI Co. Ltd. Procédé d'alignement vertical de nanotubes de carbone sur substrats par cvd thermique avec polarisation continue
WO2001085612A2 (fr) * 2000-05-11 2001-11-15 Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of National Defence Preparation de nanotubes de carbone
US20020053864A1 (en) * 2000-11-06 2002-05-09 Akihiko Hosono Carbon body, process for producing the carbon body, and electric field emission electron source using the carbon body.
US20030064169A1 (en) * 2001-09-28 2003-04-03 Hong Jin Pyo Plasma enhanced chemical vapor deposition apparatus and method of producing carbon nanotube using the same

Also Published As

Publication number Publication date
FR2857379A1 (fr) 2005-01-14
WO2005005685A2 (fr) 2005-01-20
EP1971703A2 (fr) 2008-09-24

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