FR2811686B1 - Procede de fabrication de couches de carbone aptes a emettre des electrons, par depot chimique en phase vapeur - Google Patents
Procede de fabrication de couches de carbone aptes a emettre des electrons, par depot chimique en phase vapeurInfo
- Publication number
- FR2811686B1 FR2811686B1 FR0009309A FR0009309A FR2811686B1 FR 2811686 B1 FR2811686 B1 FR 2811686B1 FR 0009309 A FR0009309 A FR 0009309A FR 0009309 A FR0009309 A FR 0009309A FR 2811686 B1 FR2811686 B1 FR 2811686B1
- Authority
- FR
- France
- Prior art keywords
- vapor deposition
- chemical vapor
- producing carbon
- carbon layers
- emitting electrons
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
- C23C16/5096—Flat-bed apparatus
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0009309A FR2811686B1 (fr) | 2000-07-17 | 2000-07-17 | Procede de fabrication de couches de carbone aptes a emettre des electrons, par depot chimique en phase vapeur |
PCT/FR2001/002304 WO2002006559A1 (fr) | 2000-07-17 | 2001-07-16 | Procede de fabrication de couches de carbone aptes a emettre des electrons, par depot chimique en phase vapeur |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0009309A FR2811686B1 (fr) | 2000-07-17 | 2000-07-17 | Procede de fabrication de couches de carbone aptes a emettre des electrons, par depot chimique en phase vapeur |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2811686A1 FR2811686A1 (fr) | 2002-01-18 |
FR2811686B1 true FR2811686B1 (fr) | 2003-01-10 |
Family
ID=8852559
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0009309A Expired - Fee Related FR2811686B1 (fr) | 2000-07-17 | 2000-07-17 | Procede de fabrication de couches de carbone aptes a emettre des electrons, par depot chimique en phase vapeur |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR2811686B1 (fr) |
WO (1) | WO2002006559A1 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2857379A1 (fr) * | 2003-07-09 | 2005-01-14 | Inanov | Croissance catalytique et directionnelle de nanotubes de carbone individuels, applications a des sources froides d'electrons |
CN111910171A (zh) * | 2020-05-26 | 2020-11-10 | 厦门大学 | 一种电场和/或磁场调控合成二维材料的装置和方法 |
CN113802107B (zh) * | 2020-06-16 | 2023-12-08 | 北京石墨烯研究院 | 利用pecvd制备石墨烯的装置和方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4645713A (en) * | 1985-01-25 | 1987-02-24 | Agency Of Industrial Science & Technology | Method for forming conductive graphite film and film formed thereby |
JPS63140083A (ja) * | 1986-05-29 | 1988-06-11 | Nippon Steel Corp | 黒色透明外観のステンレス鋼およびその製造方法 |
US6080470A (en) * | 1996-06-17 | 2000-06-27 | Dorfman; Benjamin F. | Hard graphite-like material bonded by diamond-like framework |
US5989998A (en) * | 1996-08-29 | 1999-11-23 | Matsushita Electric Industrial Co., Ltd. | Method of forming interlayer insulating film |
-
2000
- 2000-07-17 FR FR0009309A patent/FR2811686B1/fr not_active Expired - Fee Related
-
2001
- 2001-07-16 WO PCT/FR2001/002304 patent/WO2002006559A1/fr active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2002006559A1 (fr) | 2002-01-24 |
FR2811686A1 (fr) | 2002-01-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |