WO2004106848A1 - Dispositif interferometre et utilisation du dispositif interferometre - Google Patents

Dispositif interferometre et utilisation du dispositif interferometre Download PDF

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Publication number
WO2004106848A1
WO2004106848A1 PCT/EP2004/050756 EP2004050756W WO2004106848A1 WO 2004106848 A1 WO2004106848 A1 WO 2004106848A1 EP 2004050756 W EP2004050756 W EP 2004050756W WO 2004106848 A1 WO2004106848 A1 WO 2004106848A1
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WO
WIPO (PCT)
Prior art keywords
sample
bundle
sub
relative position
white light
Prior art date
Application number
PCT/EP2004/050756
Other languages
German (de)
English (en)
Inventor
Elmar Krebs
Carsten Schuh
Andreas Wolff
Claus Zumstrull
Original Assignee
Siemens Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Aktiengesellschaft filed Critical Siemens Aktiengesellschaft
Publication of WO2004106848A1 publication Critical patent/WO2004106848A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers

Definitions

  • the invention relates to an interferometer arrangement for determining a variable relative position of a sample surface of a sample body that at least partially reflects a white light and a reference surface of a reference body that at least partially reflects the white light, comprising at least one light source for emitting a light beam with the white light, the light source having a specific coherence length has, at least one beam splitter for splitting the light beam into a sub-bundle with a
  • At least one further beam splitter for splitting the sub-bundle into a sample sub-bundle for reflecting the sample sub-bundle on the sample surface and in a reference sub-bundle for reflecting the
  • Reference sub-bundles on the reference surface at least one means for superimposing the further sub-bundle, the sample sub-bundle reflected by the sample surface and the reference sub-bundle reflected by the reference surface, whereby an interference pattern results from the superimposition, at least one detector of the interference pattern for creating a white light interferogram, at least one means for Setting a length difference between the light path of the sub-bundle and the light path of the further sub-bundle and at least one means for determining the relative position of the sample surface of the specimen body with respect to the reference surface of the reference body from a plurality of white light interferograms which are produced as a function of the set length difference of the light paths.
  • the reference surface of a reference body is given to one another using the interferometer arrangement.
  • a described interferometer arrangement and a method using the interferometer arrangement is known for example from DE 100 41 041 AI.
  • the interferometer arrangement is based on so-called white light interferometry.
  • White light which is composed of electromagnetic radiation from a larger wavelength range, is used in white light interferometry.
  • the light source of the white light is characterized by a comparatively short coherence length. There is a certain phase correlation of the electromagnetic radiation from the light source via the coherence length of a light source.
  • the coherence length is only a few ⁇ m.
  • the principle of white light interferometry is described in Harry Chou et al., Hewlett Packard Journal, February 1993, pages 52-59.
  • the light source of the white light with the short coherence length can then be understood as a light source which continuously emits coherent wave packets. These wave packets spread like optical pulses. The length or the width of the wave packets in the direction of propagation of the light beam corresponds to the coherence length of the light source.
  • a semitransparent reference body which not only has the reference surface, but which also acts as a further beam splitter for breaking the partial bundle into one
  • Sample sub-bundle and acts in a reference sub-bundle acts in a reference sub-bundle.
  • the semi-transparent reference body is designed in such a way that part of the white light of the sub-bundle is reflected and another part of the white light of the sub-bundle is transmitted.
  • the reference body and the sample body are arranged in such a way that the white light of the partial bundle passing through the reference body reaches the sample surface of the sample body, is reflected there and again passes through the semitransparent reference body.
  • the reflected sub-bundle with the other divided by the beam splitter After the reflection of the sample sub-bundle on the sample surface and the reflection of the reference sub-bundle on the reference surface, the reflected sub-bundle with the other divided by the beam splitter
  • Sub-bundle overlaid. There is interference of the further sub-bundle, the reflected sample sub-bundle and the reflected reference sub-bundle. An interference pattern is obtained which is detected using a CCD (charge coupled device) camera and converted into a white light interferogram.
  • CCD charge coupled device
  • the interference pattern obtained by superimposing depends on the distance between the sample surface and the reference surface. D it is used to determine the distance between the surfaces.
  • D it is used to determine the distance between the surfaces.
  • several white light interferograms are created with different length differences of the light paths of the sub-bundle directed at the sample surface and the reference surface and the further light path of the further sub-bundle. With the help of a computer and an appropriate computer program, the one created with the different length differences
  • White light interferograms determine the distance between the sample surface and the reference surface.
  • the known interferometer arrangement only works when using a transparent sample body. A part of the sub-bundle must be able to pass through the reference body in order to reach the sample surface of the sample body.
  • an interferometer arrangement for determining a variable relative position of a sample surface at least partially reflecting a white light, a sample body and a reference surface of a reference body at least partially reflecting the white light, are specified, comprising at least one light source for emitting a light beam with the white light, the light source has a certain coherence length, at least one beam splitter for splitting the light beam into a sub-bundle with one light path and into at least one further sub-bundle with another light path, at least one further beam splitter for splitting the sub-bundle into a sample sub-bundle for reflecting the sample sub-bundle on the sample surface and into one Reference sub-bundle for reflecting the reference sub-bundle on the reference surface, at least one means for superimposing the further sub-bundle, the one reflected by the sample surface Sample bundle and of
  • the interferometer arrangement is characterized in that the further beam splitter is designed in such a way that the sample sub-bundle is directed essentially only at the sample surface and the reference sub-bundle essentially only at the reference surface.
  • the reference surface of a reference body is given to one another using the interferometer arrangement.
  • the method has the following method steps: a) setting the length difference between the light path of the sub-bundle and the light path of the further sub-bundle, b) superimposing the further sub-bundle, the sample sub-bundle reflected by the sample surface and the reference sub-bundle reflected by the reference surface, an interference pattern being produced , c) detecting the interference pattern, d) creating a
  • White light interferogram from the detected interference pattern e) repeating the process steps a) to d) a number of times, so that white light interferograms are created with different length differences, and f) determining the relative position of the sample surface and the reference surface from one another
  • the sub-bundle is divided with the aid of the further beam part in such a way that a part of the sub-bundle is directed at the sample surface and a part of the sub-bundle is directed at the reference surface. So a
  • Reference body can be used, which is opaque for the white light of the light source, i.e. opaque.
  • An optical imaging system can be used as a further beam splitter, which couples out a part of the sub-bundle and directs it onto the sample surface of the sample body or the reference surface of the reference body.
  • the further beam splitter can also be formed by the sample body and the reference body. For this purpose, the sample body and the reference body are placed side by side in the same way in the
  • the beam path of the sub-bundle is set so that the sub-bundle is aimed at the sample surface and the reference surface. However, only a part of the sub-bundle (sample sub-bundle) reaches the sample surface and only a part of the sub-bundle (reference sub-bundle) reaches the reference surface.
  • the interferometer arrangement can be based on the principle of any two-beam interferometer (for example Michaelson or Twyman-Green interferometer) or
  • V elstrahlinterferometer for example Fabry-Perot interferometer
  • Fabry-Perot interferometer for example Fabry-Perot interferometer
  • Sample body and the reference surface of the reference body can be detected.
  • the change in relative location is based
  • a length of the sample body changes due to a thermal expansion of the sample body.
  • the length of the sample body changes as the temperature increases.
  • the resolution is a few tenths of a ⁇ m. In particular, the resolution is about 0.1 ⁇ m.
  • a light source with a coherence length of less than 50 ⁇ m is preferably used.
  • the further beam splitter has the sample body and / or the reference body.
  • the beam splitter consists of the reference body and the sample body.
  • the reference body and the sample body are arranged side by side.
  • the sub-bundle is directed towards this arrangement, so that a part of the sub-bundle (sample sub-bundle) reaches the sample surface of the sample body and a part of the sub-bundle (reference sub-bundle) reaches the reference surface of the reference body.
  • additional optical means laenses, mirrors, diaphragms, ...) a part of the sub-bundle on the
  • Specimen surface and part of the sub-bundle is directed onto the reference surface. Because the sample sub-bundle and the reference sub-bundle are aligned differently, it is no longer necessary for the reference body to be transparent to the white light of the sample sub-bundle.
  • the sample surface of the sample body and the reference surface of the reference body can be tilted against each other.
  • the sample surface of the sample body and the reference surface of the reference body can be tilted against each other.
  • sample surface of the sample body and the reference surface of the reference body are arranged with respect to one another such that a
  • averaged surface normal of the sample surface and an averaged surface normal of the reference surface are aligned essentially parallel to one another.
  • these surface normals are preferably aligned parallel to the direction of propagation of the sub-bundle.
  • the averaged surface normals and the direction of propagation of the sub-bundle are arranged coaxially in this way. This results in a simple implementation of the interferometer arrangement. Without further optical elements, part of the white light of the sub-beam can be directed onto the
  • Specimen surface and part of the white light are directed onto the reference surface. Thanks to the coaxial measurement arrangement, a resolution of a few tenths of a ⁇ m is possible, especially with a light path of over 20 cm. With a so-called triangulometric measurement method, for example, this would only be possible with great effort.
  • the sample body and the reference body can be arranged so as to be displaceable relative to one another. But preferably the
  • Sample body and the reference body are not arranged to be displaceable against each other.
  • the sample body and the reference body are connected to one another in such a way that essentially no change in the relative position of the sample body and the reference body can occur.
  • the change in the relative position of the surfaces relative to one another that can be detected with the aid of the interferometer arrangement is not influenced by a change in the relative position of the sample body and the reference body with respect to one another. If it is also ensured that a state of
  • the change in position can clearly be attributed to a change in the sample body or a change in the state of the sample body.
  • the reference body and the sample body are, for example, using a
  • Connection means firmly connected to one another in such a way that the relative position of the sample body and the reference body cannot change from one another. It is also conceivable for the reference body and the sample body to be arranged on a common support body which cannot be deformed when determining the relative position. For a firm connection, the sample body and the reference body can be connected to the support body with the aid of a connecting means.
  • a connecting means is, for example, a solder or an adhesive.
  • the reference body is a support body of the specimen body or the specimen body is a support body of the reference body.
  • the sample body is placed on a support body, which also acts as a reference body.
  • the reference body is a vessel with a vessel bottom, a vessel wall and a vessel interior separated from the vessel bottom and the vessel wall, a vessel rim formed by the vessel wall forming the reference surface and the specimen body being arranged on the vessel bottom in the interior of the vessel.
  • the specimen is placed on the bottom of the vessel.
  • steps a) to f) are carried out repeatedly, so that a change in the relative position can be determined. Due to the high resolution, a small change in the relative position can be determined. The change can occur suddenly, ie within a relatively short time. In particular, a small change can be determined that occurs over a longer period of time. Aging and creep processes can be recorded.
  • the interferometer arrangement will be used in particular as a so-called dilatometer.
  • the dilatometer is a device for determining a very small change in the dimension of a specimen (solid).
  • the change in dimension is based, for example, on a thermal expansion of the sample body or a phase transformation of the material of the sample body. Any other changes in state are also conceivable.
  • a crack is induced in the interior of the specimen by an external flow, which is noticeable in a length change of the specimen towards the outside. This can occur if the sample body is a composite body made of different materials. In this composite body, for example, a mechanical stress can be induced by varying the temperature due to the different coefficients of thermal expansion of the materials used.
  • a piezo actuator in a monolithic multilayer construction is used as the sample body.
  • An end face of the piezo actuator can be designed such that the white light of the light source is at least partially reflected.
  • a stamp with a die on the front of the piezo actuator is used as the sample body.
  • the stamp surface forms the sample surface of the sample body reflecting the white light of the sample bundle.
  • the stamp and the piezo actuator are connected to one another in such a way that the length of the
  • Piezo actuator leads to a change in the position of the stamp and thus to a change in the position of the stamp surface.
  • the relative position of the reference surface to the stamp surface changes.
  • the piezo actuator is repeatedly electrically controlled in dynamic operation, which leads to an extension (expansion) and shortening (contraction) of the piezo actuator. Cracks can occur in the piezo actuator, which lead to a permanent change in length during operation. To estimate the reliability of the piezo actuator, it is important to know the change in length due to the repeated electrical activation. To determine the length change of the piezo actuator, which is caused by the dynamic operation, the piezo actuator is firmly connected to the bottom of the vessel, for example with the aid of a thin film of an adhesive.
  • the vessel is, for example, a drive housing of the piezo actuator, in which the piezo actuator is in operation.
  • the electrical connections necessary for controlling the piezo actuator are routed through a vessel wall of the vessel.
  • the piezo actuator is controlled electrically between the repeated determination of the relative position of the sample surface and the reference surface. Due to the high resolution, the arrangement is suitable for detecting a slow change (long-term drift) in the dimension of the piezo actuator, which is caused by the repeated electrical activation of the piezo actuator.
  • the interferometer arrangement of the present the relative position of the sample surface to the reference surface is determined. Suitable measures can be taken to ensure that the change in position and thus the change in dimension of the sample body can be detected.
  • the change in the dimension of the sample body can have various causes. Conversely, the cause of the determined change in dimension can be determined.
  • the interferometer arrangement can be used to elegantly determine a temperature expansion coefficient of the material from which the specimen is made. Changing the temperature changes the dimensions of a sample body made of the material. As a result, the relative position of the sample surface and the reference surface to one another changes. By determining the relative position as a function of temperature, the thermal expansion coefficient of the material of the sample body can be inferred.
  • the following advantages result with the present invention: With the aid of the interferometer arrangement, the relative position of the sample surface and the reference surface with respect to one another can be detected exactly.
  • a reference body can be used for this, which is opaque for the white light of the light source.
  • the resolution of the interferometer arrangement is a few tenths of a ⁇ m.
  • the interferometer arrangement does not have a mechanical displacement sensor for determining the relative position of the reference surface to the sample surface. In such a case, the necessary and time-consuming correction measurements are not necessary.
  • FIG. 1 shows an interferometer arrangement according to the invention.
  • FIG. 2A shows a section of the interferometer arrangement with sample body and reference body.
  • FIG. 2B shows a section along the line 2B from FIG. 2A.
  • FIG. 3 shows a method for determining a change in the relative position of the sample surface
  • the sample body 40 is a piezo actuator 43 in a monolithic multilayer construction.
  • the piezo actuator has a composite of piezoceramic layers and electrode layers arranged between the piezoceramic layers. To produce the composite, the electrode layers and the piezoceramic layers are sintered together. The internal electrodes of the piezo actuator are contacted alternately with the aid of external electrodes. The piezo actuator is deflected by an electrical control of the external electrodes connected to the internal electrodes.
  • the piezo actuator is arranged in a vessel 53 (FIGS. 2A and 2B).
  • the vessel is the control housing for the piezo actuator.
  • the vessel has a vessel bottom 54, a vessel wall 55, a vessel interior 56 and a vessel rim 57.
  • the vessel edge 57 is formed by the vessel wall 55.
  • the vessel edge 57 represents the reference surface 51.
  • the piezo actuator 43 and the vessel 53 are firmly connected to one another with the aid of a connecting means 60.
  • the lanyard is an adhesive.
  • the piezo actuator is glued to the bottom of the vessel.
  • the connecting means 60 is one
  • the piezo actuator is located in a tubular spring that clamps the piezo actuator with a defined force.
  • the bottom plate of the Bourdon tube is welded to the bottom of the vessel.
  • electrical connections 44 of the piezo actuator are guided through the vessel bottom 54 of the vessel 53.
  • the vessel 53 acts as the support body 70 of the sample body.
  • the piezo actuator itself does not form the sample surface of the sample body. To form the sample surface of the sample body, the piezo actuator itself does not form the sample surface of the sample body.
  • a sample 46 is arranged on the end face of the piezo actuator, which faces away from the bottom of the vessel.
  • the stamp is firmly connected to the piezo actuator 43.
  • the stamp has sample surface 41.
  • the stamp is formed, for example, by a base plate of the tubular spring described above.
  • the sample surface 41 which is formed by the stamp
  • the reference surface 51 which is formed by the edge of the vessel, at least partially reflect the white light of the
  • Sub-bundle 20 The vessel 53 and the piezo actuator 43 or the stamp 46 of the piezo actuator are arranged coaxially to the sub-bundle. This means that an averaged surface normal 52 of the reference surface 51 and an averaged surface normal 42 of the sample surface 41 are arranged parallel to one another.
  • This coaxial arrangement ensures that only white light from the sample sub-bundle 24 of the sub-bundle 20 reaches the sample surface. Likewise, only white light from the reference sub-bundle 25 of the sub-bundle reaches the reference surface.
  • a first step (301, FIG. 3), the length difference between the light path 21 of the sub-bundle 20 and the further light path 31 of the further sub-bundle 30 is set. Any actuator 10 is used for this.
  • a light beam 11 is emitted with light pulses from a white light.
  • the beam splitter 6 With the help of the beam splitter 6, the light beam 11 is divided into the sub-bundle 20 and the further sub-bundle 30.
  • the sub-bundle 20 reaches partly on the reference surface and partly on the sample surface.
  • the partial bundle 20 is reflected from these surfaces and guided further with the aid of a mirror 8 in the direction of the detector 9.
  • the further sub-bundle 30 is reflected on the mirror 32 and also reaches the detector 9.
  • the mirror 8 is transparent to the radiation of the further sub-bundle reflected by the mirror 32.
  • the mirror 8 acts as a means for superimposing the further sub-bundle, the sample sub-bundle and the reference sub-bundle. These bundles of light are superimposed (302, FIG. 3). Due to the overlay, an interference pattern is formed.
  • the interference pattern is detected with the aid of the detector 9 (303, FIG. 3).
  • the detector is a CCD camera. Alternatively, a corresponding photodetector array is used. With these detectors it is possible to achieve a spatial resolution of the interference.
  • a white light interferogram is created (304, Figure 3). After the white light interferogram has been recorded, steps 301 to 304 are repeated (305, FIG. 3).
  • the change in the relative position 45 between the sample surface and the reference surface is caused by a change in the state of the sample body.
  • the piezo actuator is repeatedly electrically controlled. Due to the repeated activation of the piezo actuator, the length of the piezo actuator may change. This change in the length of the piezo actuator can be determined using the interferometer arrangement. For this purpose, the above-described steps for determining the relative position of the sample surface to the reference surface are repeated after the electrical actuation of the piezo actuator has ended. The influence of the repeated electrical activation of the piezo actuator on the length of the piezo actuator can be determined from the comparison of the determined relative positions.
  • the piezo actuator is subjected to a static, that is to say non-changing, electrical control voltage. It will change the relative location of the sample surface and the
  • Reference surface to each other determined depending on the electrical control voltage. With a longer measurement period, a long-term drift in the change in the relative position can also be determined.
  • the influence of temperature on the change in length of the piezo actuator is determined (e.g. shortening of the piezo actuator by depolarization when the temperature rises).
  • the piezo actuator is brought to a certain temperature in a warm chamber.
  • the vessel consists essentially of a glass that is a small one
  • the influence of temperature on the length change of the piezo actuator is determined in a temperature range from -50 ° C to 150 ° C.
  • the piezo actuator in the temperature chamber is tempered to the appropriate temperature and at this temperature
  • the dimension of the piezo actuator is inferred at the corresponding temperature.
  • a change in the state of the piezo actuator is brought about by changing the temperature, which in turn brings about a change in the dimension of the piezo actuator and, as a result thereof, a change in the relative position of the sample surface and the reference surface, which can be determined with the aid of the interferometer arrangement, with one another.
  • Piezo actuator due to depolarization in the event of force surges from outside or if the piezo actuator is worn due to mechanical stress.

Abstract

L'invention concerne un dispositif interféromètre (1) permettant de déterminer une position relative (45) modifiable entre la surface (41) d'une éprouvette (40), cette surface réfléchissant au moins partiellement la lumière blanche, et la surface de référence d'une éprouvette (50) réfléchissant au moins partiellement la lumière blanche. L'invention concerne également l'utilisation du dispositif interféromètre. La longueur de cohérence de la source de lumière blanche (2) étant courte, on peut obtenir une modification d'au moins quelques dixièmes de ηm des dimensions d'une éprouvette quelconque avec une solution. On utilise le dispositif interféromètre, par exemple, pour déterminer les processus de vieillissement d'un actionneur piézoélectrique dans une construction multicouche monolithique.
PCT/EP2004/050756 2003-05-27 2004-05-11 Dispositif interferometre et utilisation du dispositif interferometre WO2004106848A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10324044.6 2003-05-27
DE10324044A DE10324044B4 (de) 2003-05-27 2003-05-27 Dilatometer mit einer Interferometeranordnung und Verwendung des Dilatometers mit der Interferometeranordnung

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Publication Number Publication Date
WO2004106848A1 true WO2004106848A1 (fr) 2004-12-09

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8390703B2 (en) 2008-07-23 2013-03-05 Panasonic Corporation Image pickup apparatus and semiconductor circuit element

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005025414B4 (de) * 2005-06-02 2008-03-13 Siemens Ag Verfahren und Vorrichtung zum Prüfen einer axialen Position eines Piezoaktors in einem Gehäuse während eines Betriebs des Piezoaktors
DE102005056705B3 (de) * 2005-11-28 2006-12-28 Siemens Ag Klemmvorrichtung für eine optische Messanordnung und Verfahren für die Klemmvorrichtung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19715488C1 (de) * 1997-04-14 1998-06-25 Siemens Ag Piezoaktor mit neuer Kontaktierung und Herstellverfahren
US5953124A (en) * 1998-01-19 1999-09-14 Zygo Corporation Interferometric methods and systems using low coherence illumination
GB2355310A (en) * 1999-09-28 2001-04-18 Ocular Sciences Ltd White light interferometer
DE10041041A1 (de) * 2000-08-22 2002-03-07 Zeiss Carl Interferometeranordnung und Interferometrisches Verfahren

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19522262C2 (de) * 1995-06-20 1997-05-22 Zeiss Carl Jena Gmbh Heterodyn-Interferometer-Anordnung
DE19721843C1 (de) * 1997-05-26 1999-02-11 Bosch Gmbh Robert Interferometrische Meßvorrichtung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19715488C1 (de) * 1997-04-14 1998-06-25 Siemens Ag Piezoaktor mit neuer Kontaktierung und Herstellverfahren
US5953124A (en) * 1998-01-19 1999-09-14 Zygo Corporation Interferometric methods and systems using low coherence illumination
GB2355310A (en) * 1999-09-28 2001-04-18 Ocular Sciences Ltd White light interferometer
DE10041041A1 (de) * 2000-08-22 2002-03-07 Zeiss Carl Interferometeranordnung und Interferometrisches Verfahren

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8390703B2 (en) 2008-07-23 2013-03-05 Panasonic Corporation Image pickup apparatus and semiconductor circuit element

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DE10324044B4 (de) 2006-01-12

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