WO2017202519A1 - Dispositif moems ainsi que procédé de fabrication correspondant - Google Patents

Dispositif moems ainsi que procédé de fabrication correspondant Download PDF

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Publication number
WO2017202519A1
WO2017202519A1 PCT/EP2017/056787 EP2017056787W WO2017202519A1 WO 2017202519 A1 WO2017202519 A1 WO 2017202519A1 EP 2017056787 W EP2017056787 W EP 2017056787W WO 2017202519 A1 WO2017202519 A1 WO 2017202519A1
Authority
WO
WIPO (PCT)
Prior art keywords
axis
laser beam
laser
moems
along
Prior art date
Application number
PCT/EP2017/056787
Other languages
German (de)
English (en)
Inventor
Robert Kakonyi
Balazs Jatekos
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2017202519A1 publication Critical patent/WO2017202519A1/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/42—Simultaneous measurement of distance and other co-ordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD

Definitions

  • the present invention relates to a MOEMS device and a corresponding manufacturing method.
  • MOEMS devices are micro-opto-electro-mechanical devices which incorporate optical components, e.g. Laser sources, and micromechanical components, e.g. Have microgame gel.
  • optical components e.g. Laser sources
  • micromechanical components e.g. Have microgame gel.
  • optical systems for range finding have been developed using the line scan technique.
  • the measurement principle is based on the determination of the length of the light path from a laser source to an object with an optical reflection surface.
  • Known optical distance measuring systems comprise a micromirror which can be tilted about an axis, which deflects the laser beam and makes it possible to scan the distance of an object to be detected along a line.
  • optical systems for distance measurement comprise a micromirror which can be tilted about an axis, which deflects the laser beam and makes it possible to scan the distance of an object to be detected along a line.
  • US 2013/0063718 A1 describes a device for the optical measurement of a physical parameter with a laser light source for generating a measurement beam in the direction of an object and for receiving the object reflected by the object
  • Measuring beam the measuring beam along an optical path, the variation of which depends on the physical parameter to be detected.
  • Laser light source has an optical cavity. Furthermore provided are a
  • Motion sensor for the laser light source and elements for calculating the physical parameter from a signal measured at the laser light source and a signal measured by the motion sensor.
  • the invention provides a MOEMS device according to claim 1 and a
  • the idea underlying the present invention is based on the fact that a single quasi-ideal lens in axis-parallel arrangement converts the axis movement of the laser source with a certain divergence into an angular deflection of a collimated laser beam.
  • the present invention provides a MOEMS device with a laser source, wherein the laser source is elastically deflectable at least along one axis, wherein above the laser source, a lens device is arranged, which converts the laser beam emitted from the laser source into a substantially parallel laser beam, wherein a Deflection angle of the converted laser beam depends on a deflection of the laser source along the axis. Since the angular deflection of the laser beam through the
  • Movement of the laser source along the axis is achieved by the lens device can be dispensed with a micromirror with elaborate suspension and packaging become.
  • the space requirement is reduced because the tilting movement of the known micromirror is eliminated, so that the entire device can be made much smaller.
  • the carrier region is suspended by a spring device on opposite side walls of the substrate. This allows an elastic and stable suspension to be realized.
  • the drive device comprises a capacitive drive.
  • Such drives are easy to produce and energy-saving by means of micromechanical standard processes.
  • the laser device has a
  • Receiver device such as a photodiode, for receiving a second laser beam reflected from an external object.
  • a simple arrangement for the self-mixing process can be produced integrated, in which the receiver is close to the transmitter.
  • a beam splitter device for splitting the second laser beam into two components is attached to the lens device.
  • the lens device is designed such that it transforms the first laser beam into a substantially collimated second laser beam. This increases the resolution during scanning. In certain applications, it is also possible that the laser beam is not collimated, but collimation is performed only at a certain distance from the MOEMS device.
  • the carrier region elastically suspended in the cavity is elastically deflectable along a third axis, which runs essentially perpendicular to the second axis, wherein the lens device is designed such that it transforms the first laser beam into a second laser beam, which comprises a first laser beam Wnkel forms with the second axis, which is dependent on a deflection of the support area along the first axis and the third axis, so that a Area is scanned by the second laser beam.
  • a second laser beam which comprises a first laser beam Wnkel forms with the second axis, which is dependent on a deflection of the support area along the first axis and the third axis, so that a Area is scanned by the second laser beam.
  • the laser device has a laser diode.
  • Such laser diodes can be produced with very small dimensions.
  • the laser device is in the
  • Fig. 1 is a schematic representation for explaining the present
  • Fig. 2a), b) are schematic cross-sectional views of a MOEMS device according to a first embodiment of the present invention
  • Fig. 3 is a schematic cross-sectional view of a MOEMS device
  • Fig. 4 is a schematic cross-sectional view of a MOEMS device
  • Fig. 1 shows a schematic representation for explaining the present
  • reference numeral 1 denotes a laser source which is arranged in an x / y coordinate system.
  • a quasi-ideal lens 10 is arranged axis-parallel to the y-axis and symmetrical to the x-axis.
  • the laser source 1 is offset by the focal length f of the lens 10 in the negative x direction and by a distance
  • ⁇ y h offset in y direction.
  • a laser beam B generated by the laser source 1 is converted into a parallel laser beam B ', which forms an angle ⁇ with the x-axis.
  • a variable angular deflection of the laser beam B ' can be achieved by generating a variable deflection A y of the laser source 1 in the y direction.
  • Fig. 2a), b) are schematic cross-sectional views of a MOEMS device according to a first embodiment of the present invention.
  • reference numeral 5 denotes a substrate, for example a
  • Wafer substrate which has a cavity C, which is enclosed by the side walls 5a, 5b and the bottom wall 5c of the substrate 5.
  • a lens device 15 is attached, for example, by a bond K, whereby the cavity C is closed.
  • a laser source T is mounted on a carrier region 3, which is elastically deflectable one-dimensionally along the x-axis by a drive D (shown only schematically).
  • the support portion 3 is connected via spring means 2a, 2b with suspension portions 4a, 4b on the side walls 5a and 5b.
  • Radiation direction of the laser source 1 ' runs along the y-axis.
  • the (only schematically illustrated) drive D is, for example, by means of comb electrode means formed outside the plane of the drawing or
  • the laser beam B0 emitted by the laser source 1 'in the y-direction is transmitted through the
  • Lens device 15 is converted into a substantially parallel laser beam B0, which emerges from the lens device 15.
  • the MOEMS device 100 is connected via a connection device A by means of an external line device L to an external control unit CU.
  • the connection device A extends over integrated strip conductors, which are not shown for reasons of simplicity.
  • Laser source T are these integrated interconnects, for example via the
  • the production of the MOEMS device 100 takes place by means of customary micromechanical standard processes, the carrier region 3, the drive D and the spring devices 2a, 2b being etched, for example, by a sacrificial layer process from a micromechanical functional layer of polysilicon.
  • the laser source 1 ' can either be integrated into the carrier region 3 by means of a corresponding layer structure or be attached to this as a separate component.
  • the lens device 15 can either be formed by a closing process with a subsequent structuring process or glued as a separate component onto the side walls 5a, 5b of the substrate 5 by means of the adhesive K shown.
  • the (only schematically illustrated) drive D can be either resonant with low power consumption or quasi-static depending on the application. If a two-axis drive is used, for example with additional suspension and additional electrodes in the z-direction, eg a Lissajous pattern can be drawn on an object to be scanned. The Lissajous pattern better obscures the accessible rectangular scan interval if the frequencies of the two oscillations are close together. Accordingly, the drive mechanisms in the two Directions are very similar or identical. For a quasi-static drive D, a regular pattern, eg zigzag pattern, is preferred.
  • FIG 3 is a schematic cross-sectional view of a MOEMS device according to a second embodiment of the present invention.
  • the MOEMS device 200 shown in Fig. 3 differs from the embodiment shown in Fig. 2a), b) in that it constitutes a distance measuring system. Accordingly, the MOEMS system 200 receives the laser beam B0 'reflected from an object G with a receiving device, such as a
  • Photodiode. 3 this photodiode is integrated into the laser source 1 ".
  • a corresponding evaluation of the received light signals B0 'from an object G in relation to the emitted light signals B takes place in the control unit CU', for example by means of the self-mixing method.
  • FIG. 4 is a schematic cross-sectional view of a MOEMS device according to a second embodiment of the present invention.
  • the MOEMS device 300 according to the third embodiment is based on the first embodiment shown in FIG. 2 a), b), but additionally has a beam splitting device 50 mounted on the lens device 15.
  • the beam splitting device 50 operates according to the Michelson principle and allows the laser beam B0 emerging from the lens device 15 to pass partially onto the object G to be detected and partly onto a receiver device PD in the form of a photodiode which is connected to the
  • the laser beam B0 'reflected by the object G is likewise directed to the receiver device PD by the beam deflection device 50, so that an evaluation by means of the self-mixing technique can likewise be carried out It is likewise conceivable to produce the beam deflection device 50 directly on the lens device 15 by means of a micromechanical process.
  • the invention is not limited thereto but can be used for any applications in which a scanned laser beam is generated and, if necessary, a reflected laser beam has to be detected.
  • the substrate may be both a laser substrate, as described above, and a chip substrate, wherein, for example, a plurality of chips are produced on a laser with a corresponding MOEMS device.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Semiconductor Lasers (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

L'invention concerne un dispositif MOEMS (microsystème optoélectromécanique) ainsi qu'un procédé de fabrication correspondant. Le dispositif MOEMS comporte un substrat (5) dans lequel est formée une cavité (C) ; une zone porteuse (3) suspendue élastiquement dans la cavité (C), laquelle zone porteuse peut être déviée au moins le long d'un premier axe (x) ; un dispositif d'entraînement (D) situé dans la cavité (C) et servant à dévier la zone porteuse (3) ; un dispositif laser (V) situé sur ou dans la zone porteuse (3), lequel est conçu pour émettre un premier faisceau laser (B) le long d'un deuxième axe (y) qui s'étend sensiblement perpendiculairement au premier axe (x) ; un moyen formant lentille (15), lequel est monté sur le substrat (5) au-dessus du dispositif laser (1') de telle sorte qu'il dissimule la cavité (C) et lequel est conçu de telle sorte qu'il transforme le premier faisceau laser (B) en un deuxième faisceau laser (B0) qui forme un angle (a) avec le deuxième axe (y), lequel angle est dépendant d'une déviation de la zone porteuse (3) le long du premier axe (x) ; et un dispositif de connexion (A) pour connecter un dispositif de commande externe (CU).
PCT/EP2017/056787 2016-05-24 2017-03-22 Dispositif moems ainsi que procédé de fabrication correspondant WO2017202519A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016208926.9A DE102016208926A1 (de) 2016-05-24 2016-05-24 MOEMS-Vorrichtung sowie entsprechendes Herstellungsverfahren
DE102016208926.9 2016-05-24

Publications (1)

Publication Number Publication Date
WO2017202519A1 true WO2017202519A1 (fr) 2017-11-30

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PCT/EP2017/056787 WO2017202519A1 (fr) 2016-05-24 2017-03-22 Dispositif moems ainsi que procédé de fabrication correspondant

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WO (1) WO2017202519A1 (fr)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113566804B (zh) * 2021-06-08 2023-01-13 无锡职业技术学院 三维光子晶体的四质量光机电三轴陀螺仪及其加工方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0816868A2 (fr) * 1996-07-01 1998-01-07 Itt Manufacturing Enterprises, Inc. Emetteur laser avec un faisceau explorateur tournant
US6091537A (en) * 1998-12-11 2000-07-18 Xerox Corporation Electro-actuated microlens assemblies
US6233045B1 (en) * 1998-05-18 2001-05-15 Light Works Llc Self-mixing sensor apparatus and method
US20020105699A1 (en) * 2001-02-02 2002-08-08 Teravicta Technologies, Inc Integrated optical micro-electromechanical systems and methods of fabricating and operating the same
US20110118943A1 (en) * 2008-05-16 2011-05-19 Koninklijke Philips Electronics N.V. Security system comprising a self-mixing laser sensor and method of driving such a security system
US20130063718A1 (en) 2010-05-11 2013-03-14 Institut National Polytechnique De Toulouse Device for the optical measurement of a physical parameter

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0816868A2 (fr) * 1996-07-01 1998-01-07 Itt Manufacturing Enterprises, Inc. Emetteur laser avec un faisceau explorateur tournant
US6233045B1 (en) * 1998-05-18 2001-05-15 Light Works Llc Self-mixing sensor apparatus and method
US6091537A (en) * 1998-12-11 2000-07-18 Xerox Corporation Electro-actuated microlens assemblies
US20020105699A1 (en) * 2001-02-02 2002-08-08 Teravicta Technologies, Inc Integrated optical micro-electromechanical systems and methods of fabricating and operating the same
US20110118943A1 (en) * 2008-05-16 2011-05-19 Koninklijke Philips Electronics N.V. Security system comprising a self-mixing laser sensor and method of driving such a security system
US20130063718A1 (en) 2010-05-11 2013-03-14 Institut National Polytechnique De Toulouse Device for the optical measurement of a physical parameter

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
G. GIULIANI ET AL.: "Laser diode self-mixing technique for sensing applications", J. OPT. A: PURE APPL. OPT., vol. 4, 2002, pages 283 - 294

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