WO2004106729A1 - 液体噴射装置 - Google Patents
液体噴射装置 Download PDFInfo
- Publication number
- WO2004106729A1 WO2004106729A1 PCT/JP2004/007748 JP2004007748W WO2004106729A1 WO 2004106729 A1 WO2004106729 A1 WO 2004106729A1 JP 2004007748 W JP2004007748 W JP 2004007748W WO 2004106729 A1 WO2004106729 A1 WO 2004106729A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- liquid
- piezoelectric
- liquid ejecting
- ejecting apparatus
- electrostrictive element
- Prior art date
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 383
- 230000005684 electric field Effects 0.000 claims description 11
- 239000002245 particle Substances 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 7
- 238000002347 injection Methods 0.000 description 50
- 239000007924 injection Substances 0.000 description 50
- 239000000446 fuel Substances 0.000 description 48
- 229910052751 metal Inorganic materials 0.000 description 46
- 239000002184 metal Substances 0.000 description 46
- 238000002485 combustion reaction Methods 0.000 description 7
- 238000000889 atomisation Methods 0.000 description 3
- 230000008602 contraction Effects 0.000 description 3
- 239000002828 fuel tank Substances 0.000 description 3
- 239000003502 gasoline Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000011796 hollow space material Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/02—Ink jet characterised by the jet generation process generating a continuous ink jet
- B41J2/025—Ink jet characterised by the jet generation process generating a continuous ink jet by vibration
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
- F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
- F02M61/18—Injection nozzles, e.g. having valve seats; Details of valve member seated ends, not otherwise provided for
- F02M61/1853—Orifice plates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M69/00—Low-pressure fuel-injection apparatus ; Apparatus with both continuous and intermittent injection; Apparatus injecting different types of fuel
- F02M69/04—Injectors peculiar thereto
- F02M69/042—Positioning of injectors with respect to engine, e.g. in the air intake conduit
- F02M69/044—Positioning of injectors with respect to engine, e.g. in the air intake conduit for injecting into the intake conduit downstream of an air throttle valve
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M2200/00—Details of fuel-injection apparatus, not otherwise provided for
- F02M2200/21—Fuel-injection apparatus with piezoelectric or magnetostrictive elements
Definitions
- the present invention relates to a liquid ejecting apparatus configured to atomize a liquid to be ejected.
- this type of conventionally known liquid ejecting apparatus has a chamber whose volume is changed by a piezoelectric element 301 and which is provided with a liquid ejecting hole 302. , A liquid introduction hole 304, and a liquid supply passage 304.
- the liquid is supplied into the liquid supply passage 304, and is then introduced into the chamber 303 through the liquid introduction hole 304. Then, the liquid is pressurized in the chamber 303 by the operation of the piezoelectric element 301 and is ejected from the liquid ejection hole 302 (for example, see Japanese Patent Application Laid-Open No. 2000-27997). No. 6 (see page 2, page 3, figure 2).
- the conventional device attempts to inject the liquid only by the pressure generated by the piezoelectric Z-electrostrictive element 301, so it is used in an environment where the temperature and pressure of the space in which the liquid is injected fluctuate drastically. In such a case, it may be difficult to jet the liquid while surely atomizing the liquid.
- the upper surface of the champ 303 is formed of a metal or the like and the piezoelectric Z-electrostrictive element 301 is bonded to the same metal, the bonding surface is frequently deformed by the piezoelectric electro-strictive element 301. Therefore, the piezoelectric / electrostrictive element 301 may peel off. Disclosure of the invention
- an object of the present invention is to provide a liquid ejecting apparatus which can surely atomize droplets to be ejected and which has improved durability by adopting a structure in which an adhered portion is not vibrated. To provide.
- the liquid ejecting apparatus pressurizes the first liquid, and pressurizes the first liquid.
- a liquid ejecting device having a pressurizing means for ejecting a liquid from an ejection portion, a wall defining a liquid introduction space into which the first liquid ejected from the ejection portion is introduced, and a liquid ejection hole provided on the wall. And an active portion including the piezoelectric Z electrostrictive layer and at least one pair of electrode layers, and an electric field is applied to the piezoelectric Z electrostrictive layer by the same pair of electrode layers, and no electric field is applied to the piezoelectric / electrostrictive layer.
- a piezoelectric z-electrostrictive element configured to have an inactive portion is held by the inactive portion, and is fixed to an outer surface of a wall of the liquid ejecting portion, and a liquid storage space is formed together with an outer surface of the wall.
- the “liquid injection hole” includes not only “a hollow cylindrical through-hole provided in a wall (that is, a flow path whose cross-sectional area is not changed in the flow direction)”, 1In order to increase the flow by converting the energy of the pressure or heat of the liquid into kinetic energy, the term is used as a term that also includes a flow path (that is, a nozzle) whose cross-sectional area changes in the direction of flow. Is done.
- the pressure required for the first liquid to be ejected through the liquid ejection holes is generated by the pressurizing means, and the vibration for atomizing the first liquid is applied by the piezoelectric electrostrictive element. Is done. Therefore, the liquid ejecting apparatus can surely achieve the ejection and the atomization of the first liquid even if the environment of the space for ejecting the liquid changes drastically.
- the piezoelectric Z electrostrictive element is held in the vibration chamber at an inactive portion that is not substantially deformed, the holding portion is not vibrated by the piezoelectric / electrostrictive element.
- this liquid ejecting apparatus can reliably hold the piezoelectric / electrostrictive element for a long period of time, and its durability is significantly improved.
- the liquid ejecting section is interposed, and the first means from the pressurizing means toward the liquid ejecting hole is provided. It is preferable to provide an on-off valve for stopping and allowing the flow of the liquid.
- the injection start timing and the injection end timing of the first liquid can be reliably determined. Can be controlled.
- the second liquid is non-conductive (insulating) in order to ensure that an electric field is applied to the piezoelectric Z electrostrictive layer. Is preferable.
- the second liquid is a nonflammable liquid.
- the traveling direction of the pressure wave based on the vibration of the active portion of the piezoelectric / electrostrictive element can be dispersed by the solid particles, it is possible to vibrate a wall having a larger area with a uniform pressure. It becomes.
- the liquid ejection holes can be arranged in a portion having a larger area, it is possible to eject a large amount of uniformly atomized droplets.
- the piezoelectric Z electrostrictive element has the inert portion in a liquid storage space of the vibration chamber, and has two ends of the inert portion continuous with the inert portion. It is preferred that it be retained.
- the expansion and contraction of the active portion of the piezoelectric Z-electrostrictive element can be expressed by the inactive portion as bending deformation of the piezoelectric Z-electrostrictive element. Therefore, even if the potential difference applied between the electrode layers is reduced, it is possible to transmit sufficient vibration to the first liquid. As a result, the power consumption of the piezoelectric Z electrostrictive element can be reduced.
- the active section is disposed closer to the wall of the liquid ejecting section than the inactive section.
- the vibration chamber includes a gas discharge unit that discharges gas generated in the liquid storage space to the outside.
- FIG. 1 is a diagram schematically illustrating a liquid ejecting apparatus according to a first embodiment of the present invention applied to an internal combustion engine.
- FIG. 2 is a front view of the electromagnetic on-off discharge valve shown in FIG.
- FIG. 3 is a plan view of the liquid ejecting device shown in FIG.
- FIG. 4 is a cross-sectional view of the liquid ejecting device cut along a plane along line 1-1 in FIG. 3 and an enlarged front view of the electromagnetic on-off discharge valve shown in FIG.
- FIG. 5 is a cross-sectional view of the liquid jet device cut along a plane along line 2-2 in FIG.
- FIG. 6 is a sectional view of a liquid ejection device according to a second embodiment of the present invention.
- FIG. 7 is a plan view of the liquid ejecting device according to the third embodiment of the present invention.
- FIG. 8 is a cross-sectional view of the liquid ejecting device cut along a plane along line 3-3 in FIG.
- FIG. 9 is a cross-sectional view of the liquid ejecting device cut along a plane along the line 414 in FIG.
- FIG. 10 is a plan view of a liquid ejecting device according to a fourth embodiment of the present invention.
- FIG. 11 is a cross-sectional view of the liquid ejecting device cut along a plane along line 5-5 in FIG.
- FIG. 12 is a cross-sectional view of the liquid ejecting device cut along a plane along line 6-6 in FIG.
- FIG. 13 is a plan view of a liquid ejecting device according to a fifth embodiment of the present invention.
- FIG. 14 is a cross-sectional view of the liquid ejecting device cut along a plane along line 7-7 in FIG.
- FIG. 15 is a cross-sectional view of the liquid ejecting device cut along a plane along line 8-8 in FIG.
- FIG. 16A is a cross-sectional view of a liquid ejecting device according to a sixth embodiment of the present invention
- FIG. 16B is a cross-sectional view of the liquid ejecting device cut along a plane along line 9-9 in FIG. 16A.
- FIG. 17 is a sectional view of a liquid ejecting device according to a seventh embodiment of the present invention.
- FIG. 18 is a cross-sectional view of a conventional liquid ejecting apparatus.
- liquid ejecting apparatus a liquid spraying apparatus, a liquid supply apparatus, and a droplet discharging apparatus
- the liquid injection device according to the first embodiment of the present invention is an electronic fuel injection device for an internal combustion engine as a mechanical device that requires finely divided liquid (fuel). Used as an injection control device (electronic liquid injection control device).
- This liquid ejecting apparatus includes a liquid ejecting device 10 having a piezoelectric Z electrostrictive element functioning as an actuator, a pressurizing pump (fuel pump) 21 as a pressurizing means, a fuel supply pipe (a liquid supply pipe, a fuel supply pipe). Piping) 22, Pre-regulatory pump 23, Electromagnetic open / close discharge valve (Discharge valve, Open / close valve) 24, Fuel tank (Liquid storage tank) 25, and Electric control device 40.
- the pressurizing pump 21 and the pressure pump 23 are interposed in the fuel supply pipe 22.
- Such a liquid injection device includes a fuel injection space (liquid injection space) 31 formed by an intake pipe (or an intake port) 30 of the internal combustion engine and the like. Liquefied liquid (eg, liquid fuel, for example, gasoline, hereinafter sometimes simply referred to as “fuel” or “first liquid”).
- Liquefied liquid eg, liquid fuel, for example, gasoline, hereinafter sometimes simply referred to as “fuel” or “first liquid
- the pressurizing pump 21 has an inlet 21 a connected to the bottom of the fuel tank 25 via a fuel supply pipe 22, and a pre-regulated pump 23 via the fuel supply pipe 22. And a discharge section 21b connected to the discharge section 21b.
- the pressurizing pump 21 introduces the fuel in the fuel tank 25 from the introduction part 21a and pressurizes it, and discharges the pressurized fuel from the discharge part 21b. Even if the piezoelectric Z-electrostrictive element of the liquid ejecting device 10 is not operated, the pressurizing pump 21 supplies the fuel to the nozzle 21 and the electromagnetic open / close discharge valve 24 and the liquid ejecting device. Liquid through 1 0 2004/007748
- the pressure is increased to a pressure higher than the pressure that can be injected into the injection space 31 (this pressure is referred to as “pressure pump discharge pressure”).
- the pressure in the intake pipe 30 is given to the pre-stressing pump 23 by piping not shown.
- the pressure regulator 23 reduces (or regulates) the pressure of the fuel pressurized by the pressurizing pump 21 based on the pressure in the intake pipe 30. .
- the pressure of the fuel in the liquid supply pipe 22 between the pressure regulator 23 and the electromagnetic on-off discharge valve 24 is more predetermined (constant) than the pressure in the intake pipe 30.
- the pressure is adjusted so as to be as high as possible (this pressure is called “adjustment pressure”). Therefore, when the electromagnetic on / off discharge valve 24 is opened for a predetermined time, fuel having a fuel amount substantially proportional to the predetermined time is injected into the intake pipe 30 regardless of the pressure in the intake pipe 30.
- the electromagnetic on / off discharge valve 24 is a well-known fuel injector (electromagnetic injection valve) that has been widely used in electronic fuel injection control devices for internal combustion engines.
- FIG. 2 is a front view of the electromagnetic on / off discharge valve 24, and shows a cross section of a front end portion thereof cut along a plane including a center line of the electromagnetic on / off discharge valve 24.
- the electromagnetic open / close discharge valve 24 is connected to a liquid supply pipe 22 and is connected to a liquid inlet 23 and a liquid inlet 24 a, and a liquid passage connected to the liquid inlet 24 a.
- the liquid passage 24 b of the electromagnetic on / off discharge valve 24 is connected to the liquid ejecting device 10 via a discharge hole 24 e.
- the electromagnetic on-off discharge valve 24 is connected to the pressurizing pump 21 via the pressure regulator 23.
- the pressurized fuel supplied from the liquid supply device 10 is supplied to the liquid ejection device 10 through the liquid passage 24 b and the discharge hole 24 e.
- the liquid injection device 10 includes a chamber having a piezoelectric electrostrictive element formed on at least the wall surface thereof in order to atomize the liquid (fuel injected toward the back surface of the intake valve 32) injected into the fuel injection space 31. And a wall different from the wall on which the piezoelectric / electrostrictive element is formed
- the liquid ejecting device is provided with a liquid ejecting hole (liquid ejecting nozzle) formed in the above-described manner, and is shown in detail in FIGS.
- the liquid ejecting device 10 has a substantially rectangular parallelepiped shape in which each side extends parallel to the X, Y, and Z axes orthogonal to each other.
- a base portion of the liquid ejecting device 10 (hereinafter, also referred to as a “liquid ejecting portion”) is composed of a plurality of thin metal sheets (hereinafter, referred to as “laminate”) that are sequentially stacked and joined to each other. It is called “metal plate.” It consists of 10 a to 10 c.
- the material of the metal plates 10a to 10c is stainless (SUS304 or SUS316) in this example.
- the metal plate 10c functions as a vibration transmission plate for transmitting vibration generated by the piezoelectric Z-electrostrictive element 11 supported by the vibration chamber 11 described later.
- the material of a metal plate according to another embodiment described later is also the same as that of the metal plates 10a to L0c.
- the liquid ejecting device 10 connects the liquid inlet 10-1, the liquid supply passage 10-2, the chamber 10-3, the liquid supply passage 10-2, and the chamber 10-3.
- a liquid introduction passage 10-4, a piezoelectric Z-electrostrictive element 11 and a vibration chamber 1 2 fixed to a metal plate 10c and holding the piezoelectric / electrostrictive element 11 are provided.
- Liquid inlet 10-1 is a circular through-hole formed in metal plate 10c.
- the liquid inlet 10-1 is provided at the center of the metal plate 10c in the Y-axis direction and near the end of the X-axis negative direction.
- a discharge port 24 e of an electromagnetic open / close type discharge valve 24 is liquid-tightly connected to the liquid inlet 10-1 by a sleeve 25.
- the liquid supply passage 10-2 is a space defined by the upper surface of the metal plate 10 a, the side wall surface forming the through hole provided in the metal plate 10 b, and the lower surface of the metal plate 10 c. is there .
- the planar shape of the liquid supply passage 10-2 (as viewed from the positive direction of the Z-axis) is a top P corresponding to the arc of the liquid inlet 10-1 and from the top P It is a substantially isosceles triangle having a base T along the Y axis at a position separated by a predetermined distance in the positive direction of the X axis.
- the length of the base T is W.
- the chamber 10-3 has a through hole formed in the metal plate 10b at a position separated from the upper surface of the metal plate 10a by a predetermined distance in the positive X-axis direction with respect to the liquid supply passage 10-2. This is a space defined by the side wall surface to be formed and the lower surface of the metal plate 10c. Chan
- the planar shape of the bar 10-3 is a substantially rectangular shape having a long side LH and a short side SH along the Y axis and the X axis, respectively, as shown in FIG.
- the length of the long side LH is slightly longer than the length W of the base T of the liquid supply passage 10-2.
- the positions of the pair of short sides SH are located outside the both ends of the base T in the Y-axis direction (outside in the positive Y-axis direction and outside in the Y-axis negative direction).
- Each of the liquid injection holes 10-3a is a cylindrical space having an axis in the Z-axis direction and a bottom surface having a diameter d. Therefore, a plurality of circular injection ports having a diameter d are formed on the lower surface of the metal plate 10a.
- the plurality of liquid injection holes 10-3a are arranged in a square lattice.
- each center point of the plurality of liquid injection holes 10-3a is defined by a plurality of lines parallel to the X axis arranged at a fixed distance and a plurality of lines arranged at the same fixed distance. It coincides with the intersection with a line parallel to the Y axis.
- the “liquid injection hole” refers to a hollow cylindrical liquid injection through-hole (“liquid injection hole 10-3a”) provided on a wall constituting the chamber 110-3 like the liquid injection hole 10-3a.
- the liquid introduction passage portion 10-4 which is also used as a term that includes a “flow path for liquid ejection whose cross-sectional area is changed (reduced) in the flow direction (in this case, the negative direction of the Z axis)”, is a metal plate 1
- a thin plate-shaped hollow space that is, a slit defined by the upper surface of approximately 0b in the X-axis direction and the side wall surface erected from both ends of the upper surface in the Y-axis direction and the lower surface of the metal plate 10c. Is a space that constitutes This slit is also called a liquid introduction passage.
- the height in the Z-axis direction of the upper surface of the metal plate 10b at the substantially central portion in the X-axis direction is lower than the height in the Z-axis direction of both ends of the metal plate 10b in the X-axis direction by t. Therefore, the length of the slit in the Z-axis direction (the width of the slit) is t.
- the planar shape of the slit of the liquid introduction passage portion 10-4 is a substantially rectangular shape having a long side LI and a short side SI along the Y-axis and the X-axis, respectively.
- Long side I Has the same length W as the side T of the liquid supply passage 10-2.
- One long side LI coincides with the bottom side T of the liquid supply passage 10-2. Therefore, the starting points of the pair of short sides SI coincide with both ends of the base T.
- the slit of the liquid introduction passage portion 10-4 has a rectangular shape with the short side S I and the long side I in plan view.
- a pair of opposing short sides S I, S I of this rectangle are parallel to the flow direction of the liquid (X-axis direction).
- the plurality of liquid injection holes 10-3a are arranged only inside a region defined by a straight line that extends a pair of short sides S I and S I virtually in the positive X-axis direction in plan view.
- the liquid can reach each of the liquid injection holes 10-3a while having substantially the same pressure, and the flow velocity in each of the liquid injection holes 10-3a becomes substantially equal to each other.
- the liquid ejecting speed from each of the liquid ejecting holes 10-3a is substantially the same as each other. Becomes possible.
- the liquid introduction passage section 10-4 is provided with a plurality of support sections (cross sections) 10-4a.
- Each support portion 10-4a extends in the X-axis direction on the upper surface of the metal plate 10b substantially at the center in the X-axis direction.
- the plurality of support portions 10-4a are arranged at predetermined distances along the Y-axis direction.
- Each support portion 10-4a extends from the upper surface of the metal plate 10b substantially in the X-axis direction to the lower surface of the metal plate 10c.
- the slits of the liquid introduction passages 10-4 are divided into a plurality of (in this case, five) independent slits by the support portions 10-4a.
- the plurality of slits have the same shape as each other.
- the cross section of each slit cut along a plane along the YZ plane has a rectangular shape having a short side and a long side in the Z-axis direction and the Y-axis direction, respectively.
- the piezoelectric / electrostrictive element 11 as an actuator has a substantially rectangular parallelepiped shape extending parallel to the X, Y and Z axes.
- the length of the piezoelectric Z-electrostrictive element 11 in the X-axis direction is slightly shorter than the length of the chamber 10-3 in the X-axis direction.
- the length of the piezoelectric / electrostrictive element 11 in the Y-axis direction is longer than the length of the champers 10-3 in the Y-axis direction and shorter than the length of the metal plates 10a to 10c in the Y-axis direction.
- the piezoelectric / electrostrictive element 11 includes a pair of electrodes 11a and lib and a piezoelectric Z electrostrictive layer 11c.
- the pair of electrodes 1 1a and 1 1b It has a plurality of comb-like electrodes (electrode layers) that extend in a plane parallel to the plane.
- the plurality of comb-like electrodes of the electrode 11a and the plurality of comb-like electrodes of the electrode 11b alternately face each other.
- a piezoelectric Z-electrostrictive layer 11 c is present between the opposing comb-shaped electrodes. As shown in FIG.
- the comb-shaped electrodes of the pair of electrodes 11 a and 11 b are:
- the piezoelectric / electrostrictive layer 11c is provided at approximately the center of the Y-axis direction in the Y-axis direction and above the chamber 110-3 only, and is provided at both ends of the piezoelectric / electrostrictive layer 11c in the Y-axis direction. Absent.
- the portion of the piezoelectric electrostrictive layer 11c where the comb-shaped electrodes are formed forms an active portion to which an electric field is applied by these electrodes.
- the portion of the piezoelectric / electrostrictive layer 11c where the comb-shaped electrode is not formed forms an inactive portion where no electric field is applied to the piezoelectric electrostrictive layer 11c.
- the piezoelectric / electrostrictive element 11 is a “lateral effect-type laminated piezoelectric element—evening” formed by alternately laminating layered piezoelectric Z-electrostrictive elements and layered electrodes over multiple layers.
- a drive voltage whose voltage changes periodically is applied to the electrodes 11a and 11b
- an electric field that changes periodically is applied to the active portion, and only the active portion shrinks in the Y-axis direction and the Z-axis direction It extends to (expands and contracts) and vibrates.
- the vibrating champ 12 has a substantially rectangular parallelepiped shape having sides extending parallel to the X, Y, and Z axes, and is slightly larger than the chamber 10-3 in plan view. ing.
- the vibration chamber 112 includes a fixed portion 12a and a lid portion 12b made of an insulating resin (for example, an acrylic resin, a peek resin, or a poly-carbonate resin). .
- the fixing portion 12a is a hollow prismatic frame whose upper and lower surfaces are open, and is fixed on the metal plate 10c by bonding. A notch is formed on the upper side of the side wall (wall parallel to the ZX plane) of the fixed portion 12a.
- the lid portion 12b is a hollow prismatic lid body whose upper surface is closed and whose lower surface is open, and a cut portion is formed below the side wall (a wall parallel to the XX plane).
- the vibration chamfer 1 2 is provided between the cut portion of the fixed portion 12 a and the cut portion of the lid portion 12 b, and the piezoelectric Z electrostrictive device 1, which is an inactive portion of the piezoelectric electrostrictive device 11, is provided.
- the piezoelectric Z-electrostrictive element 11 is held by sandwiching both ends in the Y-axis direction of No. 1.
- Fixed part 12 a, the piezoelectric Z electrostrictive element 11 and the lid 12 b are fixed to each other with an adhesive rubber or the like.
- the vibrating chamber 112 forms an enclosed space 12c provided with an active portion of the piezoelectric electrostrictive element 11 therein together with the metal plate 10c.
- the liquid is contained in the closed space 1 2 c of the vibrating champ 1 2.
- This liquid is referred to as “second liquid” for convenience.
- the second liquid is a non-conductive and non-flammable liquid.
- the second liquid transmits the vibration accompanying the expansion and contraction of the piezoelectric / electrostrictive element 11 to the metal plate 10c and the like as a compressional wave (longitudinal wave).
- the vibrating champers 12 may be made of a material in which a metal such as SUS or an aluminum alloy is covered with an insulating film. Also, the fixing part 12a, the piezoelectric element 11 and the lid 12b may be bonded to each other with an insulating adhesive rubber, or the fixing part 12a and the lid 12b may be bonded to each other. If an insulating member such as rubber is interposed between the piezoelectric / electrostrictive element 11 and the vibration chamber 11, the vibration chamber 112 itself can be formed only of a metal having no insulating film.
- the electric control device 40 shown in FIG. 1 is a circuit including a microcomputer, and is connected to sensors such as an engine speed sensor 41 and an intake pipe pressure sensor 42.
- the electric control unit 40 inputs the engine speed N and the intake pipe pressure P from these sensors to determine the fuel amount necessary for the internal combustion engine and the injection start timing, and determines the determined fuel amount and
- the discharge valve drive signal INJ is supplied to the electromagnetic mechanism of the electromagnetic open / close discharge valve 24 in accordance with the injection start timing.
- the electric control device 40 controls the piezoelectric Z-electrostrictive element 1 at least during a period in which the pressure of the liquid in the chamber 10-3 rises and falls due to the supply and stop of the supply of the discharge valve drive signal INJ.
- a piezoelectric element drive voltage signal DV that changes between 0 (V) and Vmax (V) at a drive frequency f between the electrodes 11a and 11b is transmitted.
- the fuel discharged from the discharge hole 24 e of the electromagnetic on-off type discharge valve 24 is supplied to the liquid supply passage 10-2 through the liquid inlet 10-1. It is introduced into the chamber 10-3 through the slit of the introduction passage 10-4 (flowing through the slit in the X-axis direction). And it is introduced into chamber 1 0-3 The discharged liquid is pushed out (injected) into the intake pipe 30 through the liquid injection hole 10-3a (the injection hole of the liquid injection hole).
- the vibration caused by the operation of the piezoelectric / electrostrictive element 11 is added to the fuel injected into the chamber 10-3 through the second liquid and the metal plate 10c. Therefore, a constricted portion is generated due to the vibration applied to the injected fuel, and the fuel is separated from the constricted portion at the leading end thereof. As a result, uniform and finely divided fuel is injected into the fuel injection space 31 of the intake pipe 30.
- the liquid ejecting apparatus according to another embodiment described below operates in the same manner as the operation of the liquid ejecting apparatus described above.
- the liquid ejecting device 10 As described above, according to the liquid ejecting device 10, the pressure required for the first liquid (fuel) to be ejected through the liquid ejecting holes 10-3 a is pressurized by the pressurizing means. Vibration generated by the pump 21 and for turning the first liquid into fine particles is applied by the piezoelectric Z electrostrictive element 11. Therefore, the liquid ejecting device 10 can surely achieve the ejection and the atomization of the first liquid even if the environment of the space for ejecting the liquid changes drastically.
- the piezoelectric Z electrostrictive element 11 is held in the vibration chamber 112 at an inactive portion that is not substantially deformed. Therefore, the holding portion is not vibrated by the piezoelectric / electrostrictive element 11. Further, the vibration generated in the active portion of the piezoelectric electrostrictive element 11 is transmitted to the first liquid ejected from the liquid ejection holes 10-3a via the second liquid. As a result, the bonding surface of the piezoelectric Z-electrostrictive element is not vibrated as in the conventional apparatus, so that the liquid ejecting device 10 reliably holds the piezoelectric / electrostrictive element 11 for a long period of time. The durability has been significantly improved.
- the length t of the rectangular short side which is the cross-sectional shape of the slit of the liquid introduction passage portion 10-4, is 0.005 to 0.5 mm. If the length t of the short side is smaller than 0.05 mm, the flow resistance exhibited by the liquid introduction passage portion 10-4 becomes excessive, and a large amount of liquid can be introduced into the chamber 10-3. As a result, a large amount of liquid cannot be ejected. If the short side length t is larger than 0.5 mm, the pressure fluctuation applied to the liquid in the chamber 10-3 by the operation of the piezoelectric electrostrictive element 11 causes the liquid supply passage 10-2. Is transmitted to the chamber — 10— 3 Fluctuations in the pressure of the liquid cannot be increased, and as a result, it may be difficult to atomize the liquid.
- the support portion 10-4a functions effectively for improving the rigidity of the slit, but can be omitted.
- the diameter d of the liquid injection holes 10-3a (the diameter d of the cylindrical bottom surface and the upper surface) is 0.03 mm and the number of the liquid injection holes 10-3a is 90
- the driving frequency f of the piezoelectric driving voltage signal DV (ie, generated by the vibration chamber 12)
- the frequency f of the pressure wave transmitted to the injected fuel is 70 kHz
- droplets with a particle diameter (droplet diameter) of approximately 0.06 mm were obtained.
- the pressure wave frequency f if the pressure wave frequency f is 140 kHz, droplets having a particle diameter (droplet diameter) of approximately 0.035 mm in diameter are obtained. I got it.
- the velocity of the droplet ejected from the liquid ejection hole 10-3a is V (mmZ second)
- the diameter of the liquid ejection hole 10-3a is d (mm)
- the frequency of the pressure wave is F ( Hz)
- the diameter d is 0.005 to 0.1 (mm)
- the frequency F is 0.5 to 5 times VZ (4.49-(1)).
- the value (4.49 ⁇ d) is a value equivalent to the number of droplets per unit time that is naturally obtained when the liquid is ejected under the above conditions. (The theory that the wavelength of the fluctuating wave involved in liquid column splitting is 4.49 times the liquid column diameter).
- the diameter d is set to be larger than 0.005 (mm).
- the diameter d is smaller than 0.005 (mm)
- the liquid injection holes 10-3a are likely to be clogged by foreign substances contained in the liquid, so that the diameter d is stable. This is because there is a danger that a squirt injection cannot be performed.
- the reason why the diameter d is smaller than 0.1 (mm) is that if the diameter d is 0.1 (mm) or more, the diameter of the liquid to be ejected becomes excessively large and the flight during the flight after the ejection This is because it is difficult to obtain droplets having a uniform diameter due to the division.
- the pressure wave frequency F is set to a value within the range of 0.5 to 5 times (4.49 ⁇ d) for the following reasons. That is, the frequency F of the pressure wave is V / (4.49 ⁇ d) If it is smaller than 0.5 times of the above, the interval between the constrictions of the liquid ejected from the liquid ejecting holes 10-3a becomes too large, and the atomization of the liquid becomes insufficient. On the other hand, if the frequency F of the pressure wave is more than 5 times V / 7 (4.49d), the constriction interval of the liquid becomes too small, and a droplet with a diameter corresponding to the frequency F is formed. Or, even if the ejected droplets are atomized to a diameter corresponding to the frequency F, the intervals between the droplets become too small and they are easily recombined during flight after the ejection. Because it becomes.
- the frequency F of the pressure wave is VZ (4.49 ⁇ It is more preferable that the value is in the range of 1 to 3 times d). In particular, the frequency F of the pressure wave is set to a value near an integral multiple of V / (4.49 ⁇ d).
- a desired droplet can be reliably formed even if the amount of power applied to the piezoelectric / electrostrictive element 11 is made smaller.
- the liquid ejecting apparatus according to the second embodiment includes a liquid ejecting device 50 in which the liquid introducing passage portion 10-4 of the liquid ejecting device 10 is replaced with a liquid introducing passage portion 10-5. It differs from the liquid ejecting apparatus according to the first embodiment only in that it is adopted instead. Accordingly, hereinafter, the liquid introduction passage portion 10-5, which will be described with reference to FIG. 6 focusing on such differences, is constituted by a metal body 10d instead of the metal plate 10b of the liquid ejection device 10. ing.
- the metal body 10 d is composed of a plurality of metal plates 10 d 1 to 10 cl 6.
- a first slit having a width (height) t1 is formed in the liquid introduction passage portion 10-5 by the metal plate 10dl to 10d3, and the metal plate 10d3 to 10d5 is formed.
- a second slit having a width (height) t2 is formed, and a third slit having a width (height) t3 is formed by the metal plates 10d5, 10d6, and 10c.
- the planar shapes of the first to third slits are the same as the planar shapes of the slits in the liquid introduction passage portions 10 to 14 of the liquid ejecting device 10.
- the positions of the first to third slits in the X-axis direction and the Y-axis direction are also the same as the positions of the slits in the liquid introduction passage section 10-4 in the X-axis direction and the Y-axis direction.
- the width t 3 is the same as that of the liquid introduction passage 10-4 It is the same as the slit width t.
- Width t2 is greater than width t3, and width tl is greater than width t2.
- the liquid ejecting device 50 has a plurality of (here, three) slits parallel to each other in the liquid introduction passage section 10-5, and each of the slits extends along the YZ plane.
- the cross section cut in a plane has a rectangular shape having a short side and a long side in the Z-axis direction and the Y-axis direction, respectively.
- the widths (thickness, length in the Z-axis direction) of these slits are different from each other, and the slits become larger in the negative Z-axis direction (closer to the metal plate 10a).
- the liquid introduction passage section 10-5 of the liquid ejection device 50 includes a plurality of slits equivalent to the slits of the liquid introduction passage section 10-4. Therefore, since the liquid ejecting device 50 can introduce a larger amount of liquid into the chamber 110-3, it can eject a larger amount of liquid.
- the liquid ejection device 50 includes a portion where bubbles in the chamber 10-3 and the liquid supply passage 10-2 are likely to stay (for example, the chamber 10-3 or the liquid supply passage 10-2).
- a liquid flow path is formed at the corner formed by the liquid introduction passage portion 10-6 and the metal plate 10a, which is indicated by a black triangle in FIG. As a result, the discharge of air bubbles is promoted.
- the liquid ejecting apparatus of the second embodiment employing the liquid ejecting device 50 has the advantages of the liquid ejecting apparatus of the first embodiment employing the liquid ejecting device 10,
- the pressure fluctuation can be appropriately applied to the liquid (since the pressure fluctuation is hardly hindered by the bubbles), so that the liquid can be ejected in a stable state. I have.
- the liquid ejecting apparatus according to the third embodiment is different from the liquid ejecting apparatus according to the first embodiment only in that a liquid ejecting device 60 is employed instead of the liquid ejecting device 10 according to the first embodiment. Further, the liquid ejecting device 60 is different from the liquid ejecting device 10 only in that the piezoelectric electrostrictive element 11 of the liquid ejecting device 10 is replaced with a piezoelectric Z electrostrictive element 13. Therefore, refer to Fig. 7 to Fig. 9 below focusing on the differences. It will be explained while doing so.
- the piezoelectric Z-electrostrictive element 13 has a substantially rectangular parallelepiped shape having each side along the X, Y, and Z-axis directions. This is a “vertical effect type laminated piezoelectric illuminator” formed by layering. That is, a plurality of comb-shaped electrodes are alternately connected to the pair of electrodes 13a and 13b. The layer surfaces of the comb-like electrode (electrode layer) and the piezoelectric Z electrostrictive layer 13c are parallel to the ZX plane.
- the piezoelectric / electrostrictive element 13 is slightly smaller than the chamber 10-3 in plan view, and is disposed inside the champ 10-3 in plan view.
- the comb-shaped electrodes of the pair of electrodes 13a and 13b are provided only at the approximate center of the piezoelectric Z-electrostrictive layer 13c in the Y-axis direction and above the chamber 10-3. It is not provided at both ends of the electrostrictive layer 13 c in the Y-axis direction.
- the portion of the piezoelectric Z electrostrictive layer 13 c where the comb-shaped electrodes are formed forms an active portion to which an electric field is applied by these comb-shaped electrodes.
- a portion of the piezoelectric Z electrostrictive layer 13c where the comb-shaped electrode is not formed forms an inactive portion where no electric field is applied to the piezoelectric Z electrostrictive layer 11c.
- the piezoelectric Z-electrostrictive element 13 applies a periodically changing electric field to its active portion when a driving voltage that periodically changes the voltage is applied to the pair of electrodes 13 a and 13 b.
- the active part extends in the Y-axis direction and contracts (expands and contracts) in the Z-axis direction to vibrate.
- the piezoelectric Z electrostrictive element 13 is held by the vibrating champ 12 at an inactive portion that is not substantially deformed. Therefore, the holding portion is not vibrated by the piezoelectric / electrostrictive element 13.
- the vibration generated in the active portion of the piezoelectric Z-electrostrictive element 13 is transmitted to the first liquid ejected from the liquid ejection holes 10-3a via the second liquid.
- the liquid ejecting apparatus employing the liquid ejecting device 60 can reliably hold the piezoelectric / electrostrictive element 11 for a long period of time, like the liquid ejecting apparatus employing the liquid ejecting device 10. Its durability has been remarkably improved.
- the liquid ejecting apparatus according to the fourth embodiment employs a liquid ejecting device 70 in which the piezoelectric electrostrictive element 11 of the liquid ejecting device 10 according to the first embodiment is replaced with a piezoelectric Z electrostrictive element 14. Only the point is different from the liquid ejecting apparatus according to the first embodiment. Therefore, the following description will be made with reference to FIGS. 10 to 12 focusing on such differences.
- the comb-shaped electrodes of the electrodes 14a and 14b extending parallel to the XY plane are formed substantially at the center in the Y-axis direction and only in the negative Z-axis direction. . That is, in the piezoelectric Z electrostrictive element 14, the active part in the liquid storage space 12 c of the vibration chamber 12 has the active part closer to the champ 10-3 than the inactive part (the metal plate of the liquid ejecting device). (10c side).
- the piezoelectric / electrostrictive element 14 is held in the vibration chambers 12 by inactive portions formed at both ends in the Y-axis direction, like the piezoelectric / electrostrictive element 11. .
- the liquid ejecting device 70 expands and contracts the active portion of the piezoelectric / electrostrictive element 14 by an inactive portion provided above the active portion in the Z-axis. It can be expressed in the form of bending deformation. Therefore, even if the potential difference of the drive voltage applied between the electrodes 14a and 14b (ie, the maximum value Vmax of the piezoelectric element drive voltage signal DV) is reduced, it is possible to transmit sufficient vibration to the fuel. Become. Therefore, the power consumption of the piezoelectric strain element 14 can be reduced.
- the active portion is disposed closer to the metal plate 10c of the chamber 10-3 than the inactive portion. Therefore, a pressure wave having a large pressure fluctuation is easily generated toward the metal plate 10c, so that the power consumption of the piezoelectric / electrostrictive element 14 can be further reduced.
- the liquid ejecting apparatus according to the fifth embodiment includes a piezoelectric / electrostrictive element 15 in which the piezoelectric Z electrostrictive element 11 of the liquid ejecting device 10 of the liquid ejecting apparatus according to the first embodiment is replaced with a piezoelectric / electrostrictive element 15.
- the liquid ejecting apparatus according to the first embodiment is different from the liquid ejecting apparatus according to the first embodiment only in that a liquid ejecting device 80 in which the chamber for excitation 112 is replaced with the chamber for excitation 16 is employed. Therefore, the following description will be made with reference to FIGS. 13 to 15 focusing on such differences. As shown in Fig.
- the piezoelectric electrostrictive element 15 has flanges 15 ⁇ 1, 15 f 2 that bend in the Z-axis direction and extend in the X-axis direction at both ends in the Y-axis direction. It differs from the piezoelectric Z-electrostrictive element 11 only in having it.
- This flange part 1 5 The common electrode of the electrode 15a is formed on the upper surface of f1, and the common electrode of the electrode 15b is formed on the upper surface of the flange portion 15f2.
- the flanges 15 fl and 15 f 2 are sandwiched between the connectors (clips) CL and CL, so that the electrodes 1 Since the common electrodes 5a and 15b can be reliably held and the electrical connection with the electric control device 40 can be maintained, the reliability of the liquid ejection device 80 can be improved.
- the vibration chamber 1 16 is different from the vibration chamber 1 12 only in that a gas discharge unit is provided for the vibration chamber 12. That is, the gas discharge part is formed by a through hole 16d formed in the upper wall of the lid 16b similar to the lid 12b, and a filter disposed in the through hole 16d.
- the evening consists of 16 e.
- the vibration chamber 16 when the dissolved gas in the second liquid becomes gas due to the pressure fluctuation of the second liquid, the gas is discharged to the outside of the vibration chamber 16 via the gas discharge part. be able to. Therefore, in the vibration chamber 16, it is avoided that the vibration by the piezoelectric Z electrostrictive element 15 is absorbed by the gas, so that the liquid ejected from the liquid ejecting hole 10-3 a can be reliably supplied. Can be given vibration.
- the liquid ejecting apparatus according to the sixth embodiment differs from the liquid ejecting apparatus according to the first embodiment only in that a liquid ejecting device 90 instead of the liquid ejecting device 10 of the liquid ejecting apparatus according to the first embodiment is employed. It is different from the device. Therefore, the liquid ejection device 90 will be mainly described below.
- the liquid ejecting device 90 includes a chamber 91, a liquid introduction passage 92, a vibrating chamber 93, and a piezoelectric / electrostrictive element 94.
- the chamber 91 has a substantially conical shape (a funnel shape).
- a plurality of hollow cylindrical liquid injection holes (liquid injection nozzles) 91 al which are the same as the liquid injection holes 10-3a are formed on the bottom wall 9la.
- the plurality of liquid injection holes 9 1 a 1 are arranged in a square lattice.
- the liquid introduction passage portion 92 is a tube made of a thin metal plate. One end of the liquid introduction passage 92 is connected to the top of the chamber 91.
- the other end is connected to a discharge hole 24 e of an electromagnetic open / close discharge valve 24 (not shown).
- a discharge hole 24 e of an electromagnetic open / close discharge valve 24 (not shown).
- the vibration chamber 93 has a configuration similar to that of the vibration chamber 12.
- the piezoelectric Z-electrostrictive element 94 has a configuration similar to that of the piezoelectric Z-electrostrictive element 11, and is held in the vibration chamber 93 by inactive portions provided at both ends thereof. ing.
- the vibration chamber 93 is fixed to a part of the wall of the liquid introduction passage portion 92, and accommodates the second liquid in a closed space formed with the wall.
- the operation of the liquid ejecting apparatus employing the liquid ejecting device 90 is the same as the operation of the liquid ejecting apparatus employing the liquid ejecting device 10. That is, when a piezoelectric element driving voltage signal DV having a predetermined frequency is applied to an electrode (not shown) of the piezoelectric / electrostrictive element 94, the piezoelectric Z electrostrictive element 94 expands and contracts, and the vibration based on the expansion and contraction causes the second vibration. (2) The liquid and the liquid (fuel) in the liquid introduction passage portion 92 are transmitted through a wall constituting the liquid introduction passage 92. Thus, the liquid ejected from the liquid ejection holes 91a1 is atomized. As described above, the vibration chamber 93 may be disposed adjacent to the liquid introduction passage 92.
- the liquid ejecting apparatus according to the seventh embodiment is different from the liquid ejecting apparatus according to the first embodiment only in that a liquid ejecting device 100 instead of the liquid ejecting device 10 according to the first embodiment is employed.
- the liquid ejecting device 100 is a single chamber unit in which the liquid supply passage 10-2 and the chamber unit 10-3 are integrated with each other by omitting the liquid introducing passage unit 10-4 of the liquid ejecting device 10.
- the liquid ejecting device 100 has the same configuration as the liquid ejecting device 10 in other respects.
- the liquid ejecting device 100 also operates in the same manner as the liquid ejecting device 100.
- the liquid introduction passages 10-4 are not always necessary.
- the piezoelectric Z-electrostrictive element is held in the vibration chamber in the inactive portion that does not substantially deform.
- the holding section of the vibration chamber 1 is not vibrated by the piezoelectric Z electrostrictive element. Further, the vibration generated in the active portion of the piezoelectric Z-electrostrictive element is transmitted to the first liquid ejected from the liquid ejection hole via the second liquid. As a result, the bonding surface of the piezoelectric Z-electrostrictive element does not vibrate as in the conventional apparatus, so that the liquid ejecting apparatus can reliably hold the piezoelectric Z-electrostrictive element for a long period of time. The durability has been significantly improved.
- the liquid ejecting apparatus includes a pressurizing means (pressurizing pump 21) for pressurizing the liquid, and an electromagnetic on / off discharge valve 24.
- pressurizing pump 21 for pressurizing the liquid
- an electromagnetic on / off discharge valve 24 When the liquid passage 24 b is opened, the pressurized liquid supplied from the pressurizing means 21 passes through the liquid passage 24 b to the liquid introduction passage portion (10—4 to 10—7). , 10-10-: L 0-13).
- the liquid is further supplied to the first chamber through a liquid introduction passage, and is jetted through a liquid jet hole of the second chamber. Accordingly, since the pressure required for liquid injection is generated by the pressurizing means 21, the environment of the liquid injection space 31 (for example, the inside of the intake pipe 30) may vary depending on the operating conditions of the machine to be applied. Even if the pressure and temperature fluctuate significantly, the same liquid can be stably ejected and supplied as desired fine particles.
- the present invention is not limited to the above embodiment, and the present invention is not limited thereto. Various modifications can be adopted within the range.
- the liquid injection device of the above embodiment has been applied to a gasoline internal combustion engine of a type in which fuel is injected into an intake pipe (intake port) 30.
- the liquid injection device according to the present invention is used in a cylinder.
- the invention can also be applied to a so-called “direct injection gasoline internal combustion engine” that directly injects fuel.
- the amount of fuel adhering to the cylinder or the amount of fuel entering the gap between the cylinder and the piston can be reduced, so that the amount of unburned HC emissions can be reduced. Further, it is also effective to use the liquid ejecting apparatus according to the present invention as a direct injector for a diesel engine.
Abstract
Description
Claims
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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EP1976038A1 (en) * | 2007-03-26 | 2008-10-01 | Mitsumi Electric Co., Ltd. | Bonding method for laminated piezoelectric element |
CN109759268A (zh) * | 2018-12-29 | 2019-05-17 | 北京福兆朗风科技有限公司 | 一种液体容器 |
CN112874158A (zh) * | 2019-11-29 | 2021-06-01 | 株式会社理光 | 液体喷射单元和液体喷射装置 |
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JPS54133213U (ja) * | 1978-03-07 | 1979-09-14 | ||
JPH06188472A (ja) * | 1992-12-16 | 1994-07-08 | Seiko Epson Corp | マイクロアクチュエータ及びこれを用いたインクジェットヘッド |
JPH08127124A (ja) * | 1994-11-02 | 1996-05-21 | Mita Ind Co Ltd | インクジェット記録ヘッド |
JPH09141852A (ja) * | 1995-11-24 | 1997-06-03 | Fujitsu Ltd | インクジェットヘッド |
JPH09174837A (ja) * | 1995-12-22 | 1997-07-08 | Nec Corp | インクジェット記録ヘッド |
JP2003047896A (ja) * | 2001-08-07 | 2003-02-18 | Ngk Insulators Ltd | 液体噴射装置 |
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JPS54133213U (ja) * | 1978-03-07 | 1979-09-14 | ||
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JPH08127124A (ja) * | 1994-11-02 | 1996-05-21 | Mita Ind Co Ltd | インクジェット記録ヘッド |
JPH09141852A (ja) * | 1995-11-24 | 1997-06-03 | Fujitsu Ltd | インクジェットヘッド |
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EP1976038A1 (en) * | 2007-03-26 | 2008-10-01 | Mitsumi Electric Co., Ltd. | Bonding method for laminated piezoelectric element |
CN109759268A (zh) * | 2018-12-29 | 2019-05-17 | 北京福兆朗风科技有限公司 | 一种液体容器 |
CN112874158A (zh) * | 2019-11-29 | 2021-06-01 | 株式会社理光 | 液体喷射单元和液体喷射装置 |
EP3827990A1 (en) * | 2019-11-29 | 2021-06-02 | Ricoh Company, Ltd. | Liquid ejection unit and liquid ejection device |
US11904308B2 (en) | 2019-11-29 | 2024-02-20 | Ricoh Company, Ltd. | Liquid ejection unit and liquid ejection device |
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