WO2004058425A2 - Micro electromechanical systems for delivering high purity fluids in a chemical delivery system - Google Patents

Micro electromechanical systems for delivering high purity fluids in a chemical delivery system Download PDF

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Publication number
WO2004058425A2
WO2004058425A2 PCT/IB2003/006199 IB0306199W WO2004058425A2 WO 2004058425 A2 WO2004058425 A2 WO 2004058425A2 IB 0306199 W IB0306199 W IB 0306199W WO 2004058425 A2 WO2004058425 A2 WO 2004058425A2
Authority
WO
WIPO (PCT)
Prior art keywords
fluid
channel
block
purge
supply source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IB2003/006199
Other languages
English (en)
French (fr)
Other versions
WO2004058425A3 (en
WO2004058425A8 (en
Inventor
Dmitry Znamensky
Alan D. Zdunek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Priority to EP03780478A priority Critical patent/EP1578546A2/en
Priority to AU2003288636A priority patent/AU2003288636A1/en
Priority to JP2004563495A priority patent/JP2006512545A/ja
Publication of WO2004058425A2 publication Critical patent/WO2004058425A2/en
Publication of WO2004058425A3 publication Critical patent/WO2004058425A3/en
Anticipated expiration legal-status Critical
Publication of WO2004058425A8 publication Critical patent/WO2004058425A8/en
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/0241—Drop counters; Drop formers
    • B01L3/0268—Drop counters; Drop formers using pulse dispensing or spraying, eg. inkjet type, piezo actuated ejection of droplets from capillaries
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/02—Feed or outlet devices; Feed or outlet control devices for feeding measured, i.e. prescribed quantities of reagents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/0241—Drop counters; Drop formers
    • B01L3/0265—Drop counters; Drop formers using valves to interrupt or meter fluid flow, e.g. using solenoids or metering valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00891—Feeding or evacuation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/0099—Cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0689—Sealing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
    • B01L2400/0487—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure fluid pressure, pneumatics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/06—Valves, specific forms thereof
    • B01L2400/0633—Valves, specific forms thereof with moving parts
    • B01L2400/0638—Valves, specific forms thereof with moving parts membrane valves, flap valves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y10T137/0419—Fluid cleaning or flushing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4238—With cleaner, lubrication added to fluid or liquid sealing at valve interface
    • Y10T137/4245—Cleaning or steam sterilizing
    • Y10T137/4259—With separate material addition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87877—Single inlet with multiple distinctly valved outlets

Definitions

  • MEMS micro-channels Due to the extremely small internal dimensions and internal volume of the MEMS micro-channels, clogging of these channels with stagnant chemicals (e.g., due to particulates in the chemicals, precipitation of the chemicals, etc.) can occur with only a short interruption in flow through the flow controller block.
  • the clogging problem can be minimized by scaling up the dimensions of the MEMS components.
  • enlarging the size of the MEMS system diminishes the advantages associated with utilizing MEMS technology.
  • the integration of MEMS valves and other MEMS components into complex and miniature high purity fluid distribution systems is difficult and is not as simple as combining conventional, non-MEMS components together to form a particular chemical flow configuration.
  • an object of the present invention is to provide a chemical distribution system employing MEMS components and having suitable valve sealing characteristics.
  • the first and second valves are implemented in the system in opposing orientations with respect to each other such that, when the second channel of the first valve serves as an outlet of the first valve, the second channel of the second valve serves as an inlet of the second valve.
  • at least a portion of each of the first and second valves is formed in a block and is in fluid communication with at least one channel disposed in the block and extending between the first and second valves.
  • the system further includes a second block with a network of delivery channels disposed within the second block, and a plurality of valves at least partially formed within the second block and in fluid communication with the network of delivery channels to facilitate a supply of a process fluid to a delivery site from at least one of the first process fluid supply source and a second fluid supply source.
  • Figs. 2a and 2b depict a schematic view of a fluid distribution system including two "directional" MEMS shut-off valves oriented in opposing directions with respect to each other in accordance with the present invention to establish a combined valve with symmetric sealing characteristics.
  • Figs. 3a and 3b depict a schematic view of a fluid distribution block in accordance with the present invention and including vacuum/purge/cleaning modes of operation, with a "directional" MEMS shut-off valve disposed in a reverse orientation with respect to the flow of fluid in the delivery mode.
  • Figs. 2a and 2b depict a schematic view of a fluid distribution system including two "directional" MEMS shut-off valves oriented in opposing directions with respect to each other in accordance with the present invention to establish a combined valve with symmetric sealing characteristics.
  • Figs. 3a and 3b depict a schematic view of a fluid distribution block in accordance with the present invention and including vacuum/purge/cleaning modes of operation, with a "directional" MEMS shut-off valve
  • the die or block is simply a suitable substrate of sufficient thickness to facilitate formation of channels and/or portions of a particular MEMS component (e.g., by any of the previously described processes).
  • the MEMS components described herein, including the die or block and any other portions forming the components may be constructed of any suitable material including, without limitation, metals such as stainless steel, silicon, polymers, pyrex, alumina, ceramics, and any selected combinations thereof.
  • two or more MEMS components e.g:, a valve and sensor
  • the valve is similar in design and operation to the cantilever-type shut- off valves that are well known in the art as described above.
  • the shut-off valve is manufactured utilizing any of the above-identified MEMS techniques, with portions of the valve being composed of any suitable materials as noted above.
  • a second shut-off valve 56 is disposed upstream of the first shut-off valve 54 and is in a closed position during the chemical delivery mode.
  • the second shut-off valve 56 serves as a purge valve to permit a cleaning gas or liquid to flow into and clean the distribution lines when the chemical delivery is halted in block 50.
  • a third shut-off valve 58 is situated on a second branch line disposed between the first and second shut-off valves.
  • the third shut-off valve 58 also serves as a purge valve to permit a cleaning gas or liquid to flow into and clean the distribution lines when chemical delivery in the block is halted.
  • Both the second and third shut-off valves are implemented in a forward orientation with respect to purging fluid flowing through each valve into the system block (as indicated by the arrows depicted in Fig. 3 a for valves 56 and 58). Since the purging fluid is maintained at a higher pressure than the pressure applied during the chemical delivery mode, the second and third shut-off valves maintain a tight seal when in their closed positions to prevent mixing of purging fluid with the fluid delivered from the system block through the first shut-off valve 54 and to the delivery location.
  • the first shut-off valve 54 is closed, as depicted in Fig. 3b, and the distribution lines can be purged and/or cleaned by applying a vacuum at line 53.
  • the applied vacuum draws any residual fluid in the lines through line 53 (as indicated by arrows 59) and to a desired evacuation destination (e,g., a collection tank).
  • a desired evacuation destination e.g., a collection tank.
  • one or both of the second and third shut-off valves 56,58 may be opened to deliver a purging/cleaning fluid into the distribution lines for further cleaning of the lines prior to switching back to the chemical delivery mode.
  • a system block facilitates delivery of a chemical fluid to a particular delivery site (e.g., a semiconductor processing tool) and further incorporates separate pressurization and vacuum/purge/cleaning lines into a single MEMS block.
  • a particular delivery site e.g., a semiconductor processing tool
  • these components may also be integrated into any selected number of separate blocks that are in fluid communication with each other.
  • the system block 100 of Fig. 4A may also be modified to provide one or more additional redundant MEMS shut-off valves with virtually no increase in system size (as the additional MEMS shut-off valves may be implemented in the same system block), volume, or susceptibility to system contamination. Redundant components are required in certain systems in which isolation between two or more sections within the system is absolutely essential to ensure complete avoidance of cross-contamination within the system and/or operational safety.
  • an additional, redundant shut-off valve 125 is implemented in-line along channel 109 and between pressure sensor 108 and shut-off valve 110.
  • valve 120 substantially prevents flow of fluid from the block 100 into delivery line 122.
  • the purge/flush line 124 is maintained at the same or higher pressure than the pressure within the block 100 (as measured by sensor 108) to prevent leakage of fluid from the block at valves 114 and 116 into line 124.
  • valves 104 and 106 are opened and valves 110, 114, 116 and 120 are closed to facilitate the flow of the pressurization fluid (e.g., helium) into the system block 100 and to force residual fluid through the system block and into lines 130 and 134.
  • Valves 132 and 136 are closed to isolate the storage tank, and valves 140 and 142 are opened to facilitate flow of the fluids evacuated from the system block 100 into exhaust line 138, where the fluids are then collected at a collection site (e.g., a collection tank). If the chemical delivery line 122 is to also be purged, valves 110 and 120 may also be opened to permit the pressurization fluid to flow from the system block into the delivery line 122.
  • valves 306 and 308 may be closed and valve 304 open, as depicted in Fig. 5E, to facilitate delivery of fluid from the upstream fluid processor to delivery line 310 while tank 250 is brought offline (e.g., for repair or replacement).
  • a MEMS system block includes a mass flow controller with at least one integrated purge or flush line to facilitate cleaning of the mass flow controller at selected periods during system operation.
  • a purge or flush line with the MEMS mass flow controller prevents stagnant chemicals from lingering inside the micro-channels of the mass flow controller, thus improving the reliability and performance of the mass flow controller without having to increase the dimensions (and thus internal volume) of the flow channels within the system block.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Fluid Mechanics (AREA)
  • Physics & Mathematics (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Micromachines (AREA)
  • Fluid-Driven Valves (AREA)
  • Valve Housings (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Check Valves (AREA)
  • Fluid-Pressure Circuits (AREA)
PCT/IB2003/006199 2002-12-27 2003-12-19 Micro electromechanical systems for delivering high purity fluids in a chemical delivery system Ceased WO2004058425A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP03780478A EP1578546A2 (en) 2002-12-27 2003-12-19 Micro electromechanical systems for delivering high purity fluids in a chemical delivery system
AU2003288636A AU2003288636A1 (en) 2002-12-27 2003-12-19 Micro electromechanical systems for delivering high purity fluids in a chemical delivery system
JP2004563495A JP2006512545A (ja) 2002-12-27 2003-12-19 薬品配送システム中に高純度流体を配送するためのマイクロ電子機器システム

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US43673202P 2002-12-27 2002-12-27
US43673102P 2002-12-27 2002-12-27
US60/436,731 2002-12-27
US60/436,732 2002-12-27
US10/733,761 US7195026B2 (en) 2002-12-27 2003-12-12 Micro electromechanical systems for delivering high purity fluids in a chemical delivery system
US10/733,761 2003-12-12

Publications (3)

Publication Number Publication Date
WO2004058425A2 true WO2004058425A2 (en) 2004-07-15
WO2004058425A3 WO2004058425A3 (en) 2004-09-30
WO2004058425A8 WO2004058425A8 (en) 2005-07-21

Family

ID=32686098

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2003/006199 Ceased WO2004058425A2 (en) 2002-12-27 2003-12-19 Micro electromechanical systems for delivering high purity fluids in a chemical delivery system

Country Status (5)

Country Link
US (2) US7195026B2 (https=)
EP (1) EP1578546A2 (https=)
JP (1) JP2006512545A (https=)
AU (1) AU2003288636A1 (https=)
WO (1) WO2004058425A2 (https=)

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US9802808B2 (en) 2005-06-06 2017-10-31 Entegris, Inc. Fluid storage and dispensing systems and processes

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WO2006116572A2 (en) 2005-04-25 2006-11-02 Advanced Technology Materials, Inc. Liner-based liquid storage and dispensing systems with empty detection capability
EP1879829A4 (en) * 2005-04-25 2011-01-19 Advanced Tech Materials A DISPOSABLE LIQUID STORAGE AND DISPENSING SYSTEM WITH EMPTY STATE CAPACITY
US8322571B2 (en) 2005-04-25 2012-12-04 Advanced Technology Materials, Inc. Liner-based liquid storage and dispensing systems with empty detection capability
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EP3006102A1 (en) * 2005-04-25 2016-04-13 Advanced Technology Materials, Inc. Liner-based liquid storage and dispensing systems with empty detection capability
US9802749B2 (en) 2005-04-25 2017-10-31 Entegris, Inc. Liner-based liquid storage and dispensing systems with empty detection capability
US9802808B2 (en) 2005-06-06 2017-10-31 Entegris, Inc. Fluid storage and dispensing systems and processes

Also Published As

Publication number Publication date
AU2003288636A8 (en) 2004-07-22
AU2003288636A1 (en) 2004-07-22
WO2004058425A3 (en) 2004-09-30
JP2006512545A (ja) 2006-04-13
WO2004058425A8 (en) 2005-07-21
US20040159351A1 (en) 2004-08-19
US7195026B2 (en) 2007-03-27
US20070151616A1 (en) 2007-07-05
EP1578546A2 (en) 2005-09-28

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