JP2006512545A - 薬品配送システム中に高純度流体を配送するためのマイクロ電子機器システム - Google Patents

薬品配送システム中に高純度流体を配送するためのマイクロ電子機器システム Download PDF

Info

Publication number
JP2006512545A
JP2006512545A JP2004563495A JP2004563495A JP2006512545A JP 2006512545 A JP2006512545 A JP 2006512545A JP 2004563495 A JP2004563495 A JP 2004563495A JP 2004563495 A JP2004563495 A JP 2004563495A JP 2006512545 A JP2006512545 A JP 2006512545A
Authority
JP
Japan
Prior art keywords
fluid
channel
block
purge
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004563495A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006512545A5 (https=
Inventor
ズナメンスキー、ドミトリー
ズドゥネク、アラン・ディー．
Original Assignee
レール・リキード−ソシエテ・アノニム・ア・ディレクトワール・エ・コンセイユ・ドゥ・スールベイランス・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by レール・リキード−ソシエテ・アノニム・ア・ディレクトワール・エ・コンセイユ・ドゥ・スールベイランス・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード filed Critical レール・リキード−ソシエテ・アノニム・ア・ディレクトワール・エ・コンセイユ・ドゥ・スールベイランス・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード
Publication of JP2006512545A publication Critical patent/JP2006512545A/ja
Publication of JP2006512545A5 publication Critical patent/JP2006512545A5/ja
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/0241—Drop counters; Drop formers
    • B01L3/0268—Drop counters; Drop formers using pulse dispensing or spraying, eg. inkjet type, piezo actuated ejection of droplets from capillaries
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/02—Feed or outlet devices; Feed or outlet control devices for feeding measured, i.e. prescribed quantities of reagents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/0241—Drop counters; Drop formers
    • B01L3/0265—Drop counters; Drop formers using valves to interrupt or meter fluid flow, e.g. using solenoids or metering valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00891—Feeding or evacuation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/0099—Cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0689—Sealing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
    • B01L2400/0487—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure fluid pressure, pneumatics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/06—Valves, specific forms thereof
    • B01L2400/0633—Valves, specific forms thereof with moving parts
    • B01L2400/0638—Valves, specific forms thereof with moving parts membrane valves, flap valves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y10T137/0419—Fluid cleaning or flushing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4238—With cleaner, lubrication added to fluid or liquid sealing at valve interface
    • Y10T137/4245—Cleaning or steam sterilizing
    • Y10T137/4259—With separate material addition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87877—Single inlet with multiple distinctly valved outlets

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Fluid Mechanics (AREA)
  • Physics & Mathematics (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Micromachines (AREA)
  • Fluid-Driven Valves (AREA)
  • Valve Housings (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Check Valves (AREA)
  • Fluid-Pressure Circuits (AREA)
JP2004563495A 2002-12-27 2003-12-19 薬品配送システム中に高純度流体を配送するためのマイクロ電子機器システム Withdrawn JP2006512545A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US43673202P 2002-12-27 2002-12-27
US43673102P 2002-12-27 2002-12-27
US10/733,761 US7195026B2 (en) 2002-12-27 2003-12-12 Micro electromechanical systems for delivering high purity fluids in a chemical delivery system
PCT/IB2003/006199 WO2004058425A2 (en) 2002-12-27 2003-12-19 Micro electromechanical systems for delivering high purity fluids in a chemical delivery system

Publications (2)

Publication Number Publication Date
JP2006512545A true JP2006512545A (ja) 2006-04-13
JP2006512545A5 JP2006512545A5 (https=) 2006-06-01

Family

ID=32686098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004563495A Withdrawn JP2006512545A (ja) 2002-12-27 2003-12-19 薬品配送システム中に高純度流体を配送するためのマイクロ電子機器システム

Country Status (5)

Country Link
US (2) US7195026B2 (https=)
EP (1) EP1578546A2 (https=)
JP (1) JP2006512545A (https=)
AU (1) AU2003288636A1 (https=)
WO (1) WO2004058425A2 (https=)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008524626A (ja) * 2004-12-20 2008-07-10 ハネウェル・インターナショナル・インコーポレーテッド 閉ループ調節を備える小型流量制御装置
WO2009125997A1 (en) * 2008-04-11 2009-10-15 Incyto Co., Ltd. Microfluidic circuit element comprising microfluidic channel with nano interstices and fabrication method thereof
WO2011146145A1 (en) * 2010-05-21 2011-11-24 Hewlett-Packard Development Company, L.P. Microfluidic systems and networks
US8721061B2 (en) 2010-05-21 2014-05-13 Hewlett-Packard Development Company, L.P. Fluid ejection device with circulation pump
US8740453B2 (en) 2010-05-21 2014-06-03 Hewlett-Packard Development Company, L.P. Microcalorimeter systems
US9963739B2 (en) 2010-05-21 2018-05-08 Hewlett-Packard Development Company, L.P. Polymerase chain reaction systems
US10005082B2 (en) 2008-04-11 2018-06-26 Incyto Co., Ltd. Microfluidic circuit element comprising microfluidic channel with nano interstices and fabrication method thereof
US10132303B2 (en) 2010-05-21 2018-11-20 Hewlett-Packard Development Company, L.P. Generating fluid flow in a fluidic network

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7780785B2 (en) * 2001-10-26 2010-08-24 Applied Materials, Inc. Gas delivery apparatus for atomic layer deposition
US7186385B2 (en) * 2002-07-17 2007-03-06 Applied Materials, Inc. Apparatus for providing gas to a processing chamber
US7437944B2 (en) * 2003-12-04 2008-10-21 Applied Materials, Inc. Method and apparatus for pressure and mix ratio control
US7273272B2 (en) * 2004-03-22 2007-09-25 Fuji Photo Film Co., Ltd. Liquid supply device and image forming apparatus
EP3006102A1 (en) * 2005-04-25 2016-04-13 Advanced Technology Materials, Inc. Liner-based liquid storage and dispensing systems with empty detection capability
EP1896359B1 (en) 2005-06-06 2017-01-11 Advanced Technology Materials, Inc. Fluid storage and dispensing systems and processes
US7464917B2 (en) * 2005-10-07 2008-12-16 Appiled Materials, Inc. Ampoule splash guard apparatus
US20070175392A1 (en) * 2006-01-27 2007-08-02 American Air Liquide, Inc. Multiple precursor dispensing apparatus
US8951478B2 (en) * 2006-03-30 2015-02-10 Applied Materials, Inc. Ampoule with a thermally conductive coating
US7562672B2 (en) * 2006-03-30 2009-07-21 Applied Materials, Inc. Chemical delivery apparatus for CVD or ALD
FR2919725B1 (fr) * 2007-08-02 2010-04-30 Air Liquide Dispositif de dilution d'un fluide
US20090090164A1 (en) * 2007-10-08 2009-04-09 Air Liquide Electronics U.S. Lp Method for volumetrically calibrating a liquid flow controller while maintaining the liquid in a closed system
US8191397B2 (en) * 2007-12-12 2012-06-05 Air Liquide Electronics U.S. Lp Methods for checking and calibrating concentration sensors in a semiconductor processing chamber
DE102008036269A1 (de) * 2008-08-04 2010-02-11 Ewe Ag Vorrichtung zum kontinuierlichen Mischen von ausgespeichertem Erdgas mit Sauerstoff zu einem Brenngas für eine Erwärmung des unter Druck stehenden Erdgases vor oder nach seiner Entspannung
US8146896B2 (en) * 2008-10-31 2012-04-03 Applied Materials, Inc. Chemical precursor ampoule for vapor deposition processes
US9137895B2 (en) 2008-12-24 2015-09-15 Stmicroelectronics S.R.L. Micro-electro-mechanical systems (MEMS) and corresponding manufacturing process
JP5646196B2 (ja) * 2010-03-30 2014-12-24 武蔵エンジニアリング株式会社 吐出装置および液体分注装置並びに液体分注方法
JP5885548B2 (ja) * 2012-03-12 2016-03-15 株式会社神戸製鋼所 多流路機器の運転方法及び多流路機器
US10393101B2 (en) * 2013-08-12 2019-08-27 Koninklijke Philips N.V. Microfluidic device with valve

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3725010A (en) 1971-08-23 1973-04-03 Beckman Instruments Inc Apparatus for automatically performing chemical processes
DE2142956C3 (de) 1971-08-27 1974-10-31 Bp Benzin Und Petroleum Ag, 2000 Hamburg Steuereinrichtung für eine Verdrängerpumpe oder Verdrängungsmesskammer
US4821997A (en) * 1986-09-24 1989-04-18 The Board Of Trustees Of The Leland Stanford Junior University Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator
US5069419A (en) * 1989-06-23 1991-12-03 Ic Sensors Inc. Semiconductor microactuator
DE4221089A1 (de) * 1992-06-26 1994-01-05 Bosch Gmbh Robert Mikroventil
US5333381A (en) * 1992-10-21 1994-08-02 Paul J. Gelardi Wrap cutter
US5325880A (en) * 1993-04-19 1994-07-05 Tini Alloy Company Shape memory alloy film actuated microvalve
US5465766A (en) * 1993-04-28 1995-11-14 Advanced Delivery & Chemical Systems, Inc. Chemical refill system for high purity chemicals
US5417235A (en) 1993-07-28 1995-05-23 Regents Of The University Of Michigan Integrated microvalve structures with monolithic microflow controller
US5529279A (en) * 1994-08-24 1996-06-25 Hewlett-Packard Company Thermal isolation structures for microactuators
US5542821A (en) 1995-06-28 1996-08-06 Basf Corporation Plate-type diaphragm pump and method of use
US6168948B1 (en) 1995-06-29 2001-01-02 Affymetrix, Inc. Miniaturized genetic analysis systems and methods
DE19637878C2 (de) 1996-09-17 1998-08-06 Fraunhofer Ges Forschung Mikroventil mit vorgespannter Ventilklappenstruktur
US5865417A (en) * 1996-09-27 1999-02-02 Redwood Microsystems, Inc. Integrated electrically operable normally closed valve
US6082185A (en) 1997-07-25 2000-07-04 Research International, Inc. Disposable fluidic circuit cards
US6627157B1 (en) 1999-03-04 2003-09-30 Ut-Battelle, Llc Dual manifold system and method for fluid transfer
JP3579763B2 (ja) * 1999-07-01 2004-10-20 日本酸素株式会社 ガス供給装置及び方法
US6423536B1 (en) 1999-08-02 2002-07-23 Molecular Dynamics, Inc. Low volume chemical and biochemical reaction system
US6264064B1 (en) * 1999-10-14 2001-07-24 Air Products And Chemicals, Inc. Chemical delivery system with ultrasonic fluid sensors
EP1296754A2 (en) 2000-06-03 2003-04-02 Symyx Technologies Parallel semicontinuous or continuous reactors
US6590267B1 (en) * 2000-09-14 2003-07-08 Mcnc Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
WO2002033268A2 (en) * 2000-10-18 2002-04-25 Research Foundation Of State University Of New York Microvalve
AU2002241818A1 (en) 2001-01-10 2002-07-24 Memorial Sloan-Kettering Cancer Center System and process for microfluidics-based automated chemistry
US7318912B2 (en) 2001-06-07 2008-01-15 Nanostream, Inc. Microfluidic systems and methods for combining discrete fluid volumes
US6766260B2 (en) * 2002-01-04 2004-07-20 Mks Instruments, Inc. Mass flow ratio system and method
US7051749B2 (en) * 2003-11-24 2006-05-30 Advanced Technology Materials, Inc. Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008524626A (ja) * 2004-12-20 2008-07-10 ハネウェル・インターナショナル・インコーポレーテッド 閉ループ調節を備える小型流量制御装置
US10005082B2 (en) 2008-04-11 2018-06-26 Incyto Co., Ltd. Microfluidic circuit element comprising microfluidic channel with nano interstices and fabrication method thereof
WO2009125997A1 (en) * 2008-04-11 2009-10-15 Incyto Co., Ltd. Microfluidic circuit element comprising microfluidic channel with nano interstices and fabrication method thereof
US10471424B2 (en) 2008-04-11 2019-11-12 Incyto Co., Ltd. Microfluidic circuit element comprising microfluidic channel with nano interstices and fabrication method thereof
US8721061B2 (en) 2010-05-21 2014-05-13 Hewlett-Packard Development Company, L.P. Fluid ejection device with circulation pump
US9963739B2 (en) 2010-05-21 2018-05-08 Hewlett-Packard Development Company, L.P. Polymerase chain reaction systems
US8740453B2 (en) 2010-05-21 2014-06-03 Hewlett-Packard Development Company, L.P. Microcalorimeter systems
US10132303B2 (en) 2010-05-21 2018-11-20 Hewlett-Packard Development Company, L.P. Generating fluid flow in a fluidic network
US10173435B2 (en) 2010-05-21 2019-01-08 Hewlett-Packard Development Company, L.P. Fluid ejection device including recirculation system
US10272691B2 (en) 2010-05-21 2019-04-30 Hewlett-Packard Development Company, L.P. Microfluidic systems and networks
US10415086B2 (en) 2010-05-21 2019-09-17 Hewlett-Packard Development Company, L.P. Polymerase chain reaction systems
WO2011146145A1 (en) * 2010-05-21 2011-11-24 Hewlett-Packard Development Company, L.P. Microfluidic systems and networks
US11260668B2 (en) 2010-05-21 2022-03-01 Hewlett-Packard Development Company, L.P. Fluid ejection device including recirculation system

Also Published As

Publication number Publication date
WO2004058425A2 (en) 2004-07-15
AU2003288636A8 (en) 2004-07-22
AU2003288636A1 (en) 2004-07-22
WO2004058425A3 (en) 2004-09-30
WO2004058425A8 (en) 2005-07-21
US20040159351A1 (en) 2004-08-19
US7195026B2 (en) 2007-03-27
US20070151616A1 (en) 2007-07-05
EP1578546A2 (en) 2005-09-28

Similar Documents

Publication Publication Date Title
JP2006512545A (ja) 薬品配送システム中に高純度流体を配送するためのマイクロ電子機器システム
CN103510070B (zh) 用于原子层沉积和化学气相沉积反应器的使用点阀歧管
CN101654171B (zh) 十字吹扫阀和容器组件
TWI629429B (zh) 群集質量流裝置及將其併入之複式線路質量流裝置
TWI593037B (zh) 用於工件之液體處理的設備及用於該設備中之流動控制系統
KR102285276B1 (ko) 높은 처리량의 어플리케이션을 위한 반응기 시스템
CN101533918B (zh) 用于液态氢贮箱的多相转换阀
KR100875333B1 (ko) 반도체 제조 장치 및 반도체 제조 방법
JP7583186B2 (ja) マニホールドアセンブリを備える流体流れ制御システム
TW201535566A (zh) 線內分配儲存器
US8298369B2 (en) Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquid
US20070175392A1 (en) Multiple precursor dispensing apparatus
JP4002060B2 (ja) 液体材料供給装置
TWI760466B (zh) 液體供給裝置及液體供給方法
CN101903561A (zh) 液体材料气化装置
WO2022203931A1 (en) Guided flow valve assembly and system incorporating same
US20040135271A1 (en) Liquid vaporizer with positive liquid shut-off
KR101107529B1 (ko) 기화기로의 원료 용액 공급계 및 원료 용액 공급계의 세정방법
CN115206831B (zh) 处理液供给装置
CN115244323A (zh) 有限容积的同轴阀体
JP2011505050A (ja) 多区域圧力制御システム
JP2004186243A (ja) ブロックバルブ並びにモノブロックバルブ及びバルブの洗浄方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060328

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20061031

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20090403