WO2004046563A1 - Resistance a l'ecoulement variable - Google Patents

Resistance a l'ecoulement variable Download PDF

Info

Publication number
WO2004046563A1
WO2004046563A1 PCT/EP2003/013120 EP0313120W WO2004046563A1 WO 2004046563 A1 WO2004046563 A1 WO 2004046563A1 EP 0313120 W EP0313120 W EP 0313120W WO 2004046563 A1 WO2004046563 A1 WO 2004046563A1
Authority
WO
WIPO (PCT)
Prior art keywords
fluid
fluid line
section
flow resistance
pressure
Prior art date
Application number
PCT/EP2003/013120
Other languages
German (de)
English (en)
Inventor
Thorsten Göttsche
Jörg Kohnle
Herbert Ernst
Original Assignee
Hahn-Schickard-Gesells Chaft Für Angewandte Fors Chung E.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hahn-Schickard-Gesells Chaft Für Angewandte Fors Chung E.V. filed Critical Hahn-Schickard-Gesells Chaft Für Angewandte Fors Chung E.V.
Priority to AU2003288145A priority Critical patent/AU2003288145A1/en
Publication of WO2004046563A1 publication Critical patent/WO2004046563A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0046—Electric operating means therefor using magnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0086—Medical applications

Definitions

  • the present invention relates to a variable flow resistance and in particular to a variable flow resistance which is suitable for use as a control component in a fluid system.
  • Valves of this type generally have an open state and a closed state, but do not allow the flow resistance supplied by them to be adjusted.
  • the flow regulator includes one in one membrane formed through the first substrate, through which an inlet opening is provided in the center, a fluid chamber having an outlet opening is formed in a second substrate, a spiral, upwardly open, capillary channel is formed in the underside of the fluid chamber, the two substrates are connected to one another in such a way that the membrane closes off the fluid chamber formed in the second substrate If pressure is exerted on the membrane, it is first deflected in the center until it hits the bottom of the fluid chamber in the center the inlet opening through the membrane with the inner end of the channel formed in the bottom, so that di e inlet opening and the channel are fluidly connected. With increasing deflection of the membrane, the membrane forms together with the channel a flow resistance, the length of which increases with increasing deflection of
  • capillaries produced with the aid of microsystem technology serve as fluidic resistors in microfluidics and are used for generating pressure-controlled, low flows. Relevant applications are found primarily in medical technology, but also in analytics.
  • DE 60000109 T2 relates to elastomeric micro- and microvalve systems, in which two intersecting channels with a membrane arranged between them define a valve.
  • EP 1215426 A2 discloses an electrostrictive valve for modulating a fluid flow, which comprises a valve body in the form of a cannula, in which a valve element in the form of a viscoelastic material is arranged.
  • DE 69415683 T2 discloses a flow regulator which has a channel formed in a substrate which, together with a membrane, defines a fluid line which connects an inlet opening to an outlet opening.
  • a liquid acts on the membrane from both sides, so that the fluid line is closed with increasing pressure.
  • the object of the present invention is to provide a flow resistance, the flow resistance of which can be varied continuously to be suitable as a control component for a fluid system, and which has a simple structure, and a method for controlling a fluid flow. This object is achieved by a variable flow resistance according to claim 1 and a method according to claim 13.
  • the present invention provides a variable flow resistance with the following features:
  • the present invention further provides a method of controlling fluid flow using a variable flow resistance having a fluid inlet, a fluid outlet, and a fixed length closed fluid conduit that fluidly connects the fluid inlet to the fluid outlet, the method comprising the step of:
  • the ratio of predetermined length of the fluid line to its characteristic diameter is> 500.
  • the present invention is based on the finding that fluidic resistors based on fluid lines, which can be produced, for example, with the aid of microsystem technology, can be constructed in such a way that they can be varied continuously in a defined range and thus as a control component, for example as Control valve can be used by the fluid line is formed such that the cross section thereof between a fluid inlet and a fluid outlet is variable over a predetermined length.
  • Such a fluid line has a defined fluidic resistance for liquids of a defined viscosity, which is characterized by the ratio of channel length to characteristic channel diameter.
  • the fluidic resistance can be adjusted by the flow cross-section, and thus the characteristic diameter, being adjustable over a predetermined length, the ratio of the predetermined length to the characteristic diameter being> 500 (in the initial state in which the flow cross-section is not varied).
  • an adjustable resistance according to the invention can also have sections with a fixed flow cross section.
  • the predetermined length with variable flow cross section can be provided by a plurality of sections with variable flow cross section.
  • a plurality of sections with a fixed flow cross section can be provided. The total resistance results from the sum of the partial resistances defined by the respective sections.
  • the ratio of predetermined length to characteristic diameter can be higher than> 500, and for example> 1000, in order to be able to implement a desired fluid resistance.
  • characteristic diameter is used in fluid technology to denote the diameter that a fluid channel with a round flow cross section should have in order to provide a flow cross section which is equivalent to a fluid line of any flow cross section under consideration. The determination of this characteristic diameter for any flow cross sections is known in the art.
  • variable flow resistance in that the fluid line is formed by a channel formed in the surface of a substrate and a membrane covering the channel. By deflecting the membrane, the flow cross-section of the fluid line and thus the flow resistance supplied by the same can be varied.
  • variable flow resistance in order to use the variable flow resistance according to the invention as a control component, a system can be used in which a defined pressure is specified via the fluid line forming the flow resistance, which pressure results in a flow dependent on the viscosity of the fluid and the fluidic resistance of the fluid line.
  • the flow area that can be covered is defined by the system geometry, i.e. the cross section and the length of the fluid line, and the viscosity of the fluid used.
  • the present invention can be used in all areas of microfluidics and is also particularly suitable for applications in medical technology or analysis. With a sufficient reduction in the flow cross-section of the fluid line, for example to 30% of the original flow cross-section, it can have such a high flow resistance that the invented flow resistance according to the invention represents a closed valve. In such a case, the leakage behavior is comparable to that of conventional microvalves, for example those in which an opening is closed by a membrane.
  • Known micro valves of this type have a leakage of a few ⁇ l per day due to trapped particles, leaks, etc.
  • the structure according to the invention has an increased particle tolerance compared to known micro valves, since known micro valves typically do not allow particles that are larger than about 500 nm , Due to the simple structure, the fluidic resistance according to the invention is extremely durable. Furthermore, the fluidic resistance according to the invention allows a valve and a throttle, ie a fluid resistance, to be combined in one component. Defined flows can be realized by means of the variable flow resistance according to the invention using analog controls.
  • Figure 1 is an exploded schematic view of an embodiment of a variable flow resistance according to the invention.
  • FIGS. 2 and 3 are schematic cross-sectional views for explaining the variable flow resistance according to the invention.
  • FIG. 4 shows a schematic representation of a system for flow control using a variable flow resistance according to the invention.
  • FIG. 5 is a graph showing the flow rate versus pressure on the fluid line.
  • an embodiment of a variable flow resistance according to the invention comprises a substrate 10, a holding element 12 and a membrane element 14.
  • a channel 16 is formed in the upper surface of the substrate 10, which in the embodiment shown shows a channel for space-saving reasons has a meandering course.
  • the holding element 12 has an essentially frame-shaped structure which defines a recess 18 over an essential area of the channel 16. Furthermore, a fluid inlet opening 20 and a fluid outlet opening 22 are formed in the holding element 12.
  • the recess 18 is preferably formed such that the membrane element 14 can be introduced into it and thus covers the upper side of the channel 16 which is formed in the substrate 10, with the exception of a first and a second end 24 and 26 of the channel which are arranged below the frame structure.
  • a closed fluid line of a predetermined length is thus defined by the channel 16 and the membrane element 14 applied to the upper side of the substrate 10, the holding element 12 being used to fix the position of the membrane element.
  • the fluid inlet opening 20 of the holding element 12 is in fluid communication with the first end 24 of the channel 16, while the fluid outlet opening 22 is in fluid communication with the second end 26 of the channel 16.
  • the substrate 10 can consist of any suitable carrier material, for example silicon, plastics or metals.
  • the channel 16 can be formed by any suitable method in the upper side of the substrate 10, for example by etching methods, chip processing, laser ablation methods, injection molding methods, stamping techniques, eroding or lithography methods etc. This channel 16 which is open at the top is capped by applying the membrane element 14, the membrane element 14 can be an elastomer membrane, a metal membrane or the like.
  • the membrane 14 can also consist of silicon and bonded to substrate 10 using known methods, such as silicone fusion bonding.
  • the membrane element 14 can be attached to the substrate 10 by another method, for example welding, gluing and the like, the frame element shown in FIG. 1 being optional.
  • a capillary structure can be formed by the channel 16 and the membrane 14 closing it off at the top.
  • a capillary structure is defined by the fact that capillary forces dominate in the same, whereby capillaries, depending on the surface tensions involved, which in turn depend on the fluids used, can fill under ambient conditions due to capillary forces without the introduction of additional forces.
  • Flow cross sections of fluid lines used according to the invention can lie, for example, in a range between 50 ⁇ 2 and 1500 ⁇ 2 , a typical value for the duct cross section being 820 ⁇ m 2 , for example.
  • the length of the fluid line 16 can be, for example, in a range between 0.05 m and 1.5 m, typically around 1 m, in order, for example, to set a suitable flow resistance of the fluid line assuming a viscosity of water at room temperature.
  • the actual dimensions can deviate from the dimensions mentioned and depend on the flow resistance to be implemented and the fluid for which the same is to be implemented.
  • this membrane element by applying a defined force to the side of the membrane element 14 facing away from the channel 16, this membrane element can be pressed into the channel, for example by 2-38 ⁇ m, so that the cross section of the channel changes, whereby it however, it is usually not closed completely.
  • a complete closing can be realized by matching the cross-sectional shape of the channel to the shape of the membrane is adjusted in the deflected state.
  • Pneumatic systems are particularly suitable for applying a defined force to the side of the membrane element 14 facing away from the channel.
  • other drives are also conceivable by means of which the membrane can be deflected accordingly, for example electrostatic, piezoelectric or electromagnetic drives.
  • the closed fluid line with an adjustable flow cross section can be formed by a channel formed in a flexible substrate, which is covered by a rigid or likewise flexible cover.
  • pneumatic systems can preferably be provided in order to exert pressure on the flexible substrate or the flexible substrate and the flexible cover from the outside in order to reduce the flow cross section.
  • the arrangement can be arranged in a pressure chamber, for example.
  • FIGS. 2 and 3 Two schematic cross-sectional views, which represent flow cross sections of two exemplary embodiments of channels formed in a silicon substrate 30, are shown in FIGS. 2 and 3.
  • FIG. 2 shows a fluid line cross section 32 etched in dry chemical chemistry in silicon
  • FIG. 3 shows a fluid line cross section 34 etched in wet chemical chemistry in silicon.
  • FIGS. 2 and 3 each show an elastic cover 36, which is preferably supplied by a respective membrane element.
  • the depth of the respective channel is D, while the width facing the elastic cover 36, ie maximum width, of the respective channel is w.
  • a state is shown in each case in which the elastic cover has penetrated by the depth d into the channel cross section 32 or 34 formed in the substrate 30.
  • the flow resistance in the initial state has a triangular cross section, so that the following equations refer to such a triangular cross section.
  • the fluid resistance of the element can be changed by reducing the effective channel height, i.e. by using an elastic cover material 36 which is pressed into the channel of depth D by a depth of, for example, d.
  • the fluid resistance of a channel with a triangular flow cross section, as shown in FIG. 3 results in a flow q, which is defined by the following equation 1:
  • ⁇ p represents the pressure gradient across the fluid line
  • ⁇ represents the viscosity of the fluid whose flow is to be controlled
  • L is the length of the fluid line
  • w is the maximum width thereof, ie the width thereof in the region of the surface of the substrate 30.
  • the width w is defined by the depths d and D according to the following equation 2:
  • the deflection d is achieved by applying a force F to the elastic material that is used as the channel cover 36.
  • the local deflection d (x) where x is the position over the deflectable membrane area can be described approximately as follows:
  • p is the pressure exerted on the side of the cover 36 facing away from the channel
  • E the modulus of elasticity of the membrane
  • I y the surface moment perpendicular to x.
  • the area torque I y is defined by the channel length L and the membrane thickness H M :
  • the present invention is therefore suitable for realizing flow control mechanisms using an analog variation of the flow cross section of a fluid line.
  • FIG. 4 An exemplary embodiment for carrying out an analog control of continuous flows in a fluid line 50 using a variable flow resistance 52 according to the invention, which has a fluid line with a variable flow cross section, is shown in FIG. 4.
  • the fluid line of the variable flow resistance according to the invention is connected into the fluid line 50, for example by connecting the fluid inlet opening and fluid outlet opening shown in FIG. 1 to respective connections of the fluid line 50.
  • a flow meter 54 is located in the fluid line 50 can act any conventional fluid flow meter.
  • FIG. 4 shows a device 56 for applying a predetermined pressure to the fluid line, ie for generating a defined pressure difference between the inlet and outlet of the fluid line, this device 56 being a pump, for example.
  • the device 56 can be formed by a pressure reservoir.
  • the pressure on the pressure in the fluid line 50 Sensitive fluid can only be caused by gravitational forces.
  • the output signal of the flow meter 54 is fed to a control device 60 which compares the output signal with a predetermined value.
  • the control device 60 is also connected to a pressurization device 62, by means of which, for example, the membrane element 14 shown in FIG. 1 can be subjected to a force in order to vary the flow cross section of the fluid line of the variable flow resistance 52.
  • the controller 60 controls the pressurization device 62 in order to provide a flow resistance of the variable flow resistance 52 required for a desired flow.
  • the present invention thus enables analog control of continuous flows in a microfluidic system using a variable flow resistance which has a fluid line with a variable flow cross section.
  • variable flow resistor 52 Although the flow meter 54 is shown in FIG. 4 in front of the variable flow resistor 52, it is clear that this is not limited to this position, but can also be arranged behind the variable flow resistor, for example.
  • variable flow resistance according to the invention can also be used as a valve, since with a sufficient reduction in the flow cross section of the fluid line, the same acts as a closed valve.
  • a fluid inlet 20 and a fluid outlet 22 are formed in the holding element 12.
  • a fluid inlet and a fluid outlet could each be in the sub- Strat 10 may be provided, for example penetrating the same to the rear.
  • the membrane element 14 could completely cover the substrate 10, wherein a fluid inlet or a fluid outlet could be formed in the membrane 14 opposite the first or the second end 24 or 26 of the channel 16.
  • a variable flow resistance according to the invention could have a tubular fluid line with elastic walls, which is arranged in a pressure chamber, so that the flow cross section thereof can be varied by varying the pressure in the pressure chamber.
  • the fluid line used according to the invention can have any cross-sectional shapes, for example a round cross-section, a polygonal cross-section, a polygonal cross-section with rounded corners, etc.
  • the flow rate decreases with increasing pressure acting on the fluid line or the channel from the outside.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne une résistance à l'écoulement variable comprenant une entrée de fluide (20), une sortie de fluide (22) et une conduite fermée (16) d'une longueur fixe et reliant l'entrée de fluide (20) à la sortie de fluide (22). L'invention concerne également un dispositif permettant de faire varier la section transversale d'écoulement de la conduite de fluide (16) sur une longueur prédéterminée de cette conduite pour régler la résistance définie à l'écoulement dans la conduite de fluide. Le rapport entre une longueur prédéterminée de la conduite de fluide (16) et le diamètre caractéristique de cette conduite est > 500. Le dispositif permettant de faire varier la section transversale d'écoulement est conçu pour exercer depuis l'extérieur une pression sur des sections paroi de la conduite de fluide, cette pression étant indépendante de la pression d'un agent s'écoulant dans la conduite de fluide.
PCT/EP2003/013120 2002-11-21 2003-11-21 Resistance a l'ecoulement variable WO2004046563A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003288145A AU2003288145A1 (en) 2002-11-21 2003-11-21 Variable flow resistance element

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2002154312 DE10254312B4 (de) 2002-11-21 2002-11-21 Variabler Flußwiderstand
DE10254312.7 2002-11-21

Publications (1)

Publication Number Publication Date
WO2004046563A1 true WO2004046563A1 (fr) 2004-06-03

Family

ID=32308624

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2003/013120 WO2004046563A1 (fr) 2002-11-21 2003-11-21 Resistance a l'ecoulement variable

Country Status (3)

Country Link
AU (1) AU2003288145A1 (fr)
DE (1) DE10254312B4 (fr)
WO (1) WO2004046563A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9015945B2 (en) 2008-10-08 2015-04-28 Flowsion Aps Method of forming a flow restriction in a fluid communication system

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011051140A1 (de) 2011-02-25 2012-08-30 Embedded Microsystems Bremen GmbH (EMB) Applikationszentrum für Mikrosystemtechnik Strömungswiderstand
DE102012205262B4 (de) 2012-03-30 2024-09-26 Ford Global Technologies, Llc Variabler Flusswiderstand

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE179538C (fr) *
US5660728A (en) * 1993-10-04 1997-08-26 Research International, Inc. Micromachined fluid handling apparatus with filter
EP1215426A2 (fr) 2000-12-12 2002-06-19 Eastman Kodak Company Soupape électrostrictive pour moduler l'écoulement d'un fluide
DE60000109T2 (de) 1999-06-28 2002-11-07 California Institute Of Technology, Pasadena Elastomerische mikropumpen- und mikroventilsysteme
US20020166585A1 (en) * 2000-11-06 2002-11-14 Nanostream, Inc. Microfluidic regulating device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2713846B1 (fr) * 1993-12-07 1996-01-05 Thomson Csf Procédé de commande automatique de gain dans un récepteur radio numérique et récepteur mettant en Óoeuvre ce procédé.

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE179538C (fr) *
US5660728A (en) * 1993-10-04 1997-08-26 Research International, Inc. Micromachined fluid handling apparatus with filter
DE69415683T2 (de) 1993-10-04 1999-09-09 Res International Mikromaschinen-fluss-schalter
DE60000109T2 (de) 1999-06-28 2002-11-07 California Institute Of Technology, Pasadena Elastomerische mikropumpen- und mikroventilsysteme
US20020166585A1 (en) * 2000-11-06 2002-11-14 Nanostream, Inc. Microfluidic regulating device
EP1215426A2 (fr) 2000-12-12 2002-06-19 Eastman Kodak Company Soupape électrostrictive pour moduler l'écoulement d'un fluide

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
COUSSEAU P ET AL: "Improved micro-flow regulator for drug delivery systems", PROCEEDINGS OF THE IEEE 14TH. ANNUAL INTERNATIONAL CONFERENCE ON MICROELECTRO MECHANICAL SYSTEMS. MEMS 2001. INTERLAKEN, SWITZERLAND, JAN. 21 - 25, 2001, IEEE INTERNATIONAL MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE, NEW YORK, NY: IEEE, US, vol. CONF. 14, 21 January 2001 (2001-01-21), pages 527 - 530, XP010534664, ISBN: 0-7803-5998-4 *
P. COUSSEAU ET AL: "Improved Micro-Flow Regulator for Drug Delivery Systems", 2001, IEEE, pages: 527 - 530

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9015945B2 (en) 2008-10-08 2015-04-28 Flowsion Aps Method of forming a flow restriction in a fluid communication system

Also Published As

Publication number Publication date
DE10254312B4 (de) 2005-04-21
AU2003288145A1 (en) 2004-06-15
DE10254312A1 (de) 2004-06-09

Similar Documents

Publication Publication Date Title
DE69410487T2 (de) Mikropumpe
EP1320686B1 (fr) Microsoupape se trouvant normalement a l'etat ferme
DE69727237T2 (de) Integriertes elektrisch geregeltes mikroventil
EP2220371B1 (fr) Ensemble pompe avec soupape de sécurité
DE60313435T2 (de) Ventil zur verwendung in mikrofluiden strukturen
EP2205869B1 (fr) Pompe à membrane
DE69922288T2 (de) Mikropumpe und Herstellungsverfahren für die Mikropumpe
DE60122749T2 (de) Mikroelektromechanische elektrostatische ventilvorrichtung mit flexibler membrane und deren herstellungsverfahren
EP2207963B1 (fr) Pompe et ensemble pompe
EP2731721B1 (fr) Dispositif microfluidique et procédé de production d'un dispositif microfluidique
DE10202996A1 (de) Piezoelektrisch steuerbare Mikrofluidaktorik
WO1990015933A1 (fr) Micro-soupape
EP0613535B1 (fr) Soupape micromecanique pour dispositifs de dosage micromecaniques
DE102019211941B3 (de) Mikrostrukturierte fluidflussregelvorrichtung
DE102011078770A1 (de) Mikrofluidische Vorrichtung, mikrofluidisches System und Verfahren zum Transport von Fluiden
DE19637878C2 (de) Mikroventil mit vorgespannter Ventilklappenstruktur
DE10135569B4 (de) Mikromechanisches Bauteil
DE4223067C2 (de) Mikromechanischer Durchflußbegrenzer in Mehrschichtenstruktur
DE10254312B4 (de) Variabler Flußwiderstand
DE19844518A1 (de) Hydraulischer Wegverstärker für Mikrosysteme
EP3861238B1 (fr) Microsoupape hydraulique
DE102013201330A1 (de) Microfluidische Vorrichtung und externer piezoelektrischer Aktor
DE10243997B4 (de) Mikroventil in Mehrschichtaufbau
DE29701416U1 (de) Dosiersystem
DE29708678U1 (de) Mikromembranpumpe

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): BW GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Country of ref document: JP