WO2004040335A2 - Systemes d'imagerie optique de precision elevee et systemes associes - Google Patents

Systemes d'imagerie optique de precision elevee et systemes associes Download PDF

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Publication number
WO2004040335A2
WO2004040335A2 PCT/US2003/033930 US0333930W WO2004040335A2 WO 2004040335 A2 WO2004040335 A2 WO 2004040335A2 US 0333930 W US0333930 W US 0333930W WO 2004040335 A2 WO2004040335 A2 WO 2004040335A2
Authority
WO
WIPO (PCT)
Prior art keywords
hole
post
detector
diameter
optical
Prior art date
Application number
PCT/US2003/033930
Other languages
English (en)
Other versions
WO2004040335A3 (fr
Inventor
Thomas R. Clary
Joseph A. Franklin
Kyle S. Johnston
Joseph D. Ridge
Original Assignee
Metron Systems, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metron Systems, Inc. filed Critical Metron Systems, Inc.
Priority to AU2003284961A priority Critical patent/AU2003284961A1/en
Publication of WO2004040335A2 publication Critical patent/WO2004040335A2/fr
Publication of WO2004040335A3 publication Critical patent/WO2004040335A3/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B9/00—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or -
    • G02B9/34—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or - having four components only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

L'invention concerne la conception et la construction de systèmes d'imagerie optique hors axe de précision élevée. L'invention concerne la conception et la construction de structures de montage de précision élevée pour des éléments optiques de maintien rigide d'un système d'imagerie optique. L'invention concerne à la fois un mécanisme pour un montage hautement stable et une technique pour une focalisation de haute précision d'un détecteur dans une configuration optique complexe. L'invention concerne encore à la fois des instruments et une technique utilisés pour la focalisation de systèmes d'imagerie optique de précision élevée. La théorie et l'utilisation d'au moins ces concepts sont introduits par l'examen de la manière dont ces concepts permettent d'aider à construire et à utiliser un système de balayage laser sans contact.
PCT/US2003/033930 2002-10-28 2003-10-24 Systemes d'imagerie optique de precision elevee et systemes associes WO2004040335A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003284961A AU2003284961A1 (en) 2002-10-28 2003-10-24 High precision optical imaging systems and related systems

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US42171902P 2002-10-28 2002-10-28
US60/421,719 2002-10-28

Publications (2)

Publication Number Publication Date
WO2004040335A2 true WO2004040335A2 (fr) 2004-05-13
WO2004040335A3 WO2004040335A3 (fr) 2005-01-06

Family

ID=32230256

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/033930 WO2004040335A2 (fr) 2002-10-28 2003-10-24 Systemes d'imagerie optique de precision elevee et systemes associes

Country Status (3)

Country Link
US (2) US6940891B2 (fr)
AU (1) AU2003284961A1 (fr)
WO (1) WO2004040335A2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
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WO2013118909A1 (fr) * 2012-02-07 2013-08-15 Nikon Corporation Système optique de formation d'image, appareil d'imagerie, appareil de mesure de profil, système de fabrication de structure et procédé de fabrication de structure
EP2942654A1 (fr) * 2014-05-08 2015-11-11 Airbus DS GmbH Dispositif d'ajustage de l'alignement d'un plan de détection
CN108710195A (zh) * 2018-07-25 2018-10-26 广东奥普特科技股份有限公司 大靶面机器视觉镜头的光学系统

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CN103094815B (zh) * 2013-01-17 2015-04-15 中国科学院上海光学精密机械研究所 光路基准及角度调整的辅助装置及其使用方法
CN106029308B (zh) * 2014-02-28 2019-10-29 索尼公司 机械臂设备、校准方法以及计算机可读存储介质
CN106061427B (zh) 2014-02-28 2020-10-27 索尼公司 机器人臂设备、机器人臂控制方法和程序
JP6429503B2 (ja) * 2014-06-16 2018-11-28 キヤノン株式会社 計測装置、計測方法、光学素子の加工装置、および、光学素子
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DE102015003392B4 (de) * 2015-03-18 2020-01-16 Sensopart Industriesensorik Gmbh Optische Triangulations-Sensoranordnung und Linsenanordnung hierfür
US10021281B2 (en) 2016-06-06 2018-07-10 Microsoft Technology Licensing, Llc Device with split imaging system
US10412281B2 (en) 2016-06-06 2019-09-10 Microsoft Technology Licensing, Llc Device with split imaging system
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WO2019013699A1 (fr) 2017-07-14 2019-01-17 Neolund Ab Lidar moléculaire à haute résolution
US10558001B2 (en) * 2017-07-25 2020-02-11 Canon U.S.A., Inc. Optical alignment of fiber-optic rotary joint assembly
US11670490B2 (en) * 2017-09-29 2023-06-06 Taiwan Semiconductor Manufacturing Co., Ltd. Integrated circuit fabrication system with adjustable gas injector
US11002915B2 (en) * 2018-06-29 2021-05-11 Taiwan Semiconductor Manufacturing Co., Ltd. Fiber-to-chip grating coupler for photonic circuits
CN109491034B (zh) * 2018-10-11 2023-04-18 烟台荣高数字科技有限公司 一种光栅调整机构
DE102019203600B4 (de) * 2019-03-18 2020-06-25 Carl Zeiss Smt Gmbh Verfahren, optisches System und Lithographieanlage
US11327332B2 (en) * 2019-11-06 2022-05-10 Institut National D'optique Repeatable precision mounting of mechanical parts
CN112985774B (zh) * 2021-02-08 2023-04-07 厦门特仪科技有限公司 一种硅基Micro OLED微显示器高精度角度测试方法
WO2023239884A1 (fr) * 2022-06-08 2023-12-14 Drivingplates.com LLC Systèmes et dispositifs de réseau de caméras, comprenant des configurations de plaques flottantes et des configurations de plaques divisées

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013118909A1 (fr) * 2012-02-07 2013-08-15 Nikon Corporation Système optique de formation d'image, appareil d'imagerie, appareil de mesure de profil, système de fabrication de structure et procédé de fabrication de structure
JP2015512030A (ja) * 2012-02-07 2015-04-23 株式会社ニコン 結像光学系、撮像装置、形状測定装置、構造物製造システム、及び構造物製造方法
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EP2942654A1 (fr) * 2014-05-08 2015-11-11 Airbus DS GmbH Dispositif d'ajustage de l'alignement d'un plan de détection
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CN108710195A (zh) * 2018-07-25 2018-10-26 广东奥普特科技股份有限公司 大靶面机器视觉镜头的光学系统
CN108710195B (zh) * 2018-07-25 2023-10-03 广东奥普特科技股份有限公司 大靶面机器视觉镜头的光学系统

Also Published As

Publication number Publication date
US20060007981A1 (en) 2006-01-12
US6940891B2 (en) 2005-09-06
US20050053113A1 (en) 2005-03-10
AU2003284961A8 (en) 2004-05-25
AU2003284961A1 (en) 2004-05-25
WO2004040335A3 (fr) 2005-01-06

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