WO2003078838B1 - Vacuum pump control device, and vacuum device - Google Patents

Vacuum pump control device, and vacuum device

Info

Publication number
WO2003078838B1
WO2003078838B1 PCT/JP2003/003447 JP0303447W WO03078838B1 WO 2003078838 B1 WO2003078838 B1 WO 2003078838B1 JP 0303447 W JP0303447 W JP 0303447W WO 03078838 B1 WO03078838 B1 WO 03078838B1
Authority
WO
WIPO (PCT)
Prior art keywords
pump
empty
control unit
vacuum pump
vacuum
Prior art date
Application number
PCT/JP2003/003447
Other languages
English (en)
French (fr)
Other versions
WO2003078838A1 (en
Inventor
Hidemi Yamamoto
Kohji Tsuji
Original Assignee
Ricoh Kk
Hidemi Yamamoto
Kohji Tsuji
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=28035530&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2003078838(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ricoh Kk, Hidemi Yamamoto, Kohji Tsuji filed Critical Ricoh Kk
Priority to US10/508,378 priority Critical patent/US7731484B2/en
Priority to DE60328170T priority patent/DE60328170D1/de
Priority to EP03712801A priority patent/EP1486673B1/en
Publication of WO2003078838A1 publication Critical patent/WO2003078838A1/ja
Publication of WO2003078838B1 publication Critical patent/WO2003078838B1/ja

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/20—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by changing the driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/02—Motor parameters of rotating electric motors
    • F04B2203/0204—Frequency of the electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/01—Pressure before the pump inlet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims

補正書の請求の範卵 [2003年 7月 3 （03. 07. 03) 国際 務局受理：出願当初の請求の範 M 2及 ぴ 3は取り下げられた；出願当初の請求の範囲 1， 4及び 7は補正-された；他の請求の範 [外| は変 'なし。 (! ¾')]
1. (補: iK後） ΪΪ空装^を排気する 空ポンプのための制御装 であ つて、
前記 空装 の稼動状態と前記 空ポンプの问 速度との f¾i係を設 ¾ する条件設定部と、
前記 空装 ΙΤέと前記 ΪΪ空ポンプとの間の複数の排 経路に設けられた 各開閉バルブの開閉状態を検知するセンサからの信 -または前記 iiH mバ ルブを制御する信^を合む、 前記 空装^の稼動状態に対応した外部^ を受信し、 該外部^ -に対応した 'i空ポンプの 転速度を前記条件設 ¾部から読み出して出力する制御部と、
該制御部からの出力に ¾づいて前記 空ポンプの M転速度を制御する インバータ と、
を備えたことを特徴とする 'i:空ポンプの制御装^。
2. (削除）
3. (削除）
4. (補正後） 前記制御部は前記インバータを介さずに前記 ボン プを所定のー定速度で [ | させる 送遝 モー ドも取り う るものである 請求項 1 に記載の ^空ポンプの制御装置。
5. 前記制御部は電源投入時に :送遝 ¾モー ドをとる請求项 4に記 の ¾ポンプの制御装 n。
6. 前記制御部は前記インバータ及び內部制御 ["1路からも ίί -を人 力し、 それらの信^が予め設定された条件になったときにも :送巡 モ 一ドをとる請求 ¾4又は 5に記載の 空ポンプの制御装^。
7. (補 I卜:後） 空ポンプとの問に開閉バルブが設けられた複数の排
^経路を備え、 前記 空ポンプによ り排気される ½空装^において、 前記真空ポンプには請求項 1、 4， 5又は 6のいずれかに記載の；^^ ポンプの制御装 が設けられているこ とによ り稼動状態に応じて;^ :ポ ンブの问転速度を変化させるこ とを特徴とする 空装^。
補正された用紙 （条約第 19条）
PCT/JP2003/003447 2002-03-20 2003-03-20 Vacuum pump control device, and vacuum device WO2003078838A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US10/508,378 US7731484B2 (en) 2002-03-20 2003-03-20 Vacuum pump control device and vacuum device
DE60328170T DE60328170D1 (de) 2002-03-20 2003-03-20 Vakuumpumpensteuervorrichtung und vakuumvorrichtung
EP03712801A EP1486673B1 (en) 2002-03-20 2003-03-20 Vacuum pump control device, and vacuum device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002-077708 2002-03-20
JP2002077708A JP4111728B2 (ja) 2002-03-20 2002-03-20 真空ポンプの制御装置及び真空装置

Publications (2)

Publication Number Publication Date
WO2003078838A1 WO2003078838A1 (en) 2003-09-25
WO2003078838B1 true WO2003078838B1 (en) 2003-10-30

Family

ID=28035530

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2003/003447 WO2003078838A1 (en) 2002-03-20 2003-03-20 Vacuum pump control device, and vacuum device

Country Status (5)

Country Link
US (1) US7731484B2 (ja)
EP (1) EP1486673B1 (ja)
JP (1) JP4111728B2 (ja)
DE (1) DE60328170D1 (ja)
WO (1) WO2003078838A1 (ja)

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JP4825608B2 (ja) * 2005-08-12 2011-11-30 株式会社荏原製作所 真空排気装置および真空排気方法、基板の加工装置および基板の加工方法
KR20080104372A (ko) * 2006-03-16 2008-12-02 어플라이드 머티어리얼스, 인코포레이티드 전자 장치 제조 시스템의 압력 제어 방법 및 장치
JP4882558B2 (ja) * 2006-07-11 2012-02-22 株式会社島津製作所 ターボ分子ポンプ
US9295765B2 (en) * 2006-11-09 2016-03-29 Abbott Medical Optics Inc. Surgical fluidics cassette supporting multiple pumps
US8491528B2 (en) 2006-11-09 2013-07-23 Abbott Medical Optics Inc. Critical alignment of fluidics cassettes
US8414534B2 (en) 2006-11-09 2013-04-09 Abbott Medical Optics Inc. Holding tank devices, systems, and methods for surgical fluidics cassette
US9522221B2 (en) 2006-11-09 2016-12-20 Abbott Medical Optics Inc. Fluidics cassette for ocular surgical system
US10959881B2 (en) * 2006-11-09 2021-03-30 Johnson & Johnson Surgical Vision, Inc. Fluidics cassette for ocular surgical system
US10363166B2 (en) 2007-05-24 2019-07-30 Johnson & Johnson Surgical Vision, Inc. System and method for controlling a transverse phacoemulsification system using sensed data
US10596032B2 (en) 2007-05-24 2020-03-24 Johnson & Johnson Surgical Vision, Inc. System and method for controlling a transverse phacoemulsification system with a footpedal
US10485699B2 (en) 2007-05-24 2019-11-26 Johnson & Johnson Surgical Vision, Inc. Systems and methods for transverse phacoemulsification
KR101560705B1 (ko) * 2007-05-25 2015-10-16 어플라이드 머티어리얼스, 인코포레이티드 전자 디바이스 제조 시스템들을 조립하고 작동시키는 방법들 및 장치
JP5660888B2 (ja) * 2007-05-25 2015-01-28 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 除害システムの効率的な運転のための方法及び装置
WO2008156687A1 (en) * 2007-06-15 2008-12-24 Applied Materials, Inc. Methods and systems for designing and validating operation of abatement systems
US10342701B2 (en) * 2007-08-13 2019-07-09 Johnson & Johnson Surgical Vision, Inc. Systems and methods for phacoemulsification with vacuum based pumps
DE102007051045B4 (de) * 2007-10-25 2020-11-12 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe und Verfahren
WO2009055750A1 (en) * 2007-10-26 2009-04-30 Applied Materials, Inc. Methods and apparatus for smart abatement using an improved fuel circuit
IT1392466B1 (it) * 2008-07-25 2012-03-09 Sipa Nuove Tecnologie S R L Macchina per la manipolazione di nidi di pasta
CA2941763C (en) 2008-11-07 2018-10-30 Abbott Medical Optics Inc. Automatically pulsing different aspiration levels to an ocular probe
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US9005157B2 (en) * 2008-11-07 2015-04-14 Abbott Medical Optics Inc. Surgical cassette apparatus
EP3156012B1 (en) 2008-11-07 2021-10-20 Johnson & Johnson Surgical Vision, Inc. Adjustable foot pedal control for ophthalmic surgery
AU2009313417B2 (en) 2008-11-07 2015-01-15 Johnson & Johnson Surgical Vision, Inc. Method for programming foot pedal settings and controlling performance through foot pedal variation
US9795507B2 (en) 2008-11-07 2017-10-24 Abbott Medical Optics Inc. Multifunction foot pedal
CA2743098C (en) 2008-11-07 2017-08-15 Abbott Medical Optics Inc. Automatically switching different aspiration levels and/or pumps to an ocular probe
DE102008062054B4 (de) 2008-12-12 2019-05-29 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe
US9492317B2 (en) 2009-03-31 2016-11-15 Abbott Medical Optics Inc. Cassette capture mechanism
WO2012042800A1 (ja) * 2010-09-28 2012-04-05 株式会社アルバック ロードロック装置、排気制御装置及びロードロック装置の動作方法
JP5651874B2 (ja) * 2011-01-05 2015-01-14 オリオン機械株式会社 真空ポンプの運転方法
GB2492065A (en) * 2011-06-16 2012-12-26 Edwards Ltd Noise reduction of a vacuum pumping system
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Also Published As

Publication number Publication date
WO2003078838A1 (en) 2003-09-25
JP4111728B2 (ja) 2008-07-02
US20050163622A1 (en) 2005-07-28
EP1486673A4 (en) 2006-01-25
EP1486673A1 (en) 2004-12-15
JP2003278664A (ja) 2003-10-02
DE60328170D1 (de) 2009-08-13
EP1486673B1 (en) 2009-07-01
US7731484B2 (en) 2010-06-08

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