WO2003077383A1 - Dispositif d'amplification lumineuse, son procede de fabrication, source de lumiere mettant ce dispositif en application, dispositif de traitement lumineux utilisant la source de lumiere et dispositif d'exposition utilisant cette source de lumiere - Google Patents

Dispositif d'amplification lumineuse, son procede de fabrication, source de lumiere mettant ce dispositif en application, dispositif de traitement lumineux utilisant la source de lumiere et dispositif d'exposition utilisant cette source de lumiere Download PDF

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Publication number
WO2003077383A1
WO2003077383A1 PCT/JP2003/002905 JP0302905W WO03077383A1 WO 2003077383 A1 WO2003077383 A1 WO 2003077383A1 JP 0302905 W JP0302905 W JP 0302905W WO 03077383 A1 WO03077383 A1 WO 03077383A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
light source
amplifying
source device
manufacturing
Prior art date
Application number
PCT/JP2003/002905
Other languages
English (en)
Japanese (ja)
Inventor
Masaaki Doi
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002077744A external-priority patent/JP2003283012A/ja
Priority claimed from JP2002138861A external-priority patent/JP2003332653A/ja
Priority claimed from JP2002142247A external-priority patent/JP2003332654A/ja
Priority claimed from JP2003053891A external-priority patent/JP2003338646A/ja
Application filed by Nikon Corporation filed Critical Nikon Corporation
Priority to AU2003221350A priority Critical patent/AU2003221350A1/en
Publication of WO2003077383A1 publication Critical patent/WO2003077383A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12147—Coupler
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/1215—Splitter
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12183—Ion-exchange
    • G02B2006/12185—Ion-exchange field-assisted ion-exchange

Abstract

Dispositif d'amplification lumineuse comprenant un trajet (3) de guide d'ondes amplifiant la lumière et s'étendant dans un substrat de verre (2), tout en présentant une section transversale spécifique. Ce trajet (3) de guide d'ondes est composé, de plus, d'un premier trajet (3a) s'étendant depuis une partie entrée (4a) jusqu'à une première partie intermédiaire (A) présentant une section transversale spécifique, ainsi que d'un deuxième trajet (3b) présentant une section transversale divergente s'étendant depuis la première partie intermédiaire (A) jusqu'à une partie sortie (4b).
PCT/JP2003/002905 2002-03-13 2003-03-12 Dispositif d'amplification lumineuse, son procede de fabrication, source de lumiere mettant ce dispositif en application, dispositif de traitement lumineux utilisant la source de lumiere et dispositif d'exposition utilisant cette source de lumiere WO2003077383A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003221350A AU2003221350A1 (en) 2002-03-13 2003-03-12 Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP2002069050 2002-03-13
JP2002-069050 2002-03-13
JP2002077744A JP2003283012A (ja) 2002-03-20 2002-03-20 光増幅装置およびその製造方法、光増幅装置を用いた光源装置、光源装置を用いた光治療装置、並びに光源装置を用いた露光装置
JP2002-077744 2002-03-20
JP2002138861A JP2003332653A (ja) 2002-05-14 2002-05-14 光増幅装置、光増幅装置を用いた光源装置、光源装置を用いた光治療装置および光源装置を用いた露光装置
JP2002-138861 2002-05-14
JP2002-142247 2002-05-17
JP2002142247A JP2003332654A (ja) 2002-05-17 2002-05-17 光増幅装置、光増幅装置を用いた光源装置、光源装置を用いた光治療装置および光源装置を用いた露光装置
JP2003-053891 2003-02-28
JP2003053891A JP2003338646A (ja) 2002-03-13 2003-02-28 光増幅装置およびその製造方法、光増幅装置を用いた光源装置、光源装置を用いた光治療装置、並びに光源装置を用いた露光装置

Publications (1)

Publication Number Publication Date
WO2003077383A1 true WO2003077383A1 (fr) 2003-09-18

Family

ID=27808862

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2003/002905 WO2003077383A1 (fr) 2002-03-13 2003-03-12 Dispositif d'amplification lumineuse, son procede de fabrication, source de lumiere mettant ce dispositif en application, dispositif de traitement lumineux utilisant la source de lumiere et dispositif d'exposition utilisant cette source de lumiere

Country Status (3)

Country Link
AU (1) AU2003221350A1 (fr)
TW (1) TW200403463A (fr)
WO (1) WO2003077383A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4444368B1 (ja) * 2009-07-30 2010-03-31 古河電気工業株式会社 集積型半導体レーザ素子および半導体レーザモジュールならびに光伝送システム
CN109597162A (zh) * 2018-12-27 2019-04-09 华为技术有限公司 平面光波导、plc芯片、光束整形结构及wss
CN111025471A (zh) * 2019-12-30 2020-04-17 浙江大学绍兴微电子研究中心 一种电压分段式的玻璃基掩埋式光波导连续生产方法
CN111175891A (zh) * 2019-12-30 2020-05-19 浙江大学 一种连续式电场辅助离子迁移制作光波导的方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9726820B2 (en) * 2014-08-14 2017-08-08 Raytheon Company End pumped PWG with tapered core thickness
CN107783360A (zh) * 2016-08-25 2018-03-09 深圳市光峰光电技术有限公司 光源装置及显示系统

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4444368B1 (ja) * 2009-07-30 2010-03-31 古河電気工業株式会社 集積型半導体レーザ素子および半導体レーザモジュールならびに光伝送システム
WO2011013480A1 (fr) * 2009-07-30 2011-02-03 古河電気工業株式会社 Élément laser à semi-conducteur de type intégré, module laser à semi-conducteur et système d'émission optique
JP2011035060A (ja) * 2009-07-30 2011-02-17 Furukawa Electric Co Ltd:The 集積型半導体レーザ素子および半導体レーザモジュールならびに光伝送システム
US8457169B2 (en) 2009-07-30 2013-06-04 Furukawa Electric Co., Ltd. Integrated semiconductor laser element, semiconductor laser module, and optical transmission system
CN109597162A (zh) * 2018-12-27 2019-04-09 华为技术有限公司 平面光波导、plc芯片、光束整形结构及wss
CN109597162B (zh) * 2018-12-27 2021-04-09 华为技术有限公司 平面光波导、plc芯片、光束整形结构及wss
CN111025471A (zh) * 2019-12-30 2020-04-17 浙江大学绍兴微电子研究中心 一种电压分段式的玻璃基掩埋式光波导连续生产方法
CN111175891A (zh) * 2019-12-30 2020-05-19 浙江大学 一种连续式电场辅助离子迁移制作光波导的方法
CN111175891B (zh) * 2019-12-30 2020-10-23 浙江大学 一种连续式电场辅助离子迁移制作光波导的方法
CN111025471B (zh) * 2019-12-30 2021-04-13 浙江大学绍兴微电子研究中心 一种电压分段式的玻璃基掩埋式光波导连续生产方法

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