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WO2003077383A1 - Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device - Google Patents

Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device

Info

Publication number
WO2003077383A1
WO2003077383A1 PCT/JP2003/002905 JP0302905W WO2003077383A1 WO 2003077383 A1 WO2003077383 A1 WO 2003077383A1 JP 0302905 W JP0302905 W JP 0302905W WO 2003077383 A1 WO2003077383 A1 WO 2003077383A1
Authority
WO
Grant status
Application
Patent type
Prior art keywords
device
light
amplifying
part
waveguide
Prior art date
Application number
PCT/JP2003/002905
Other languages
French (fr)
Inventor
Masaaki Doi
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING STIMULATED EMISSION
    • H01S3/00Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/06708Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/10Light guides of the optical waveguide type
    • G02B6/12Light guides of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/1228Tapered waveguides, e.g. integrated spot-size transformers
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING STIMULATED EMISSION
    • H01S3/00Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/10Light guides of the optical waveguide type
    • G02B6/12Light guides of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133Functions
    • G02B2006/12147Coupler
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/10Light guides of the optical waveguide type
    • G02B6/12Light guides of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133Functions
    • G02B2006/1215Splitter
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/10Light guides of the optical waveguide type
    • G02B6/12Light guides of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166Manufacturing methods
    • G02B2006/12176Etching
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/10Light guides of the optical waveguide type
    • G02B6/12Light guides of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166Manufacturing methods
    • G02B2006/12183Ion-exchange
    • G02B2006/12185Ion-exchange field-assisted ion-exchange

Abstract

A light amplifying device, comprising a light amplifying waveguide path (3) extending with a specified cross sectional shape provided in a glass substrate (2), the light amplifying waveguide path (3) further comprising a first waveguide path (3a) extending from an inlet part (4a) to a first intermediate part (A) with a specified cross sectional shape and a second waveguide path (3b) having a cross sectional shape divergently extending from the first intermediate part (A) to an outlet part (4b).
PCT/JP2003/002905 2002-03-13 2003-03-12 Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device WO2003077383A1 (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP2002069050 2002-03-13
JP2002-069050 2002-03-13
JP2002077744A JP2003283012A (en) 2002-03-20 2002-03-20 Optical amplifier and manufacturing method therefor, lighting system employing the light amplifier, light therapy device employing the lighting system, and exposure system employing the lighting system
JP2002-077744 2002-03-20
JP2002-138861 2002-05-14
JP2002138861A JP2003332653A (en) 2002-05-14 2002-05-14 Optical amplifier, light source device using the optical amplifier, optical therapeutic device using the light source device, and aligner using the light source device
JP2002-142247 2002-05-17
JP2002142247A JP2003332654A (en) 2002-05-17 2002-05-17 Optical amplifier, light source device using the optical amplifier, optical therapeutic device using the light source device, and aligner using the light source device
JP2003053891A JP2003338646A (en) 2002-03-13 2003-02-28 Optical amplifier and its manufacturing method, light source equipment using optical amplifier, light medical treatment apparatus using light source equipment, and projection aligner using light source equipment
JP2003-053891 2003-02-28

Publications (1)

Publication Number Publication Date
WO2003077383A1 true true WO2003077383A1 (en) 2003-09-18

Family

ID=27808862

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2003/002905 WO2003077383A1 (en) 2002-03-13 2003-03-12 Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device

Country Status (1)

Country Link
WO (1) WO2003077383A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4444368B1 (en) * 2009-07-30 2010-03-31 古河電気工業株式会社 Integrated semiconductor laser device and a semiconductor laser module and an optical transmission system

Citations (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6329986A (en) * 1986-07-23 1988-02-08 Hoya Corp Light-waveguide type laser
JPH01109789A (en) * 1987-10-22 1989-04-26 Mitsubishi Electric Corp Light amplifier
JPH02222182A (en) * 1989-02-22 1990-09-04 Hitachi Cable Ltd Rare earth element added long size glass waveguide and manufacture thereof
JPH02221937A (en) * 1989-02-22 1990-09-04 Hitachi Cable Ltd Amplifier for glass waveguide for bidirectional transmission
JPH0335203A (en) * 1989-06-30 1991-02-15 Hitachi Cable Ltd Glass waveguide added with rare earth element and production thereof and glass waveguide laser and device using this waveguide
EP0426221A1 (en) * 1989-10-30 1991-05-08 PIRELLI CAVI S.p.A. Low-noise optical amplification unit with reflection of the pumping power
JPH0351422U (en) * 1989-09-26 1991-05-20
JPH03135081A (en) * 1989-10-20 1991-06-10 Nec Corp Optical amplifier
EP0433859A1 (en) * 1989-12-18 1991-06-26 Forschungszentrum Jülich Gmbh Optical element and method for its production
JPH03252628A (en) * 1990-03-02 1991-11-11 Fujitsu Ltd Optical branching device
JPH04144177A (en) * 1990-10-05 1992-05-18 Nippon Telegr & Teleph Corp <Ntt> Optical fiber amplifier
JPH04199032A (en) * 1990-11-29 1992-07-20 Furukawa Electric Co Ltd:The Optical coupler with light amplifying function
US5134672A (en) * 1989-04-19 1992-07-28 Hitachi Cable, Ltd. Optical waveguide type star coupler
JPH0553026A (en) * 1991-08-26 1993-03-05 Nippon Telegr & Teleph Corp <Ntt> Production of optical circuit
JPH0563257A (en) * 1991-08-30 1993-03-12 Hitachi Cable Ltd Functional glass waveguide for single mode transmission
JPH0567845A (en) * 1991-03-15 1993-03-19 Tokyo Inst Of Technol Optical amplifier
JPH05136491A (en) * 1991-11-11 1993-06-01 Nippon Telegr & Teleph Corp <Ntt> Manufacture of optical circuit
US5260822A (en) * 1992-01-31 1993-11-09 Massachusetts Institute Of Technology Tapered semiconductor laser gain structure with cavity spoiling grooves
JPH05299733A (en) * 1992-04-16 1993-11-12 Hitachi Cable Ltd Rare-earth-element-added multicore fiber and light amplifier using it
JPH06194533A (en) * 1992-12-25 1994-07-15 Nippon Sheet Glass Co Ltd Waveguide element for optical amplification
US5473722A (en) * 1991-02-01 1995-12-05 Pirelli Cavi S.P.A. Rare-earth-doped lithium niobate waveguide structures
JPH08242030A (en) * 1995-03-02 1996-09-17 Matsushita Electric Ind Co Ltd Optical integrated circuit element and its manufacture
EP0734105A2 (en) * 1995-03-20 1996-09-25 Fujitsu Limited Optical fiber amplifier and dispersion compensating fiber module for optical fiber amplifier
WO1996041404A1 (en) * 1995-06-07 1996-12-19 Mcdonnell Douglas Corporation Fiber optic laser system and associated lasing method
JPH10341061A (en) * 1997-06-09 1998-12-22 Fuji Photo Film Co Ltd Semiconductor optical amplification element
US5974216A (en) * 1997-02-13 1999-10-26 Nec Corporation Optical waveguide electrically controlled variable attenuator
EP1063742A1 (en) * 1998-03-11 2000-12-27 Nikon Corporation Ultraviolet laser apparatus and exposure apparatus comprising the ultraviolet laser apparatus
WO2001020398A1 (en) * 1999-09-10 2001-03-22 Nikon Corporation Exposure device with laser device
WO2001020397A1 (en) * 1999-09-10 2001-03-22 Nikon Corporation Laser device and exposure method
JP2001133649A (en) * 1999-11-05 2001-05-18 Fdk Corp Method for manufacturing optical waveguide grating
EP1113540A1 (en) * 1996-01-19 2001-07-04 SDL, Inc. Optical amplifiers providing high peak powers with high energy levels
JP2001221926A (en) * 1999-11-30 2001-08-17 Fdk Corp Production of optical waveguide element
WO2001078632A1 (en) * 2000-04-13 2001-10-25 Nikon Corporation Laser therapy apparatus
JP2001337356A (en) * 2000-05-29 2001-12-07 Yusuke Mori Light source device

Patent Citations (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6329986A (en) * 1986-07-23 1988-02-08 Hoya Corp Light-waveguide type laser
JPH01109789A (en) * 1987-10-22 1989-04-26 Mitsubishi Electric Corp Light amplifier
JPH02222182A (en) * 1989-02-22 1990-09-04 Hitachi Cable Ltd Rare earth element added long size glass waveguide and manufacture thereof
JPH02221937A (en) * 1989-02-22 1990-09-04 Hitachi Cable Ltd Amplifier for glass waveguide for bidirectional transmission
US5134672A (en) * 1989-04-19 1992-07-28 Hitachi Cable, Ltd. Optical waveguide type star coupler
JPH0335203A (en) * 1989-06-30 1991-02-15 Hitachi Cable Ltd Glass waveguide added with rare earth element and production thereof and glass waveguide laser and device using this waveguide
JPH0351422U (en) * 1989-09-26 1991-05-20
JPH03135081A (en) * 1989-10-20 1991-06-10 Nec Corp Optical amplifier
EP0426221A1 (en) * 1989-10-30 1991-05-08 PIRELLI CAVI S.p.A. Low-noise optical amplification unit with reflection of the pumping power
EP0433859A1 (en) * 1989-12-18 1991-06-26 Forschungszentrum Jülich Gmbh Optical element and method for its production
JPH03252628A (en) * 1990-03-02 1991-11-11 Fujitsu Ltd Optical branching device
JPH04144177A (en) * 1990-10-05 1992-05-18 Nippon Telegr & Teleph Corp <Ntt> Optical fiber amplifier
JPH04199032A (en) * 1990-11-29 1992-07-20 Furukawa Electric Co Ltd:The Optical coupler with light amplifying function
US5473722A (en) * 1991-02-01 1995-12-05 Pirelli Cavi S.P.A. Rare-earth-doped lithium niobate waveguide structures
JPH0567845A (en) * 1991-03-15 1993-03-19 Tokyo Inst Of Technol Optical amplifier
JPH0553026A (en) * 1991-08-26 1993-03-05 Nippon Telegr & Teleph Corp <Ntt> Production of optical circuit
JPH0563257A (en) * 1991-08-30 1993-03-12 Hitachi Cable Ltd Functional glass waveguide for single mode transmission
JPH05136491A (en) * 1991-11-11 1993-06-01 Nippon Telegr & Teleph Corp <Ntt> Manufacture of optical circuit
US5260822A (en) * 1992-01-31 1993-11-09 Massachusetts Institute Of Technology Tapered semiconductor laser gain structure with cavity spoiling grooves
JPH05299733A (en) * 1992-04-16 1993-11-12 Hitachi Cable Ltd Rare-earth-element-added multicore fiber and light amplifier using it
JPH06194533A (en) * 1992-12-25 1994-07-15 Nippon Sheet Glass Co Ltd Waveguide element for optical amplification
JPH08242030A (en) * 1995-03-02 1996-09-17 Matsushita Electric Ind Co Ltd Optical integrated circuit element and its manufacture
EP0734105A2 (en) * 1995-03-20 1996-09-25 Fujitsu Limited Optical fiber amplifier and dispersion compensating fiber module for optical fiber amplifier
WO1996041404A1 (en) * 1995-06-07 1996-12-19 Mcdonnell Douglas Corporation Fiber optic laser system and associated lasing method
EP1113540A1 (en) * 1996-01-19 2001-07-04 SDL, Inc. Optical amplifiers providing high peak powers with high energy levels
US5974216A (en) * 1997-02-13 1999-10-26 Nec Corporation Optical waveguide electrically controlled variable attenuator
JPH10341061A (en) * 1997-06-09 1998-12-22 Fuji Photo Film Co Ltd Semiconductor optical amplification element
EP1063742A1 (en) * 1998-03-11 2000-12-27 Nikon Corporation Ultraviolet laser apparatus and exposure apparatus comprising the ultraviolet laser apparatus
WO2001020397A1 (en) * 1999-09-10 2001-03-22 Nikon Corporation Laser device and exposure method
WO2001020398A1 (en) * 1999-09-10 2001-03-22 Nikon Corporation Exposure device with laser device
JP2001133649A (en) * 1999-11-05 2001-05-18 Fdk Corp Method for manufacturing optical waveguide grating
JP2001221926A (en) * 1999-11-30 2001-08-17 Fdk Corp Production of optical waveguide element
WO2001078632A1 (en) * 2000-04-13 2001-10-25 Nikon Corporation Laser therapy apparatus
JP2001337356A (en) * 2000-05-29 2001-12-07 Yusuke Mori Light source device

Non-Patent Citations (11)

* Cited by examiner, † Cited by third party
Title
BAUMANN I. ET AL.: "Er-doped integrated optical devices in LiNb 03", TOPICS IN QUANTUM ELECTRONICS, vol. 2, no. 2, 1996, pages 355 - 366, XP000685246 *
BJARKLEV A. ET AL.: "New tapered active fibres for very low noise amplifier applications", ELECTRONICS LETTERS, vol. 28, no. 1, 1992, pages 34 - 36, XP002969500 *
GILES C.R. ET AL.: "Gain enhancement in reflected-pump erbium-doped fiber amplifiers", OSA PROCEEDINGS OF THE TOPICAL MEETING ON OPTICAL AMPLIFIERS AND THEIR APPLICATIONS, vol. 13, 1992, pages 148 - 151, XP002969903 *
KINTZER E.S. ET AL.: "High-power, strained-layer amplifiers and lasers with tapered gain regions", IEEE PHOTONICS TECHNOLOGY LETTERS, vol. 5, no. 6, 1993, pages 605 - 608, XP000384041 *
KITAGAWA T. ET AL.: "Guided-wave laser based on erbium-doped silica planar lightwave circuit", ELECTRONICS LETTERS, vol. 27, no. 4, 1991, pages 334 - 335, XP000219839 *
KUNINORI HATTORI ET AL.: "Er tenka sekiei-kei doharokei ring kyoshinki", THE TRANSACTIONS OF THE INSTITUTE OF ELECTRONICS, INFORMATION AND COMMUNICATION ENGINEERS C-I, vol. J77-C-I, no. 5, 1994, pages 214 - 221, XP002969901 *
NAOMASA SHIMOJO ET AL.: "Reiki hikari hanshaki ni yoru hikari zofukuki tokusei no kaizen", 1998 NEN THE INSTITUTE OF ELECTRONICS, INFORMATION AND COMMUNICATION ENGINEERS, TSUSHIN SOCIETY TAIKAI KOEN RONBUNSHU 2, 7 September 1998 (1998-09-07), pages 480, XP002969904 *
SOCCOLICH C.E. ET AL.: "Gain enhancement in EDFAs by using fiber-grating pump reflectors", OPTICAL FIBER COMMUNICATION CONFERENCE, OFC'94, TECHNICAL DIGEST, 1994, pages 277 - 278, XP000858817 *
TAKU SOMA ET AL.: "Er tenka garnet kessho usumaku o mochiita shuseki-gata hikari zofuku soshi no tokusei", 1997 NEN THE INSTITUTE OF ELECTRONICS, INFORMATION AND COMMUNICATION ENGINEERS, ELECTRONICS SOCIETY, TAIKAI KOEN RONBUNSHU 1, 13 August 1997 (1997-08-13), pages 308 - 309, XP002969902 *
VANCE R.W.C. ET AL.: "State-space description of optimal erbium amplifier tapers", APPLIED OPTICS, vol. 33, no. 30, 1994, pages 6992 - 7001, XP000476199 *
WALPOLE J.N.: "Semiconductor amplifiers and lasers with tapered gain regions", OPTICAL AND QUANTUM ELECTRONICS, vol. 28, no. 6, 1996, pages 623 - 645, XP002969499 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4444368B1 (en) * 2009-07-30 2010-03-31 古河電気工業株式会社 Integrated semiconductor laser device and a semiconductor laser module and an optical transmission system
WO2011013480A1 (en) * 2009-07-30 2011-02-03 古河電気工業株式会社 Integrated-type semiconductor laser element, semiconductor laser module, and optical transmission system
JP2011035060A (en) * 2009-07-30 2011-02-17 Furukawa Electric Co Ltd:The Integrated-type semiconductor laser element, semiconductor laser module, and optical transmission system
US8457169B2 (en) 2009-07-30 2013-06-04 Furukawa Electric Co., Ltd. Integrated semiconductor laser element, semiconductor laser module, and optical transmission system

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