TW200403463A - Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device - Google Patents

Abstract

A light amplifying device (1) comprises a light amplifying wave-guide path (3) extending with a specified cross sectional shape provided in a glass substrate (2). The light amplifying wave-guide path (3) further comprises a first wave-guide path (3a) extending from an inlet part (4a) to a first intermediate part (A) with a specified cross sectional shape and a second wave-guide path (3b) having a cross sectional shape divergently extending from the first intermediate part (A) to an outlet part (4b).

Description

200403463 Description of the invention: [Technical field to which the invention belongs] The present invention relates to an amplification device and a manufacturing method for amplifying light from a laser. Also, ^ (Nine Temples, Department of Radiation and Light Department, Department of Economic Affairs, Ten Departments, the present invention relates to using The light field coat is placed with a light source, and the light treatment device using the light source is placed on a light treatment device using a light source Pei Zhi exposure device. '[Prior Art] _

As a device for amplifying single-wavelength, external light or visible light generated from a laser light source such as a semiconductor laser, there are a fiber amplifier and an optical waveguide amplifier. This is to supply the excitation light to the optical fiber for amplification and the optical waveguide for adding the rare earth elements such as oblique ytterbium to excite the added rare earth element, thereby inverting the energy level of the electrons covered by the rare earth element and forming a reverse Knife cloth to amplify the light entering the optical fiber or optical waveguide. When using the optical fiber amplifier and optical waveguide amplifier of this structure to produce the highest power, it will be produced by the optical fiber for amplification or the waveguide for amplification.

Stimulated Raman Scattering (SRS) ’Four-Wave Mixing (FWM) and other non-linear optical effects generate noise light. In this way, the generated noise light and the signal light (laser light) of the amplification object are amplified at the same time, so the amplification power of the amplifier is also used for the amplification of the noise light, and the amplification ability of the amplifier cannot be effectively used for amplification. The news of the subject 5 The magnification of the tiger's light causes the problem of reduced magnification efficiency. At the same time, self-phase modulation is also generated.

Modulation: SPM) also causes the problem of signal spectrum expansion. 200403463 In general, in fiber amplifiers and optical waveguide amplifiers, the inner diameter (core diameter) of the optical fiber used for optical amplification and the size of the waveguide are set to maintain a single mode. The southernmost power that can be amplified without generating the above-mentioned stray light in the waveguide for amplification is limited, and there is a limit in the optical amplification. * In addition, when using optical fiber amplifiers and optical waveguide amplifiers to amplify light, the excitation light supplied to these amplifiers is not completely used for the excitation of adding rare earth elements, and some of them will still directly penetrate the optical fiber or light guide. Wave path does not help light amplification. Therefore, the excitation light cannot be effectively used, and there is a problem of poor light amplification efficiency. On the other hand, the optical fiber amplifier, optical waveguide amplifier, and laser light source combined as described above are used as light sources for various optical related devices. ^ For example, it can be used as a light source device for supplying a predetermined irradiation light on a light (laser light) treatment device that performs recent vision and astigmatism treatment, or on a wafer, for semiconductor manufacturing using photolithography technology Practical use of the light source device of the exposure device. White 7—Towels such as phototherapy devices or semiconductor exposure devices often require the supply control (switching control) of the irradiated light to be switched on the supply side. In No. 36256, some requirements are set for the output side of the light source device. However, in this way, in order to respond to this problem, it is necessary to separately install a switching element, which causes problems such as a complicated device structure and an increased manufacturing cost;

[Inventive Content] W

The first object of the present invention is to produce a kind of noise light, such as the scatman scattering, four-wave mixing, etc., even when the highest power of 200403463 light is generated. An optical amplifying device produced by the phase modulation of the white phase and the phase modulation and its manufacturing method. Another purpose of this month is to provide a structure that can control the generation of noisy light caused by stimulated Raman scattering, = mixing of light waves, etc., or control self-phase modulation, and obtain high-power amplified light. Light amplification device. Another purpose of this month is to provide an optical amplifying device which can efficiently utilize the optical fiber provided for amplification of the optical amplifier or visit the excitation light provided in the large waveguide to perform efficient optical amplification. Another purpose of the 'x month' is to provide an optical amplifying device having an integrated light switching function. A light source device constructed by using the light amplifying device described above is provided with a light source device provided on a substrate having a predetermined object of the present invention. An object of the present invention is to provide an exposure device and a phototherapy device. The first optical amplifier of the present invention is constructed by extending the cross-sectional shape of the clothes ^ ^, "Bayi", which is composed of a person and a large guide wave path. d Extending from 帛 ... to a certain cross-section method. The output is enlarged to a cone-shaped cross-section. When using each type of light amplification device, when the irradiation light is amplified, the part of the wave path toward the exit section is enlarged first: the first middle part of the guided wave path is enlarged first. "The shape of Xi Dainian was enlarged into a tapered shape, 掇 p% ίΜ ^ FWd Diameter: MF /" The heart is cut and expanded, so the light density gradually decreases in the enlarged tapered portion, and & 4, ^ & Moon Dagger suppresses the generation of stimulated Raman scattering, four light waves, e ^, and self-phase modulation. Nine waves are combined, the first optical amplifying device and the optical amplifying guided wave path can be opened from the first intermediate point A to the second intermediate section ... The exit section is extended to the second intermediate section to expand into a wide range of directions. The cross-sectional shape is from the 2nd conical cross-sectional shape; the mouth 丨 stirrup is enlarged into a V shape and extends in a certain cross-sectional shape. At this time, it is desirable that the portion from the optical amplification waveguide to the first middle portion is set to a size capable of maintaining a single mode.卩, ㈣ ,, u, and other aspects-The first manufacturing method of the optical amplifying device of the present invention is based on a wide-sounding: second-class glass substrate on the surface of the glass substrate, which is set from the -end portion to the predetermined two: The middle part, and the opening from the middle part to the other end is enlarged, and the death / visibility is opened. Shuangkai 彡 # 成 ^, immerse the glass substrate just described in the melt ... valence ion neutral salt is heated above the melting point And the producer) in the first and the second to form a refractive index region of the film on the opening portion of the film on the surface of the glass substrate, and then remove the film from the glass substrate, the application of an electric field on the glass substrate will be high The refraction area is made by burying the inside of the glass substrate. The second manufacturing method of the optical amplifying device of the present invention is to extend from the one end portion to the middle portion of the surface of the glass substrate and has a predetermined width and extend linearly, and the middle portion is extended to the other end portion to have a tapered width. Opening: to form a film, add a rare earth element to the opening portion of the glass substrate formed by ion implantation, and immerse the glass substrate in a molten liquid (system, which contains a monovalent ion neutral salt to heat It is made above the melting point) in the predetermined day Mori, at the opening portion of the film on the surface of the glass substrate, a refractive index region of the waveguide is formed, the film is removed from the glass substrate, and the glass substrate is applied.

The 2UU4034W electric field is made by embedding the inside of the broken glass substrate in the area. ㈣Glass:; = In the method, it is preferred to be based on the size of the film opening width, which can be immersed in the melt solution for 5 weeks. In the oxygen-generating burner of the optical amplifying device of the present invention, in the # Α method of the silicon substrate, the lower surface is formed by stacking six surfaces with hydrogen and crying. 〇. In the lower part, a core with a high refractive index such as lin and ^ is formed, and a rare earth element ^ g is added to the product, so that the silicon substrate forming the lower enveloping sound and core layer is heated, so that the lower adjacent Scoop ... After the dagger layer 1, the α 卩 coating layer and core layer are transparent. On the surface of the core layer, a mountain ^ ^ ^ is a part from the middle to the middle, with a predetermined width and a linear extension. At the same time, from M Both & mouth and deep end, forming a layer with an enlarged taper M layer 'use the photoresist layer as a photomask, and use the reactive ion money engraving method' to remove the core layer covering the part of the photoresist layer, 'The linear extension of the layer is left, and the upper cladding layer is formed on the surface of the lower cladding layer (which has a core layer enlarged into a cone shape) by a chlorine-oxygen burner.' The stone cladding substrate on which the upper cladding layer is formed is heated to make the upper cladding layer transparent as well. The first light source device of the present invention includes: an optical amplifying device (which is the first optical amplifying device having the structure described above or a light amplifying u u produced by the i-th manufacturing method), and an irradiating light source (whose system is Emitting irradiation light), excitation light source (which emits excitation light), irradiation light introduction path (from the entrance part, the radon injection material emitted by the irradiation light source is entered into the optical amplification waveguide), α and excitation light introduction path ( It is to introduce the excitation light emitted from the excitation light source into the light amplification waveguide from the entrance 胄), and then, through the irradiation light introduction path and the excitation light introduction path, the irradiation light and the excitation light are introduced into the light amplification guide path. The structure that excites the effect of 200403463 light, amplifies the irradiation light, and emits the light from the exit portion. In the upper light source device, an irradiation light source can be constituted by a laser light source (which emits laser light of a predetermined wavelength). Hagimoto Maoyue's second optical amplifying device, which is provided with an optical amplifying waveguide (which is connected to a broken glass substrate and has a predetermined cross-sectional shape #, extending continuously from the population section to the exit section). A waveguide-type optical switch is provided at the rear of the waveguide. If this structure is made, since the light amplification device has an optical switch, it is not necessary to provide a switching element or a modulator separately, and the structure of the device composed of the light amplification device can be simply formed, and the manufacturing cost can be reduced. It is preferable to form an optical waveguide on the glass substrate (which is adjacent to and parallel to the rear of the optical amplification f-wave path), and the optical signal will be injected from the entrance to the optical amplification waveguide and the amplified optical signal through the optical switch. It is divided into the rear part of the optical amplification waveguide or the optical waveguide for the flow control. At this time, the directional consumable type switch can be used to form the 'back of the large waveguide wave path and the waveguide wave path are arranged at predetermined intervals, and optical switches are arranged in the near part, using the thermo-optic effect, electro-optical effect' or acousto-optic effect Into the optical amplification waveguide: the optical communication soul is divided into the rear part of the optical amplification waveguide or the optical waveguide for flow control. The fourth manufacturing method of the optical amplification device of the present invention is based on the addition of rare earth glass. On the surface of the substrate, a first opening (from one end to the other 7 sides, extending with a predetermined width) and a second opening (near the other ^ portion of the aforementioned first opening ′) are adjacent to and parallel to the opening 帛 1. -End side), 幵, forming a film, immersing a glass substrate in a molten liquid (made by heating ^ 200403463 ^ raw salt containing a monovalent ion above a melting point) for a predetermined time in order to The first and second openings form the two refractive index areas of the optical waveguide, remove the film from the glass substrate, and apply electrical rush to the glass substrate to bury the two surface refractive areas into the glass substrate to form light. Zoom in $ wave and 2nd Guided wave path, using the light lithography technique on the glass substrate surface behind the optically amplified guide wave path and above the second guided wave path to form a thermo-optical effect ^ edge light effect or acousto-optic effect element to form directivity | 马 合The fifth manufacturing method of the optical amplifying device of the present invention is provided on the surface of a glass substrate, and includes a first opening (from one end portion to the other end side with a predetermined width extension) and a second opening (on the other side of the first opening). Near one end, adjacent to the ^ opening and extending in parallel to the other _ end side), to form a film glass substrate ... and the part of the 2nd opening, by the ion implantation method: adding rare earth elements, the glass substrate Immerse in a molten liquid (made by heating a neutral salt containing monovalent ions above the refining point) for a predetermined time to form the optical waveguide on the first and second parts of the glass substrate surface Two high-refractive-index regions, the film is removed from the glass substrate, and an electric field is applied to the glass to bury the two high-refractive regions inside the glass substrate. Behind the wave path: 2 ¥ Glass substrate table above the wave path , Using photolithography, to form a thermo-optic effect element, or electro-optic effect of the acousto-optical effect used to coupler. V ^ The sixth manufacturing method of the optical amplifying device of the present invention, which is a burner, piles up and collects documents on the surface of the silicon substrate ^ ^ The surface is formed to form a lower cladding layer, which is ignited by oxygen and hydrogen 200403463

t 'On the surface of the lower cladding layer, a core layer with a high refractive index added with a rare earth element and a filler is deposited, and the stone substrate that forms the lower cladding layer and the core layer is heated.' The lower cladding layer and the core layer are heated. Transparency, forming a first photoresist layer (extending a predetermined width from one end to the other end side) and a second photoresist layer (near the other-end portion of the first photoresist layer and the first layer on the core layer) Phase 4 extends in parallel to the other end side), the photoresist layer is regarded as light I, and the core layer covering the part other than the photoresist layer is removed by the reactive ion surname engraving method. First, the surface of the lower cladding layer of the first core layer and the second core layer left after removing the pre-resistance layer is collected by a hydrogen and oxygen burner to form a port P cladding layer, which will form a standing β 4. The silicon substrate of the dipper layer is heated to make the upper cladding layer transparent as well. The upper surface of the second waveguide, which is formed by the light amplification waveguide layer formed by the second rt, is used for light. Lithography technology, forming the thermo-optic effect and electro-optic effect-the components used to effect, to form a directional coupler. The second light source device of the present invention is provided with: a light amplifying device, which is buried. The second light amplifying or irradiating light source formed by the fourth manufacturing method described above emits irradiation light; an excitation light source, It is used to emit excitation light; the irradiated light emitted from the irradiated light source is introduced into the light path from the entrance; the irradiated light is introduced into the optical amplification waveguide; the excited light is emitted from the irradiated light source to be introduced from the entrance The excitation light is introduced into the light amplification waveguide; and the switch operation control device is the operation control of the optical switch; 12 200403463 Through the E channel and the excitation light channel, the irradiation light and the excitation light are entered into the light amplification. In the guided wave path, # the amplified illumination light is controlled by the action of the optical switch of the switch action control device through the action of the excitation light. The light is passed through the light guide base, Buffin, and the exit end of the guided wave path. The composition of each part is shot. In the light source device described above, the irradiation light source can be a laser light source that emits laser light of a predetermined wavelength. * The third optical amplifying device of the present invention is configured by providing an optical amplifying waveguide (a predetermined cross-sectional shape is extended on a glass substrate). The optical amplifying waveguide is composed of one entrance-side waveguide (extending from the entrance portion). To the first intermediate section) and a plurality of diverging waveguides (the first intermediate section diverges from the entrance-side waveguide: extending toward the exit section). In this way, by using a plurality of branch V-wave paths to suppress the generation of noise light or self-phase modulation, and even if there is a limit on the amplification power that can be generated in each branch, it matches the amplified light produced by each branch waveguide. In this way, no noise light or self-phase modulation is generated, and high-power light can be obtained. In this optical amplifying device, it is preferable that at least two of the plurality of branched waveguides are multiplexed at the second intermediate portion to form one exit-side waveguide and extend to the exit portion. In this case ... the side waveguide, the branch waveguide, and the aforementioned exit material wave path have a structure capable of maintaining a single-mode size on a glass substrate, and a guide wave path for excitation light (for introducing excitation light) and a multiplexing mechanism ( The excitation light supplied by the excitation light waveguide is multiplexed in the branched waveguide). The multiplexing mechanism can be composed of a demultiplexer 13. 0/2 is formed by the refraction region (the entrance-side waveguide, the branched waveguide, and the exit 1 waveguide are formed in a glass substrate added with a rare earth element), and when the waveguide and the multiplexing mechanism for the excitation light are provided In the case, it is preferable that the two entrance-side guided wave paths and the divergent guided-wave paths to the aforementioned multiplex structure have a high-refractive region or a high-refraction area formed by ordinary glass to which rare earth elements are not added. The multiplexing mechanism of the guided wave path, the exit side part and the J guided wave path are composed of a high-refraction region formed by a glass substrate added with a rare earth element. ^ The fourth optical amplifying device of the present invention is constructed using an optical fiber for amplification. The optical fiber for amplification is composed of one entrance-side optical fiber (extending from the entrance portion to the first intermediate portion) and a plurality of branching optical fibers (in the first intermediate portion). , Divided from the optical fiber on the inlet side, and branched to the outlet). In this optical amplifying device, amplifying light from a plurality of branched optical fibers is used so that no high-power light can be obtained without generating noise light or self-phase modulation. At this time, it is preferable that at least two of the plurality of branched optical fibers are multiplexed at the second middle to form an exit-side optical fiber and extend to the aforementioned exit portion. In either case, the entrance-side fiber, branch fiber, and exit-side fiber have a structure capable of maintaining a single-mode size. An excitation optical fiber (for introducing excitation light) and a multiplexing mechanism (connecting the excitation optical fiber and the branched optical fiber, and multiplexing the excitation light supplied through the aforementioned excitation optical fiber into the branched optical fiber) may also be provided. This multiplexing mechanism can be constituted by a demultiplexer. 200403463 1 Y-based entry-side fiber, branch fiber, and exit-side fiber can be composed of a rare-earth fiber. X, when an excitation light fiber and a multiplexing mechanism are provided, 'the IM blade from the entrance side optical fiber and the divergent fiber entrance side to the multiplexing structure is composed of a general optical fiber with no added rare earth element, and the The optical and truncating multiplexing mechanism, the exit side part and the exit side optical fiber are composed of an optical fiber added with a rare earth element. The third light source device of the present invention includes: a third light magnification unit, which is configured on the above glass substrate by providing a light amplification waveguide; an irradiation light source, which emits irradiation light; and an excitation light source, The system emits excitation light; from the entrance, the irradiated light from the irradiated light source is introduced into the light amplification waveguide. * The excitation light from the excitation light source is guided to the human π portion or from the excitation and light guided waveguide to the light amplification. In the guided wave path, in the optical amplification guided wave path, a structure that amplifies the irradiated light by the action of the excitation light and emits it from the exit portion. The fourth light source device of the present invention is equipped with: _ the fourth optical amplification device , Which uses the above-mentioned amplification optical fiber to constitute an irradiation light source, which emits irradiation light; and. An excitation light source, which emits excitation light; The excitation light from the excitation light source is introduced into the entrance or the excitation light fiber is introduced into the amplification optical fiber, and the excitation light is emitted by the excitation 15 200403463 in the amplification optical fiber. The irradiating light source can be configured to emit a predetermined light and amplify the irradiating light. From the above-mentioned light source device, a laser light source having a wavelength of laser light can be configured.

The fifth optical amplifying device of the present invention is provided with an optical amplifying waveguide (formed in a predetermined cross-sectional shape on a glass substrate) and a multiplexing / demultiplexing mechanism (installed at the exit of the optical amplifying waveguide). When the excitation light enters the optical amplification waveguide from the entrance of the optical amplification waveguide, the multiplexing / demultiplexing mechanism separates the amplified signal light and the excitation light by first amplifying the waveguide, so that the emission from the exit section Make up. In addition, an excitation light mechanism is provided, the system of which is separated by the multiplexing and demultiplexing mechanism, so that the emitted excitation light is reflected, and the excitation light reflected by the excitation light reflecting mechanism is transmitted through the multiplexing and demultiplexing mechanism and exits. P enters the optical amplification waveguide. In this way— | 'Injected from the population department, through the reflection mechanism, the excitation light used to amplify the signal light is reflected, and then injected into the J-wave amplification V wave path, so that it can be reused, so the signal light amplification can be improved. effectiveness. The multiplexing / demultiplexing mechanism can be constituted by a demultiplexing multiplexer, and the optical amplification waveguide system has a constitution capable of maintaining a single-mode size. The excitation light reflection mechanism can be constituted by an optical mirror, or can be constituted by a reflection type Bragg diffraction grating. The sixth optical amplifying device of the present invention includes: an optical amplifying waveguide which is formed on a glass substrate and has a predetermined cross-sectional shape; and a first multiplexing / demultiplexing mechanism which is provided on the optical amplifying waveguide. The entrance section; and 16 200403463 the first multiplexing and demultiplexing mechanism, which is provided at the exit section number of the optical amplification waveguide and the light is incident to the Y: the structure of the mechanism is the entrance section of the entrance section In the Γ wave path; the structure of the second multiplexing / demultiplexing mechanism is that the excitation light incident from another is incident into the optical amplification waveguide. From the composition of the f 1 multiplexing / demultiplexing mechanism is through the second multiplexing / demultiplexing mechanism: 'The excitation light that enters the optical amplification waveguide with the mouth opening, the gas_light path, rust π ^ The first multiplexer / demultiplexer path exits from the entrance to the outside; the second < structure is transmitted through the first multiplexer and demultiplexer from the entrance ^ | the amplified signal light in the guided wave path and the excitation light It shoots into the gourd and shoots out from the exit to the outside through other paths. There is also an excitation light reflection mechanism, which reflects the excitation light emitted by the first person =; the excitation light reflection mechanism two: The light passes through the i-th multiplexing and demultiplexing mechanism and enters from the entrance To light effect: within the wave. In this case, the excitation light can be reused to increase the amplification. In this optical amplification device, the U-th branching mechanism and the second multiplexer / demultiplexer: are each composed of a demultiplexing multiplexer. Can maintain the composition of early drawing size. The excitation light reflection mechanism is composed of an optical mirror or a reflection type Bragg diffraction grating. A seventh optical amplifying device according to the present invention includes: i amplification optical fibers and fibers, and a multiplexing / demultiplexing mechanism (installed at an exit portion of the optical fiber for amplification). When the signal light and the excitation light enter the amplification optical fiber from the entrance of the amplification optical fiber into the amplification optical fiber, the composition of the multiplexing / demultiplexing mechanism is to separate the signal light and the excitation light amplified from the amplification optical fiber inside the 200404463 and exit the exit Shoot out. In addition, an excitation light reflection mechanism is provided, which reflects the excitation light separated and emitted by the multiplexing / demultiplexing mechanism; and transmits the excitation light reflected by the excitation light reflecting mechanism through the multiplexing / demultiplexing mechanism and emits it from the exit portion. Into the amplification fiber. In the optical amplifying center, the multiplexing / demultiplexing mechanism can also be constituted by a demultiplexing multiplexer. The amplifying optical fiber system has a structure capable of maintaining a single-mode size. The excitation light reflecting mechanism is an optical mirror or a reflective type. Bragg diffraction grating. The eighth optical amplifying device of the present invention includes: one optical fiber for amplification;

The first multiplexing / demultiplexing mechanism is provided at the entrance portion of the amplification optical fiber; and I: 2 multiplexing / demultiplexing mechanism is provided at the exit portion of the amplification optical fiber; the configuration of the first multiplexing / demultiplexing mechanism is from the entrance portion. The externally emitted Mao light is entered into the amplification optical fiber; " The composition of the multiplexing / demultiplexing mechanism is to radiate the excitation light emitted from the outside into the amplification optical fiber from the front \ exit section. The structure of the first multiplexing / demultiplexing mechanism is through the second multiplexing / demultiplexing mechanism, and the aforementioned excitation light, which is radiated from the exit to the amplification light beam, passes through the other path with the incident path of the signal light from the entrance. The component of the No. 2 demultiplexing mechanism is transmitted through the first splitting structure. It is difficult for the π part to emit I to the amplified signal light in the amplification fiber, and other paths of the incident path of the transmission and excitation light. Shoot out from the exit. In addition, an excitation light reflection mechanism is provided.

18 200403463 The excitation light emitted by the mechanism is separated and reflected. It is considered that the excitation light reflected by the excitation light reflection mechanism is transmitted through the first multiplexer from the knife to the structure, and is injected into the optical fiber for amplification from the entrance. In this optical amplifying device, the first and second split-receiver and second-division multiplexers are respectively composed of a demultiplexer, and the first and second systems for the anti-pattern cavity have a structure capable of maintaining single-mode size. The excitation light reflection mechanism is composed of an optical mirror or a reflective Bragg diffraction grating. -The fifth light source device of the present invention includes: a fifth light amplification device that is the light amplification device of the present invention described above; an irradiation light source that emits irradiation light; and an excitation light source that emits excitation light; The entrance or exit section 'introduces the irradiation light from the irradiation light source and the excitation light from the aforementioned excitation light source into the light amplification waveguide and the amplification guide f, and amplifies the aforementioned irradiation light by the action of the excitation light. It is composed of a multiplexing / demultiplexing mechanism and is emitted from the exit. Further, in the light source device described above, the radiant beam < i T & emission is first constituted by a laser light source which emits laser light of a predetermined wavelength. On the other hand, the light treatment device of the present invention is provided with a light source device, which is a light source device having the above-mentioned configuration; and a wavelength converter, which is a treatment that converts the irradiation light emitted from the exit portion of the light source device to a predetermined wavelength. With the irradiation light; and the irradiation optical system, which guides the irradiation light converted by the wavelength converter to the treatment site for irradiation. ... "The exposure device of the present invention is equipped with a 19 ... 20043463 wavelength converter, which converts light emitted from the exit portion of the light source device into irradiation light of a predetermined wavelength; the photomask supports #, which maintains a predetermined exposure The object provided by the pattern does not hold the part, it is to hold the object of exposure; the cover 'illumination optical system is to make the light n and the π-ray projection optical system held by the light u holding part by the light converted by the wavelength converter. It is through the illumination optical system, the image is set ^ the exposure held by the object holding portion through the irradiated light through the mask [Embodiment] In view of the preferred embodiment of the invention ', referring to the drawings, Instructions. FIG. 1 is a light amplification display device according to the first embodiment of the present invention] — 'Inside the glass base with rare earth elements added, there is a light I, which extends from Lu to the right end surface for light amplification.' The pilot wave path 3 for optical amplification is extended. The optical waveguide 3 is composed of a first waveguide 3a (opened from the same wearing surface on the left end face; the straight line extends to the middle portion A) and a second waveguide 3b (smoothly connected to the i-th waveguide 3a, And from the middle part A to the exit part located on the right end surface, it gradually expands into a tapered shape. It also sets the index of refraction, the width of the guided wave path (cross-sectional area), etc. in order to maintain the single mode, and The second waveguide is fluttered in a range capable of maintaining a single mode, and the waveguide is enlarged into a cone. 7 Also, if the shape of the waveguide 3 is symmetrical about the central axis (the direction of travel of the signal light and the excitation light), The tapered shape of the second waveguide 3b can also be increased by 20 200403463. As long as the width of the waveguide is enlarged from the ground to the cone, ^ D & The second waveguide 0 axis, even if the transmission wheel is on it Heart tiger light and excitation light enter the area 5 of the second waveguide 3b. Second, they will not excite the higher-order modes other than the basic mode (zero-order mode). (2U) ~ The figure shows the first waveguide 3a and the second The dihedral shape of the guided wave path is as shown in the figure 2U). The first guided wave ... is rounded from (a (Pl) 'the second guided wave path. 3b maintains the shape of the circular cross section 3b (Ql). Aπ is enlarged to the right side; as shown in the second figure, the ⑻1 guided wave path = has a circular cross section _), and the second guided wave path 3b is enlarged into a cone only on the left and right. As shown in Figure 2 (C), the i-th waveguide m-section Φ 3a (p3) '2nd waveguide 3b maintains a square cross-section, and the state of J province expands up and down into a cone.及 2 (D) as shown in Fig. 2 (D), the wave path 3a has a square cross section 3a (p4), and the wave path 2 of 帛 2 is enlarged to the right and left to taper to form a rectangular 3b (q4). When the signal light and the excitation light are emitted from the population department 4a, the signal light in the I light guide wave path 3 is amplified by the excitation effect of the excitation light, especially in the narrow width (small cross-sectional area) part of the ith guide wave path. It can excite the signal light with good efficiency. Therefore, it has the advantage that the length of the guided wave path is short. At this time, since the guided wave path is enlarged into the miscellaneous wave in the second guided wave path 3b, so in this part, the signal light The mode field diameter (MFD) is enlarged to reduce the optical density slowly, while suppressing stimulated Raman scattering (such as _Ga Scatter ^: SRS), four light wave mixing (F · — ^ Μι_ · ·) Since, phase modulation (Self Phase M〇duiati〇n: spM). The generation and, although the second waveguide 3b is tapered to expand the case to become a multi-mode range

21 200403463 Hours: Expansion: Compared with the case of single-mode range, it is possible to further control the noise light caused by stimulated tearing and scattering, etc., and the generation of self-phase modulation. Optical magnification device t (2) Figure 3 shows a different example of the optical magnification crying mouth structure (second embodiment). The optical amplifier is composed of a first waveguide 3a, (a straight line extending from the entrance portion 4a to the first intermediate portion ..., a second waveguide%), (a smooth connection with the first waveguide 3a, and No.! The middle part A to the second middle part B are slowly enlarged into a tapered shape), and the third waveguide 3 is connected smoothly to the second waveguide 2 and extends linearly with the same cross-sectional shape. To the exit section 4b). In this way-by connecting the exit section 4b with the 詈 筮 q channel, the wood and the younger brother 3 guided wave path 3c, (a straight extension with the same cross-sectional area), Can suppress the spread of the amplified signal light emitted from ... b. The second waveguide 3b is not limited to single-mode, but can be expanded into a heterogeneous to multi-mode range. Optical amplification device (installed in Figure 4) Another different example of the configuration of the optical amplifier (the third embodiment). This amplification benefit 1 'is formed by the first waveguide 3a "(a straight line extending from the entrance portion 4a to the middle portion A with the same cross-sectional shape), and the second guide Wave path ... (With a cross-sectional shape larger than the i-th waveguide 3a ", it extends straight from the middle part to the exit part. ). The width (cross-sectional area) of the first waveguide 3a ”and the width (cross-sectional area) of the second waveguide 3b” of the disk are set to maintain the single-mode range. (Guided wave path%, toward the second guided wave path 3b ", the structure is sharpened without setting a cone, so the width of the second guided 22 200403463 wave path 3b" is set to maintain the range of single mode to prevent When the signal light and the excitation light enter the second guided wave path 3b, a higher-order mode other than the basic mode is formed instantly. In this configuration, 'the same in the second guided wave path 3b', the mode field diameter (MFD) of the signal light is Reduced optical density reduces the generation of Stimulated Raman Scattering (srs), Four Light Wave Mixing (F0U " ave Mixing: FWM), and Self-Phase Modulation: SPM.- Next, the stimulated Raman scattering (SRS) will be briefly explained. The critical excitation power pcr required to reach the Raman critical value can generally be expressed. Rcr = UbAeff) / (gRLeff) In the formula, Aeff is the part of the guided wave path. Effective area, UFF effective length, gR pull The Mann gain coefficient is a value determined by the material of the guided wave path. From the formula, it can be known that 'by increasing the effective area Aeff, the critical excitation power Per 〇 can be increased. ^ Second, for the optical amplifier of the above structure The manufacturing method is described as follows: The method of manufacturing an optical amplifier according to the first to third embodiments described above by an ion exchange method will be described with reference to FIGS. 5 to 10 ^ This method is a hundred first As shown in Figure 帛 5, the light lithography technology used on the surface of the glass substrate (phosphate glass, βκ7 glass, soda lime glazing, etc.) with the addition of rare earth elements such as rhenium is used for photolithography technology. 23 200403463 The opening 13 in the shape of a pavement is patterned to form a metal film 2. The opening 3 corresponds to the shape of the optical waveguide 3 described above, and is formed by the first opening 1 3a (which extends linearly from the one end side I to the middle with a predetermined visibility), and the second opening 3b (from the middle to the other (One end side, enlarged into a cone). Female second 'As shown in FIG. 6, in the melt 18 (those obtained by heating a neutral salt containing a monovalent ion such as Ag to be melted above the melting point), the pattern is formed into a metal film as described above. The glass substrate 丨 immersed for a predetermined time. Thus, as shown in Figure 7, a part of the melt exposed to the opening [8] of the melt is near the surface of the glass. Sodium (Na) ions are replaced with monovalent metal ions' to form a high-refraction region as a guided wave path. 14 (the area where the underline is drawn). : Next, after removing the metal film 12 as shown in FIG. 8, as shown in FIG. 9, # the electrodes (1 5a, 15b) are used to hold the upper and lower surfaces and apply an electric field, as shown in FIG. 0: When the high-refractive region 14 is buried in the glass substrate, the gate refractive region 14 forms the optical waveguide 3 shown in FIG.}, And a large optical device 1 is formed. At this time, the optical waveguide 3 is made into a single-mode size by appropriately setting the concentration of the melt 18, the temperature, the immersion time (ion exchange time), and the application of an electric field. The optical amplifier (1, ^ and #) of the present invention shown in FIG. 1 or FIG. 3 is enlarged into a tapered optical waveguide (3b, 3b,). In order to form a ^ wave path of this shape, a metal film 12 is provided such as The above-mentioned enlargement into a tapered second opening, 13b. Otherwise, the width of the high-refractive region 14 can be enlarged into a tapered shape corresponding to 帛 2open [13 '. However, in this case, the high-refractive region is known to be 14 It is a two-dimensional (width direction) enlarged cone, forming the second optical path shown in Figure 2; elliptical enlarged optical waveguide. As shown in Figure 2 (A), in order to the light a 24 200403463

The wave path also expands in the thickness direction. It is best that the content of the molten metal 18 / 又 // between the holes corresponding to the second opening 13b can be adjusted. Also, if the width is enlarged to increase the immersion moxibustion / thumb / panta, the depth of the high-refraction region 14 can also be a cone-shaped field, which can be applied to the area inside the glass substrate U. The internal activity of electricity 1 can form an optical waveguide as shown in Figure 2 (A). In this case, Iksan's sleeves are dry, and the extension of the optical waveguide path is made straight by adjusting the electrode position and applying a voltage. Ion exchange method (which? Λ In the above method, a glass substrate added with a rare earth element such as oblique (Er) is used, but this method uses _ ordinary glass, and only uses the ion implantation method in the part of the optical waveguide. Add 铒: that is, first, on the surface of a general glass substrate u, (without adding fresh glass = glass substrate), the use of photolithography technology, etc., as shown in Figure 5 The metal film 12 of the shape of the opening 13. Then, on the surface of the glass substrate n located in the opening 13, a rare earth element such as europium (Er) is added by an ion implantation method. In addition, the ion implantation method is generally used in semiconductor manufacturing processes. The technique used is to ionize atoms and molecules in a vacuum and accelerate them from KeV to MeV to irradiate the glass substrate. Because the ion implantation is used, the surface of the glass substrate located at the opening 13 is doped. (Er). Therefore, if the same process as the above-mentioned ion exchange method is performed thereafter, that is, the ion exchange method shown in Fig. 6 to Fig. 10, it is possible to produce 3rd Optical amplifiers with optical waveguides as shown in the figure, etc. 25 200403463 Main · UiA method and reactive M-I engraving method (its J) The above-mentioned optical amplifier device can also be manufactured using the firepower stacking method and reactive ion coin engraving method (about In this regard, please refer to the Papers of the Institute of Electronics and Communications C—J, vol. J77-CI, No. 5 'P. 214-221, 1994. The flame deposition method refers to the gas-phase axis addition method of the optical fiber manufacturing method (soup Method) A method suitable for a plane guided wave path. A method in which raw material gas such as SiCl4 flows into a hydrogen-oxygen burner, and an oxidation reaction occurs in a flame, so that Si02 fine particles and the like are deposited in a substrate form. In the first embodiment, such as As shown in the figure, the lower cladding layer 22 is formed by the hydrogen and oxygen burners 28 stacked on the surface of the Shixi substrate (the soil plate) 21, and the second coating layer is then stacked by the hydrogen and oxygen burners as shown in FIG. A high refractive index core layer M doped with bait (Er) and phosphorus (P) is obtained. After that, j electric furnace: The core layer 23 is heated to several thousand and several hundred tons to make it transparent. Its in the x-core. On the layer 23, a photoresist layer corresponding to the shape of the optical waveguide is formed using a photolithography technology (corresponding to the photoresist layer of the open σ 13 shape in FIG. 5), === is a photomask, and the reactive ion method is used to remove Said photoresist: Bottom: the outer core layer 23. Thereby, as shown in FIG. 13, a core layer (corresponding to a waveguide layer 24 made of light corresponding to a small heart-shaped layer) is formed on the m 旻 layer 22. Next, the fire part using the hydrogen-oxygen burner 28 is formed. The cladding layer 22 is stacked to form the upper Qiu spoon, Luo Qiu, and this is applied to the electric furnace, which is transparent: put: install 24 methods, ㈣_ 购 和 (_ 所 ^ 便 ^ 置 According to this and 'in the above description Materials used in each manufacturing method

26 200403463 In addition to the above glass, crystals such as lithium niobate can also be used. -Optical Amplifying Device (Jade 4) This optical amplifying device 1 〇 (the fourth embodiment), as shown in FIG. 15, has a light guide for light amplifying inside a glass substrate 10 2 to which a rare earth element is added. The wave path i 03 is provided with a light switch section 1 05 ′ at the rear of the light guide wave path and the first and second output guide wave paths 106 and 107 for emitting an optical signal allocated by the light switch section 105. The optical waveguide 103 has an entrance portion 104a which is opened at the left end of the glass substrate 102. Signal light is incident from the entrance portion, and excitation light (pump laser light) is supplied to excite the addition of rare earth elements (such as ytterbium, europium, etc.) to Amplify the signal light. As described above, the signal light amplified in the optical waveguide 103 is input to the optical switch unit 105, and is distributed here to the first and second outgoing waveguides 106, 107, from the i and the first 2 exit sections 104b, 104c (open at the right end of the 1st and 2nd output waveguides 106, 107 and exit. Also, 'these optical waveguides 103, 1st and 2nd output waveguides' 106, ι The refractive index and the width of the waveguide (cross-sectional area) of 〇7 are all set to maintain the single mode.

The above-mentioned optical waveguide shape forms the first B; Figs. 16 and 17 show the structure of the optical switch unit 丄 05 in detail _ 1 〇 3

The part 105 is slowly bent into a U-shaped 1 switch waveguide i05a. In addition, the second switch waveguide 'is linearly symmetrical with the first switch waveguide 105 (U-shaped), and the waveguide 1 05a is close to (about 5 times the interval of the signal light wavelength) the first glass switch above 105b. The guided wave path 105a is connected to the first outgoing guided wave path 106. The switch guided wave path 105b is connected to the second outgoing guided wave path 107. First and second switching waveguides 105a, 27 200403463 On the surface of the glass substrate 2 are provided first and second heaters i〇8a, i〇8b. These first and second heaters i〇8a, i〇8b The controller 109 is connected to the power source 109b. The optical switch unit 105 having such a structure is configured by the first and second switch waveguides 105a, 105b, and the first and second heaters i〇8a, i〇8b.

Using the directional coupler type optical switch of the thermo-optic effect (but 0) of the glass substrate, the alignment is performed by the controller 109a! And applying voltage control to the second heaters 108a and 10 讣 to distribute the optical signals from the optical waveguide 103 to the first and second emission waveguides 106, 107 and emit them.

The operation principle will be described below. In an area where two single-mode guided waves formed by the first and second switching guided waves and 105a and 105b are in close proximity, the electric field distribution of the named t-mode is stored (refer to Figure 18 (A)) and the odd The electric field distribution of the modes (Exhibit 8 (B)). The transmission constants of the two modes are different. Therefore, in the optical switch, when the optical signal is transmitted in the} and the second switch guide wave path i05a, the transfer of husband power is periodically generated between the two guide wave paths 1 () 5a, 嶋. In the odd and even modes, the phase difference is a redundant distance, and the optical power is 100% shifted. Those who use the directivity of the thermo-optical effect of the glass substrate to make a coupler-type light-on relationship take advantage of this phenomenon. By controlling the voltage applied to the i-th and the first port 108a, 108b, it can be between 0% and 100%. Control the transition of the optical power from the 1st switch waveguide to the 2nd switch waveguide arbitrarily. That is, can come from the first! And the second outgoing waveguide 1,06, m the output light Λbl 'is set to 0% from the transition of the optical power, and only the optical signal is output from the second waveguide 106, and the optical power is transmitted from the second outgoing waveguide only. The state of the optical signal output of the wave channel 1G7, arbitrary: 28 200403463. Eight, especially the switch unit 105, but you can also use Mach-Zid (Mach-

Zender) type switches, etc. to replace, electric pull- ^ directional coupler type optical switches. At this time, there is only one radio guided wave system connected to the optical switch unit 105 (for example, only the younger 1 emits the guided wave path 106). The light emitted by Zhou Zheng from the outgoing guided wave path is in addition to heat. Light (T0) effect library ice, sound and light chirp effect. In addition to the application, the electro-optic effect can be described. Second, a method for manufacturing the optical amplifier according to the fourth embodiment having the above-mentioned configuration will be described below. The raccoon exchange method (Part 3) The method for manufacturing the optical amplifier using the ion exchange method is shown in Figs. 19 to 24. This method, as shown in FIG. 19, first uses the surface of a glass substrate (phosphate glass, BKK7 glass, soda lime glass, etc.) 111 which is added with rare earth elements such as thorium (Er), and uses the light microscopy used in the semiconductor process. Shadowing technology, two openings 113, 114 are provided to match the shape of the above-mentioned optical waveguide, and a metal film 112 is formed by patterning. One of the openings Π3 is the first opening η corresponding to the above-mentioned optical waveguide ι03, the second opening 113b corresponding to the first switching waveguide 105a, and the third opening 113c corresponding to the first outgoing V-wave channel 106, such as As shown in the figure, the glass substrate is formed by connecting and extending in a line from one end side to the other end side of the surface. In addition, the other opening 114 is formed by a fourth opening 114b corresponding to the second switching waveguide 10k and a fifth opening corresponding to the second outgoing waveguide 1007 connected in a line. 29 200403463 Secondly, as shown in FIG. 20, in the melt 118 (those obtained by heating a monovalent neutral salt containing Ag and the like to a temperature above the melting point), as described above, the glass is patterned to form the metal m 112. The substrate lu is immersed for a predetermined time. As a result, as shown in Figure 21, in the openings exposed to the melt, the openings of 18, 13, and 114, near the glass surface, the sodium ions are replaced with monovalent metal ions to form a high refraction as a guided wave path. Areas 115, 116 (area with an overcast day). Next, as shown in FIG. 22, after removing the metal film 112, as shown in FIG. 23, by holding the upper and lower sides of the electrode U7a to apply an electric field, as shown in FIG. 24, the high refractive regions 115 and 116 are buried. When entering the glass substrate ill, the high-refractive regions 115 and 116 can form the optical waveguide 103, the first and second switch waveguides 105a, 10 讣, and: the second and second outgoing waveguides 106, 1〇7. At this time, each optical waveguide is set to the size of a single mode by using the appropriate concentration, temperature, and immersion time (ion exchange time plant, applied electric field, etc.) of the alpha melt solution 118. < Above the i-th and second switching waveguides 5a ′ 105b on the surface of the substrate 111, a photolithography technique is used to prepare heaters 1a, 108b and electrodes, and the heaters 108a and 108b are removed from The electrode of Lianchun was connected to the controller 109a, and the controller 109a was further connected to the power source i09b. The optical amplifier f 1 () 1 shown in Figures 15 to 17 is completed. Sub-exchange method 30 200403463 rare earth elements such as erbium (Er) are added. That is, first, a glass substrate 111

Glass substrates of Rare Earth elements in Kazan Temple) The surface of you Tian L, M Nu J, using photolithography technology, etc., as shown in Figure 19, forming a metal film with an ancient path and an opening 113, 114 with a waveguide shape. 11 2. And on the surface of the glass substrate 丄 丄 丄 located in the opening n ^ i13, U4, the rare earth 70 element such as erbium (Er) is doped with the main method of ion implantation in ancient and soil. Since the surface of the glass substrate at the openings 113 and 114 is doped with erbium (Er) by the ion implantation, therefore, the manganese is calculated as ^ ^, π, and right after that, the ion-interaction method is performed. When the same process is performed, that is, when the ion parent conversion method shown in FIG. 2G to FIG. 24 is performed, the above-mentioned optical waveguide can be formed. That is, if the first and second switch waveguides 105a, 105b on the surface of the glass substrate 111 'are formed using the photolithography technology to create a force σ 埶 weet t, mouth iU8a, 108b, and electrodes, and connect the controller 109a With the power source i09b, the production of the optical amplifying device 101 shown in Fig. 15 to Fig. 17 is completed. Brother stacking method and reaction 上述 The above-mentioned optical amplifying device can also be manufactured by flame stacking method and reactive ion engraving method. In this embodiment, first, as shown in FIG. 25, the lower cladding layer 122 is formed by stacking the surface of the silicon substrate (S i substrate) 1 21 with hydrogen and oxygen at 4 lice burning to 128, and secondly, as shown in FIG. 25 Therefore, the Yishan Luan Hall does not use the oxyhydrogen burner 28 to deposit a high refractive index core layer 123 doped with Er (Er) and butterfly. Then, the core I 23 was heated to several hundreds of hundreds in an electric furnace. C, make the emperor transparent: Secondly, in the core layer 1231, using photolithography technology,

A photoresist layer that conforms to the shape of the light guide wave path (to the goose cage), Q said V 対 Yingdi 19, two openings 113, 11 4 shape photoresist layer. Use this photoresist layer as a mask for Reactive ion 31 200403463 sub-etching method 'removes the core 1 123 except the part covered by the photoresist layer. Thereby, as shown in the "27th ®" on the lower cladding layer 122, the outgoing waveguides are formed by the optical waveguides 103, the i-th and second switching waveguides 105, and 1 and 2. The core layer with a shape of 106, m is composed of two waveguide layers 124, 125. Secondly, the upper cladding layer 126 (Fig. 28) is deposited on the lower cladding layer 122 by the flame stacking method using the hydrogen-oxygen burner 128 to cover the two waveguide layers 124 and 125. If the heating is made transparent, the above-mentioned optical waveguide can be formed. Then, on the first and second switching waveguides 105a and 105b on the surface of the glass substrate, the photolithography technology is used to create a heater 108a, 1 〇8b and the electrode, Gu Ren connected to the controller 10 9a and the power source 〇9b, wrong, r ^ ^ U buckle live 'brother' Figure 15 ~ Figure 17 completed the production of the optical amplifier 101. In addition, in each of the manufacturing methods described above, "in terms of materials", in addition to the above-mentioned glass, it is also possible to use crystals such as lithium niobate. Figure 29 is a large-size diagram showing a light magnifying device of a fifth embodiment of the present invention, which is located inside a glass substrate 202 to which a rare earth element such as bait (Er) is added, and has a left end surface (inlet-side end surface). 202a extends to the right end surface (exit: end surface) of the optical amplification waveguide 203, 204, and 205. Figures 3 and 2 and 1 show the cross-sections along the arrows β-β and CC of the optical amplifier 201. From these figures, it can be seen that the optical amplification waveguide system consists of an entrance-side waveguide 203 (from the entrance side). The entrance part of the end face is extended from the middle part to the middle part 207), and two branched waveguides 204 and 205 (in the middle part 32 200403463 207, branching from the inlet-side waveguide 203 and extending toward the outlet-side end face 202b). The branched waveguides 204 and 205 are opened at the exit-side end surface 202b to form the exit portions 204a and 205a. These entrance-side waveguides 203 and the divided-diffused waveguides 204 and 205 each have a size (cross-sectional shape) capable of maintaining a single mode. s When using this optical amplifying device 2 01 to perform optical amplification, the signal light and the excitation light are incident from the entrance portion 203a into the entrance-side waveguide 203, whereby the added rare-earth element is excited by the excitation light. The energy level of the shell electrons of the rare earth element forms an inverted distribution, and the signal light is amplified. The signal

The amplification of light is performed in the entrance-side waveguide 203 and the branched waveguides 204, 205. However, at this time, the peak power of the amplified light will cause stimulated Raman scattering (SRS), so the peak power will not change. It is above the critical value (pG) of stimulated Raman scattering. However, in the optical amplifying device 200m of this embodiment, the entrance-side waveguide 203 is branched into two branched waveguides 204, 205. Therefore, in each of the branched waveguides 204, 205, the peak power The maximum value may become the optical amplification of the above-mentioned critical value (PG). Therefore, if the π part from the two divergent waveguides 204, m is examined, the light signal emitted by 2G5a will be multiplexed.

= Contrary to the case of only a single optical waveguide, it can amplify the optical signal to twice the power. Manufacturing method of the main unit 1 Next, a manufacturing method of the optical amplifier according to the fifth embodiment having the above-mentioned configuration will be described below. Ion exchange 5) 5) The method for manufacturing the optical amplifier 201 will be described. This manufacturing method is called ion exchange process ^^ μ

33 200403463 Θ Brother 3 7 Figure. First, as shown in Figure 32, this method uses the light microscopy used in the semiconductor process on the surface of a glass substrate (phosphate glass, βκ7 glass, soda lime glass, etc.) 211 with rare earth elements such as oblique (Er) added. Shadow technology, the openings 213a to 213c are provided to match the shape of the waveguide to form a metal film 212 by patterning. As can be understood from the shape of Fig. 32, the openings correspond to the above-mentioned entrance optical waveguides 203 and divergent waveguides 203 in% to 213c, which are unique shapes. ^ Secondly, as shown in FIG. 33, in a molten liquid 218 (made by heating a neutral salt containing a monovalent ion such as Ag to melt above the dazzling point), as described above, the glass is formed into a metal film 212. The substrate 211 is immersed at a fixed timing:. In this regard, as shown in FIG. 34, the opening 2 exposed to the melt 218 is known as 213c. Sting, on the surface of sin near the glass, sodium (to) ions are replaced with monovalent metal ions to form as a Mo, refracted area 2ih ~ 215c (the area with a negative line during the day, Because the cross-sectional position of the area ma is different, it is not shown). Secondly, after removing the metal film 212 as shown in FIG. 35, as shown in FIG. 36, the upper and lower surfaces are held by electrodes 217 "7b to apply an electric field." Therefore, if the birefringent regions 215a to 215c are not embedded in the glass substrate 211, the light can be enlarged and placed as shown in the figure 29. Also, at this time, the burial cause, family A, and 糸The concentration of the molten liquid 218, the degree of the dish, the temperature of the next day (Ion exchange Nihonmon gate, and another 4 rooms), the application of an electric field, etc. are used to make 203, 204, and 205 into a single mode. Dimensions. The method of manufacturing the optical waveguide device is not limited to the above method, and the ion implantation method can be used only in the part where the optical waveguide is manufactured. It is difficult to add it selectively. Rare earths such as erbium (Er) and sieves are used to produce them, and X can also be produced by the fire deposition method and reactive ion etching method. 34) Figure 38 shows the present invention. The optical amplifying device of the sixth embodiment is mounted on the inside of a glass substrate to which a rare earth element such as thorium (Er) is added. / 、 The light amplification waveguides 322 ~ 325 extending from the left side (inlet-side end face) 321a to the right end surface (outlet-side end face) 321b. The light-amplified waveguides in this optical amplification device 320 are guided by _ population side The wave path extends from the entrance part 322a at the entrance 'end surface 321a to the first intermediate part 327), and two knife divergent wave paths 323' 324 (at the first! Intermediate part 327a, from the entrance side guide, the path 322 knife diverges to the exit The side end surface 32m) and the exit side waveguide 325 (the branched waveguide 323324 merges at the second intermediate portion 327b and extends to the exit side end φ 321b). The exit side waveguide 325 is opened at the exit side end surface 321 Out. ⑽, bifurcated waveguide 323 32H The 4 entrance-side waveguides, 324 and exit-side waveguides 325 all have the size (cross-sectional shape) that can maintain a single mode. :: Use this light amplification ... 20 for optical amplification At the time, the signal light and the two-in-degree portion 322a are incident into the entrance-side guide wave path 322, and the amplification of the added rare-earth element Xinguang is excited by the excitation light. In this optical amplifying device 320, an entrance-side waveguide 322 is provided. Between the exit-side guides 325, the two peaks may be two-way 323, 324 due to the divergence into two diverging-paths 323, 324. Therefore, the exit from the exit-side guides 325 \ up = limit value (p Compared with the case where 35 200403463 is composed of a single optical waveguide, the optical signal emitted by W 325a can amplify the optical signal to twice the power. (7) Item 39 of the optical amplifying device is a light amplifying device 330 according to a seventh embodiment of the present invention, which has a glass substrate 33. The broken glass substrate 331 is connected to the i-th glass substrate 33 (1). Glass, that is, glass made of rare earth elements such as obliquely added), and second glass substrate 331-2 (made of glass added with rare earth elements such as solution). In addition, within the first glass substrate 331 1 #, δ also has an optical waveguide (from the entrance-side signal optical waveguide 332 extending from the left end surface (the entrance-side end surface) 331a) and the entrance-side signal optical waveguide at the middle portion. Wave path 332 is divided into two extensions of the first and second signal optical divergent waveguides 333a, 334a), and the i and second excitation optical waveguides 336a, 336b, and the first signal optical divergent waveguide 333a and -1 excitation The optical waveguide 336a is merged by the first demultiplexer (WDM) 338a, and the second signal optical divergent waveguide 334a and the second excitation optical waveguide 336b are merged by the second demultiplexer (WDM) 338b. Further, in the second glass substrate 331-2, first and second branched amplification waveguides 333b and 334b through which the light multiplexed by the first and second demultiplexers 338a and 338b pass are formed. When the optical amplifying device 330 is used for optical amplification, the signal light enters and enters the entrance-side signal optical waveguide 322, and the excitation light enters the i-th and the second-excitation optical waveguides 3 3 6 a, 3 3 6 b . In this way, the signal light from the entrance-side signal optical waveguide 332 into the first signal optical divergent waveguide 333a and the excitation light incident on the first excitation optical waveguide 3 3 6 a are weeped by the first multiplexing 36 200403463 ( WDM) 338a to combine the waves, and then enter the first branched amplified waveguide 333b, .... In the first branched amplified waveguide 333b, the rare earth element added by the excitation light excites the signal light. It is enlarged, and exits from the exit part 333c which the right end surface 331c opened. Similarly, the signal light entering the second signal optical branching waveguide 334a from the entrance-side signal optical waveguide 332 and the excitation light entering the second excitation optical waveguide 336b are combined by a second wavelength multiplexer (WDM) 338b. The wave then enters the second branched amplified waveguide 334b, amplifies the signal light in the second branched amplified waveguide 334b, and exits from the exit portion 334c of the right end surface 331c. As described above, the amplification of the signal light that is incident on the entrance-side signal optical waveguide 322 is performed in the first and second branched amplification waveguides 333b, 334b. Therefore, in each of the branched amplification waveguides 333b, 334b, It can perform optical amplification with the maximum peak power being the above-mentioned critical value (Pg). When the optical signals emitted from the two exit-ports 333c and 334c are combined, it can be combined with a single optical amplification waveguide. Compared with the optical amplification, the optical signal can be amplified to twice the power. Optical Amplifying Device (No. 8) FIG. 12 shows a light amplifying device 340 according to an eighth embodiment of the present invention, which has a glass substrate 341. The glass substrate 341 is a first glass substrate 341-1 (composed of ordinary glass). And a second glass substrate 341_ 2 (consisting of a glass added with a rare earth element such as thorium). In addition, inside the first glass substrate 341-1, a signal optical waveguide (from the left end surface (entering end surface) 3 41a) is provided at the entrance-side signal optical waveguide 3 4 2 and at the first intermediate portion 347a. The entrance-side signal optical waveguide 342 is divided into two extensions 37 200403463 (consisting of the first and second signal optical waveguides 343a, 344a), and the first and second excitation optical waveguides 346a, 346b, and the first signal optical divergent waveguide 343a and the first excited optical waveguide 346a are combined by the i-th multiplexer (WDM) 348a, and the second signal optical divergent waveguide 344 & and the second and the second optical waveguide 346b are connected by the second demultiplex Worker (WDM) 348b dates. Further, the second glass substrate 341-2 is formed with j and second branched amplification waveguides 343b, 34 which are multiplexed by the first and second wave multiplexers 348a, 348b and multiplexed light, and The divergent amplified waveguides 343b and 344b merge at the second intermediate portion 347b and extend to the exit-side waveguide 345 of the exit-side end surface _341b. The exit-side waveguide 345 is opened at the exit-side end surface 341b to form the exit portion 345a. When the optical amplifying device 340 is used for optical amplification, the signal light enters the entrance-side flood optical waveguide 342, and the excitation light enters the first and second excitation optical waveguides 346a and 346b. In this way, the signal light from the entrance-side signal light guide "wave path 342 enters the fi signal light divergent waveguide 343a and the excitation light that enters the first excitation light waveguide 346a is transmitted by the i-th multiplexer (WDM) 348a. Combine them, and then enter the i-th branched amplified waveguide _343b. Similarly, the signal light from the entrance-side signal optical waveguide 342 into the second-signal optical branched waveguide 344a and the excitation light that enters the second excited-light waveguide 346b. The wave is multiplexed by the second division multiplexer (WDM) 348b, and is then injected into the second branched amplified waveguide 344b. As a result, within the first and second branched amplified waveguides 343b and 33, The signal light is amplified separately and exits through the exit side guide 345 and the exit portion 345a after being combined. As described in w, the signal light entering the entrance side signal light guide 342

38 Amplification is performed in the first and second points. The branched guided wave paths 343b and 344b are respectively ordered because they exit through the exit side guide turbidity 亡 QJ, and are ejected. Therefore, they are in the divergent amplified guided wave paths 343b and 344b. , Who can be everywhere wrp. ^ The maximum value of the peak power of D is the light amplification of the above-mentioned critical value (P0). The light signal emitted from the exit of a single silt road 345a is formed by the early nine-amplified guided wave path.氺 氺 氺 ^. 51 Compared with the case of first enlarging, the optical signal can be amplified to twice the power. · Regarding the 7th and s 杳 a ^ cry mentioned above, the sub-wave multiplexing port used by your field # and the 8th embodiment is described using FIG. 41. Blooming I ^ Here, the symbol 220 is used to represent an example of the configuration of the split-wave evening operation. As shown in the figure, after approaching, 'converge to u, and then divide the V, 2Vt # guided wave path 41st (A ) As shown in the figure, the composition of the i, ,, and bar. In other words, if you pick up and pick up a red person, the second brother will measure the guided waves at the entrance 221, 222, and gradually go to 22S. The "moxibustion" of the horse in the state will be the first and second exit side guided waves, and will be stored in the coupling section (area) 225. + # The structure of the two modules (refer to the figure of the 4th child in the even and verifiable constant f)). Since the transmission of these two modes changes periodically. The surface interference interference unit moves in the area, and the optical power is due to: If the length of the coupling # 225 is set so that the parity is even, ^, ,,, will be emitted to the opposite side of the guided wave path. For example, the light entering the waveguide 1 on the entrance side of Brother 1 is emitted to the second waveguide on the exit side ^ Conversely, if the length of the coupling portion 225 is set so that the phase difference between the even and two modes becomes… several times, then Light-is a guided wave path that exits to the incident guide, & d. For example, the entrance-side guided wave path 221 and the u are first emitted to the first exit-side guided wave path 223 39 200403463. Here, because the number of transfers is also contracted, and the number f is due to the wavelength. It is different. Therefore, if the length of the coupling portion 225 is set so that the phase difference between the odd and even modes of the signal light wavelength becomes; an even multiple of τ and the phase difference between the odd and even modes of the excitation light wavelength becomes an odd multiple of 7Γ. Signal light is emitted to the same side of the waveguide, and excitation light is emitted to the opposite side of the waveguide. Therefore, in Example h, if the excitation light is incident on the first entrance side waveguide 22 and the signal light is incident on the second entrance side waveguide 222, then the excitation light and the signal light are emitted simultaneously on the second exit side waveguide, The two will be combined. In addition, if the excitation light and the signal light enter the first entrance-side guided wave @ 221 at the same time, the signal light exits to the second exit-side guided wave path 223, and the excitation light exits to the second exit-side guided wave path m. Will be split.

Light amplification device (W, FIG. 42) is a light amplification device 401-1 showing a ninth embodiment of the present invention. The light amplification device 401-1 has a glass substrate, and the central glass substrate 40 (a glass containing rare earth elements such as thorium is added) The substrate is set at the center, and the left and right glass substrates 404 and 407 are bonded to the left and right (that is, made of a general substrate, that is, made of glass that does not add rare earth elements such as thorium). The center glass substrate Inside 402, a light amplification waveguide 403 extending from the left bonding surface (the bonding surface with the left glass substrate 404) 402a to the right bonding surface (the bonding surface with the right glass substrate ο) is provided 402. This optical amplification waveguide 4 0 3, as shown in Figure 43 (showing the section along arrow d-D of Figure 42), is composed of a light-refracting region with a circular cross-section formed inside the central glass substrate 402. 200403463 in The left glass substrate 404 is provided with a first excitation optical waveguide 405a and a first signal optical waveguide 405b extending from the left end surface 404a. These waveguides 405a and 405b are merged by a first demultiplexer 406 and Optical amplification guided wave path 403 The right glass substrate 407 is provided with a second demultiplexer 408 (which is connected to the optical amplification waveguide 403), and a second excitation optical waveguide 409a and a branch extension from the second demultiplexer 408. The second signal optical waveguide 409b, these waveguides 409a, 409b are opened at the right end surface 407a of the right glass substrate 407. Also, the second excitation optical waveguide 409a opening is formed at the right end surface 407a of the right glass substrate 407. An optical mirror 41 is provided for regular reflection of the light passing through the opening. When the optical amplifying device 401-1 of this structure is used to amplify the signal light, the excitation light is incident on the i-th excitation light guide path. 405a, the signal light to be amplified is incident on the first signal light guide wave path 405b. These excitation light and signal light are guided by the first demultiplexing multiplexer 406 to be multiplexed to the optical amplification In the guided wave path 403. In this way, in the optical amplification guided wave path 403, the added rare-earth element elements are excited by excitation light, thereby forming an inverted distribution of the energy levels of the shell electrons of the rare-earth elements. Zoom in on the signal spring. In this way, the The signal light and the excitation light are separated from the optical amplification waveguide 403 by the second division multiplexer 408 into the signal light and the excitation light, and the excitation light is emitted to the second excitation light guide 409a, and the amplified signal light is emitted and output to the brother 2 signal optical waveguide 409b. Here, the exit portion of the second excitation optical waveguide 409a is opposed to the optical reflector 410 disposed on the right end surface 407a of the right substrate 407, and is emitted to the second excitation optical waveguide 409a. The excitation light is reflected by the optical mirror 41 (), and then

41 W0403463 is emitted from the second excitation optical waveguide 409a through the second multiplexer 408 to the optical waveguide 403. Therefore, in the optical amplification waveguide 403, in addition to the excitation light sent from the first excitation optical waveguide 405a, the rare earth elements are also reflected by the reflection mirror 410 and excited from the second excitation optical waveguide 40 as the returned excitation light. 'And perform efficient amplification. Since the first and second demultiplexers 406 and 408 have the same configuration as those shown in Fig. 41, their description is omitted. Next, the manufacturing method of the optical amplifier according to the ninth embodiment having the above-mentioned structure will be described below. Integral Exchange Method Hereinafter, an example of a method of manufacturing the optical amplifier device 401-1 will be described briefly. The rhenium manufacturing method is called an ion exchange method, and the processes are sequentially shown in FIGS. 49 to 49. As shown in Figure 44, this method is based on the surface of a glass substrate (phosphate glass, βκ7 glass, soda-lime glass, etc.) with rare earth elements such as gadolinium. The opening 417 in the shape of the wave path is patterned to form a metal film _ 41 6. From the shape in FIG. 44, it can be seen that the opening 4 丨 6 corresponds to the shape of the above-mentioned optical amplification waveguide 403. Next, as shown in FIG. 45 In a molten solution 42 ° (made by heating a neutral salt containing monovalent ions such as Ag to be melted above the melting point), as described above *, the glass substrate 415 patterned to form the metal film 416 is immersed for a predetermined time. Therefore, as shown in FIG. 46, in the portion of the opening 417 exposed to the molten liquid 42, sodium (Na) ions are replaced with monovalent metal 42 200403463 ions near the glass surface to form a high refraction as a guided wave path. Area 418 (the area with a negative line during the day. Secondly, after removing the metal film 416 as shown in FIG. 47, as shown in FIG. 48, the upper and lower sides are held by electrodes 42la, 421b to apply an electric field, as shown in the first fairy. High refraction area 4 If it is buried inside the glass substrate 415, 'the optical amplification device 40h can be produced as shown in Fig. 42. At this time, 4 sets the ion concentration, temperature, immersion time (ion exchange time) of the melting solution appropriately, Applying an electric field, etc., cuts the optical waveguide to a single-mode size. Y As mentioned above, although the explanation has been given of the case where the optical waveguide is amplified in the central glass substrate 402, the left and right glass substrates 404,. In the case where various waveguides and demultiplexers are installed, the method of manufacturing the optical amplifier 401-1 is not limited to the above method, and the ion implantation method may be used only in the portion where the optical waveguide is formed. ; ,, and other rare earth elements to produce, and also can be produced by flame deposition method and reactive ion etching method (refer to the paper of the Institute of Electronics and Communications CI 'νοί. ΠΗ], No. 5, pp214_221 M in 1994 »Eighth, Dou ’s light magnifying device in the form of the present invention, which is applied to the younger brother of the present invention, refers to FIG. Brother 42 pictured, Brother 1 κ Only a part of the configuration of the optical amplifying device 401-1 is different. Therefore, the same components as the optical amplifying device 40H are the same as those described above, and the description is omitted. In addition, this optical amplifying device 40b 2. It replaces the optical mirror 41o of the optical amplification device 401-1 shown in the figure from 9m to 40m. On the second laser, the wave path 409a is also set up, and only the Bragg diffraction grating 43 200403463 411 is provided. The structure is different, and the other parts are exactly the same. The Bragg diffraction grating 411 'having a function of reflecting by the excitation light separated by the second wavelength multiplexer 408' performs the same function as the optical mirror 410. Therefore, with this optical amplification device 401-2, in the optical amplification waveguide 403, in addition to the excitation light sent from the first excitation optical waveguide 405a, the rare earth elements are also reflected by the Bragg diffraction grating 411 The excitation light returned from the second excitation light waveguide 40 9a is excited, and high-efficiency amplification is performed. Optical Amplifying Device (1) The optical amplifying device according to the eleventh embodiment of the present invention will be described with reference to Figure 51. The optical amplifying device 401-3 in this embodiment and the optical amplifying device 40 in the fourth embodiment described later 4 The same components as those of the optical amplifying device of the first embodiment shown in FIG. 42 are given the same reference numerals and their descriptions are omitted. In this optical amplifying device 40-1, the optical amplifying device is removed In 401-1, an optical reflector '410' arranged on the right end face of the right glass substrate 407 and replaced with an optical reflection mirror at a position opposite to the first excitation light guide 405a of the left end face of the left glass substrate 404. The point 41 is different from the optical amplifier 4 (^ 4 in FIG. 1). _ This optical amplifier 401-3 is for entering the signal light from the first optical waveguide 405a, and is emitted from the second exciting optical waveguide 409a. Excitation light. The signal light incident in this way is guided into the optical amplifier and large waveguide 403 through the first division multiplexer 406, and the incident excitation light passes through the second division multiplexer 408. It is guided into the optical amplification waveguide 4 and as described above, in the optical amplification waveguide 4 After the roar light is amplified in 0 3, the amplified signal light is emitted to the outside through the second signal optical waveguide 409b through the second demultiplexer 408

44 200403463. On the other hand, the excitation light chants i crystals only 4 I μ.

The mirror reflects and excites the excitation light returned from the first excitation light guide 405a to perform efficient amplification. M large device (1) The light amplifying device of the twelfth embodiment of the present invention will be described with reference to Fig. 52. The light amplifying device of this embodiment only has the first excitation at the left end surface of the left glass substrate 404. The point where the Bragg diffraction grating 411 is provided on the optical waveguide 405a is different from the optical amplification device _ 401-3 of the third embodiment described above. In this optical amplification device 40, the light from the i-th signal is also used. · Signal light is input into the guided wave path 405b, and excitation light is input from the second excitation light waveguide 409. Therefore, the signal light guided to the optical amplification waveguide 403 through the first division multiplexer 406 is transmitted through the second branch. The wave multiplexer 408 is guided to the amplification of the excitation light in the optical amplification waveguide 403 and is amplified, and is emitted from the second division multiplexer 408 to the outside through the second signal optical waveguide 409b. On the other hand, the excitation light After passing through the optical amplification waveguide 403, it is emitted to the first excitation optical waveguide 405a by the first demultiplexer 406, and is reflected by the cloth rag diffraction grating, and then passes through the first excitation optical waveguide 405a and passes through the first branch. Multiplexer 406 and guided to optical amplification waveguide 403 Therefore, with this optical amplification device 401-4, in the optical amplification waveguide 403, in addition to 45 200403463, the excitation light sent back from the second excitation optical waveguide 409a, the rare-earth elements are also grating-free. 411 reflects and excites the excitation light returned from the first excitation light guide 405a, and performs high-efficiency amplification. Light source device Next, the light source I constituted by using the light amplification device having the above configuration is set to 30, and it will be described with reference to FIG. 53. The light source device 30 is composed of a laser light generating section 31 that generates laser light and a light amplifying section 40 that amplifies the laser light generated from the laser light generating section 3m.

"The field laser light generating unit 31 has a laser oscillating at a desired wavelength. This laser 32, for example, is composed of a pulse-driven oscillation oscillating wavelength of 1 544, and a semiconductor laser. A long control mechanism, for example, 'when using a semiconductor laser as the laser, it can be achieved by performing temperature control of the DFB semiconductor laser, and by this method, the oscillation I wavelength can be further stabilized and controlled to —A fixed wavelength, or fine adjustment of the output wavelength. As the age-controlled wavelength of the feedback control when this oscillation wavelength is controlled to a predetermined wavelength, the oscillation wavelength of the DFB semiconductor laser is used. This half; body laser 32, equipped with a pulse control mechanism 33, which performs current control to make the pulse «. By this, the pulse width of the pulse light produced can be controlled within the range of G.5ns ~-, and the range below the ugly Hz ( For example, the range of chest z to l0_z) controls the repetition frequency. As an example of this configuration example, the system uses pulse control mechanism 33 to produce pulse width-pulse light with a weight of 100 kHz. The pulses obtained in this way Laser light output, system The optical isolator 46 200403463 34 is guided to the optical amplifying section 40 and amplified in the optical amplifying section 40. In this optical amplifying section 40, first, the first-stage optical amplifier 41 is used for amplification. The first-stage optical amplifier 41, which is composed of the optical amplifiers 丨, j, 101, 320 described above. The output (excitation light) from the excitation semiconductor laser 41a is passed through a wavelength division multiplexer (Wavelength Divisian).

Multiplexer (referred to as WDM) 41b is input to amplify the laser light input through the optical isolator 34. The output (laser light) of the first-stage optical amplifier 41 amplified in this way is guided to the optical beam splitter_mirror 43 by the narrow-band filter 41a and the optical isolator 42b, and is divided into complex numbers by the beam splitter 43 in parallel A wave of channels. A second-stage optical amplifier is connected to each channel divided into a plurality of channels. However, in Figure 53, only one channel is representatively displayed. In addition, the narrow-band filter 42a cuts off the -ASE light generated by the optical amplifier 41, and transmits the wavelength of the transmitted light through the DFB semiconductor laser 32 (wavelength · approximately less than lpm). A narrow band is applied to the optical amplifier so that the A light enters the subsequent stage, which can prevent the amplification and gain of the laser light from being reduced. Here, the transmission wavelength width of the narrow-band filter is preferably about 1 mp, but since the wavelength width of the ase light is about tens of nm, the transmission wavelength width obtained at the current point is even about 100 pm. The narrow-band filter state is also no problem in general use, and can cut off ASE light. · The second-stage optical amplifier 45 is also composed of the above-mentioned optical amplifiers 丨, r, i ", · \ 〇1 > '320, and the output (laser) from the excitation semiconductor laser 45 & is input through WDM45b, The output light amplified by the first-stage optical amplifier ο is further amplified. The output of the second-stage optical amplifier 45 47 200403463 22: With the wave filter 46a and the optical isolator 46b, the second output from the output terminal 47 = 47, which is focused on all the multiple channels to be bundled, and 4ΪΓ is amplified by the first-stage optical amplifier 11 41 or the second-stage optical amplifier, "the vice, 4G BU 丨, 4G BU 2, he ~ 3, 40 BU 4 The composition ^ 'does not require WDM41b, WDM45b. In addition, in the above embodiments, a configuration example is shown in which an isolator 1 is appropriately inserted in each connection portion to prevent the influence of return light, or a narrow-band filter is inserted in order to obtain good amplification characteristics. However, ::: or the configuration of the first wave π filter, or its number is not limited to the previous α implementation, for example, depending on the required accuracy of the light source device of the present invention, it may be determined appropriately. It is sufficient to provide at least one of the isolator and narrowband data wave filter with a high wave transmittance for the desired wavelength, and the transmission wavelength of the filter is less than lpm. The use of a narrow-band filter as described in the previous paragraph can reduce the noise caused by the natural emitted light ASE (Amplified Sponta us Emissi⑽) generated by the optical amplifier. In addition, it can also suppress the ASE from the previous optical amplifier. The resulting amplification of the φ fundamental wave is reduced. Light Therapy Device The light and treatment device configured using the light source device 30 of the present invention configured as described above will be described with reference to Figs. 54 to 56. This phototherapy. The device 50 is to irradiate the cornea with laser light to perform surface ablation (pRK ··

Photorefractive Keratectomy) or Laser Intrastromal Keratomileusis (LASIK. Laser Intrastromal Keratomileusis) to correct the curvature or unevenness of the cornea 48. It is a device for the treatment of myopia and astigmatism. Phototherapy device 50, such as ^ ^ light source installed, wavelength conversion :: As shown in the figure, basically, the laser light from the above is converted to = Γ ° (this light source will be used to convert laser light with wavelength), irradiation Optical device 70 (corneal HC Π: laser light of converted wavelength is guided to ^ M site of eyeball EY) and irradiated), and observation optical device

52, which is arranged in X-γ Jiang △ & Zhuangkou P. By moving the X-Y mobile station 53, the whole device frame 51 is in Chu w. In the figure 54, it can be connected with the arrow χ direction (direction) and Move in the γ direction on a straight paper surface. The three-sided left and right light sources 1 and 30 are configured as described above, and the laser light output from its output end 47 is converted into a desired wavelength within a wavelength conversion device 60 (in this device, a wavelength of 193nm suitable for corneal treatment is used) Molecular laser light with the same wavelength) for therapeutic laser light. The structure of this wavelength conversion device 6 () is shown in FIG. 55, which shows a predetermined wavelength emitted from the output terminal 47 of the light source device 30 using a non-linear optical crystal (in this embodiment, the wavelength is 1.544_ The basic wave conversion wavelength is 8 times the wave (higher-order spectrum wave), and an example of the structure that generates 193nm ultraviolet light (the same wavelength as the ArF excimer laser). The wavelength output from the output terminal 47, the basic wave of 544_ (frequency 0), is transmitted through the non-linear optical crystal (61, 62, 63) from left to right and output. In addition, between the nonlinear optical crystals (61, 62, 63), as shown in FIG. NJ131, a condenser lens (64, 65) is provided. When these fundamental waves pass through the non-linear optical crystal 61, the frequency of the fundamental wave is twice as high as the frequency of 2ω due to the generation of the second harmonic ’, that is, the frequency 2ω (

49 200403463 The wavelength is twice the wavelength of 772nm (1/2 of 544nm). The generated vertical wave advances to the right and enters the next non-linear optical junction. It is said that the second spectral wave is generated. The relative fundamental wave has a 4 times frequency of 4 times the frequency 4① (wave: 386 nm (1,544 nm ^ 1/4)). The generated 4x wave advance ^ proceeds to the non-linear optical crystal 63 on the right side, and here, the second generation is performed again, and the frequency 彳 ^ of the incident wave is generated, that is, the generation has a relatively basic The wave is 8 times the frequency 8 to 8 times (wavelength: 193nm). ’’

As the non-linear optical crystal used for the aforementioned wavelength conversion, for example, a non-linear optical crystal converted from a fundamental wave to a 2x wave is a LiB305 (LBO) crystal, and is converted from a 2x wave to a 4x wave. The non-linear optical crystal 62 is a LiB3G5aBQ) crystal, and the non-linear optical crystal 63 is a crystal when the non-linear optical crystal 63 is converted from 4 times to 8 times. Here, in the phase matching using the LB0 crystal for the conversion from the fundamental wave to the 2x wave, and the second purpose for wavelength conversion, the temperature adjustment method of the LB0 crystal is used.

(Non-Critical Phase Matching: NCPM). Since the NCPM does not cause an angular deviation (Walk-off) of the fundamental wave and the second harmonic wave in the nonlinear optical crystal, it can be converted into a double wave with high efficiency. In addition, the generated double wave will not This is advantageous because the beam is deformed due to the angle deviation. In this way, in the wavelength conversion device 60, the laser light having a wavelength of 193 nm (laser light having the same wavelength as the ArF excimer laser light) output by the wavelength conversion is introduced into the surface of the cornea HC of the eyeball EY, and the irradiation here The optical device 70 and the observation optical device 80 will be described. In addition, because of the light 50 200403463 1 · 59μπι, the wave source device 30 is composed of a DFB semiconductor laser (which is in the range of 51jum and has an oscillation wavelength) or a fiber laser. The long conversion device 4 60 'comes from The laser light of the above-mentioned wavelength of the solid laser is converted into laser light having an 8-fold harmonic within a range of 189 calendar to 199 and output. In this way, although this laser light is a laser light of the same winter wavelength as the ArF excimer laser light, the repetition frequency of its pulse oscillation is very high 100 kHz 〇- See page 56 ®, which shows that this optical device 4 7〇 & Configuration of observation optical device 80. The irradiation optical device 70 is composed of a condenser lens η (condensing the laser light of the wavelength ⑼⑽ obtained by the wavelength conversion of the light from the above-mentioned light 30 into a thin beam shape by a wavelength conversion device 6 ° ′) and color separation. Mirror 72 (shoots the surface of the above = to the treatment ..., 隹 on the surface of the corneal HC, the laser light is based on

Move ί: for evapotranspiration of that part. At this time, with [Y to make the photo: at the angle: t C set :: upper 51 carcass movement = square ... direction, the laser light spot scanning movement of, to burn the corneal surface, for myopia, astigmatism, hyperopia Wait for treatment. -Surface: r :: r 医 :: The operator looks through the observation optical device ⑽,. The cornea ΗΓ # of the eyeball EY performed by the observation of the movement of the optical moving table 53 is provided by an illumination lamp 85 (for illuminating the subject to be treated), an objective lens 81 (through the dichroic lens 72 and receiving light from the objective lens), Mirror 82 (for inversion, can pass through _observation angle: = 51 200403463 exposure device. Secondly, the above-mentioned light source device 30 is used. The exposure device used in the light lithography process of one of the semiconductor processes_, see FIG. 57 The principle of the exposure dress used in the photolithography process is the same as that of the photoengraving. It uses optical projection and the pattern of the elements accurately drawn on the W mask (reticle) is transferred to the photoresist-coated semiconductor. Wafer or glass substrate, etc. This exposure device i 500 is installed by the above light source £ 30, the wavelength conversion device 501, the illumination optical system 502, and a photomask support table 503 (to support the photomask (only shown) Pieces) 510), a projection optical system 504, a device table 505 (for holding the holding semiconductor wafer 515), and a driving device 506 (for horizontally moving the mounting table 505) The exposure device 500 is based on the light source device 3 described above. The laser light output from the output terminal 47 is input to the wavelength conversion device 501, where 'converts the wavelength to the laser of the wavelength required for the exposure of the semiconductor wafer 515-the laser light of wavelength conversion in this manner is input to a plurality of The illumination optical system 502 constituted by the lens is irradiated on the entire surface of the mask 51 supported by the 'mask support stand 503' through the illumination optical system 502. In this way, the light passing through the k mask 510 has The image of the element pattern traced on the mask 500 is transmitted through the projection optical system 504 and irradiated to a predetermined position of the semiconductor wafer 515 placed on the mounting table 505. At this time, the projection optical system 5 is used 〇4, the pattern image of the mask 51 0 is reduced and exposed on the semiconductor wafer β 515. _ [Simplified description of the drawing] (1) The first part of the drawing shows the first embodiment of the present invention. 52 200403463 cross-sectional view of the optical amplifying device. Figures 2 (A) to 2 (D) show the cross-sectional views of the optical amplifying device along the lines P — P and Q — Q of FIG. 1. It is a sectional view showing a light amplification device according to a second embodiment of the present invention. FIG. 5 is a cross-sectional view showing an optical amplifying device according to a third embodiment of the present invention. FIGS. 5 to 10 are explanatory diagrams showing manufacturing processes of the optical amplifying device according to the first to third embodiments by an ion exchange method. Fig. 11 to Fig. 14 are explanatory diagrams showing the manufacturing process of the optical amplifying device of the first to third embodiments by the flame deposition method and the reactive ion # engraving method. Fig. 15 shows the fourth embodiment of the present invention. Plan view of the optical amplifying device of the embodiment. Fig. 16 is a plan view showing the optical switch portion of the optical amplifying device of the fourth embodiment of the present invention in an enlarged manner. Fig. Π shows the arrow A_A along the 15th figure. A cross-sectional view in which the optical switch portion of the optical amplifier device according to the fourth embodiment of the present invention is enlarged. Figures 18 (A) and 18 (B) are explanatory diagrams of the electric field pattern of the signal of the optical switch section of the optical amplifier device of the fourth embodiment. · Figure 19 to Figure 24 'are explanatory diagrams showing the manufacturing process of the optical amplification device according to the fourth embodiment of the ion exchange method. Figure 25 ~ Figure 28, # _ + 站 丄 协 7, Department ", good staff by flame stacking method and reactive ion etching method by ion exchange method ^ Le 4 Beishi shape light amplification device 53 200403463 Process description diagram. Fig. 29 is a cross-sectional view showing a light magnifying device according to a fifth embodiment of the present invention. Fig. 30 is a line B-B along Fig. 29, showing a first embodiment of the present invention. Sectional view of the optical amplifying device. Fig. 31 is a cross-sectional view of the optical amplifying device according to the fifth embodiment of the present invention along the line c-C of Figs. An explanatory diagram of the manufacturing process of the optical amplifier device according to the fifth embodiment of the ion exchange method. Fig. 38 'is a cross-sectional view showing the optical amplifier device according to the sixth embodiment of the present invention. Fig. 39' is a seventh embodiment of the present invention. Sectional view of an optical amplifying device according to an embodiment.-Fig. 40 'is a sectional view of an optical amplifying device according to an eighth embodiment of the present invention. Figs. 41 (A) and 41 (B) are diagrams showing A cross-sectional view of the structure of a demultiplexer used in the optical amplification device of the invention. A cross-sectional view of a light amplifying device according to a ninth embodiment of the present invention is shown in Fig. 43. Fig. 43 is a cross-sectional view of the light amplifying device according to the ninth embodiment of the present invention along line d-D. Figures 49 to 49 are explanatory diagrams showing the manufacturing process of the optical amplifier device according to the ninth embodiment of the ion exchange method. Figure 50 is a cross-sectional view showing the optical amplifier device 54 200403463 according to the tenth embodiment of the present invention. Fig. 51 'is a sectional view showing an optical amplifying device according to an eleventh embodiment of the present invention. Fig. 52' is a sectional view showing an optical amplifying device according to a 12th embodiment of the present invention. Fig. 53 'is a view illustrating a Schematic diagram of the structure of the light source device. Fig. 5 and 4 'are diagrams showing the structure of the phototherapy device of the present invention. Fig. 55' is a diagram of the structure of the wavelength conversion device constituting the phototherapy device. Figs. 5 and 6 'It is a schematic diagram showing the structure of an irradiation optical device and an observing optical device constituting the above-mentioned phototherapy device. Fig. 57' is a diagram showing the structure of an exposure device of the present invention. (II) Symbols 1 1 '' 1 '', 10 1,201,320 optical amplifying device 3 3 0 '34 0' 4 01 -1 ~ 401 -4 optical amplifying device 2,11,11 ', 1 〇2,111,11 Γ glass substrate 202,211,321,331 , 341, 415 glass substrates 3, 103, 203 optical amplification waveguides 3a, 3a ', 3a "first waveguide 3b, 3b', 3" second waveguide 3c 'third waveguide 4a, 104a, 203a, 322a Entrance section 4b, 204a, 205a, 325a, 333c, 334c, 345a Exit section A 1st middle section 55 200403463 12, 112, 212, 416 Metal film 13, 113, 114, 213a, 213b, 213c, 417 Opening 13a, 113a 1st opening 13b, 113b 2nd opening 14, 115, 116, 215b, 215c, 418 High-refraction areas 15a, 15b, 117a, 117b Electrode 217a, 217b, 421a, 421b Electrode 18, 118, 218, 420 Molten liquid

21,121 silicon substrate 22,122 lower cladding layer 23,123 core layer 24,124,125 waveguide layer 25,126 upper cladding layer 28,128 oxyhydrogen burner 30 light source device 31 laser light generating section

32 Semiconductor laser 33 Pulse control mechanism 34, 42b, 46b Optical isolator 40 Optical amplifier 41 First-stage optical amplifier 41a, 45a Semiconductor laser 41b, 45b, 220 demultiplexer 42a, 46a for narrow-band filtering 56 200403463 43 Beamsplitter 45 Second-stage optical amplifier 47 Output 50 Phototherapy device 51 Device frame 52 Base portion 53 XY mobile stage 60, 501 Wavelength conversion device 61, 62, 63 Non-linear optical junction 64, 65, 71 Condensing lens 70 Irradiation optical device 72 Dichroic mirror 80 Observation optical device 81 Objective lens 82 稜鏡 83 Eyepiece 85 Illumination lamp 104b First exit section 104c First exit section 105 Optical switch section 10 5a First switch waveguide 105b Second switch Guided wave path 106 The first outgoing guided wave path 107 The second outgoing guided wave path

57 200403463 108a 1st heater 108b 2nd heater 109a controller 109b power supply 113c 3rd opening 114a 4th 114b 5th opening 202a, 321a, 331a left end face (inlet end face) 202b, 321b, 331c right end face (outlet Side end face) 204, 205, 323, 324 Bifurcated waveguide 221 First inlet-side waveguide 222 Second inlet-side waveguide 223 First outlet-side waveguide 224 Second outlet-side waveguide 225 Coupling section 322 Entrance-side waveguide 325 Exit-side waveguide 327a, first intermediate portion 327b, second intermediate portion 334b 332 entrance-side optical waveguide 333a, first optical divergent waveguide 333b, first divergent amplified waveguide 334a, second optical divergent waveguide, second divergent amplified waveguide 200403463 336a 1st excitation light branching waveguide 336b 2nd excitation light branching waveguide 337 middle part 338a, 338b, 348a, 406 1st branching multiplexer 348b, 408 2nd branching multiplexer · 341a left end face (entrance end face ) 341b Right end surface (exit-side end surface) 341-1 1st glass substrate 342-1 2nd glass substrate 342 entrance side signal optical waveguide 343a first signal optical divergent waveguide 343b divergent Amplified guided wave path 344a 2nd signal optical branched guided wave path 344b Divided amplified guided wave path '345 Exit side guided wave path 346a First excitation light branched guided wave path 346b Second excitation light branched guided wave path 347a 1st middle part 347b 2nd middle part 402 Central glass substrate '402a left joint surface' 402b right joint surface 403 optical amplification waveguide 404 left substrate 59 200403463 404a left end surface 405a first excitation optical waveguide 405b first signal optical waveguide 406 first demultiplexer 40 7 right substrate 407a Right end face 409a 2nd optical waveguide 409b 2nd optical waveguide

410 Optical mirror 411 Bragg diffraction grating 500 Exposure device 502 Illumination optical system 503 Mask support table 504 Projection optical system 505 Mounting table 50 6 Drive device

510 Photomask (reticle) 515 Semiconductor wafer 60

Claims (1)

200403463 Patent application scope: An optical amplifying device, which is provided on a substrate with an extended optical amplifying waveguide, which is characterized by: & a cross-sectional shape of the optical amplifying waveguide extending from an entrance to a surface shape, from the i in.延伸 Extends in a cross-sectional shape. … And the opening is expanded in a conical shape. 2. The light amplifying device according to item [Scope of the patent application]. Light = Guided wave path extends from the entrance to the… part of the middle: Department = 4 Keep the size of early pull, and The tapered and enlarged wave path from the middle part is also within the range of maintaining a single mode to form a tapered and enlarged optical amplification device such as the first item in the scope of patent application, wherein the amplified guided wave path starts from the The first intermediate portion faces the exit portion to the second intermediate portion: it has a cross-sectional shape that extends and expands in a tapered shape, and from the second intermediate portion to the exit ^ 'is connected to the enlarged cross-sectional shape and has a constant surface. The shape is extended. For example, the optical amplifying device of the third scope of the patent application, wherein the optical amplifying waveguide extends from the entrance portion to the middle portion, and is set to maintain a single-mode size. A method for manufacturing an optical amplifying device, characterized in that a film is formed on the surface of a glass substrate to which a rare earth element is added, and the film is provided with an opening 'that extends linearly from a one end portion to a middle portion with a predetermined width and from the middle The portion has a tapered width toward the other end portion; the glass substrate is immersed in a molten liquid prepared by heating a neutral salt containing a monovalent ion to 61 200403463 points or more for a predetermined period of time in order to be located on the glass substrate The opening portion of the film on the surface forms a high refractive index region of the waveguide; the film is removed from the glass substrate; an electric field is applied to the glass substrate so that the high refractive region is buried inside the glass substrate. 6. The manufacturing method of the optical amplifying device according to item 5 of the patent application range, wherein the time for immersing each part of the glass substrate in the molten liquid is adjusted according to the width of the opening of the film. 7. A method for manufacturing an optical amplifying device, characterized in that: a film is formed on the surface of a glass substrate on which η, and a rare earth element is added, and the film is provided with an opening that extends linearly from a one end portion to a middle portion with a predetermined width, And has a tapered width from the middle portion toward the other end portion; doping a rare earth element into the opening portion of the glass substrate forming the film by an ion implantation method; The glass substrate is immersed in a molten solution prepared by heating a neutral salt containing monovalent ions to a temperature above k points for a predetermined period of time to form a high waveguide wave path at the opening portion of the diaphragm on the surface of the glass substrate. Refractive index region; «The glass substrate removes the film; an electric field is applied to the glass substrate, so that the high refractive region is buried inside the glass substrate. 8. The manufacturing method of the optical amplifying device according to item 7 of the scope of the patent application, wherein ′ is adjusted according to the width dimension of the film opening Π to adjust the time that each part of the glass plate is immersed in the molten liquid. 9. A method for manufacturing an optical amplifying device, characterized by: 62 200403463 layers; a wind-oxygen burner 'is stacked on the surface of a silicon substrate to form a lower cover, and a hydrogen-oxygen burner is used to cover the lower portion with a thinner +粞 -The surface of the main multi-layer is stacked to form a core layer of high refractive index formed by adding cellulose and phosphorus; the lower cladding layer and the core layer will be formed by the lower cladding layer and the core layer Transparency; "σ; Extending '1' the surface of the layer 'forms a photoresist layer with a predetermined width from the end to the middle ^ and from the middle to the other-a photoresist layer with a wide width; ... there is an enlarged cone to light The resist layer is used as a light army, and the core layer other than the part covered by the pre-resistance layer is removed by reactive ion etching method. The photoresist layer is removed and extends in a straight line that is right away ^ Chess ^ far away The lower cladding of the core layer with a tapered and enlarged shape _ Upper West 丨 The surface of the cladding layer is stacked by the hydrogen and oxygen burners to form the upper cladding layer; I ^ a that will form the upper cladding layer The silicon substrate of the rear layer is heated to cover the upper part. The layers are also transparent. 10. A kind of light source device 'characterized in that it includes: the light amplification device of the scope of patent application No. 1; the user, the light source, and the light source' are used to emit two light rays; the excitation light source is used to emit excitation light; The lead-in path is used to guide the radiation light emitted by the 6H-A light source into the light amplification waveguide from the entrance; and the excitation light lead-in path is used to direct # j Λ the δxuan excitation light source. The emitted excitation light is introduced into the optical amplification waveguide from the entrance; 63 200403463 transmits the excitation light into the optical amplification waveguide through the irradiation light introduction path and the excitation light introduction path, and acts by the excitation light. The irradiated light is emitted from the exit portion in an amplified manner. 11. If the light source six τ in item 10 of the scope of the patent application, the projected light source is composed of a laser light source that emits light of a predetermined wavelength f. ',,, 12, A light source device comprising: a light amplification device' is a new manufacturer based on the scope of patent application; the light source irradiated by each method is used to emit the irradiation light; the excitation light source is used Excitation light is emitted; an illumination light introduction path is used to introduce the emission light source into the light amplification waveguide from the entrance; and an excitation light introduction path is used to emit the excitation light source from the The entrance part is introduced into the light amplification waveguide; the laser light is first introduced into the light introduction path and the excitation light introduction path, and the irradiated light and: §in the large guided wave path are amplified by the action of the excitation light. The exit is shot. 13. If the light source device of the scope of application for patent No. 12 is used, the continuous light source is composed of a laser light source that emits laser light of a predetermined wavelength. 14. A light therapy device, characterized in that: and prepared: any light source device in the scope of application for patents Nos. 10 to 13; a wavelength conversion theft, which is used to convert the irradiated light from the light source device to a predetermined wavelength The treatment irradiation light; the radiation irradiation pre-learning system is to radiate the light guide w 2004200403463 converted by the wavelength converter to the treatment site. i5. An exposure device, which is characterized by: having any of the patent application scope No. Π) called "3 light emission"-a light source set-up; a wavelength converter that converts light emitted from the exit portion of the light source device to a predetermined wavelength; Illumination light; μ, You Zhuo support department, which is the mask object holding part of your Fuhan with a predetermined exposure pattern, is used to hold the exposure object; "The illumination optical system is emitted from the exit portion of the light source device 4 The known light is irradiated on the mask held by the mask support; and, the projection optical system, the object is exposed through the mask after the mask is exposed. The light is irradiated through the illumination optical system to the object and the object An optical amplifying device held by the object holding section is a light amplifying waveguide provided on a glass substrate and continuously extending from the human π section to the D section on a glass substrate. The characteristics are as follows: There is an optical switch of the guided wave path type. 17. The optical amplifying device according to item 16 of the scope of patent application, wherein the rear part of the optical amplifying guided wave path is adjacent to and parallel to the optical amplifying device. The Nozomi optical waveguide system is formed on the glass substrate. The optical switch is controlled so that the amplified optical signal that is incident from the entrance to the optical amplification waveguide is separately flowed to the optical amplification waveguide. 18. The optical amplifying device according to item I of the scope of patent application, wherein the optical switch 'is composed of a directional coupler type switch, which is set at 65 200403463 first :::: : The rear part and the near part of the optical waveguide with a predetermined interval use the thermo-optical effect, electro-optic effect, or acousto-optic effect to divide the optical signal incident on the optical amplifier waveguide into the optical amplifier waveguide for the flow control. ... 19. For example, the optical amplification device of the 16th scope of the patent application, in which the light opening is related to a Mach-Zender type switch. "&Quot; 20. A method for manufacturing an optical amplifier device, characterized in that: 帛 is formed on the surface of an ice-added rare earth & element glass substrate, and the film is provided with a predetermined width extending from the end to the other-end side 丨An opening, and a second opening adjacent to the first opening near the other-end portion of the first opening and extending to the other end side; immersing the glass substrate in a solution containing monovalent ions < A high-refractive-index region formed as a light-guiding wave path at a predetermined time in the molten liquid prepared by heating the above-mentioned melting point above the melting point at a portion of the 帛 1 and the second opening σ located on the surface of the glass substrate _; Removing the film from the glass substrate; applying an electric field on the glass substrate, and embedding the two high-refractive regions inside the glass substrate to form a light amplification waveguide and a second waveguide; and on the light amplification waveguide The rear surface and the surface of the glass substrate above the second guided wave path use a photolithography technique to form a thermo-optic effect, an electro-optical effect, or an acousto-optic effect to form a directional coupler. 21. A method for manufacturing an optical amplifying device S, characterized in that: a film is formed on the surface of the glass substrate, and the film is provided with a first opening extending from a one end portion to the other end side with a predetermined width, and the first opening in the second opening. The other end 66 200403463 is adjacent to the first opening and parallel to the second opening extending to the other end side; in the portion of the first and second openings of the glass substrate on which the film is formed, Ion implantation method for doping rare earth elements; immersing the glass substrate in a molten liquid prepared by heating a neutral salt containing monovalent ions above a melting point for a predetermined period of time on the glass substrate surface; 1 and the part of the second opening form two high refractive index regions as optical waveguides; remove the film from the glass substrate; apply an electric field on the glass substrate to embed the two high refractive regions into the glass substrate Inside, an optically amplified waveguide and a second waveguide are formed; on the surface of the glass substrate behind the optically amplified waveguide and above the second waveguide, a photolithography technique is used to form a thermo-optic effect and an electro-optic effect The acousto-optic effect element is constituted by a directional coupler. 22. A method of manufacturing an optical amplifier device, characterized in that: a lower cladding layer is formed on the surface of a silicon substrate by a hydrogen-oxygen burner, and an added rare earth is deposited on the surface of the lower cladding layer by a hydrogen-oxygen burner. Element-like elements, phosphorus and other high-refractive core layers; ▲ heating the silicon substrate forming the lower cladding layer and the core layer to make the lower cladding layer and the core layer transparent; on the surface of the core layer, Form a rafter that extends from one end to the other end with a predetermined width! A green layer, and a second photo67 resist layer adjacent to the first photoresist layer adjacent to the other end of the i-th photoresist layer and extending in parallel to the other end; the photoresist layer is used as What is the first mask, the reactive ion etching method is used to remove the photoresist layer coating 1: Qiu Ba ,, said, the core layer other than Fufeng Fengfen; An oxygen burner removes the surface of the lower cladding layer of the photoresist layer, and the accumulation of the first and second core layers forms the upper cladding. The upper cladding frost will be formed. The subsequent heating of the silicon substrate causes the upper cladding. The layer is also transparent; the photolithography technique is used on the surface of the upper cladding layer at the rear of the light amplification waveguide formed by the first core layer and above the second waveguide formed by the second core layer. 'The elements used to form thermo-optic, electro-optical, or acousto-optic effects constitute a directional coupler. 23. A light source device, comprising:-the light amplifying device of the first patent application range;-an irradiation light source for emitting the irradiation light; an excitation light source for emitting the excitation light; an introduction path of the irradiation light, The irradiated light emitted by the irradiated light source is introduced into the optical amplification waveguide from the _ entrance portion; the excitation light introduction path is the excited light radiated by the excitation light source is introduced from the entrance portion to the optical amplification waveguide. And the switching operation control device is used to control the operation of the optical switch. The irradiation light and the excitation light are introduced into the light amplification waveguide through the irradiation light introduction path and the excitation light introduction path. The function of the excitation light, 68 200403463, respectively, according to the operation control of the optical switch performed by the switching operation control device, the irradiated light is respectively emitted from the exit end of the optical amplification waveguide and the second waveguide . 24. The light source device according to item 23 of the patent application scope, wherein the illumination light source is composed of a laser light source that emits laser light of a predetermined wavelength. 25. A light source device, comprising: a light amplifying device manufactured by the manufacturing method of patent application No. 20; an irradiation light source for emitting irradiation light; an excitation light source for emitting light Excitation light; ..., the light introduction path, which is used to guide the irradiation light emitted by the irradiation light source into the light amplification waveguide from the entrance; put the lx light & path, which is the excitation light emitted by the excitation light source Is introduced into the optical amplification waveguide from the entrance; and-a switch operation control device for controlling the operation of the optical switch, and transmits the irradiation light and the excitation light through the irradiation light introduction path and the excitation light introduction path ^ Light 'enters the light-guide amplification path, and the irradiated light amplified by the action of the excitation light will amplify the light-guide path and the light according to the operation control of the optical switch by the switching operation control device. The exit ends of the second guided wave path are respectively emitted. 26. The light source device according to item 25 of the patent application scope, wherein the irradiation light source is a device that emits laser light of a predetermined wavelength. 27. A light therapy device, comprising: 69 200403463 any one of the light source devices in the scope of patent application Nos. 23 to 26; "wavelength converter" is used to convert the light source device from the light source device. The irradiation light emitted from the exit portion is converted into a therapeutic irradiation light of a predetermined wavelength, and the irradiation optical system guides the irradiation light converted by the wavelength converter to a treatment site for irradiation. 28. An exposure device comprising: a light source device according to any of items 10 to 13 of the scope of patent application; a wavelength converter for emitting makeup light emitted from the exit portion of the light source device The irradiation light converted into a predetermined wavelength; the light army support unit to hold a mask provided with a predetermined exposure pattern; the object holding unit to hold the exposure object; the illumination optical system from the exit portion of the light source device The emitted irradiation light is irradiated onto the mask held by the mask support portion; & the projection optical system is `` irradiated by the illumination optical system and irradiated with the mask cover by the illumination light '' to the object held by the object holding portion. Exposure object. ^ This type of optical amplification split is formed by setting a light amplification waveguide with a predetermined cross-section shape on a glass substrate. It is characterized in that: the light amplification waveguide has one extending from the entrance to the first middle S entrance The side waveguide is a plurality of branched waveguides extending from the inlet-side waveguide 4 and the blade 4 at the first intermediate portion and extending to the exit portion. · In 30, the optical amplifier device according to item 29 of the patent application scope, wherein: the guided wave path, the divergent guided wave path and the exit-side guided wave path have a size that can guarantee the early branch. 70 200403463 31. For example, the optical amplifying device of the 29th scope of the patent application, wherein at least two of the plurality of "knife-discussion" wave paths are merged at the second middle portion and become an exit-side guided wave path extending to the exit portion. 32. For example, the optical amplifying device of the 31st scope of the patent application, wherein the 1 $ wave path, the divergent guided wave path and the exit-side guided wave path have a size capable of maintaining a single mode. ^, =, Please refer to the patent scope 29 Any of the ~ 31 items-the light amplification device of item ^: In the glass substrate, an excitation Γ wave path 'for introducing excitation light' and an excitation light 'M knife' that will be supplied through the excitation light guide wave path are provided. A multiplexing mechanism for multiplexing is added in the wave path. 34 'The optical amplification device of the second scope of the patent application, wherein the mouth wave mechanism is composed of a demultiplexing multiplexer. ~ Amplification of light of any one of the crimes _ 'The high refractive index formed in the glass side of the population side guide, the divergent guide and the exit side guide, and the glass substrate with rare earth elements added. Light amplification of item M The device, from the entrance side of the part, the wave path and the divergent guided wave path to the refracting area of the multiplexing mechanism M, the high mouth side part and mouth formed in the general glass-breaking substrate without adding rare earth elements: the The side-by-side wave path in the glassy soil substrate from the multiplexing mechanism of the divergent guided wave path is composed of a refraction region formed by the addition of a rare earth element. The entrance side application: Patent No. 34 of the light amplification device 'Among them, from the population side of the divergent waveguide to 71 200403463 of the multiplexing mechanism, it is a general glass substrate without added rare earth elements The high-refractive region formed in the middle, and the exit-side portion and the exit-side waveguide from the multiplexing mechanism of the divergent waveguide are high-refractive regions formed in the glass substrate with the rare earth element added. Made up. 38. An optical amplifying device configured by using an amplifying optical fiber, characterized in that: the amplifying optical fiber is provided with: an inlet-side optical fiber extending from an entrance portion to an intermediate portion; A plurality of branched optical fibers that exit from the entrance side and extend toward the exit portion. 39. For example, the optical amplification device of the 38th scope of the patent application, wherein at least two of the later branched optical fibers are multiplexed at the second middle portion, and become an exit-side optical fiber extending to the exit portion. 40. The optical amplifying device according to item 38 of the scope of the patent application, wherein the entrance-side optical fiber, the branch optical fiber, and the exit-side optical fiber have a size capable of maintaining a single mode k. 41. The optical amplifying device according to item 39 of the patent application scope, wherein the entrance-side optical fiber, the branching optical fiber, and the exit-side optical fiber have a size capable of maintaining ❿. Zhuang 42. The optical amplification device according to any one of the 38th to 40th scope of the patent application, wherein an optical fiber for excitation light for introducing excitation light is provided, and an optical fiber for connection and connection with the excitation light is different from this. An optical fiber, a wave mechanism / person for using the excitation light supplied by the optical fiber to combine the excitation light supplied in the optical fiber with the divergent fiber 43, such as the optical amplification device of the 42nd patent application scope, wherein Consists of a demultiplexer. 72 200403463, 4 sets of 4, such as the optical amplification device of any one of the patent scope 38 ~, which is composed of the entry side optical fiber, the branch fiber and the exit side optical fiber are added with rare earth elements added optical fiber . 45. The optical amplifying device according to item 42 of the patent, in which a portion of the fiber from the entrance-side optical fiber and the entrance side of the divergent optical fiber to the multiplexing mechanism is composed of a general optical fiber without adding a rare earth element. The exit-side part and the exit-side optical fiber from the multiplexing mechanism of the branched fiber are composed of an optical fiber added with a rare earth element. 46. A light source device comprising: a light amplifying device according to item 29 of the scope of patent application; an irradiation light source for emitting irradiation light; and an excitation light source for emitting excitation light; The irradiated light is introduced into the light amplification waveguide from the entrance portion. 'Excitation light from the excitation light source is introduced into the entrance. In the light amplification waveguide, the irradiation light is amplified by the action of the excitation light, and is emitted from the exit portion. 47. The light source device according to item 46 of the patent application scope, wherein the illumination light source is composed of a laser light source that emits laser light of a predetermined wavelength. 48. A light source device is characterized in that it includes: a light amplifying device of the 38th scope of the patent application; an irradiation light source for emitting the irradiation light; and an excitation light source for emitting the excitation light; The irradiated light is introduced from the entrance portion into the amplification 73 200403463 into the optical fiber 'to introduce the excitation light from the excitation light source into the entrance portion or from the excitation light fiber to the amplification optical fiber. The irradiation light is amplified by the action of the excitation light, and a small percentage of the target is emitted from the exit portion. The target is called π ^ 7 ~ 70 cups of clothing, Dan T. The irradiation light source is a laser light source that emits laser light of a predetermined wavelength. Constructed $. · 50 types of light therapy devices, which are characterized by: having any one of the light source devices in the scope of patent applications 46 to 49; a wavelength converter that converts the projected light emitted from the exit portion of the light source device to a predetermined wavelength The irradiation light for treatment; and the light guide system, the radiation converted by the wavelength converter is first introduced to the > oral treatment site for irradiation. η, an exposure device, characterized by having:-any of the patent scope 46 to 49-a light source device; a wavelength converter that converts the irradiated light from the light source device into irradiated light of a predetermined wavelength; Photo shot by a human being == 2: Keep the first mask to set the exposure first; the target object. · Spear, sigma, wavelength conversion, crying = mask held on the support part of the mask: and The "light to the system" of the illumination light is the illumination light that passes through the reticle after passing through the illumination optics, and irradiates: the system irradiates the reticle object. The exposure 52 held by the object holding section is an optical amplifying device characterized by: 74 200403463: a light amplifying waveguide formed by a predetermined cross-sectional shape on a glass substrate and a light amplifying waveguide provided thereon屮 η & multiplexing and demultiplexing mechanism at the exit; when signal light and excitation light are incident from the entrance of the optical amplification waveguide into the optical amplification guide, the multiplexing and demultiplexing mechanism is about to pass through the optical amplification guide The amplified signal light in the wave path is separated from the excitation light and exits from the exit; it is provided with an excitation light reflection mechanism for reflecting the excitation light separated and emitted by the multiplexing / demultiplexing mechanism, and will be excited by the excitation light. The exciting light emitted by the reflection mechanism is transmitted through the multiplexing and demultiplexing mechanism from the exit to the light amplification waveguide. 53. The optical amplifying device according to item 52 of the patent application scope, wherein the multiplexing and demultiplexing mechanism is composed of a demultiplexing multiplexer. ~ 54. The optical amplifier device according to item 52 of the patent application scope, wherein the optical amplifier waveguide has a size capable of maintaining a single mode. 55. The light amplifying device according to item 52 of the patent application scope, wherein the excitation light reflection mechanism is composed of an optical mirror. _56. For example, the light amplifying device according to item 52 of the patent application scope, wherein the excitation light reflection mechanism is composed of a reflection type Bragg diffraction grating. 57. An optical amplifying device, comprising: a light amplifying waveguide formed with a predetermined cross-sectional shape on a glass substrate; and a $ 1 knife wave mechanism provided at an entrance of the optical amplifying waveguide; and The second multiplexing / demultiplexing mechanism 75 at the exit portion of the optical amplification waveguide 75 200403463 The first multiplexing / demultiplexing mechanism is to input signal light from the outside into the optical amplification waveguide from the entrance portion. The second The multiplexing / demultiplexing mechanism is used to inject the excitation light from the outside into the optical amplification waveguide through the exit section; the first multiplexing / demultiplexing mechanism is to enter the exit section through the second multiplexing / demultiplexing mechanism The excitation light in the optical amplification waveguide passes through another path different from the incident path of the signal light and exits from the entrance to the outside; the second multiplexing / demultiplexing mechanism will pass through the i-th multiplexing / demultiplexing wave The mechanism enters the signal light amplified in the light amplification waveguide from the ▲ entrance portion, and exits from the exit portion to the outside through another path different from the incident path of the Xin-Hai excitation light; it is provided for reflection The first combined demultiplexer Excitation light reflecting means separated emission of the excitation light will be the excitation light reflecting means being reflective of - the excitation light, the optical amplifier from the inlet portion enters through the second Shu and demultiplexing means, a large waveguide. 58. For example, the optical amplifying device according to item 57 of the scope of patent application, wherein the first combining wave mechanism and the second combining / demultiplexing mechanism are constituted by a demultiplexer. 59. The light amplifying device according to item 57 of the scope of patent application, wherein the light amplifying waveguide has a size capable of maintaining a single mode. 60. The light amplifying device according to item 57 of the application, wherein the * excitation light reflection mechanism is composed of an optical mirror. 61. The light amplifying device according to item 57 of the patent application scope, wherein the excitation light reflection mechanism is composed of a reflective Bragg diffraction grating. 76 200403463 62. An optical amplifying device, comprising: an amplifying optical fiber and a multiplexing / demultiplexing mechanism provided at an exit portion of the amplifying optical fiber; and when signal light and excitation light pass through an entrance portion of the amplifying optical fiber When entering the optical fiber for amplification, the multiplexing / demultiplexing mechanism will separate the signal light amplified from the excitation light through the optical fiber for amplification and exit from the exit; it is provided to reflect the multiplexed and demultiplexed wave The excitation light reflection mechanism that separates the excitation light emitted by the mechanism passes the excitation light reflected by the excitation light reflection mechanism through the multiplexing and demultiplexing mechanism and enters the light amplification guide wave_ from the exit portion. 63. The optical amplifying device according to item 62 of the patent application scope, wherein the multiplexing / demultiplexing mechanism is composed of a demultiplexer. 64. The optical amplifying device according to item 62 of the patent application scope, wherein the amplifying optical fiber has a size capable of maintaining a single mode. -65. The light amplifying device according to item 62 of the patent application scope, wherein the excitation light reflection mechanism is composed of an optical mirror. 66. The light amplifying device according to item 62 of the patent application scope, wherein the excitation light reflection mechanism is composed of a reflective Bragg diffraction grating. 67. An optical amplifying device, comprising: a first amplifying optical fiber, a first multiplexing / demultiplexing mechanism provided at the amplifying optical fiber entrance portion, and a second multiplexing / demultiplexing mechanism provided at the amplifying optical fiber exit portion · Wave mechanism; the first multiplexing / demultiplexing mechanism is used to input the signal light from the outside into the amplification optical fiber from the entrance, and the second multiplexing / demultiplexing mechanism is from the outside 77 200403463 The excitation light incident from the exit part enters the amplification fiber; the first multiplexing / demultiplexing mechanism will pass through the second multiplexing / demultiplexing mechanism to enter the amplification fiber from the exit section. The excitation light passes through another path different from the incident path of the signal light, and exits from the entrance to the outside; the second multiplexing / demultiplexing mechanism is to be incident from the entrance through the first multiplexing / demultiplexing mechanism. The signal light amplified in the amplifying optical fiber passes through another path different from the incident path of the converted excitation light and exits from the exit to the outside; it is provided to reflect the light emitted by the first multiplexing / demultiplexing mechanism and separated. The excitation light reflection mechanism that emits the excitation light transmits the excitation light reflected by the excitation light reflection mechanism through the first multiplexing and demultiplexing mechanism and enters the optical fiber for light amplification from the entrance portion. 68. The optical amplifying device according to item 67 of the scope of patent application, wherein the first multiplexing and demultiplexing mechanism and the second multiplexing and demultiplexing mechanism are each composed of a demultiplexer. 69. The optical amplifying device according to item 67 of the application, wherein the amplifying optical fiber has a size capable of maintaining a single mode. 70. For the light amplifying device with a scope of 帛 67, the 专利 excitation light reflection mechanism is composed of an optical mirror. X 71. The light amplifying device according to item 67 of the patent application scope, wherein the excitation light reflection mechanism is composed of a reflection type Bragg diffraction grating. μ 72. A light source device comprising: a light amplifying device according to item 52 of the scope of patent application; an irradiation light source for emitting irradiation light; and 78 200403463 a rabbit light source for emitting excitation light; The irradiation light from the irradiation light source and the excitation light from the excitation light source are introduced into the light amplification waveguide from the entrance portion, and in the light amplification waveguide, the irradiation light is amplified by the action of the excitation light, and It is separated by the multiplexing / demultiplexing mechanism and emitted from the exit portion. 73. The light source device according to item 72 of the patent application scope, wherein the illumination light source is composed of a laser light source that emits laser light of a predetermined wavelength. 74. A light source device comprising: a light amplifying device according to item 57 of the scope of patent application; an irradiation light source for emitting irradiation light; and an excitation light source for emitting excitation light; The irradiated light passes through the 帛 1 multiplexing and demultiplexing mechanism and is introduced into the optical amplification waveguide from the entrance portion, and the _excitation light from the excitation light source is transmitted through the second multiplexing and demultiplexing mechanism to the optical amplification guide from the exit portion. In the wave path 'in the light amplification guide wave path, the eruption light is amplified by the action of the excitation light' and is separated by the second multiplexing / demultiplexing mechanism and emitted from the exit portion. 75. The light source device according to item 74 of the patent application scope, wherein the illumination light source is composed of a laser light source that emits laser light of a predetermined wavelength. 76. A light source device comprising: a light amplifying device according to item 62 of the stated patent scope; an irradiating light source that emits irradiated light; and an excitation light source that emits irradiating light; irradiating from the irradiating light source Light and excitation from the excitation light source 79 200403463 Light is introduced into the amplification optical fiber from the entrance portion, and in the amplification optical fiber, the irradiated light is amplified by the action of the excitation light, and by the second combination The wave mechanism is separated and emitted from the exit portion. 77. The light source device according to item 76 of the patent application scope, wherein the illumination light source is composed of a laser light source that emits laser light of a predetermined wavelength. 78. A light source device comprising: a light amplifying device according to item 67 of the scope of patent application; an irradiation light source 'for emitting irradiation light; and an excitation light source for emitting excitation light; The irradiated light from the radiation source passes through the first multiplexing / demultiplexing mechanism and is introduced into the amplifying fiber from the entrance portion, and the excitation light from the excitation light source passes through the second multiplexing / demultiplexing mechanism to guide the amplification from the exit portion through the exit portion. Inside the optical fiber, in the amplifying optical fiber, the irradiated light is-amplified by the action of the excitation light, and is separated by the second multiplexing / demultiplexing mechanism, and is emitted from the exit portion. 79. The light source device according to item 78 of the patent application scope, wherein the illumination light source is composed of a laser light source that emits laser light of a predetermined wavelength. φ 80. A light treatment device 'characterized in that it includes: any light source device in the scope of patent applications 72 to 79; a wavelength converter that converts light emitted from the exit portion of the light source device' into light The irradiation power for a predetermined wavelength; and the irradiation optical system, which guides the irradiation light converted by the wavelength converter to a treatment site for irradiation. 81. An exposure device 'characterized by: 80 200403463 The wavelength converter in the 72nd to 79th scope of the patent application, which is used for gland // Λ original flat placement, and will be the next to the master of the light source device The emitted irradiation light is converted into irradiation light with a chirped wavelength; ^ 出 # 出 出 ==: is used to hold a mask provided with a predetermined exposure pattern; The image holding portion is used to hold an exposure object; The system is to be irradiated by the wavelength converter on the reticle held by the support; and the projection optical system is the day when the reticle will pass through the reticle ... The system irradiates the mask object. A shot first ’irradiates the exposure held by the object holding part. 81