WO2003058213A1 - Procede et dispositif de reconnaissance de gaz etranger dans des systemes optiques de formation d'images et/ou de guidage de faisceaux - Google Patents
Procede et dispositif de reconnaissance de gaz etranger dans des systemes optiques de formation d'images et/ou de guidage de faisceaux Download PDFInfo
- Publication number
- WO2003058213A1 WO2003058213A1 PCT/EP2002/014806 EP0214806W WO03058213A1 WO 2003058213 A1 WO2003058213 A1 WO 2003058213A1 EP 0214806 W EP0214806 W EP 0214806W WO 03058213 A1 WO03058213 A1 WO 03058213A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- wave field
- analysis
- useful
- protective gas
- impurities
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
- B23K26/128—Laser beam path enclosures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/705—Beam measuring device
Definitions
- the invention is based on the knowledge that in optical systems which contain gases between the individual optical components (such as mirrors, beam splitters, lenses, optical gratings or prisms), the optical properties depend on the refractive index of the gas used.
- gases such as mirrors, beam splitters, lenses, optical gratings or prisms
- the essential influence of foreign gases or other contaminants, which absorb these electromagnetic useful wave fields radiating through the optical system, can be seen in the fact that these foreign gases or contaminants locally or also in the entire beam path of the useful wave field lead to heating of the protective gas used and thus changing the refractive index of the gas and thus the imaging properties.
- the protective gas surrounding the beam path and usually also the optical components is examined for such foreign gases or impurities by means of the photo-acoustic effect .
- the shielding gas to be examined is exposed in an examination volume to an intensity-modulated electromagnetic analysis wave field emitted by a beam source (for example by a laser). If this wave field is selected so that at least frequency fractions of these waves can be absorbed by the foreign gases or contaminants, part of the molecules and / or atoms of the foreign gases or contaminants are absorbed by the electromagnetic see waves brought into an energetically excited state.
- the excited molecules or atoms can release their excitation energy in whole or in part and convert them, for example, into translation, rotation and vibration energy of the collision partners.
- the increase in the translation energy of the molecules or atoms present in the investigation volume means an increase in temperature and thus an increase in pressure (photoacoustic effect). Periodic pressure fluctuations result from the wave field radiated into the examination volume and changed in intensity periodically.
- the great advantage of this type of determination of the influences of foreign gases or impurities is to be seen in the direct connection between the heating of the protective gas and the photoacoustic signals used to identify these influences. If, on the other hand, you wanted to work with mass spectrometers, you would first have to identify and clearly identify all foreign gases or impurities in question, their concentration should be determined and the expected thermal influences should be calculated using a comprehensive table.
- the spectral composition can advantageously be chosen such that the analysis wave field contains all or at least some frequency components of the useful wave field and / or the useful wave field contains all and / or some frequency components of the analysis wave field.
- a preferred embodiment of the invention provides that the spectral composition of the useful wave field and the analysis wave field match.
- an analysis laser beam can be used to estimate the influence of foreign gases or impurities on the imaging properties of the laser cutting system (and thus on the cutting quality), which preferably only one, several or all of these laser lines or even more additional Contains laser lines.
- the analysis laser beam contains all laser lines of the useful laser beam, but no further ones, then the intensity distribution of the individual lines of the analysis laser beam can advantageously be selected to be equal to the intensity distribution of the lines of the useful laser beam (with which the cut is made).
- the light sources in the UV range can also be used in imaging systems of exposure systems, or the procedure can also be used in laser fusion arrangements, etc.
- a preferred embodiment of the invention provides that the intensity-modulated analysis wave field is generated by preferably using a beam splitter or a partially transparent mirror or a mirror provided with a bore or a scattering body, such as a thin wire, for a low intensity component from the useful wave field is decoupled.
- a further advantageous embodiment of the invention provides that the intensity of the analysis wave field is modulated by pulsing the excitation power of the beam source or by periodic masking, preferably by means of a mechanical interrupter wheel.
- a second laser beam can also be coupled out of the laser very simply by not only laser power from the laser resonator at the output window at which the useful laser beam emerges from the laser decouples, but also on a resonator mirror or another component located in the resonator, such as an etalon, decouples another laser beam with low laser power.
- a further advantageous embodiment of the invention provides that the examination volume is arranged within the imaging and / or beam guidance system in such a way that gas exchange is possible without great time delays.
- the beam source 11 designed as a laser emits the useful wave beam 1 as a collimated, slightly divergent laser beam.
- the beam path of the useful wave field 1 there is a beam splitter 6 and then the actual optical components 10 ′ of the optical imaging or beam guiding system 10, which direct the useful wave field 1 onto the surface 16 to be exposed, processed or evaporated, for example of wafers to be cut or should suitably image targets to be heated in laser fusion.
- the analysis wave field 4 is coupled out of the useful wave field 1 by means of the beam splitter 6.
- a decoupling window 19 and a modulation unit 12 are located one after the other in the beam path of the analysis wave field 4.
- the analysis wave field 4 can emerge from the housing of the imaging or beam guidance system 10 through the decoupling window 19.
- the analysis beam 4 can be modulated in intensity.
- the detection chamber 3 is located in the beam path of the analysis wave field 4 'modulated in this way. It has an inlet and outlet window 18, 18', an interior 17 which can be filled with gas and an acoustic sensor 7 arranged in the interior and designed as a microphone.
- the detection chamber 3 is provided with a filling connection 8 and an evacuation connection 9. It can be filled with the protective gas to be examined for foreign gases or impurities by means of these connections and, after an analysis, emptied, evacuated or also flushed. Since the intensity-modulated analysis wave field 4 'has the same spectral composition as the useful wave field 1 at all times, energy from the analysis wave field 4' is absorbed by the foreign gases or impurities contained in the protective gas if and only if energy from the useful wave field 1 is also absorbed.
- the radiation energy absorbed when the detection chamber 3 is irradiated by the foreign gases or impurities contained in the protective gas leads to Photoacoustic effect on temperature changes and thus on pressure fluctuations with the frequency impressed by the modulation frequency, which can be converted at the sound sensor 7 into electrical output signals. Since the temperature changes generated are directly proportional to the pressure fluctuations generated under suitable conditions, such as a beam diameter, the dimensions of the detection chamber, the shielding gas used, the pressure set in the detection chamber and the external gases to be detected a photoacoustic signal 5 generated in this way is a unique feature for assessing the beam properties of the optical imaging or beam guidance system.
- the evacuation connection 9 of the detection chamber is connected to a vacuum pump 24 via line 23 and is provided with an evacuation valve 23 '.
- the shielding gas is analyzed for foreign gases and / or impurities as follows:
- Evacuation valve 23 ' is opened until a sufficiently deep vacuum is established in the detection chamber 3 and / or the pressure falls below.
- the vacuum can preferably be measured by means of a pressure sensor installed in the line 23 between the evacuation valve 23 'and the detection chamber 3;
- the cleaning of the detection chamber 3 can then be controlled by a sufficiently deep evacuation by means of the evacuation valve 23 '.
- a constant volume flow can be drawn through the detection chamber by attaching a throttle in the line between the vacuum pump 24 and the evacuation valve 23 'with the evacuation valve and the filling valve open, so that a continuous analysis of the protective gas can be carried out.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2002367326A AU2002367326A1 (en) | 2002-01-08 | 2002-12-30 | Method and array for the detection of foreign gas in optical imaging and/or beam control systems |
EP02806029A EP1463929A1 (fr) | 2002-01-08 | 2002-12-30 | Procede et dispositif de reconnaissance de gaz etranger dans des systemes optiques de formation d'images et/ou de guidage de faisceaux |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10200349.1 | 2002-01-08 | ||
DE10200349A DE10200349A1 (de) | 2002-01-08 | 2002-01-08 | Verfahren und Anordnung zur Fremdgaserkennung im Strahlengang optischer Abbildungs- und/oder Strahlführungssysteme |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2003058213A1 true WO2003058213A1 (fr) | 2003-07-17 |
Family
ID=7711622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2002/014806 WO2003058213A1 (fr) | 2002-01-08 | 2002-12-30 | Procede et dispositif de reconnaissance de gaz etranger dans des systemes optiques de formation d'images et/ou de guidage de faisceaux |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1463929A1 (fr) |
AU (1) | AU2002367326A1 (fr) |
DE (1) | DE10200349A1 (fr) |
WO (1) | WO2003058213A1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7304716B2 (en) | 2002-11-14 | 2007-12-04 | Infineon Technologies Ag | Method for purging an optical lens |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004029672B4 (de) * | 2004-06-11 | 2007-04-12 | Novapax Kunststofftechnik Steiner Gmbh & Co. Kg | Vorrichtung zur Bearbeitung von Werkstücken |
DE102004034832B4 (de) * | 2004-07-19 | 2014-05-22 | Gerhart Schroff | Verfahren und Anordnung zur Gasanalyse |
CN102066035B (zh) * | 2008-06-20 | 2014-11-12 | 通快机床两合公司 | 激光加工设备 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999035484A1 (fr) * | 1998-01-07 | 1999-07-15 | Stichting Voor De Technische Wetenschappen | Procede de determination par spectroscopie d'un compose organique volatil dans un gaz rejete par un mammalien |
WO2001001532A1 (fr) * | 1999-06-23 | 2001-01-04 | Lambda Physik Ag | Dispositif de commande en ligne de la puissance de sortie d'un laser a ultraviolet a vide |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2820444C2 (de) * | 1978-05-10 | 1982-04-29 | Aleksandr Fedorovič Egorov | Verfahren und Vorrichtung zur quantitativen Bestimmung des Fremdgas- bzw. -dampfgehaltes in einem Gasgemisch |
DE3707622A1 (de) * | 1987-03-10 | 1988-09-22 | Pierburg Gmbh | Verfahren und vorrichtung zum messen geringer gaskonzentrationen |
DE3804134A1 (de) * | 1988-02-11 | 1989-08-24 | Felten & Guilleaume Energie | Verfahren und einrichtung zum messen der konzentration eines fremdgases in einem gasgemisch unter nutzung eines moires |
IT1248992B (it) * | 1990-06-25 | 1995-02-11 | Cise Spa | Cella optoacustica per la misura di concentrazioni di specie chimiche in fluidi in genere |
DE4126885A1 (de) * | 1991-08-14 | 1993-02-18 | Michael Rupp | Verfahren und vorrichtung zum untersuchen von behaeltnissen auf fremdstoffe |
DE4342624C1 (de) * | 1993-12-14 | 1995-06-29 | Deutsche Forsch Luft Raumfahrt | Vorrichtung zum Erzeugen eines definierten Ozon-Fremdgas-Gemisches und Verfahren zum Bereitstellen eines definierten Ozon-Fremdgas-Gemisches in einem geschlossenen Behälter |
DE4427314C2 (de) * | 1994-08-02 | 1997-02-20 | Graessle Walter Gmbh | Vorrichtung zur Untersuchung von Behältern auf Fremdgase |
US5929981A (en) * | 1996-06-18 | 1999-07-27 | Ohmeda Inc. | System for monitoring contamination of optical elements in a Raman gas analyzer |
DE19840345B4 (de) * | 1998-09-04 | 2004-09-30 | Dräger Medical AG & Co. KGaA | Verfahren und Vorrichtung zum quantitativen Aufspüren eines vorgegebenen Gases |
-
2002
- 2002-01-08 DE DE10200349A patent/DE10200349A1/de not_active Withdrawn
- 2002-12-30 AU AU2002367326A patent/AU2002367326A1/en not_active Abandoned
- 2002-12-30 EP EP02806029A patent/EP1463929A1/fr not_active Withdrawn
- 2002-12-30 WO PCT/EP2002/014806 patent/WO2003058213A1/fr not_active Application Discontinuation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999035484A1 (fr) * | 1998-01-07 | 1999-07-15 | Stichting Voor De Technische Wetenschappen | Procede de determination par spectroscopie d'un compose organique volatil dans un gaz rejete par un mammalien |
WO2001001532A1 (fr) * | 1999-06-23 | 2001-01-04 | Lambda Physik Ag | Dispositif de commande en ligne de la puissance de sortie d'un laser a ultraviolet a vide |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7304716B2 (en) | 2002-11-14 | 2007-12-04 | Infineon Technologies Ag | Method for purging an optical lens |
Also Published As
Publication number | Publication date |
---|---|
EP1463929A1 (fr) | 2004-10-06 |
DE10200349A1 (de) | 2003-07-17 |
AU2002367326A1 (en) | 2003-07-24 |
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