WO2003055652A1 - Dispositif de detection et de prehension - Google Patents

Dispositif de detection et de prehension Download PDF

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Publication number
WO2003055652A1
WO2003055652A1 PCT/EP2003/000008 EP0300008W WO03055652A1 WO 2003055652 A1 WO2003055652 A1 WO 2003055652A1 EP 0300008 W EP0300008 W EP 0300008W WO 03055652 A1 WO03055652 A1 WO 03055652A1
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WO
WIPO (PCT)
Prior art keywords
arms
force measuring
force
arm
longitudinal
Prior art date
Application number
PCT/EP2003/000008
Other languages
German (de)
English (en)
Inventor
Matthias Langer
Karsten LÖFFLER
Original Assignee
Eberhard-Karls-Universität Tübingen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eberhard-Karls-Universität Tübingen filed Critical Eberhard-Karls-Universität Tübingen
Priority to EP03704345A priority Critical patent/EP1463610B1/fr
Priority to DE50307808T priority patent/DE50307808D1/de
Publication of WO2003055652A1 publication Critical patent/WO2003055652A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
    • B81C99/002—Apparatus for assembling MEMS, e.g. micromanipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00—Micromanipulators

Definitions

  • the present invention relates to a force measuring and gripping device for simultaneous scanning and / or force-controlled gripping of nanometer-sized objects in different media, with a first and a second arm, which are spaced apart and essentially parallel to one another and each have a longitudinal axis, a first and a first second gripping and force measuring unit (measuring unit), the first measuring unit being assigned to the first arm and the second measuring unit to the second arm, at least one measuring unit being bendable perpendicular to the longitudinal axis.
  • Atomic Force Microscopy for example, is used today for force-sensitive scanning of nano-sized objects. Here, an extremely fine needle is passed over a surface. This is attached to the movable end of a flexible load cell.
  • a force interaction between the surface and the needle is measured as the bending of the force measuring bar.
  • This bending can be measured, for example, by reflection of a laser beam on the top of the force measuring bar.
  • control electronics With the help of control electronics, the needle is always guided over the sample at a constant distance. After scanning over the sample, the surface topology can be reconstructed from the control signal, a resolution of ⁇ 1 nm being achievable.
  • the fine needle is bent perpendicular to the surface (object surface) on which the sample lies. With the AFM it is therefore possible to measure the force acting perpendicular to the object base. However, a quantitative measurement of the horizontal force, ie the force parallel to the object base, is not possible.
  • gripping devices for gripping nanometer-sized objects are also known in the literature.
  • two "multiwalled carbon nanotubes” with a diameter of 50 nm and a length of 4 ⁇ m were used to build a so-called “nanotweezer”.
  • Two gold electrodes were vapor-deposited on the opposite sides of a fine glass fiber, which are used for electrical and mechanical contacting of the nanotubes. With an electrical voltage of 8.5 V, these can be closed and opened electrostatically.
  • the disadvantage of this device is that a repelling electrostatic to open both tweezer halves Force must be generated. When transferred into liquid, the nanotubes detach from the gold electrodes.
  • the electrical voltages at the nanopweezers can damage biological structures, moreover the voltages lead to a current flow between the two tweezers halves. The use of such a nanotweezer in the biological field thus hardly seems possible.
  • Nanohand concept was developed, which can be seen as a kind of further development of the previously described Nanotweezers.
  • two additional bar electrodes are arranged next to one of the gripper halves. The opening and closing process is carried out by electrostatic control via these additional electrodes.
  • the gripper halves themselves have the same potential.
  • contamination cones are deposited at the gripper ends, which serve as contact tips with a diameter of only 100 nm and a distance of 25 nm. The tips can be made electrically conductive with metal vapor deposition.
  • the disadvantage of this nanohand concept is, among other things, that the electrical control principle leads to electrical extracellular potentials in cells in a physiological medium.
  • a difficult to implement method for electrical insulation in liquid must be developed.
  • An insulation layer leads to changed mechanical properties (elasticity) of the gripper and may hinder the freedom of movement of both gripper halves.
  • the spatial enlargement of the gripper by the additional bar electrodes can possibly lead to unwanted contact with the object. Replacing the gripper is always associated with complicated electrical contacting work.
  • micro gripper Another approach for a gripping device is being pursued at the Düsseldorf Research Center under the name "micro gripper".
  • This gripping device is driven by so-called shape memory alloys, which can change their shape depending on the temperature.
  • the prototype presented by the Düsseldorf Research Center consists of a 100 ⁇ m thick sheet made of a nickel-titanium alloy.
  • the micro gripper integrates both a linear actuator and the gripper drive. Both movements are caused by changes in temperature. They are manufactured by laser cutting, which means that commercial production is possible in principle.
  • the gripper consists of two antagonistic actuators, which are combined in a monolithic structure. A difficult assembly, as with the Nanotweezer from Harvard University of Cambridge, is therefore no longer necessary. To open the gripper, a heating power of around 20 to 60 mW is required.
  • the gripper exhibits a hysteresis during heating and cooling. Gripping movements can only be carried out at frequencies of a few Hz. With a maximum heating output, the response time for a gripper type is 32 ms. The temperatures for opening and closing at the gripper tips are between 60 and 80 ° C. The positioning accuracy of the micro gripper is 3 ⁇ m. The disadvantage of this approach is that it is difficult to use for biological applications, since the temperature of approx. 60 to 80 ° C would lead to cell destruction. In addition, there is no possibility To be able to measure force so that a controlled gripping of sensitive biological structures is not possible.
  • the object of the present invention is to provide a force measuring and gripping device which enables simple manufacture and can also be used for biological applications in a physiological medium, in particular liquids.
  • a physiological medium in particular liquids.
  • use in air and vacuum should also be possible.
  • the force measuring and gripping device of the type mentioned in that the two arms are connected to one another via a joint means, the joint means dividing the two arms into a first and a second longitudinal section, and the joint means being designed in such a way that it enables a pivoting movement of at least one arm around the joint means and thus a measuring unit in a plane (longitudinal plane) that is parallel to the longitudinal axes of both arms.
  • the force measuring and gripping device according to the invention can be realized using manufacturing processes known from the semiconductor field, for example made of silicon. The manufacturing costs are thus low.
  • the joint means is provided on the mutually facing sides of the arms.
  • each measuring unit has a carrier element and an elongated force measuring bar, the carrier element being attached to an arm with one longitudinal end and carrying the force measuring bar at the other longitudinal end.
  • a tip is provided on a longitudinal end of the force measuring beam facing away from the carrier element, which tip extends forward at an angle to the longitudinal plane.
  • the force measuring bar preferably has a rectangular cross section, the longer side being perpendicular to the object base. This has the advantage partly that a bending of the load cell perpendicular to the object base is prevented.
  • the two force measuring bars are spatially arranged so that they bend under the action of a horizontal force (parallel to the object base). This bending can be detected using known optical detection methods, for example a laser-assisted light pointer method, and then enables the horizontal forces to be quantified. Force absolute values can therefore be measured.
  • the possibility of quantitatively measuring the horizontal force enables the forces occurring when holding an object to be detected and controlled, so that damage to the object can be avoided in a targeted manner.
  • an actuating means is provided which is assigned to the second longitudinal section of at least one " of " the arms in order to exert a force on the at least one arm.
  • an inclined bearing surface is provided on the mutually facing edges on the second longitudinal sections of the arms and the actuating means has an actuating element which interacts with the bearing surface.
  • the actuating element is preferably a ball, which can be displaced in particular by a piezoelectric drive unit.
  • the two bearing surfaces can be manufactured very easily and still enable an effective full force is exerted on at least one arm to perform a pivoting movement around the joint means.
  • the two arms and the joint means are designed as an integral unit. They are preferably made of silicon, silicon oxide or silicon nitride. Of course, the entire force measuring and gripping device can also be formed in one piece.
  • the production can be carried out, for example, using conventional silicon processing methods, such as electron beam lithography, UV lithography, lift-off masks, reactive ion etching, KOH etching processes, RIE etching. This leads to significant cost advantages compared to previous solutions.
  • At least one of the two force measuring bars is designed with a spring constant of 0.01 to 0.5 N / m.
  • a measuring device is provided, which is constructed in particular on the basis of the known light pointer measuring principle. The advantage of optical measurement of the bending has clear advantages over piezoresistive detection when it comes to force-sensitive scanning and gripping of objects in liquids.
  • Figure 1 is a schematic representation of a force measuring and gripping device according to the invention in plan view.
  • Fig. 2 is a schematic sectional view of the device according to the invention along the section line II-II of Fig. 1; 3 shows a further schematic sectional illustration of the device according to the invention along the section line III-III in FIG. 1;
  • Fig. 4 is a schematic partial side view of the device according to the invention.
  • FIG. 5 shows a schematic representation of the device according to the invention for explaining a force measuring process
  • a force measuring and gripping device (hereinafter referred to briefly as gripper) is shown schematically and not to scale and is identified by reference number 10. It can be seen from the plan view shown in FIG. 1 that the gripper 10 has a first arm 12 and a second arm 14. Both arms 12, 14 are constructed mirror-symmetrically to one another, have an essentially rectangular cross section (cf. FIG. 2) and extend along their respective longitudinal axes L1 and L2. The two arms 12, 14 are arranged at a distance from one another, so that their longitudinal axes L1, L2 run parallel to one another.
  • the two arms 12, 14 are connected to one another via a web 18.
  • the web 18 is arranged on the mutually facing side walls 16 of the arms 12, 14 and divides the two arms in the longitudinal direction into a first longitudinal section 21 and a second longitudinal section 23.
  • the length ratio ( ⁇ leverage ratio) of the two longitudinal sections 21, 23 can be selected depending on the application, the longitudinal section 21 being larger than the longitudinal section 23 in the present exemplary embodiment.
  • the two arms 12, 14 have on their end faces 29 projections 31, 33 which run towards one another and which leave a small gap 35 free.
  • gripping and force measuring units 41, 43 are provided on the end face, which extend in the longitudinal direction.
  • Both gripping and force measuring units 41, 43 each have a carrier 45 and a force measuring bar 47.
  • the carriers 45 are designed as cuboid bodies which each carry one of the force measuring bars 47 on their mutually facing sides.
  • the force measuring bars 47 extend parallel to the longitudinal axes L1, L2 and lie in a common plane which runs parallel to the two longitudinal axes Ll, L2.
  • the end (freely movable end 49) of the force measuring bar 47 opposite the firmly clamped end is spaced longitudinally from the carrier 45.
  • a tip 51 is provided, which extends obliquely downwards and forwards to a longitudinal plane which is formed by the two longitudinal axes L1, L2.
  • the two arms 12, 14 and the web 18 are designed as an integral unit and are produced, for example, from silicon, silicon oxide or silicon nitride.
  • the two force measuring beams 47 are designed so that they can bend resiliently in the longitudinal plane.
  • the spring constant of the force measuring bar 47 is selected, for example, in the range from 0.01 to 0.5 N / m.
  • This stiffness in the vertical direction can preferably be achieved by a corresponding rectangular cross-section, the longer side of the rectangle running perpendicular to the longitudinal plane and the short side parallel to the longitudinal plane.
  • the web 18 is designed in terms of its shape and dimensions so that it can serve as a solid body joint 54.
  • the solid-state joint 54 serves to enable the pivoting of an arm in the longitudinal plane. Such pivoting is achieved in that a force is exerted on the first longitudinal section of one of the two arms 12, 14 which is parallel to the longitudinal plane. If the first longitudinal section of one arm moves towards the other arm due to the acting force, the second longitudinal section of the arm moves away from the other, so that the gap 35 becomes larger. Counteracts the force set direction, the pivoting movement of an arm leads to a narrowing of the gap 35.
  • a ball 61 is provided which rests on the two bearing surfaces 25, 27.
  • the ball 61 itself is part of a drive unit (not shown) which can displace the ball perpendicular to the longitudinal plane.
  • Such a displacement of the ball 61 can exert a force on the bearing surfaces 25, 27, this force having a force component parallel to the longitudinal plane.
  • This force component can then be used to pivot the arms 12, 14.
  • one arm is preferably held stationary so that only the other arm can be pivoted.
  • a piezoelectric drive can be used as the drive unit.
  • the position of the ball 61 along the bearing surfaces 25, 27 is freely selectable.
  • the lever ratio can be adjusted via this position of the ball, i.e. the ratio of ball displacement path and path of the force measuring beam.
  • the functioning of the ball 61 is illustrated again in the two FIGS. 6a and 6b. If the ball 61 is displaced by a distance s via the drive unit in the direction of arrow 63, that is to say perpendicular to the longitudinal plane, the first moves Longitudinal section of the second arm 14 by a corresponding distance s 1 to the outside and thus away from the first longitudinal section of the other arm 12. The pivotal movement of the first longitudinal section 21 of the second arm 14 thus caused leads to a corresponding pivotal movement of the force measuring beam 47 due to the solid body joint 54 the gripping and force measuring unit 43. This has the result that the distance a between the two force measuring bar 47 is reduced.
  • the gripping and force measuring unit can also be used to scan an object and thus Realize an acquisition of its topographical structure. Such scanning will be explained in more detail below with reference to FIG. 5.
  • FIG. 5 shows a front section of the gripper 10 with the two arms 12, 14 and the two gripping and force measuring units 41, 43.
  • the gripper 10 is arranged with its longitudinal plane parallel to a flat object base on which an object 65 rests.
  • the gripper 10 is arranged to be movable in the x direction as well as in the y and z direction by means of corresponding grid units.
  • the degree of bending can be recorded using known measuring methods, for example the laser-assisted light pointer method.
  • This laser-assisted light pointer method is preferred for the reasons already mentioned, although capacitive or piezoresistive measurements are also possible.
  • a focused laser beam is imaged on the force measuring bar 47. Its surface is covered with a highly reflective metal layer. The laser light reflected by this layer is imaged on a position-sensitive photodetector. If the force measuring bar 47 bends due to a force interaction, changes its angle relative to the incident laser beam. The laser beam is thus reflected at the changed angle of the force measuring bar and imaged at a different location on the photodetector. The shift of the laser beam spot on the detector leads to a change in intensity, which can be measured as a change in voltage at the output of a measuring amplifier.
  • the photodetector itself consists of two closely spaced photosensitive halves, with the laser spot illuminating both halves with the same intensity of light.
  • the force F L can now be determined quantitatively, ie as an absolute value, on the basis of the known spring constants of the force measuring bar 47.
  • the gripper 10 is moved further, the movement (in the z direction perpendicular to the paper plane) being such that the force F L determined remains constant.
  • the topography can then be determined on the basis of the movement of the gripper 10, since the tip of the force measuring bar 47 exactly follows the object surface.
  • the possibility of quantitatively detecting a horizontal force acting on the force measuring bar 47 can also be used very advantageously for the improved manipulation of such objects, for example nanometer-sized particles.
  • the gripper 10 is positioned such that the object lies between the two force measuring bars 47. Then a force is exerted on the drive unit and the ball 61 first longitudinal section of the arm 14 is exerted, so that the force measuring bar 47 of the gripping and force measuring unit 43 is moved to the other force measuring bar.
  • the tip 51 of the force measuring bar 47 detects the object 65 and presses it against the opposite tip of the other force measuring bar 47 of the measuring unit 41. If the pivoting movement is continued, the force measuring bar 47 of the fixed measuring unit 41 bends, as does the other force measuring bar 47
  • Object 65 acting gripping or holding force can then be determined by detecting the bending of the force measuring beam 47.
  • the described gripper 10 can be used, for example, for the mechanical manipulation of mechanosensors in living cells (mechanoelectric transduction in hair cells of the inner ear, mechanosensitive ion channels in neurons and cardiac muscle cells).
  • the gripper 10 enables mechanically sensitive cellular structures to be localized in liquid by scanning with the tips of the force measuring bars.
  • the identified cellular structure can be mechanically manipulated using the gripper 10, while the electrical response of the cell is measured using electrophysiological methods (eg patch clamp).
  • electrophysiological methods eg patch clamp
  • the gripper 10 also enables the targeted manipulation of nanostructures, such as the so-called “carbon nanotubes”, which are required for the construction of the smallest computer but also the smallest nanosensors have become very important.
  • the gripper can be used to build the smallest electronic or sensory components that consist of "carbon nanotubes", for example.
  • Another area of application for the gripper according to the invention could be seen, for example, in the possibility of examining the fusion of secretory and neuronal vesicles with membranes. localize the pancreas (diameter 100 nm to 1,000 nm) and lift this vesicle by targeted positioning of the gripper and move it freely in the liquid.
  • a small patch of the membrane of an "acinar cell" of the pancreas is torn out of the cell membrane with a patch clamp pipette so that the inside of the membrane points outwards and the vesicle can be brought into contact with it using the gripper. So it is e.g. possible to test the influence of different pharmaceuticals on their interaction.

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manipulator (AREA)
  • Advancing Webs (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

La présente invention concerne un dispositif de mesure de force et de préhension (10) destiné à la détection et/ou à la préhension d'objets de taille nanométrique dans différents milieux, comprenant: un premier et un second bras (12, 14) qui sont espacés et sensiblement parallèles entre eux et présentent un axe longitudinal (L1, L2) respectif; une première et une seconde unité de préhension et de mesure de force (41, 43), la première unité de mesure (41) étant associée au premier bras (12), et la seconde unité de mesure (43) étant associée au second bras (14), au moins l'une des unités de mesure pouvant être repliée perpendiculairement à l'axe longitudinal. Selon l'invention, les deux bras sont reliés par un élément d'articulation (18, 54), l'élément d'articulation (18, 54) séparant les deux bras en une première et une seconde partie longitudinale (21, 22), et l'élément d'articulation (18, 54) étant conçu de sorte qu'il permet à au moins un bras (12, 14) d'effectuer un mouvement de pivotement autour de l'élément d'articulation (18, 54) et ainsi à une unité de mesure (41, 43) d'effectuer un mouvement dans un plan qui est parallèle aux axes longitudinaux des deux bras.
PCT/EP2003/000008 2002-01-04 2003-01-02 Dispositif de detection et de prehension WO2003055652A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP03704345A EP1463610B1 (fr) 2002-01-04 2003-01-02 Dispositif de detection et de prehension
DE50307808T DE50307808D1 (de) 2002-01-04 2003-01-02 Abtast- und greifvorrichtung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10200834.5 2002-01-04
DE10200834A DE10200834A1 (de) 2002-01-04 2002-01-04 Abtast- und Greifvorrichtung

Publications (1)

Publication Number Publication Date
WO2003055652A1 true WO2003055652A1 (fr) 2003-07-10

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Application Number Title Priority Date Filing Date
PCT/EP2003/000008 WO2003055652A1 (fr) 2002-01-04 2003-01-02 Dispositif de detection et de prehension

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EP (1) EP1463610B1 (fr)
AT (1) ATE368553T1 (fr)
DE (2) DE10200834A1 (fr)
WO (1) WO2003055652A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8915143B2 (en) 2010-10-22 2014-12-23 World Precision Instruments, Inc. Combination ultrasensitive force transducer and grabbing device for force and strain measurement from single cells

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005054551B3 (de) * 2005-11-14 2006-12-28 Carl Von Ossietzky Universität Oldenburg Vorrichtung zum Verlagern von Endeffektoren an Mess- oder Handhabungseinrichtungen sowie Verfahren zur Bestimmung der Kontaktkraft oder der Position eines Endeffektors
DE102017105463A1 (de) 2017-03-15 2018-09-20 Bundesrepublik Deutschland, Vertreten Durch Das Bundesministerium Für Wirtschaft Und Energie, Dieses Vertreten Durch Den Präsidenten Der Physikalisch-Technischen Bundesanstalt Mikrogreifer und Verfahren zum Messen der Greifkraft eines Mikrogreifers

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DE19523229A1 (de) * 1995-06-27 1997-01-02 Riad Dipl Ing Salim Mikrogreifer für die Mikromontage
DE19644502A1 (de) * 1996-10-25 1998-05-07 Fraunhofer Ges Forschung Greifervorrichtung für die Mikromontage kleiner Werkstücke mit wenigstens zwei Greiferelementen
US5811017A (en) * 1995-05-16 1998-09-22 Olympus Optical Co., Ltd. Cantilever for use in a scanning probe microscope and method of manufacturing the same
DE19753523A1 (de) * 1997-12-03 1999-06-17 Karlsruhe Forschzent Mikrogreifer

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JPH11300662A (ja) * 1998-04-27 1999-11-02 Yokogawa Electric Corp マイクロ・ピンセット
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US5811017A (en) * 1995-05-16 1998-09-22 Olympus Optical Co., Ltd. Cantilever for use in a scanning probe microscope and method of manufacturing the same
DE19523229A1 (de) * 1995-06-27 1997-01-02 Riad Dipl Ing Salim Mikrogreifer für die Mikromontage
DE19644502A1 (de) * 1996-10-25 1998-05-07 Fraunhofer Ges Forschung Greifervorrichtung für die Mikromontage kleiner Werkstücke mit wenigstens zwei Greiferelementen
DE19753523A1 (de) * 1997-12-03 1999-06-17 Karlsruhe Forschzent Mikrogreifer

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Title
ARAI F ET AL: "INTEGRATED MICROENDEFFECTOR FOR MICROMANIPULATION", IEEE / ASME TRANSACTIONS ON MECHATRONICS, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 3, no. 1, 1 March 1998 (1998-03-01), pages 17 - 22, XP000739647, ISSN: 1083-4435 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8915143B2 (en) 2010-10-22 2014-12-23 World Precision Instruments, Inc. Combination ultrasensitive force transducer and grabbing device for force and strain measurement from single cells

Also Published As

Publication number Publication date
DE10200834A1 (de) 2003-07-24
ATE368553T1 (de) 2007-08-15
DE50307808D1 (de) 2007-09-13
EP1463610A1 (fr) 2004-10-06
EP1463610B1 (fr) 2007-08-01

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