WO2003028037A3 - Vorrichtung und verfahren für ein rastersondenmikroskop - Google Patents

Vorrichtung und verfahren für ein rastersondenmikroskop Download PDF

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Publication number
WO2003028037A3
WO2003028037A3 PCT/DE2002/003688 DE0203688W WO03028037A3 WO 2003028037 A3 WO2003028037 A3 WO 2003028037A3 DE 0203688 W DE0203688 W DE 0203688W WO 03028037 A3 WO03028037 A3 WO 03028037A3
Authority
WO
WIPO (PCT)
Prior art keywords
sample
scanning probe
probe microscope
plane
displacing
Prior art date
Application number
PCT/DE2002/003688
Other languages
English (en)
French (fr)
Other versions
WO2003028037A2 (de
Inventor
Detlef Knebel
Torsten Jaehnke
Olaf Suenwoldt
Original Assignee
Jpk Instruments Ag
Detlef Knebel
Torsten Jaehnke
Olaf Suenwoldt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jpk Instruments Ag, Detlef Knebel, Torsten Jaehnke, Olaf Suenwoldt filed Critical Jpk Instruments Ag
Priority to DE50213222T priority Critical patent/DE50213222D1/de
Priority to US10/490,442 priority patent/US7022985B2/en
Priority to DE10294376T priority patent/DE10294376D2/de
Priority to EP02776745A priority patent/EP1430485B1/de
Priority to JP2003531475A priority patent/JP4044042B2/ja
Publication of WO2003028037A2 publication Critical patent/WO2003028037A2/de
Publication of WO2003028037A3 publication Critical patent/WO2003028037A3/de
Priority to US11/378,258 priority patent/US7473894B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • General Physics & Mathematics (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

Die Erfindung bezieht sich auf eine Vorrichtung und ein Verfahren für ein Rastersondenmikroskop, insbesondere ein Rasterkraftmikroskop mit einer Messanordnung (100), welche eine laterale Verlagerungseinrichtung (1) zum Verlagen einer Messsonde (5) in einer Ebene, eine vertikale Verlagerungseinrichtung (4) zum Verlagern der Messsonde (5) in einer Richtung senkrecht zur Ebene und einen Probenträger (11) zum Aufnehmen einer Messprobe (6) umfasst. Durch die Messanordnung (100) hindurch ist ein Kondensorlichtweg (10) gebildet, so dass der Probenträger (11) im Bereich eines Endes des Kondensorlichtwegs (10) angeordnet ist.
PCT/DE2002/003688 2001-09-24 2002-09-24 Vorrichtung und verfahren für ein rastersondenmikroskop WO2003028037A2 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE50213222T DE50213222D1 (de) 2001-09-24 2002-09-24 Vorrichtung und Verfahren für ein Rastersondenmikroskop
US10/490,442 US7022985B2 (en) 2001-09-24 2002-09-24 Apparatus and method for a scanning probe microscope
DE10294376T DE10294376D2 (de) 2001-09-24 2002-09-24 Vorrichtung und Verfahren für ein Rastersondenmikroskop
EP02776745A EP1430485B1 (de) 2001-09-24 2002-09-24 Vorrichtung und Verfahren für ein Rastersondenmikroskop
JP2003531475A JP4044042B2 (ja) 2001-09-24 2002-09-24 走査型プローブ顕微鏡用の装置及び方法
US11/378,258 US7473894B2 (en) 2001-09-24 2006-03-20 Apparatus and method for a scanning probe microscope

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10147868 2001-09-24
DE10147868.2 2001-09-24

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US10490442 A-371-Of-International 2002-09-24
US11/378,258 Continuation US7473894B2 (en) 2001-09-24 2006-03-20 Apparatus and method for a scanning probe microscope

Publications (2)

Publication Number Publication Date
WO2003028037A2 WO2003028037A2 (de) 2003-04-03
WO2003028037A3 true WO2003028037A3 (de) 2004-02-12

Family

ID=7700623

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/DE2002/003690 WO2003028038A2 (de) 2001-09-24 2002-09-24 Verfahren und vorrichtung zum messen einer probe mit hilfe eines rastersondenmikroskops
PCT/DE2002/003688 WO2003028037A2 (de) 2001-09-24 2002-09-24 Vorrichtung und verfahren für ein rastersondenmikroskop

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/DE2002/003690 WO2003028038A2 (de) 2001-09-24 2002-09-24 Verfahren und vorrichtung zum messen einer probe mit hilfe eines rastersondenmikroskops

Country Status (6)

Country Link
US (3) US6998602B2 (de)
EP (2) EP1430485B1 (de)
JP (2) JP4044042B2 (de)
AT (2) ATE377248T1 (de)
DE (4) DE50211146D1 (de)
WO (2) WO2003028038A2 (de)

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US7282930B2 (en) * 2005-12-21 2007-10-16 Suss Microtec Test Systems Gmbh Device for testing thin elements
JP4810251B2 (ja) 2006-02-16 2011-11-09 キヤノン株式会社 原子間力顕微鏡
US7478552B2 (en) * 2006-03-21 2009-01-20 Veeco Instruments Inc. Optical detection alignment/tracking method and apparatus
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
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US7607344B2 (en) * 2007-04-23 2009-10-27 Frederick Sachs Factory-alignable compact cantilever probe
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CN105259178B (zh) * 2015-11-20 2019-03-15 云南卡索实业有限公司 一种剪切类线性痕迹激光检测系统
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Also Published As

Publication number Publication date
WO2003028037A2 (de) 2003-04-03
DE50213222D1 (de) 2009-03-05
EP1430486B1 (de) 2007-10-31
US20050061970A1 (en) 2005-03-24
DE10294376D2 (de) 2004-08-26
US6998602B2 (en) 2006-02-14
US7473894B2 (en) 2009-01-06
US20050023481A1 (en) 2005-02-03
EP1430485B1 (de) 2009-01-14
WO2003028038A2 (de) 2003-04-03
DE50211146D1 (de) 2007-12-13
JP2007333743A (ja) 2007-12-27
WO2003028038A3 (de) 2004-02-12
JP2005504301A (ja) 2005-02-10
ATE377248T1 (de) 2007-11-15
US20060168703A1 (en) 2006-07-27
US7022985B2 (en) 2006-04-04
ATE421150T1 (de) 2009-01-15
JP4044042B2 (ja) 2008-02-06
EP1430486A2 (de) 2004-06-23
DE10294378D2 (de) 2004-08-26
EP1430485A2 (de) 2004-06-23

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