WO2004012201A3 - Method of and apparatus for calibrating cantilevers - Google Patents

Method of and apparatus for calibrating cantilevers Download PDF

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Publication number
WO2004012201A3
WO2004012201A3 PCT/GB2003/003358 GB0303358W WO2004012201A3 WO 2004012201 A3 WO2004012201 A3 WO 2004012201A3 GB 0303358 W GB0303358 W GB 0303358W WO 2004012201 A3 WO2004012201 A3 WO 2004012201A3
Authority
WO
WIPO (PCT)
Prior art keywords
cantilever
deflection
calibrating
measuring
cantilevers
Prior art date
Application number
PCT/GB2003/003358
Other languages
French (fr)
Other versions
WO2004012201A2 (en
Inventor
John Gallop
Original Assignee
Sec Dep For Trade & Industry O
John Gallop
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sec Dep For Trade & Industry O, John Gallop filed Critical Sec Dep For Trade & Industry O
Priority to AU2003260713A priority Critical patent/AU2003260713A1/en
Publication of WO2004012201A2 publication Critical patent/WO2004012201A2/en
Publication of WO2004012201A3 publication Critical patent/WO2004012201A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q40/00—Calibration, e.g. of probes

Abstract

A method of and apparatus for calibrating a cantilever (12) of a scanning probe microscope provide for applying radiation pressure to the cantilever so as to deflect the cantilever and measuring the deflection of the cantilever. Radiation pressure is provided by a focused beam of radiation, preferably a laser beam (14) and deflection of the cantilever is measured by measuring a reflection of the laser beam. Preferably, the laser light beam used for calibration is the same as that used for measurement of beam deflection in a scanning probe microscope. This provides an effective non-destructive calibration system which can be performed repeatedly without damaging the cantilever.
PCT/GB2003/003358 2002-07-31 2003-07-31 Method of and apparatus for calibrating cantilevers WO2004012201A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003260713A AU2003260713A1 (en) 2002-07-31 2003-07-31 Method of and apparatus for calibrating cantilevers

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0217812.7A GB0217812D0 (en) 2002-07-31 2002-07-31 Method of calibrating cantilevers
GB0217812.7 2002-07-31

Publications (2)

Publication Number Publication Date
WO2004012201A2 WO2004012201A2 (en) 2004-02-05
WO2004012201A3 true WO2004012201A3 (en) 2005-03-31

Family

ID=9941508

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2003/003358 WO2004012201A2 (en) 2002-07-31 2003-07-31 Method of and apparatus for calibrating cantilevers

Country Status (3)

Country Link
AU (1) AU2003260713A1 (en)
GB (1) GB0217812D0 (en)
WO (1) WO2004012201A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201216529D0 (en) * 2012-09-17 2012-10-31 Univ St Andrews Torsional stiffness measurement
US9874581B2 (en) 2015-05-15 2018-01-23 Honeywell International Inc. In-situ bias correction for MEMS accelerometers
US10330697B2 (en) 2015-05-15 2019-06-25 Honeywell International Inc. Active, in-situ, calibration of MEMS accelerometers using optical forces
US9983225B2 (en) 2015-06-29 2018-05-29 Honeywell International Inc. Optical-mechanical vibrating beam accelerometer
EP3431982A1 (en) 2017-07-18 2019-01-23 Nanosurf AG Microcantilever

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6006593A (en) * 1995-12-06 1999-12-28 Agency Of Industrial Science & Technology, Ministry Of International Trade & Industry Method using cantilever to measure physical properties

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6006593A (en) * 1995-12-06 1999-12-28 Agency Of Industrial Science & Technology, Ministry Of International Trade & Industry Method using cantilever to measure physical properties

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
DEGERTEKIN F L ET AL: "Actuation and characterization of atomic force microscope cantilevers in fluids by acoustic radiation pressure", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 78, no. 11, 12 March 2001 (2001-03-12), pages 1628 - 1630, XP012027544, ISSN: 0003-6951 *
SCHERER MARC P ET AL: "Experimental determination of the mechanical impedance of atomic force microscopy cantilevers in fluids up to 70 kHz", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 88, no. 5, 1 September 2000 (2000-09-01), pages 2912 - 2920, XP012051518, ISSN: 0021-8979 *
UMEDA N ET AL: "SCANNING ATTRACTIVE FORCE MICROSCOPE USING PHOTOTHERMAL VIBRATION", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 9, no. 2 PART 2, 1 March 1991 (1991-03-01), pages 1318 - 1322, XP000222902, ISSN: 1071-1023 *

Also Published As

Publication number Publication date
AU2003260713A8 (en) 2004-02-16
WO2004012201A2 (en) 2004-02-05
AU2003260713A1 (en) 2004-02-16
GB0217812D0 (en) 2002-09-11

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