CN211179651U - A New Ultrasonic Detection System for Metal Internal Defects - Google Patents
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Abstract
Description
技术领域technical field
本实用新型属于激光超声无损检测领域,具体涉及一种金属内部缺陷的新型超声检测系统。The utility model belongs to the field of laser ultrasonic nondestructive testing, in particular to a novel ultrasonic testing system for metal internal defects.
背景技术Background technique
激光超声检测技术作为一种新型的超声无损检测手段,主要用于材料表面及内部的缺陷状况检测。该技术利用激光实现超声的激发与检测。与传统的压电超声技术相比,激光超声检测技术具有非接触、频带宽、空间分辨率高等优点,并且能够在高温、高压、腐蚀、辐射等特殊环境下正常工作,具有极强的环境适应性。因此激光超声检测技术在材料表征、缺陷检测、加工过程监测等方面均得到广泛的应用。As a new type of ultrasonic non-destructive testing method, laser ultrasonic testing technology is mainly used for the detection of defects on the surface and interior of materials. This technology utilizes lasers to realize the excitation and detection of ultrasound. Compared with traditional piezoelectric ultrasonic technology, laser ultrasonic testing technology has the advantages of non-contact, wide frequency band, high spatial resolution, and can work normally in special environments such as high temperature, high pressure, corrosion, radiation, etc., and has strong environmental adaptability. sex. Therefore, laser ultrasonic testing technology has been widely used in material characterization, defect detection, process monitoring and so on.
现阶段存在的超声检测系统种类繁多,其区别主要在于超声激发设备与超声探测器的不同。对于超声探测器而言,当前常用的设备为PZT压电陶瓷、EMAT电磁超声传感器、激光干涉仪以及多普勒测振仪等。2017年,Chuanyong Wang等人于“Optics & LaserTechnology”发表了“Width gauging of surface slot using laser-generatedRayleigh waves”。文中利用脉冲激光激发超声波,并使用激光干涉仪对超声信号进行检测,从而实现铝板表面矩形缺陷宽度与位置信息的定量测量。2017年,Zhong Yunjie等人于“Journal of Nondestructive Evaluation”发表了“Simulation of Laser Ultrasonicsfor Detection of Surface-Connected Rail Defects”,使用激光超声检测系统对铁轨表面的微小裂痕进行了检测。There are many kinds of ultrasonic detection systems at this stage, and the difference is mainly in the difference between the ultrasonic excitation equipment and the ultrasonic detector. For ultrasonic detectors, the commonly used devices are PZT piezoelectric ceramics, EMAT electromagnetic ultrasonic sensors, laser interferometers, and Doppler vibrometers. In 2017, Chuanyong Wang et al. published "Width gauging of surface slot using laser-generated Rayleigh waves" in "Optics & LaserTechnology". In this paper, a pulsed laser is used to excite ultrasonic waves, and a laser interferometer is used to detect the ultrasonic signals, so as to realize the quantitative measurement of the width and position information of rectangular defects on the surface of aluminum plates. In 2017, Zhong Yunjie et al. published "Simulation of Laser Ultrasonics for Detection of Surface-Connected Rail Defects" in the "Journal of Nondestructive Evaluation", using a laser ultrasonic inspection system to detect tiny cracks on the rail surface.
本申请在激光超声的基础上,结合了光纤传感技术以实现超声信号的识别与测量,该系统在保持高时空分辨率、高信噪比的基础上,有效缩减了设备的购买成本,并且使用灵活、调试方便、精度可达到0.01 mm,对样品表面、内部等多种类型缺陷均可进行有效的检测,在激光超声无损检测领域具有一定的应用潜力。Based on laser ultrasound, the present application combines optical fiber sensing technology to realize the identification and measurement of ultrasound signals. The system effectively reduces the purchase cost of equipment while maintaining high temporal and spatial resolution and high signal-to-noise ratio. It is flexible to use, easy to debug, and the precision can reach 0.01 mm. It can effectively detect various types of defects such as the surface and the interior of the sample, and has certain application potential in the field of laser ultrasonic nondestructive testing.
实用新型内容Utility model content
本实用新型的目的在于克服现有技术的不足,而提供一种金属内部缺陷的新型超声检测系统,该系统可以在无损伤的前提下,对金属内部缺陷进行超声扫描检测,并对缺陷位置、横向与纵向尺寸的信息进行超高精度检测。The purpose of the utility model is to overcome the deficiencies of the prior art, and provide a new type of ultrasonic detection system for metal internal defects, which can perform ultrasonic scanning detection on metal internal defects without damage, and detect the defect position, Ultra-high-precision detection of horizontal and vertical size information.
实现本实用新型目的的技术方案是:The technical scheme that realizes the purpose of the present utility model is:
一种金属内部缺陷的新型超声检测系统,包括窄线宽激光器、隔离器、环形器、光纤调节器、电动精准位移平台、凸透镜、分光镜、空间脉冲激光器、光电探测器、示波器和信号分析识别模块,待测金属样品固定在电动精准移动平台上,电动精准移动平台的一侧依次设有凸透镜、分光镜和空间脉冲激光器,空间脉冲激光器射出激光经分光镜分为两部分能量,一部分能量被空间光电探测器接收转为电信号后传输至示波器中作为触发信号,另一部分激光经过凸透镜聚焦于固定在电动精准移动平台上待测金属样品表面,用于激发超声;环形器设在电动精准移动平台的另一侧通过光纤调节器调节固定作为探测头,环形器通过隔离器与窄线宽激光器连接,组成光纤斐索干涉仪检测系统,环形器的输出端还与光电探测器的输入端连接,光电探测器的输出端与示波器的输入端连接,示波器的输出端与信号分析识别模块的输入端连接,探测头将信号传输至光电探测器中,光电探测器输出干涉信号,将干涉信号输入示波器中,示波器输出探测信号,探测信号经过信号分析识别模块的整合处理,得到探测结果。A new ultrasonic inspection system for metal internal defects, including narrow linewidth lasers, isolators, circulators, fiber conditioners, motorized precision displacement stages, convex lenses, beam splitters, space pulse lasers, photodetectors, oscilloscopes, and signal analysis and identification Module, the metal sample to be tested is fixed on the electric precision mobile platform, and one side of the electric precision mobile platform is sequentially provided with a convex lens, a beam splitter and a space pulse laser. The space photodetector receives and converts the electrical signal and transmits it to the oscilloscope as a trigger signal. The other part of the laser is focused on the surface of the metal sample to be tested fixed on the electric precision moving platform through the convex lens, which is used to excite the ultrasonic wave; the circulator is set on the electric precision moving platform The other side of the platform is adjusted and fixed as a probe head through an optical fiber adjuster. The circulator is connected to a narrow linewidth laser through an isolator to form a fiber-optic Fizeau interferometer detection system. The output end of the circulator is also connected to the input end of the photodetector. , the output end of the photodetector is connected to the input end of the oscilloscope, the output end of the oscilloscope is connected to the input end of the signal analysis and identification module, the detection head transmits the signal to the photoelectric detector, the photoelectric detector outputs the interference signal, and the interference signal is input In the oscilloscope, the oscilloscope outputs the detection signal, and the detection signal is integrated and processed by the signal analysis and identification module to obtain the detection result.
所述的空间脉冲激光器,输出的激光聚焦点与环形器末端的光纤探头,分别位于待测金属样品的两侧,且处于同一直线。In the space pulse laser, the output laser focusing point and the fiber probe at the end of the circulator are respectively located on both sides of the metal sample to be measured, and are in the same straight line.
所述的空间脉冲激光器,为Nd:YAG固体激光器,激光波长1064nm,脉宽6ns。The space pulse laser is a Nd:YAG solid-state laser with a laser wavelength of 1064 nm and a pulse width of 6 ns.
所述的光纤调节器,可在X-Y-Z方向进行调节,调节精度为0.01mm。The optical fiber adjuster can be adjusted in the X-Y-Z direction, and the adjustment precision is 0.01mm.
所述的窄线宽激光器、光隔离器、环形器、光电探测器,工作波长均为1550nm。The narrow linewidth laser, optical isolator, circulator, and photodetector all have an operating wavelength of 1550 nm.
所述的信号分析识别模块,采用现有技术,通过计算机算法编程对探测信号进行处理来获得探测结果,包括探测信号的滤波处理、纵波与横波的信号识别、纵波与横波幅值的比值计算、信号接收时间变化的提取这四个部分。The signal analysis and identification module adopts the prior art to process the detection signal through computer algorithm programming to obtain the detection result, including the filtering processing of the detection signal, the signal identification of the longitudinal wave and the transverse wave, the ratio calculation of the amplitude of the longitudinal wave and the transverse wave, These four parts are extracted from the signal reception time variation.
该系统的工作原理为:使用脉冲激光辐射到材料表面,若控制激光能量低于材料损伤阈值,即可引发热弹效应,从而产生瑞利波、横波、纵波等类型的超声波。当样品内部存在缺陷时,上述超声波在传递过程中会受缺陷影响,使信号形状、幅值大小、接收时间等特征发生不同程度的变化。本实用新型通过提取不同扫描位置的时域信号特征和对信号特征的计算,来对缺陷的位置、大小、形状等信息进行确定。The working principle of the system is as follows: using pulsed laser radiation to the surface of the material, if the laser energy is controlled to be lower than the material damage threshold, the thermoelastic effect can be induced, resulting in the generation of Rayleigh waves, transverse waves, longitudinal waves and other types of ultrasonic waves. When there are defects in the sample, the above-mentioned ultrasonic waves will be affected by the defects during the transmission process, so that the characteristics of the signal shape, amplitude, receiving time and other characteristics will change to different degrees. The utility model determines the position, size, shape and other information of defects by extracting the time domain signal features of different scanning positions and calculating the signal features.
有益效果:本实用新型提供的一种金属内部缺陷的新型超声检测系统,该系统使用脉冲激光器激发超声波,实现了非接触、无损伤的超声检测;使用光纤斐索干涉仪检测系统检测超声,具有极高的时间及空间分辨率;使用信号分析识别模块,可精准的分析出缺陷的信息;本系统搭建简单,调节方便,可在高温、高压、强电磁干扰等恶劣环境下正常工作;可检测的缺陷类型众多,可对表面裂纹、缺口、沟槽,内部气孔、空腔等类型的缺陷进行超声检测。Beneficial effects: The utility model provides a new type of ultrasonic detection system for metal internal defects. The system uses a pulsed laser to excite ultrasonic waves and realizes non-contact and non-destructive ultrasonic detection; uses a fiber-optic Fizeau interferometer detection system to detect ultrasonic waves, which has the advantages of: Extremely high temporal and spatial resolution; using the signal analysis and identification module, the defect information can be accurately analyzed; the system is simple to build, easy to adjust, and can work normally in harsh environments such as high temperature, high pressure, and strong electromagnetic interference; it can detect There are many types of defects, and ultrasonic testing can be performed on surface cracks, gaps, grooves, internal pores, cavities and other types of defects.
附图说明Description of drawings
图1为一种金属内部缺陷的新型超声检测系统的结构示意图;FIG. 1 is a schematic structural diagram of a new type of ultrasonic inspection system for metal internal defects;
图2为扫描检测得到的内部缺陷成像图;Fig. 2 is the internal defect imaging image obtained by scanning detection;
图中:1.窄线宽激光器 2.隔离器 3.环形器 4.光纤调节器 5.光电探测器6.待测样品 7.电动精确位移平台 8.空间脉冲激光器 9.分光镜 10.凸透镜 11.空间光电探测器 12.示波器 13.信号分析识别模块。In the picture: 1.
具体实施方式Detailed ways
下面结合附图和实施例对本实用新型做进一步阐述,但不是对本实用新型的限定。The present utility model is further described below in conjunction with the accompanying drawings and embodiments, but is not intended to limit the present utility model.
如图1所示,一种金属内部缺陷的新型超声检测系统,包括窄线宽激光器、隔离器、环形器、光纤调节器、电动精准位移平台、凸透镜、分光镜、空间脉冲激光器、光电探测器、示波器和信号分析识别模块,待测金属样品固定在电动精准移动平台上,电动精准移动平台的一侧依次设有凸透镜、分光镜和空间脉冲激光器,空间脉冲激光器射出激光经分光镜分为两部分能量,一部分能量被空间光电探测器接收转为电信号后传输至示波器中作为触发信号,另一部分激光经过凸透镜聚焦于固定在电动精准移动平台上待测金属样品表面,用于激发超声;环形器设在电动精准移动平台的另一侧通过光纤调节器调节固定作为探测头,环形器通过隔离器与窄线宽激光器连接,组成光纤斐索干涉仪检测系统,环形器的输出端还与光电探测器的输入端连接,光电探测器的输出端与示波器的输入端连接,示波器的输出端与信号分析识别模块的输入端连接,探测头将信号传输至光电探测器中,光电探测器输出干涉信号,将干涉信号输入示波器中,示波器输出探测信号,探测信号经过信号分析识别模块的整合处理,得到探测结果。As shown in Figure 1, a new type of ultrasonic inspection system for metal internal defects, including narrow linewidth laser, isolator, circulator, fiber conditioner, electric precision displacement platform, convex lens, beam splitter, space pulse laser, photodetector , oscilloscope and signal analysis and identification module, the metal sample to be tested is fixed on the electric precision mobile platform, and one side of the electric precision mobile platform is sequentially provided with a convex lens, a beam splitter and a space pulse laser. The laser beam emitted by the space pulse laser is divided into two parts by the beam splitter. Part of the energy, part of the energy is received by the space photodetector and converted into an electrical signal, and then transmitted to the oscilloscope as a trigger signal, and the other part of the laser is focused on the surface of the metal sample to be measured fixed on the motorized precision moving platform through a convex lens to excite ultrasound; annular; The circulator is located on the other side of the electric precision mobile platform and is adjusted and fixed as a probe head through an optical fiber adjuster. The circulator is connected to a narrow linewidth laser through an isolator to form a fiber optic Fizeau interferometer detection system. The output end of the circulator is also connected to the photoelectric The input end of the detector is connected, the output end of the photodetector is connected to the input end of the oscilloscope, the output end of the oscilloscope is connected to the input end of the signal analysis and identification module, the detection head transmits the signal to the photoelectric detector, and the photoelectric detector outputs interference The interference signal is input into the oscilloscope, the oscilloscope outputs the detection signal, and the detection signal is integrated and processed by the signal analysis and identification module to obtain the detection result.
所述的示波器,采用高分辨率示波器,其最高采样频率为20GSa/s。The described oscilloscope adopts a high-resolution oscilloscope, and its maximum sampling frequency is 20GSa/s.
所述的空间脉冲激光器,输出的激光聚焦点与环形器末端的光纤探头,分别位于待测金属样品的两侧,且处于同一直线,扫描时保持二者位置不变,只移动检测样品。In the space pulse laser, the output laser focusing point and the fiber probe at the end of the circulator are respectively located on both sides of the metal sample to be tested, and are in the same straight line. During scanning, the positions of the two remain unchanged, and only the testing sample is moved.
所述的空间脉冲激光器,为Nd:YAG固体激光器,激光波长1064nm,脉宽6ns。The space pulse laser is a Nd:YAG solid-state laser with a laser wavelength of 1064 nm and a pulse width of 6 ns.
所述的光纤调节器,可在X-Y-Z方向进行调节,调节精度为0.01mm。The optical fiber adjuster can be adjusted in the X-Y-Z direction, and the adjustment precision is 0.01mm.
所述的窄线宽激光器、光隔离器、环形器、光电探测器,工作波长均为1550nm。The narrow linewidth laser, optical isolator, circulator, and photodetector all have an operating wavelength of 1550 nm.
所述的信号分析识别模块,采用现有技术,通过计算机算法编程对探测信号进行处理来获得探测结果,包括探测信号的滤波处理、纵波与横波的信号识别、纵波与横波幅值的比值计算、信号接收时间变化的提取这四个部分。The signal analysis and identification module adopts the prior art to process the detection signal through computer algorithm programming to obtain the detection result, including the filtering processing of the detection signal, the signal identification of the longitudinal wave and the transverse wave, the ratio calculation of the amplitude of the longitudinal wave and the transverse wave, These four parts are extracted from the signal reception time variation.
所述的待测金属样品,固定于电动精准位移平台之上,由电动精准位移平台驱动并实现二维区域内的扫描检测,电动精准位移平台包括控制电机,扫描行程为200×200mm,最小扫描步长为0.01mm。The metal sample to be tested is fixed on the electric precision displacement platform, driven by the electric precision displacement platform and realizes scanning detection in a two-dimensional area. The electric precision displacement platform includes a control motor, and the scanning stroke is 200×200mm. The step size is 0.01mm.
实施例:Example:
使用铝板样品进行检测,样品尺寸为300×100×10 mm。在铝板上侧,钻一个直径2mm,深度10 mm的圆柱孔,制造内部缺陷以待检测;将待测样品固定于精密电动位移平台上,调整样品位置,使缺陷位置处于扫描范围。The detection was carried out using an aluminum plate sample with a sample size of 300 × 100 × 10 mm. On the upper side of the aluminum plate, drill a cylindrical hole with a diameter of 2 mm and a depth of 10 mm to create internal defects for detection; fix the sample to be tested on a precision electric displacement platform, and adjust the position of the sample so that the defect position is within the scanning range.
采用上述连接好的超声检测系统进行检测,检测之前,首先对光纤斐索干涉仪检测系统进行调试,通过光纤调节器来改变光纤端面与样品表面间的相对距离,从而改变光纤干涉腔长。观察光电探测器的输出信号,当输出光强达到预定强度时,干涉仪处于稳定工作状态,可对超声信号进行检测;在样品另一侧,控制脉冲激光器出射激光,调节脉冲激光器输出强度,使得激光能量小于样品损伤阈值,同时选择单发出射模式,以保证干涉仪能稳定接收到超声信号。The above-mentioned connected ultrasonic detection system is used for detection. Before detection, the fiber Fizeau interferometer detection system is first debugged, and the relative distance between the fiber end face and the sample surface is changed by the fiber adjuster, thereby changing the fiber interference cavity length. Observe the output signal of the photodetector. When the output light intensity reaches a predetermined intensity, the interferometer is in a stable working state and can detect the ultrasonic signal; on the other side of the sample, control the pulsed laser to emit laser light, and adjust the output intensity of the pulsed laser to make The laser energy is less than the sample damage threshold, and the single-shot emission mode is selected to ensure that the interferometer can receive the ultrasonic signal stably.
调节光纤端面与激光照射点的相对位置,使二者在空间上处于同一直线。检测时,开启脉冲激光器,发出一束单发激光。通过检测系统,即可在示波器上得到超声检测波形。之后,重复上述检测步骤,控制精密电动位移平台驱动样品以0.2 mm步长,在5×5 mm区域内进行逐点扫描检测。扫描中注意保持光纤探头与激光照射点位置不变,只有检测样品进行移动。Adjust the relative position of the fiber end face and the laser irradiation point so that the two are in the same straight line in space. During detection, the pulsed laser is turned on to emit a single-shot laser. Through the detection system, the ultrasonic detection waveform can be obtained on the oscilloscope. After that, the above detection steps were repeated, and the precision electric displacement platform was controlled to drive the sample to perform point-by-point scanning detection in a 5 × 5 mm area with a step size of 0.2 mm. During scanning, keep the position of the fiber probe and the laser irradiation spot unchanged, and only the detection sample moves.
完成全部扫描工作后,得到如图2所示的内部缺陷成像图,收集所有扫描点的超声波形数据。利用信号分析识别模块数据进行分析处理。通过使用MATLAB软件,对波形数据进行滤波处理,以提高波形的信噪比,便于进行分析处理。经观察,发现在1.6 μs和3.3 μs时刻分别检测到纵波和横波信号。在无缺陷区域时,纵波的幅值强度明显强于横波,这与两种类型超声波的传输特性相符。随着扫描点位置逐渐向缺陷靠近,纵波强度逐渐下降。同时,与纵波相比,横波信号强度衰减幅度较小。当扫描至缺陷边缘处,纵波幅值强度衰减至横波之下。随着扫描点逐渐移出缺陷区域,纵波强度随之上升,并在缺陷边缘时再次超过横波强度。并且通过对纵波与横波接收时间差异的分析,利用纵波与横波在待测物体中传播速度的大小来判断此探测点缺陷的深度。After all the scanning work is completed, the internal defect imaging diagram as shown in Figure 2 is obtained, and the ultrasonic shape data of all scanning points are collected. Use the signal analysis and identification module data for analysis and processing. By using MATLAB software, the waveform data is filtered to improve the signal-to-noise ratio of the waveform, which is convenient for analysis and processing. After observation, it was found that the longitudinal wave and shear wave signals were detected at 1.6 μs and 3.3 μs, respectively. In the defect-free area, the amplitude intensity of the longitudinal wave is significantly stronger than that of the transverse wave, which is consistent with the transmission characteristics of the two types of ultrasonic waves. As the position of the scanning point gradually approaches the defect, the longitudinal wave intensity gradually decreases. At the same time, compared with the longitudinal wave, the attenuation amplitude of the shear wave signal strength is smaller. When scanning to the edge of the defect, the amplitude intensity of the longitudinal wave decays below the shear wave. As the scan point gradually moves out of the defect area, the longitudinal wave intensity increases and again exceeds the shear wave intensity at the edge of the defect. And through the analysis of the difference of the receiving time of the longitudinal wave and the transverse wave, the depth of the detection point defect is judged by the propagation speed of the longitudinal wave and the transverse wave in the object to be tested.
根据上述的波形变化规律,通过观察纵波与横波的相对幅值情况,即可对缺陷情况进行判定。定义当纵波幅值强度小于横波时,扫描点处于缺陷位置,反之则表示检测样品内部不存在缺陷。使用MATLAB软件进行编程,设计了一条超声判定程序。以纵波为标准,对所有扫描点的数据进行归一化处理。处理后,所有数据的纵波强度均为一。之后提取出每组数据的横波强度。在无缺陷区域内,纵波强度大于横波,故横波强度小于一。而在缺陷位置时,纵波强度小于横波,此时横波强度大于一。将所有的横波强度数据进行收集,并按照扫描的空间位置进行排列,即可得到二维扫描区域内的横波强度分布数据。之后用颜色深度对幅值强度进行绘制,即可得到样品的内部缺陷扫描成像图。最后将每组数据中纵波与横波接收到的时间提取出来,通过计算分析来得出此处缺陷的纵向尺寸。According to the above-mentioned waveform change law, the defect can be judged by observing the relative amplitudes of the longitudinal wave and the transverse wave. Definition When the amplitude and intensity of the longitudinal wave is smaller than the transverse wave, the scanning point is at the defect position, otherwise it means that there is no defect in the test sample. Using MATLAB software for programming, an ultrasonic judgment program was designed. Using the longitudinal wave as the standard, normalize the data of all scanning points. After processing, the P-wave intensity of all data is unity. The shear wave intensity of each set of data is then extracted. In the defect-free area, the longitudinal wave intensity is greater than the shear wave intensity, so the shear wave intensity is less than one. At the defect position, the longitudinal wave intensity is smaller than the shear wave, and the shear wave intensity is greater than one. Collecting all the shear wave intensity data and arranging them according to the scanned spatial position, the shear wave intensity distribution data in the two-dimensional scanning area can be obtained. Then, the amplitude intensity is plotted with the color depth, and the scanning image of the internal defects of the sample can be obtained. Finally, the time when the longitudinal wave and the transverse wave are received in each set of data is extracted, and the longitudinal size of the defect here is obtained through calculation and analysis.
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