WO2003010764A1 - Procede d'inspection d'un support d'enregistrement optique - Google Patents

Procede d'inspection d'un support d'enregistrement optique Download PDF

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Publication number
WO2003010764A1
WO2003010764A1 PCT/JP2002/007510 JP0207510W WO03010764A1 WO 2003010764 A1 WO2003010764 A1 WO 2003010764A1 JP 0207510 W JP0207510 W JP 0207510W WO 03010764 A1 WO03010764 A1 WO 03010764A1
Authority
WO
WIPO (PCT)
Prior art keywords
optical recording
recording medium
light reflectance
layer
inspection
Prior art date
Application number
PCT/JP2002/007510
Other languages
English (en)
Japanese (ja)
Inventor
Yoshihisa Tamagawa
Original Assignee
Tdk Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tdk Corporation filed Critical Tdk Corporation
Publication of WO2003010764A1 publication Critical patent/WO2003010764A1/fr

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/002—Recording, reproducing or erasing systems characterised by the shape or form of the carrier
    • G11B7/0037—Recording, reproducing or erasing systems characterised by the shape or form of the carrier with discs
    • G11B7/00375—Recording, reproducing or erasing systems characterised by the shape or form of the carrier with discs arrangements for detection of physical defects, e.g. of recording layer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers

Definitions

  • the present invention relates to a method for detecting the quality of an optical recording medium, such as a DVD-RAM, for determining whether the optical recording medium is good or not.
  • the optical recording medium 1 is formed by forming at least a first protective layer 2, a recording layer 3, a second protective layer 4, and a reflective layer 5 on a substrate 6 in this order. Its recording capacity is overwhelmingly larger than those of other recording media such as MO, CD-R, and CD_RW.
  • this optical recording medium 1 at each interface between the recording layer 3 and each of the protective layers 2 and 4 after production, delamination in which the layers are separated (hereinafter referred to as “film separation”).
  • interlaminar delamination in this specification is not limited to the above-described delamination between layers, but also includes a state in which a foreign substance is formed between layers due to penetration of moisture or the like.
  • the inventor repeatedly examined the cause of the film peeling, and found that the presence of minute moisture existing between the recording layer 3 and each of the protective layers 2 and 4 was greatly related to the occurrence of the film peeling. In fact, more specifically, it has been found that the smaller the amount of water present between the layers, the more difficult it is for film peeling to occur.
  • the substrate 6 made of a plastic material such as PC (polycarbonate) has high hygroscopicity! /. For this reason, the substrate 6 is first annealed in the atmosphere and dehydrated before being transported into the high vacuum chamber where the sputtering process is performed. State (about 5 X 10—a) The dewatering process is performed by exhausting air.
  • the inventor increases the evacuation time (hereinafter, also referred to as “load lock time”) in the front chamber (load lock) so that each of the recording layer 3 and each of the protective layers 2 and 4 can be separated. It has been found that the occurrence of film peeling at the interface can be suppressed.
  • the load lock time should be as short as possible within a range where the film peeling of the manufactured optical recording medium 1 does not occur. Must be set.
  • the load lock time is set as short as possible without causing film peeling, the optical recording medium 1 in which film peeling occurs due to variations in various manufacturing conditions may be shipped.
  • a predetermined number is extracted from one lot of the manufactured optical recording medium 1 and an acceleration test is performed on the predetermined number of the optical recording media 1 (for example, at a temperature of 80 ° C. and a humidity of 80%). After the accelerated test, if any of the optical recording media 1 from which film peeling has occurred exists, remove all of the optical recording media 1 contained in the opening for defective products. When no film peeling has occurred on all of the optical recording media 1, an inspection method that treats all of the optical recording media 1 included in the lot as non-defective products is adopted.
  • the conventional accelerated test method requires a long time for the test. Therefore, there is a problem that the production efficiency of the optical recording medium 1 is reduced, and as a result, the manufacturing cost of the optical recording medium 1 is rising.
  • the present invention has been made to solve the above problems, and has as its main object to provide a method for inspecting an optical recording medium that can determine the quality of a manufactured optical recording medium in a short time.
  • the method for inspecting an optical recording medium includes a method for determining whether or not an optical recording medium having at least a first protective layer, a recording layer, a second protective layer, and a reflective layer formed on a substrate in this order is good.
  • An inspection method comprising: measuring the light reflectance of the optical recording medium to be inspected; and comparing the measured light reflectance with a predetermined value to determine the quality of the optical recording medium. .
  • the light reflectance at which the inspection result regarding delamination is good is the predetermined value, and that the optical recording medium is determined to be non-defective when the measured light reflectance is equal to or higher than the predetermined value.
  • the optical reflectance of the optical recording medium to be inspected is measured, and the quality of the optical recording medium is determined by comparing a predetermined value and a measured optical reflectance. Accordingly, the quality of the manufactured optical recording medium can be determined in a short time. Accordingly, as a result of sufficiently reducing the time required for the inspection process, it is possible to sufficiently reduce the manufacturing cost of the optical recording medium while ensuring high reliability.
  • the lower limit of the light reflectance at which the inspection result regarding the delamination becomes good is defined as the predetermined value.
  • FIG. 1 is a characteristic diagram showing a characteristic of a relative light reflectance with respect to a load lock time (LL time) of the optical recording medium 1.
  • FIG. 2 is an explanatory diagram showing an inspection result of film peeling with respect to the load lock time of the optical recording medium 1.
  • FIG. 3 is an explanatory diagram for explaining the structure of the optical recording medium 1. BEST MODE FOR CARRYING OUT THE INVENTION
  • optical recording medium 1 to be inspected according to the optical recording medium inspection method according to the present invention will be described.
  • the same components as those described in the conventional example are denoted by the same reference numerals, and overlapping description will be omitted.
  • an optical recording medium (DVD-RAM) 1 has a structure in which at least a first protective layer 2, a recording layer 3, a second protective layer 4, and a reflective layer 5 are formed on a substrate 6 in this order. Have been.
  • the first protective layer 2 and the second protective layer 4 are formed using a dielectric material such as ZnS—Si 2 .
  • the recording layer 3 is formed with Ge, Sb, and Te as main constituent elements.
  • Ge, Cr, and N were added to each interface (boundary) between the recording layer 3 and each of the protective layers 2 and 4.
  • a palladium layer (not shown) mainly composed of is formed.
  • the reflective layer 5 is configured using Ag and A1 as main constituent elements, for example.
  • Substrate 6 is made of plastic material and used for injection molding Therefore, it is manufactured.
  • various materials such as PC (polycarbonate) can be used as the plastic material, but the transfer property during injection molding (particularly, the transfer property of the group formed on the surface of the substrate 6) is improved. Considering this, PC is preferred.
  • the material used for each layer is not limited to the above materials, and various materials can be used.
  • the substrate 6 is annealed and dehydrated.
  • the substrate 6 is carried into a front chamber (load lock), and the front chamber is maintained under a medium vacuum state for a predetermined load lock time, thereby further removing moisture from the substrate 6.
  • the substrate 6 is carried into a high vacuum tank, and the high vacuum tank is maintained in a high vacuum state, and at least the first protective layer 2 and the recording layer 3 are formed on the surface of the substrate 6.
  • the second protective layer 4 and the reflective layer 5 are sequentially formed by a physical vapor deposition method such as sputtering or ion plating. Thereby, the optical recording medium 1 is manufactured.
  • reference data to be used for judging the quality of the optical recording medium 1 during the inspection is created.
  • a reference data creation procedure first, a plurality of optical recording media 1 are manufactured by changing the load lock time (hereinafter, also referred to as “LL time”) according to the above manufacturing method.
  • LL time the load lock time
  • the load lock time and the optical recording medium 1 shown in FIG. Is determined with respect to the light reflectance.
  • the load lock time and the presence or absence of film peeling in the optical recording medium 1 were detected.
  • the light reflectance is the relative light at each load opening time when the light reflectance at the shortest load lock time (1 second) is set as a reference (100%). Reflectance was expressed as a percentage.
  • the lower limit of the light reflectance at which the inspection result of the film peeling becomes good is obtained, and this lower limit is used as reference data.
  • the longer the load lock time is the higher the light reflectance of the optical recording medium 1 is. It is considered that the longer the load time, the lower the light refractive index inside the optical recording medium 1 and the higher the light reflectance.
  • the inspection result on film peeling is good by setting the load opening time to a predetermined time (for example, 5.3 seconds) or more. Therefore, the light reflectance (predetermined value: about 102.3%) when the load lock time is the predetermined time is obtained from the relationship shown in FIG.
  • the quality of the optical recording medium 1 can be determined by estimating that the detection result regarding film peeling is good.
  • the predetermined value (approximately 102.3%) means the lower limit of the light reflectance at which the detection result of the film peeling is good, and this lower limit is used as the reference data. It is also possible to use the absolute light reflectance at the shortest lock time (1 second) as reference data and compare this reference data with the absolute light reflectance at each load lock time.
  • the optical reflectance of each manufactured optical recording medium 1 is measured under the same conditions as those under which the above-mentioned reference data was created.
  • the measured light reflectance is compared with the reference data. If the measured light reflectance is equal to or higher than the reference data (approximately 102.3%), the water in the anterior chamber is sufficient. Therefore, the possibility that film separation is caused by the remaining water is extremely low, and the optical recording medium 1 is determined to be good.
  • the measured light reflectance is smaller than the reference data, moisture removal in the anterior chamber is inadequate, and there is a high possibility that the remaining moisture will cause film peeling. Determined to be good.
  • the manufactured optical recording medium By measuring the light reflectance of the body 1 and comparing the measured light reflectance with a predetermined lower limit of the light reflectance (reference data), the quality of the manufactured optical recording medium 1 can be determined in a short time. be able to. For this reason, the inspection time required for the inspection can be significantly reduced as compared with the conventional inspection method in which the acceleration test is performed on all optical recording media. Therefore, since the productivity can be improved, the inspection cost can be reduced. As a result, the manufacturing cost can be sufficiently reduced while ensuring the reliability of the optical recording medium 1.
  • the reference data is defined as the lower limit of the light reflectance, and the quality of the optical recording medium 1 is determined by comparing the reference data with the measured light reflectance. Then, the quality of the optical recording medium 1 can be determined.
  • the present invention is not limited to the above-described embodiment of the invention, and can be appropriately modified.
  • the present invention can be applied to inspection of an optical recording medium (DVD-ROM, etc.) other than DVD-RAM.
  • Industrial applicability can be applied to inspection of an optical recording medium (DVD-ROM, etc.) other than DVD-RAM.
  • the light reflectance of the optical recording medium to be inspected is measured, and the measured light reflectance and the lower limit of the predetermined light reflectance (standard By comparing the data with the data, the quality of the manufactured optical recording medium can be determined in a short time. For this reason, the inspection time required for the inspection can be remarkably reduced as compared with the conventional inspection method in which the acceleration test is performed on all the optical recording media. Therefore, the productivity can be improved, and the inspection cost can be reduced. As a result, an optical recording medium inspection method that can sufficiently reduce the production cost while securing the reliability of the optical recording medium is realized. Is done.

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  • Manufacturing Optical Record Carriers (AREA)

Abstract

L'invention se rapporte à un procédé d'inspection d'un support d'enregistrement optique consistant à déterminer si un support d'enregistrement optique (1) dans lequel au moins une première couche protectrice (2), une couche d'enregistrement (3), une seconde couche protectrice (4) et une couche réfléchissante (5) sont ainsi formées sur un substrat (6) est satisfaisant ou non. Ce support d'enregistrement optique (1) est évalué grâce à la mesure du facteur de réflexion du support d'enregistrement optique (1) à inspecter et à la comparaison du facteur de réflexion mesuré avec une valeur prédéterminée. Par conséquent, un support d'enregistrement fabriqué peut être évalué en peu de temps. C'est pourquoi, le temps nécessaire au processus d'inspection peut être suffisamment écourté et, par conséquent, le coût de fabrication du support d'enregistrement optique (1) peut être suffisamment réduit tout en conservant une haute fiabilité.
PCT/JP2002/007510 2001-07-27 2002-07-24 Procede d'inspection d'un support d'enregistrement optique WO2003010764A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-227226 2001-07-27
JP2001227226A JP2003045093A (ja) 2001-07-27 2001-07-27 光記録媒体の検査方法

Publications (1)

Publication Number Publication Date
WO2003010764A1 true WO2003010764A1 (fr) 2003-02-06

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PCT/JP2002/007510 WO2003010764A1 (fr) 2001-07-27 2002-07-24 Procede d'inspection d'un support d'enregistrement optique

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JP (1) JP2003045093A (fr)
WO (1) WO2003010764A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07176049A (ja) * 1993-12-20 1995-07-14 Idemitsu Material Kk 円盤状記録媒体の欠陥検出方法および検出装置
JPH09147423A (ja) * 1995-11-24 1997-06-06 Matsushita Electric Ind Co Ltd 光学情報記録媒体の製造方法及び評価方法
JPH109829A (ja) * 1996-06-26 1998-01-16 Matsushita Electric Ind Co Ltd 多層薄膜の膜厚測定方法と、その方法を用いた光学情報記録媒体の製造方法及び光学情報記録媒体の製造装置
JPH1131380A (ja) * 1997-07-10 1999-02-02 Ekisupaato Magnetics Kk Ｃｄ−ｒの検査装置
JP2000331346A (ja) * 1999-05-20 2000-11-30 Victor Co Of Japan Ltd 光情報記録媒体の初期化方法及び初期化済み光情報記録媒体

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07176049A (ja) * 1993-12-20 1995-07-14 Idemitsu Material Kk 円盤状記録媒体の欠陥検出方法および検出装置
JPH09147423A (ja) * 1995-11-24 1997-06-06 Matsushita Electric Ind Co Ltd 光学情報記録媒体の製造方法及び評価方法
JPH109829A (ja) * 1996-06-26 1998-01-16 Matsushita Electric Ind Co Ltd 多層薄膜の膜厚測定方法と、その方法を用いた光学情報記録媒体の製造方法及び光学情報記録媒体の製造装置
JPH1131380A (ja) * 1997-07-10 1999-02-02 Ekisupaato Magnetics Kk Ｃｄ−ｒの検査装置
JP2000331346A (ja) * 1999-05-20 2000-11-30 Victor Co Of Japan Ltd 光情報記録媒体の初期化方法及び初期化済み光情報記録媒体

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