WO2003008961A1 - Corps structurel a croisements tridimensionnels de microcanaux et procede de formation d'un ecoulement laminaire multiple a croisements tridimensionnels - Google Patents

Corps structurel a croisements tridimensionnels de microcanaux et procede de formation d'un ecoulement laminaire multiple a croisements tridimensionnels Download PDF

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Publication number
WO2003008961A1
WO2003008961A1 PCT/JP2002/004428 JP0204428W WO03008961A1 WO 2003008961 A1 WO2003008961 A1 WO 2003008961A1 JP 0204428 W JP0204428 W JP 0204428W WO 03008961 A1 WO03008961 A1 WO 03008961A1
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WO
WIPO (PCT)
Prior art keywords
liquid
microchannel
microchannels
substrate
channel
Prior art date
Application number
PCT/JP2002/004428
Other languages
English (en)
Japanese (ja)
Inventor
Takehiko Kitamori
Akihide Hibara
Manabu Tokeshi
Kenji Uchiyama
Original Assignee
Kanagawa Academy Of Science And Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by Kanagawa Academy Of Science And Technology filed Critical Kanagawa Academy Of Science And Technology
Publication of WO2003008961A1 publication Critical patent/WO2003008961A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/432—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction with means for dividing the material flow into separate sub-flows and for repositioning and recombining these sub-flows; Cross-mixing, e.g. conducting the outer layer of the material nearer to the axis of the tube or vice-versa
    • B01F25/4323—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction with means for dividing the material flow into separate sub-flows and for repositioning and recombining these sub-flows; Cross-mixing, e.g. conducting the outer layer of the material nearer to the axis of the tube or vice-versa using elements provided with a plurality of channels or using a plurality of tubes which can either be placed between common spaces or collectors
    • B01F25/43231—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction with means for dividing the material flow into separate sub-flows and for repositioning and recombining these sub-flows; Cross-mixing, e.g. conducting the outer layer of the material nearer to the axis of the tube or vice-versa using elements provided with a plurality of channels or using a plurality of tubes which can either be placed between common spaces or collectors the channels or tubes crossing each other several times
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B01F33/3039—Micromixers with mixing achieved by diffusion between layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates

Definitions

  • the invention of this application relates to a method for forming a microchannel three-dimensional crossover structure and a three-dimensional crossover multilayer liquid. More specifically, the invention of the present application is based on a three-dimensional flow channel that is useful for precision microanalysis, precision separation, or fine chemical synthesis in microchips and the like having a microchannel (microchannel).
  • the present invention relates to a micro-channel structure crossed over a substrate and a method for forming a three-dimensionally cross-linked liquid using the same. Background art
  • the inventors of the present application proposed a new liquid-liquid method for solvent extraction and chemical synthesis in order to solve the problem that conventional versatility is poor and high-level integration is difficult.
  • the invention of this application can greatly improve the degree of integration of the flow channel in the microchip, facilitate continuous operation and multi-stage operation, and have a stable interface and good phase. It is an object of the present invention to provide a new technical means for high integration and formation of a multilayer flow, which can easily realize the separability. Disclosure of the invention
  • the invention of this application solves the above-mentioned problems.
  • a structure in which a substrate on which microchannels are provided is stacked with the microchannel mounting surfaces facing each other, At least a part of the microchannels disposed on the substrate is vertically intersected with each other, and a liquid-liquid interface of the liquid flowing through the microchannel is formed at the three-dimensional intersection.
  • the present invention provides a microchannel three-dimensional intersection structure.
  • the second aspect of the present invention is characterized in that one surface of the upper and lower microphone opening channels constituting the three-dimensional intersection is made hydrophobic and the other surface is made hydrophilic.
  • the pressure difference at the liquid-liquid interface between the aqueous phase and the oily phase is 60%.
  • the present invention provides a microphone-channel stereoscopic crossing structure characterized by being 0 Pa or less.
  • the microchannels of the upper substrate to be crossed are stacked via the upper substrate upper surface or the intermediate substrate.
  • the microchannel crossover structure which is characterized by communicating with the microchannels provided on the lower or upper surface of the upper substrate by through holes, fifthly, the micro opening of each substrate
  • the microchannel three-dimensional intersection structure is provided with a liquid supply part and a drainage part communicating with the channel.
  • the invention of this application is directed to a sixth aspect of the present invention, in which the liquid is circulated through the microphone opening channels of each of the upper and lower substrates by using any of the above-described three-dimensional channel intersection structures, and the liquid-liquid interface is formed at the three-dimensional intersection.
  • a method for forming a three-dimensionally cross-layered liquid which is characterized by forming a multi-layered flow.
  • FIG. 1 is a schematic view illustrating the outline of the structure of the present invention.
  • FIG. 2 is a schematic view different from FIG.
  • FIG. 3 is a cross-sectional view of a main part illustrating a three-dimensional intersection.
  • FIG. 4 is a cross-sectional view of a principal part showing another example different from FIG.
  • FIG. 5 is a graph illustrating a flow velocity difference and a pressure difference between a nitrogen channel and water flowing through the microchannel of the structure of the present invention.
  • Fig. 6 is a conceptual diagram showing the arrangement when there are a plurality of microchannel intersections.
  • FIG. 7 is a process step diagram illustrating the formation of the microchannel of the structure of the present invention.
  • FIG. 8 is a plan view illustrating the arrangement of the three-dimensional intersection of microchannels.
  • FIG. 9 is an exploded perspective view illustrating the structure of the present invention in the embodiment.
  • FIG. 10 is a micrograph illustrating the liquid-liquid interface at the intersection.
  • FIG. 11 is a photograph illustrating the state of the liquid-liquid interface when the ODS process is performed and when it is not performed.
  • FIG. 1 and FIG. 2 schematically illustrate this, for example, as illustrated in FIG. 1, in the structure of the invention of this application.
  • the microchannel (1A1 ) Is formed on the lower substrate (1A) and the lower substrate on which the microchannel (1B1) is formed is the microchannel (1A1) (1B1). ) Are laminated with their forming surfaces facing each other. At the intersection (2), the liquid flowing through each of the upper and lower microchannels A A) (1B1) intersects three-dimensionally to form a liquid-liquid interface (3). I am trying to.
  • FIG. 2 also shows an intersection (2) where such a liquid-liquid interface is formed, but is longer than the intersection (2) of the example of FIG. 1 in the flow direction of the liquid-liquid interface. (L) is longer.
  • This length (L) means the contact length as a multilayer flow, as also shown in FIG.
  • the length (L) of the intersection (2) and the location and number of the intersection (2) can be determined as appropriate according to the operation purpose and application of the structure of the present invention.
  • the microchannel (1B2) formed on the upper surface of the upper substrate (1B) and the through-hole (1B3) can communicate with each other.
  • another substrate or cover plate (4) may be laminated.
  • the degree of freedom in selecting the position of the intersection (2) of the microchannel (1B1) with respect to the microchannel (1A1) of the lower substrate (1A) is increased. growing. Microphone on top This is because the upper liquid can be guided to a predetermined position by the mouth channel (1B2) and a liquid-liquid interface can be formed at the intersection (2) at the predetermined position.
  • a substrate as an intermediate layer may be interposed.
  • the formation of the liquid-liquid interface due to the three-dimensional crossing between the upper and lower liquids is performed in order to form a stable interface between the upper liquid and the lower liquid, and the properties of each liquid, surface tension, specific gravity, compatibility, etc. Points will be taken into account. Naturally, the flow velocity or the liquid temperature is determined in consideration of these points.
  • the means for supplying the fluid to the flow path and the means for discharging the liquid from the flow path are also appropriately determined.
  • the surface of a microchannel formed on a glass substrate can be effectively hydrophobized by subjecting it to a silane treatment with trichloride octadecylsilane (0DS) or the like.
  • a silane treatment with trichloride octadecylsilane (0DS) or the like.
  • the liquid-liquid interface of both the oil phase and the aqueous phase is stably formed when the range of the pressure difference at the liquid-liquid interface of the oil phase and the aqueous phase is 600 Pa or less.
  • This pressure difference can be derived from the flow rate difference between the oil phase and the aqueous phase.
  • Fig. 5 (a) shows the measured flow rates of both liquids when nitrobenzene was used as the oil phase and water was used as the aqueous phase.
  • the upper and lower limits of the flow rate of water for forming a stable liquid-liquid interface when the flow rate of nitrobenzene as the oil phase is 0 to 6 tI / min are shown.
  • D 4 S / 1 Note that S is the cross-sectional area of the microchannel, and 1 indicates the perimeter of the cross-section of the microphone channel.
  • the microphone mouth channel used in the experiment has D of 135 m.
  • Figure 5 (b) shows the upper and lower limits of the pressure difference at the liquid-liquid interface of nitrobenzene and water to form a stable liquid-liquid interface.
  • the density of water was 0.998 g / mL
  • the density of benzene was 1.204 g / mL
  • the viscosity of water was 1.002 mP.
  • the viscosity of a's and nitrobenzene was set at 1.863 mPa ⁇ s.
  • the pressure difference in the counterflow was estimated.
  • the flow rate of nitrobenzene was 3 AtI / min and the flow rate of water was 6 nI / min.
  • FIG. 6 there are four three-dimensional intersections, and the three-dimensional intersections are provided at 5 mm intervals.
  • the pressure drop gradient ⁇ P_L of nitrobenzene is 7900 Pa / m
  • the ⁇ PZL of water is 850 Pa / m
  • the pressure of benzene and the pressure of water between the parts are 39.5 Pa and 42.5 Pa. Between these four crossovers, the pressures of nitrobenzene and water are 18.5 Pa and 12.7 Pa.
  • the range of the pressure difference needs to be 250 Pa or less. Since this value is within the range of the allowable pressure difference of the microchannel, the invention of this application can be applied to the case where there are a plurality of three-dimensional intersections.
  • the width is about 50 Oim or less and the depth is about 20 Otm or less, but is not limited to this.
  • the flow velocity of the fluid is generally considered to be about 20 ⁇ . I Zmin or less, but is not limited thereto.
  • microchannel of the three-dimensional intersection structure of the present invention can be formed by various processing methods such as, for example, lithography and jet etching.
  • FIG. 7 illustrates an example of this method for a glass substrate as a process step including a 0DS hydrophobizing treatment of a lower substrate.
  • a microchannel is formed by photolithography and one-to-one etching, and a lower channel (1A) is formed on the lower substrate (1A).
  • DS (silane) treatment for hydrophobic surface You. It goes without saying that the ODS (silane) treatment may be performed after the resist and metal stripping.
  • the lamination of the lower substrate (1A) and the upper substrate (1B) for forming the three-dimensional intersection (2) may be performed by heat fusion, or by screwing or crimping with a holder. .
  • the three-dimensional formation of the liquid-liquid interface by the microchannel standing crossover structure of the present invention as described above can be performed by separation by solvent extraction or the like, analysis by a reagent reaction, analysis by optical means, Is useful for chemical synthesis methods, etc., and also as a channel formation itself by three-dimensional three-dimensional crossing.
  • a plurality of three-dimensional intersections may be arranged in the flow path. For example, as illustrated in FIG. 8, various forms such as crossing the microchannel (1A1) of the lower substrate and the microchannel (1B1) of the upper substrate are possible.
  • FIG. 10 is an enlarged photograph of a portion where two microchannels processed on the upper and lower surfaces are in contact while intersecting with each other.
  • Benzene benzene is circulated in the oil phase, and fluorescent fine particles are dispersed in the aqueous phase as a probe.
  • the black streamline in Fig. 10 indicates the streamline on the water phase side. It can be seen that each phase contacts and forms a stable interface that crosses three-dimensionally, flows linearly according to the hydrophilicity (hydrophobicity) of the surface, and then completely separates.
  • a stable interface can be easily formed by chemical modification, and integration such as multi-step operation after phase separation can be easily realized.
  • Figure 11 (a) shows the result of modifying the microchannel with triclonal octadecylsilane
  • Figure 11 (b) shows the result without modification.
  • the surface of the microchannel can be effectively hydrophobized by performing a silane treatment with trichloride octadecylsilane (ODS) or the like.
  • ODS trichloride octadecylsilane
  • the invention of this application can greatly improve the degree of integration of channels in microchannels, facilitate continuous operation and multistage operation, and realize stable interfaces and good phase separation.
  • a new technical means for high integration and formation of a multi-layer liquid can be provided.

Abstract

L'invention concerne un corps structurel dans lequel des substrats possédant des microcanaux sont mis en couches, les surfaces à arrangement de microcanaux étant face à face. Ces microcanaux placés sur chaque substrat se croisent les uns les autres de façon tridimensionnelle au moins en partie, et une interface liquide-liquide d'un liquide s'écoulant à travers les microcanaux est formée au niveau des parties qui se croisent.
PCT/JP2002/004428 2001-07-11 2002-05-07 Corps structurel a croisements tridimensionnels de microcanaux et procede de formation d'un ecoulement laminaire multiple a croisements tridimensionnels WO2003008961A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-211254 2001-07-11
JP2001211254A JP2003028836A (ja) 2001-07-11 2001-07-11 マイクロチャンネル立体交差構造体と立体交差多層流の形成方法

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WO2003008961A1 true WO2003008961A1 (fr) 2003-01-30

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WO (1) WO2003008961A1 (fr)

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JP4599805B2 (ja) * 2003-04-08 2010-12-15 東ソー株式会社 微小流路構造体及びそれを用いた化学反応方法
JP4724656B2 (ja) 2004-04-28 2011-07-13 アークレイ株式会社 電気泳動チップおよびこれを備えた電気泳動装置
JP2008014791A (ja) * 2006-07-05 2008-01-24 Nipro Corp 液体混合デバイス、液体混合方法及び微量検体測定方法
JP2008215873A (ja) * 2007-02-28 2008-09-18 Yokogawa Electric Corp センサユニット及びマイクロリアクタシステム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10507962A (ja) * 1994-10-22 1998-08-04 セントラル リサーチ ラボラトリーズ リミティド 不混和性流体間の拡散移動のための方法及び装置
WO1999022858A1 (fr) * 1997-11-05 1999-05-14 British Nuclear Fuels Plc Reactions de composes aromatiques
JPH11508182A (ja) * 1995-06-16 1999-07-21 ザ ユニバーシティ オブ ワシントン 微細製造差動抽出デバイスおよびその方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000298109A (ja) * 1999-04-13 2000-10-24 Kanagawa Acad Of Sci & Technol マイクロチャンネル構造体
JP2001137613A (ja) * 1999-11-11 2001-05-22 Kawamura Inst Of Chem Res 抽出機構を有する微小ケミカルデバイス
JP2002001102A (ja) * 2000-06-20 2002-01-08 Kanagawa Acad Of Sci & Technol マイクロチャンネル構造

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10507962A (ja) * 1994-10-22 1998-08-04 セントラル リサーチ ラボラトリーズ リミティド 不混和性流体間の拡散移動のための方法及び装置
JPH11508182A (ja) * 1995-06-16 1999-07-21 ザ ユニバーシティ オブ ワシントン 微細製造差動抽出デバイスおよびその方法
WO1999022858A1 (fr) * 1997-11-05 1999-05-14 British Nuclear Fuels Plc Reactions de composes aromatiques

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