WO2002088639A1 - System and method for filtering output in mass flow controllers and mass flow meters - Google Patents

System and method for filtering output in mass flow controllers and mass flow meters Download PDF

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Publication number
WO2002088639A1
WO2002088639A1 PCT/US2002/013207 US0213207W WO02088639A1 WO 2002088639 A1 WO2002088639 A1 WO 2002088639A1 US 0213207 W US0213207 W US 0213207W WO 02088639 A1 WO02088639 A1 WO 02088639A1
Authority
WO
WIPO (PCT)
Prior art keywords
indicated flow
flow
filtered
indicated
allowable deviation
Prior art date
Application number
PCT/US2002/013207
Other languages
English (en)
French (fr)
Inventor
Tariq Faisal
Original Assignee
Mykrolis Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mykrolis Corporation filed Critical Mykrolis Corporation
Priority to JP2002585894A priority Critical patent/JP2005510690A/ja
Priority to EP02725821A priority patent/EP1393020A1/en
Priority to KR10-2003-7013916A priority patent/KR20040015132A/ko
Priority to CNA028088336A priority patent/CN1714277A/zh
Publication of WO2002088639A1 publication Critical patent/WO2002088639A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0205—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
    • G05B13/021—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a variable is automatically adjusted to optimise the performance

Definitions

  • the present invention has been made in view of the above circumstances and can be characterized by one aspect as an output filter that substantially eliminates or reduces disadvantages and problems associated with conventional filters. More particularly, embodiments of the present invention provide a method for filtering an indicated flow. Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The aspects and advantages of the invention will be realized and attained by means of the elements and combinations particularly pointed out in the appended claims.
  • an embodiment of the output filter of the present invention can be configured to start the timer when a sample of the indicated flow falls outside of the plus or minus one percent (or otherwise defined) allowable deviation.
  • the buffer can be provided so that very small offsets (e.g., offsets just outside of the plus or minus one percent range) do not start the clock and are not represented in the filtered indicated flow.
  • the allowable deviation and the buffer can be asymmetrical about the baseline. As just one example, allowable deviation could be plus one percent and minus two percent, etc.
  • output filter 230 compared the indicated flow to a baseline defined by a set point.
  • output filter 230 can pass filtered indicated flow 620 to the output port of the DSP (or other micro-processor).
  • output filter 540 removes the noise and transient spikes indicated flow 530. Because noise can be removed from, or, at least, substantially reducing the indicated flow, embodiments of the present invention can create a filtered indicated flow which is less likely to cause false alarm conditions in manufacturing tools, thereby reducing downtime and wafer batch loss. Furthermore, this can be done without reducing the response time of the mass flow meter.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Artificial Intelligence (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
  • Air Conditioning Control Device (AREA)
PCT/US2002/013207 2001-04-27 2002-04-26 System and method for filtering output in mass flow controllers and mass flow meters WO2002088639A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2002585894A JP2005510690A (ja) 2001-04-27 2002-04-26 マスフローコントローラおよびマスフローメータにおける出力をフィルタリングするためのシステムおよび方法
EP02725821A EP1393020A1 (en) 2001-04-27 2002-04-26 System and method for filtering output in mass flow controllers and mass flow meters
KR10-2003-7013916A KR20040015132A (ko) 2001-04-27 2002-04-26 질량 유동 제어기와 질량 유동 계량기의 출력을 여과하는장치 및 방법
CNA028088336A CN1714277A (zh) 2001-04-27 2002-04-26 对质量流控制器和质量流量计的输出滤波的系统和方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US28693401P 2001-04-27 2001-04-27
US60/286,934 2001-04-27

Publications (1)

Publication Number Publication Date
WO2002088639A1 true WO2002088639A1 (en) 2002-11-07

Family

ID=23100770

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/013207 WO2002088639A1 (en) 2001-04-27 2002-04-26 System and method for filtering output in mass flow controllers and mass flow meters

Country Status (7)

Country Link
US (2) US6865520B2 (zh)
EP (1) EP1393020A1 (zh)
JP (1) JP2005510690A (zh)
KR (1) KR20040015132A (zh)
CN (1) CN1714277A (zh)
TW (1) TW538328B (zh)
WO (1) WO2002088639A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014135973A1 (en) * 2013-03-08 2014-09-12 Hitachi Metals, Ltd. System and method for improved indicated flow in mass flow controllers

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW538328B (en) * 2001-04-27 2003-06-21 Mykrolis Corp System and method for filtering output in mass flow controllers and mass flow meters
JP4546926B2 (ja) * 2003-09-05 2010-09-22 マイクロ・モーション・インコーポレーテッド 流量計フィルタ・システム及び方法
BRPI0621207B1 (pt) * 2006-01-27 2020-03-03 Dolby International Ab Filtragem eficiente com um banco de filtros modulado complexo
US7791422B2 (en) * 2007-10-17 2010-09-07 Autoliv Asp, Inc. Voltage controlled oscillator with cascaded emitter follower buffer stages
US7940188B2 (en) 2008-02-07 2011-05-10 Veltek Associates, Inc. Air sampling system having a plurality of air sampling devices with their own flow switches
US8195312B2 (en) * 2009-08-27 2012-06-05 Hitachi Metals, Ltd Multi-mode control loop with improved performance for mass flow controller
EP2537148B1 (en) 2010-02-18 2021-06-23 Veltek Associates, INC. Improved air sampling system
US9939416B2 (en) 2014-08-28 2018-04-10 Veltek Assoicates, Inc. Programmable logic controller-based system and user interface for air sampling in controlled environments
CN108027621B (zh) * 2015-09-28 2021-12-31 皇家飞利浦有限公司 用于使用比例流量阀控制气体流的方法和系统
US20190017334A1 (en) * 2017-07-14 2019-01-17 Cameron International Corporation Horizontal offline stand building system and method of its use in drilling operations
US11429409B2 (en) * 2018-09-04 2022-08-30 Lam Research Corporation Software emulator for hardware components in a gas delivery system of substrate processing system
CN111060168A (zh) * 2019-12-26 2020-04-24 深圳市佳运通电子有限公司 一种流量信号采样方法和装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5730181A (en) * 1994-07-15 1998-03-24 Unit Instruments, Inc. Mass flow controller with vertical purifier
US6389364B1 (en) * 1999-07-10 2002-05-14 Mykrolis Corporation System and method for a digital mass flow controller

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5220515A (en) * 1991-04-22 1993-06-15 Applied Materials, Inc. Flow verification for process gas in a wafer processing system apparatus and method
US5741980A (en) * 1994-11-02 1998-04-21 Foster-Miller, Inc. Flow analysis system and method
US5555190A (en) * 1995-07-12 1996-09-10 Micro Motion, Inc. Method and apparatus for adaptive line enhancement in Coriolis mass flow meter measurement
US6814096B2 (en) * 2000-12-15 2004-11-09 Nor-Cal Products, Inc. Pressure controller and method
US6607597B2 (en) * 2001-01-30 2003-08-19 Msp Corporation Method and apparatus for deposition of particles on surfaces
US6695946B2 (en) * 2001-04-18 2004-02-24 Applied Materials Inc. Cooling system
TW538328B (en) * 2001-04-27 2003-06-21 Mykrolis Corp System and method for filtering output in mass flow controllers and mass flow meters

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5730181A (en) * 1994-07-15 1998-03-24 Unit Instruments, Inc. Mass flow controller with vertical purifier
US6389364B1 (en) * 1999-07-10 2002-05-14 Mykrolis Corporation System and method for a digital mass flow controller

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014135973A1 (en) * 2013-03-08 2014-09-12 Hitachi Metals, Ltd. System and method for improved indicated flow in mass flow controllers
JP2016513828A (ja) * 2013-03-08 2016-05-16 日立金属株式会社 マスフローコントローラの改善された表示流量のためのシステム及び方法
US10473500B2 (en) 2013-03-08 2019-11-12 Hitachi Metals, Ltd. System and method for improved indicated flow in mass flow controllers

Also Published As

Publication number Publication date
US20050023197A1 (en) 2005-02-03
JP2005510690A (ja) 2005-04-21
US7113895B2 (en) 2006-09-26
CN1714277A (zh) 2005-12-28
US20020161559A1 (en) 2002-10-31
TW538328B (en) 2003-06-21
US6865520B2 (en) 2005-03-08
EP1393020A1 (en) 2004-03-03
KR20040015132A (ko) 2004-02-18

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