WO2002075297A1 - Procede et dispositif destines a la mesure de caracteristiques thermoelectriques d'un objet combinatoire - Google Patents
Procede et dispositif destines a la mesure de caracteristiques thermoelectriques d'un objet combinatoire Download PDFInfo
- Publication number
- WO2002075297A1 WO2002075297A1 PCT/JP2002/002415 JP0202415W WO02075297A1 WO 2002075297 A1 WO2002075297 A1 WO 2002075297A1 JP 0202415 W JP0202415 W JP 0202415W WO 02075297 A1 WO02075297 A1 WO 02075297A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sample
- combinatorial
- measuring
- specimen
- temperature gradient
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
Definitions
- the present invention relates to a method and an apparatus for measuring thermoelectric properties of a compinatrial sample.
- thermoelectric materials can convert surplus heat into electric energy, so by attaching them to conventional power generation systems, etc., new electric energy can be efficiently extracted, and the emergence of more efficient thermoelectric materials Is expected.
- thermoelectric material when a current is applied to the thermoelectric material, one joint is cooled by the Peltier effect, so that it is being used as a new cooling system, and a more efficient thermoelectric material is desired.
- Carrier control is important for using such semiconductors as devices. For example, by forming a junction (pn junction) between a hole carrier type semiconductor and an electron carrier type semiconductor, devices with various characteristics such as transistors, FETs, diodes, solar cells, and laser oscillations are created. In particular, the carrier code is an important characteristic parameter.
- carrier control is performed during or after the preparation of an undoped sample by impurity replacement or heat treatment in an atmosphere of impurity gas.However, since the amount of doping is generally very small, control is performed. However, it is not easy and often involves trial and error. In particular, wide-gap semiconductors tend to have a specific sign of either p or n.Therefore, only one type has been fabricated or the range of fabrication conditions has been very narrow, and Precise growth conditions Is required. Disclosure of the invention
- thermoelectric materials have been searched for thermoelectric materials until now, since the thermoelectric properties are evaluated individually for each one produced.
- the bottleneck is the method of evaluating the thermoelectric properties, and it is necessary to measure a large number of microscopically prepared samples without delay and at high speed.
- the present invention has been made in view of the above circumstances, and provides a method and an apparatus for measuring thermoelectric properties of a compinatorial sample, which are effective in expediting the evaluation of a measurement sample, searching for thermoelectric materials, controlling a semiconductor carrier, and the like. With the goal.
- thermoelectric properties of a combinatorial sample a minute temperature gradient is applied by attaching the buttered compinatorial sample between two or more heat baths, and a temperature gradient direction from the combinatorial sample is applied. It is characterized by being able to take out many electrical signals.
- thermoelectric properties of a combinatorial sample a puttered compinatorial sample, two or more heat baths for applying a minute temperature gradient to the sample, and means for measuring the temperature gradient
- the heat bath refers to the portion of the sample stage.
- it is not just a (sample) table but refers to a material with a relatively large heat capacity so that the temperature is kept constant during the measurement. (In practice, it is often made of metal such as copper. No tics are used.)
- a heat bath Is one, but at least two or more are required for measuring thermoelectric properties.
- a more specific configuration of the present invention is a method for measuring thermoelectric properties of a compinatrial sample, wherein a small temperature gradient is applied to the compinatrial sample patterned by one photolithography technique, and It is characterized by being able to take out many electrical signals from combinatorial samples.
- thermoelectric characteristic measuring device for a combinatorial sample, a sample patterned by a photolithographic technique, a pair of sample stages for applying a minute temperature gradient to the sample, and a means for measuring the temperature gradient, And a wire bonding means connected to the sample.
- FIG. 1 is a block diagram of a device for measuring thermoelectric properties of a compinatrial according to an embodiment of the present invention.
- FIG. 1 is a perspective view of a system for measuring a thermoelectric characteristic of a computer using a probe pin array according to a first embodiment of the present invention.
- FIG. 3 is a perspective view of a combinatorial thermoelectric characteristic measuring apparatus using wire bonding according to a second embodiment of the present invention.
- FIG. 4 is a diagram showing the results of the thermoelectromotive force measured by the device of the present invention.
- FIG. 1 is a block diagram of an apparatus for measuring thermoelectric properties of a compinatrial showing an embodiment of the present invention.
- 1 is a sample stage
- 2 is a temperature controller
- 3 is a temperature difference controller
- 4 is a voltmeter
- 5 is an ammeter
- 6 is a wiring switching device
- 7 is a computer.
- FIG. 2 is a perspective view of a measuring section of the compinatrial thermoelectric characteristic measuring system showing the first embodiment of the present invention.
- reference numeral 10 denotes a two-dimensional sample specimen (micro sample) patterned by using a metal mask
- 11 and 12 denote a pair of sample tables on which the measurement sample 10 is placed
- 13 Is a heater arranged on the outer surface of the sample stage
- 14 is a thermocouple arranged between a pair of sample stages 11 and 12
- 15 is a combinatorial measurement sample 10 arranged in a plurality of rows.
- a probe pin array that is arranged to be connected at one time.
- a small temperature gradient is applied to the measurement sample 10 patterned using a metal mask by the temperature 13 (for example, the temperature of the sample stage 11 is higher than that of the sample stage 3 by 3 ° C). Then, a large number of electrical signals can be extracted from the combinatorial measurement sample 10 by contact with the probe pin array 15.
- probe pins 15a, 15b, 15c, and 15d are set up in a row, and a current is passed between the probe pins 15a and 15d. And 15c, the potential difference can be measured to measure the combinatorial thermoelectric properties of the measurement sample at the same time under the same measurement conditions.
- the measured two-dimensional combinatorial sample can be removed from the sample tables 11 and 12 and a new one-dimensional combinatorial sample can be placed on it for measurement under the same conditions.
- FIG. 3 is a perspective view of a measuring section of a compinatrial thermoelectric characteristic measuring system according to a second embodiment of the present invention.
- a connection by a bonding wire is performed instead of the probe pin array of the first embodiment.
- 20 is a two-dimensionally arranged combinatorial measurement sample patterned by photolithography technology
- 21 and 22 are a pair of sample stages on which the measurement sample 20 is placed
- 24 is a thermocouple placed between a pair of sample stages 21 and 22
- 25 is a bonding terminal
- 6 is a bonding terminal
- a small temperature gradient is applied to the sample 10 patterned by the photolithography technique by the heater 23 between the terminal 25 and the measurement sample 20,
- a large number of electric signals can be taken out from the combinatorial measurement sample 20 through the bonding terminal 25 using the bonding method.
- FIG. 4 is a diagram showing the results of the thermoelectromotive force measured by the apparatus of the present invention, in which the horizontal axis represents the temperature difference [ ⁇ (° C)] and the vertical axis represents the thermoelectromotive force (uY). is there.
- thermoelectromotive force varies linearly with the temperature difference, indicating that the measurement was correct.
- a small temperature gradient is applied to the sample patterned using a metal mask, and a large number of electrical signals can be extracted from the sample for compinatorial measurement by contact with a probe pin.
- thermoelectric material it is possible to simultaneously measure a large number of thermoelectromotive forces and electrical resistances of a measurement sample synthesized with a combinatorial thin film, thereby enabling high-speed screening in searching for a thermoelectric material. Therefore, this device according to the present invention is an important elemental technology in searching for thermoelectric materials.
- thermoelectric materials the synthesis of compinatorial thin films using a mask mechanism is rapidly spreading as a high-speed material search method.
- this method to search for thermoelectric materials, it is necessary to measure the thermoelectric properties to evaluate the fabricated thin films. It was hanging.
- thermoelectric characteristics at high speed it is possible to simultaneously measure the thermoelectromotive force and the electrical characteristics of a combinatorially synthesized thin film, so that it is possible to evaluate thermoelectric characteristics at high speed.
- This device can be applied to a wide range of applications, such as the ability to easily evaluate the positive or negative charge of an introduced carrier even in a semiconductor carrier.
- the number of the heat baths is two, but two or more heat baths may be used.
- the present invention is not limited to the above embodiments, and various modifications are possible based on the spirit of the present invention, and these are not excluded from the scope of the present invention.
- the present invention it is possible to simultaneously measure the thermoelectromotive force and the electrical characteristics of a combinatorially synthesized thin film, so that high-speed thermoelectric characteristic evaluation can be performed. Therefore, the device according to the present invention is an important elemental technology in searching for thermoelectric materials.
- the present invention can be widely applied to carrier doping in semiconductors, for example, it is possible to easily evaluate the positive / negative of the charge of an introduced carrier.
- thermoelectric properties of a compinatrial sample according to the present invention are an important elemental technology in the search for thermoelectric materials. It can be evaluated and its use is extensive.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/450,709 US6902317B2 (en) | 2001-03-16 | 2002-03-14 | Method and device for measuring thermoelectric characteristics of combinatorial specimen |
EP02705181.2A EP1400804B1 (en) | 2001-03-16 | 2002-03-14 | Method and device for measuring thermoelectric characteristics of combinatorial specimen |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001075954A JP3388731B2 (ja) | 2001-03-16 | 2001-03-16 | コンビナトリアル試料の熱電特性測定方法及びその装置 |
JP2001-75954 | 2001-03-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2002075297A1 true WO2002075297A1 (fr) | 2002-09-26 |
Family
ID=18932962
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2002/002415 WO2002075297A1 (fr) | 2001-03-16 | 2002-03-14 | Procede et dispositif destines a la mesure de caracteristiques thermoelectriques d'un objet combinatoire |
Country Status (4)
Country | Link |
---|---|
US (1) | US6902317B2 (ja) |
EP (1) | EP1400804B1 (ja) |
JP (1) | JP3388731B2 (ja) |
WO (1) | WO2002075297A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4560628B2 (ja) * | 2005-04-28 | 2010-10-13 | 国立大学法人東京工業大学 | コンビナトリアルマテリアル用評価基板 |
JP2007024603A (ja) * | 2005-07-13 | 2007-02-01 | Toyota Motor Corp | 薄膜状試料の測定方法 |
CN1975448B (zh) * | 2006-12-11 | 2010-08-11 | 中国科学院上海硅酸盐研究所 | 一种热电发电元器件性能测量装置及其方法 |
US8087823B2 (en) * | 2008-08-18 | 2012-01-03 | International Business Machines Corporation | Method for monitoring thermal control |
US9448121B2 (en) | 2012-04-10 | 2016-09-20 | Industrial Technology Research Institute | Measurement method, measurement apparatus, and computer program product |
RU2646537C2 (ru) * | 2015-11-30 | 2018-03-05 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Тамбовский государственный технический университет" ФГБОУ ВПО ТГТУ | Устройство для измерения коэффициента термоэлектродвижущей силы материалов |
EP3340287B1 (en) * | 2016-12-23 | 2020-10-28 | Huawei Technologies Co., Ltd. | Pattern-based temperature measurement for a bonding device and a bonding system |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0552783A (ja) * | 1991-08-28 | 1993-03-02 | Tokuyama Soda Co Ltd | 熱電特性測定装置 |
JPH09222403A (ja) * | 1996-02-16 | 1997-08-26 | Hitachi Ltd | 物性値測定装置 |
JPH10512840A (ja) * | 1994-10-18 | 1998-12-08 | ザ・リージェンツ・オブ・ザ・ユニバーシティ・オブ・カリフォルニア | 新規材料の組合せ合成方法 |
Family Cites Families (12)
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US3733887A (en) * | 1972-01-31 | 1973-05-22 | Borg Warner | Method and apparatus for measuring the thermal conductivity and thermo-electric properties of solid materials |
US4320344A (en) * | 1978-07-24 | 1982-03-16 | Nicholas William R | Metal-alloy thermoelectric characteristic analyzer |
HU189716B (en) * | 1983-07-14 | 1986-07-28 | Budapesti Mueszaki Egyetem,Hu | Method and appaeatus for non-destructive testing the heat physical characteristics of materials |
GB2233457A (en) * | 1989-06-21 | 1991-01-09 | Schlumberger Technologies Ltd | Temperature reference junction for a multichannel temperature sensing system. |
JPH0518913A (ja) * | 1991-07-10 | 1993-01-26 | Tokuyama Soda Co Ltd | 熱起電力の測定方法および装置 |
JP2730662B2 (ja) * | 1993-03-16 | 1998-03-25 | 株式会社ジャパンエナジー | 温度測定素子及び温度測定方法 |
JPH06300719A (ja) * | 1993-04-16 | 1994-10-28 | Tokuyama Soda Co Ltd | 熱電変換特性の測定方法及び装置 |
JPH0755739A (ja) * | 1993-08-20 | 1995-03-03 | Shinku Riko Kk | 熱電特性測定方法及び装置 |
JPH07324991A (ja) * | 1994-06-02 | 1995-12-12 | Ohara Inc | 熱電特性測定装置 |
DE19635264C1 (de) * | 1996-08-30 | 1998-04-16 | Max Planck Gesellschaft | Thermoelektrische Mikrosonde |
AU3691700A (en) * | 1998-12-11 | 2000-07-03 | Symyx Technologies, Inc. | Sensor array-based system and method for rapid materials characterization |
US6487515B1 (en) * | 2000-08-18 | 2002-11-26 | International Business Machines Corporation | Method and apparatus for measuring thermal and electrical properties of thermoelectric materials |
-
2001
- 2001-03-16 JP JP2001075954A patent/JP3388731B2/ja not_active Expired - Fee Related
-
2002
- 2002-03-14 US US10/450,709 patent/US6902317B2/en not_active Expired - Lifetime
- 2002-03-14 EP EP02705181.2A patent/EP1400804B1/en not_active Expired - Lifetime
- 2002-03-14 WO PCT/JP2002/002415 patent/WO2002075297A1/ja active Application Filing
Patent Citations (3)
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JPH0552783A (ja) * | 1991-08-28 | 1993-03-02 | Tokuyama Soda Co Ltd | 熱電特性測定装置 |
JPH10512840A (ja) * | 1994-10-18 | 1998-12-08 | ザ・リージェンツ・オブ・ザ・ユニバーシティ・オブ・カリフォルニア | 新規材料の組合せ合成方法 |
JPH09222403A (ja) * | 1996-02-16 | 1997-08-26 | Hitachi Ltd | 物性値測定装置 |
Non-Patent Citations (2)
Title |
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KOINUMA,HIDEOMI ET AL.: "21 Seiki no zairyo kakumei sendo program (combinatorial gijutsu) 1000nen o 1nen ni chijimeru meterial highway no kochiku...", MATERIALS INTEGRATION, vol. 13, no. 8, 25 July 2000 (2000-07-25), pages 39 - 44, XP002955839 * |
See also references of EP1400804A4 * |
Also Published As
Publication number | Publication date |
---|---|
US20040047398A1 (en) | 2004-03-11 |
JP2002277422A (ja) | 2002-09-25 |
EP1400804A1 (en) | 2004-03-24 |
US6902317B2 (en) | 2005-06-07 |
EP1400804A4 (en) | 2010-03-03 |
JP3388731B2 (ja) | 2003-03-24 |
EP1400804B1 (en) | 2016-01-13 |
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