WO2002067291A3 - Anordnung eines halbleiterchips auf einem substrat - Google Patents

Anordnung eines halbleiterchips auf einem substrat Download PDF

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Publication number
WO2002067291A3
WO2002067291A3 PCT/DE2002/000339 DE0200339W WO02067291A3 WO 2002067291 A3 WO2002067291 A3 WO 2002067291A3 DE 0200339 W DE0200339 W DE 0200339W WO 02067291 A3 WO02067291 A3 WO 02067291A3
Authority
WO
WIPO (PCT)
Prior art keywords
semi
substrate
conductor chip
arrangement
distance
Prior art date
Application number
PCT/DE2002/000339
Other languages
English (en)
French (fr)
Other versions
WO2002067291A2 (de
Inventor
Holger Huebner
Original Assignee
Infineon Technologies Ag
Holger Huebner
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag, Holger Huebner filed Critical Infineon Technologies Ag
Publication of WO2002067291A2 publication Critical patent/WO2002067291A2/de
Publication of WO2002067291A3 publication Critical patent/WO2002067291A3/de

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/4985Flexible insulating substrates
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    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/0401Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Wire Bonding (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

Die Kontaktflächen (3) des Halbleiterchips (1) und des Substrates sind einander gegenüberliegend angeordnet und elektrisch leitend miteinander verbunden, wobei der Abstand zwischen den Kontaktflächen weniger als 10 ν beträgt. Bei bevorzugten Ausführungsformen ist dieser Abstand nur typisch 2 ν, was mit dem Verfahren der Diffusionslöttechnik (SOLED) hergestellt werden kann. Zur Verbindung von Halbleiterchip und Substrat können weitere Metallflächen (2) vorhanden sein.
PCT/DE2002/000339 2001-02-20 2002-01-31 Anordnung eines halbleiterchips auf einem substrat WO2002067291A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10108081A DE10108081B4 (de) 2001-02-20 2001-02-20 Anordnung eines Halbleiterchips auf einem Substrat
DE10108081.6 2001-02-20

Publications (2)

Publication Number Publication Date
WO2002067291A2 WO2002067291A2 (de) 2002-08-29
WO2002067291A3 true WO2002067291A3 (de) 2002-11-14

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PCT/DE2002/000339 WO2002067291A2 (de) 2001-02-20 2002-01-31 Anordnung eines halbleiterchips auf einem substrat

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WO (1) WO2002067291A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004046699A1 (de) * 2004-09-24 2006-04-13 Infineon Technologies Ag Anordnung zum Verbinden von Kontaktflächen durch eine sich verfestigende Flüssigkeit
DE102004055677A1 (de) * 2004-11-18 2006-06-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Chipträgerverbund und Verfahren zum Herstellen eines Chipträgerverbunds
DE102005026243B4 (de) 2005-06-07 2018-04-05 Snaptrack, Inc. Elektrisches Bauelement und Herstellungsverfahren
JP7166818B2 (ja) 2018-07-13 2022-11-08 スタンレー電気株式会社 光半導体素子

Citations (4)

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Publication number Priority date Publication date Assignee Title
US5205032A (en) * 1990-09-28 1993-04-27 Kabushiki Kaisha Toshiba Electronic parts mounting apparatus
US5699611A (en) * 1994-06-14 1997-12-23 Hughes Electronics Method of hermetically self-sealing a flip chip
US5897341A (en) * 1998-07-02 1999-04-27 Fujitsu Limited Diffusion bonded interconnect
DE19907276A1 (de) * 1999-02-20 2000-09-07 Bosch Gmbh Robert Verfahren zur Herstellung einer Lötverbindung zwischen einem elektrischen Bauelement und einem Trägersubstrat

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