WO2002050863A1 - Mecanisme de fixation de support d'echantillons - Google Patents

Mecanisme de fixation de support d'echantillons Download PDF

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Publication number
WO2002050863A1
WO2002050863A1 PCT/JP2001/011079 JP0111079W WO0250863A1 WO 2002050863 A1 WO2002050863 A1 WO 2002050863A1 JP 0111079 W JP0111079 W JP 0111079W WO 0250863 A1 WO0250863 A1 WO 0250863A1
Authority
WO
WIPO (PCT)
Prior art keywords
sample carrier
clamps
clamp
fixing
fixing mechanism
Prior art date
Application number
PCT/JP2001/011079
Other languages
English (en)
Japanese (ja)
Inventor
Toshihiko Hara
Original Assignee
Advantest Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corporation filed Critical Advantest Corporation
Priority to JP2002551876A priority Critical patent/JPWO2002050863A1/ja
Publication of WO2002050863A1 publication Critical patent/WO2002050863A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting substrates others than wafers, e.g. chips
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007—Holding mechanisms

Definitions

  • the present invention relates to a sample carrier fixing mechanism used when fixing a conveyed sample carrier at a predetermined position of a measurement unit.
  • a sample carrier on which a sample to be measured is placed is transported into a vacuum chamber of the measuring device. After fixing the sample carrier in place on the measuring table and positioning it, the required measurement work is performed.
  • FIG. 9 shows a schematic configuration of an example of a measuring apparatus using such an electron beam.
  • a sample carrier 11 on which a sample to be measured is placed is first placed in the air from a first gate pulp 1. It is carried into the pressure conversion chamber 13 through 2. After the sample carrier 11 is carried into the pressure conversion chamber 13, the pressure in the chamber is adjusted to substantially the same pressure as the pressure in the vacuum chamber 15. Thereafter, the second gate valve 14 is opened, and the sample carrier 11 is conveyed from the pressure conversion chamber 13 through the second gate valve 14 into the vacuum chamber 15.
  • the sample carrier 11 When the sample carrier 11 is taken out from the vacuum chamber 15 into the atmosphere, the sample carrier 11 is carried into the pressure conversion chamber 13 through the second gate pulp 14 where the pressure inside the chamber is reduced. It is adjusted to almost the same pressure as the atmospheric pressure. Thereafter, the first gate valve 12 is opened, and the sample carrier 11 is discharged from the pressure conversion chamber 13 to the atmosphere through the first gate valve 12.
  • the sample carrier 11 is mounted and fixed at a predetermined position on a measurement table 16 movable in three directions of X axis, Y axis and Z axis. After fixing the sample carrier 11, move the measuring table 16 in the X-axis, Y-axis and Z-axis directions or the Z-axis direction as needed to position the sample carrier 11 and start measurement.
  • Top of measuring table 16 Is equipped with a column 17 for electron beam emission. When measuring the length of the sample placed on the sample carrier 11, the column 17 irradiates the sample with an electron beam. .
  • a robot (not shown) is used for transporting the sample carrier 11 in the vacuum chamber 15.
  • the sample carrier 11 is sent from the arm of the robot onto the measurement table 16. Is done.
  • a sample carrier fixing mechanism (not shown) installed on the measuring table 16 is used.
  • a driving mechanism (not shown) such as a motor for driving the fixing mechanism to fix the sample carrier 11 at a predetermined position of the fixing mechanism has been used. Therefore, in the prior art, these mechanisms were arranged in the vacuum chamber 15.
  • An object of the present invention is to provide a sample carrier fixing mechanism having a simple structure that does not require a driving device for driving a clamp for positioning and fixing a sample carrier.
  • Another object of the present invention is to provide a sample carrier fixing mechanism provided with a clamp which can be rotated by the weight of the sample carrier to accurately position and fix the sample carrier.
  • a sample carrier fixing mechanism for positioning and fixing a sample carrier to be conveyed, the plate carrier comprising At least one pair of clamps, each of which is mounted, wherein each clamp has a mounting portion on which the sample carrier is to be mounted, and A clamp for projecting and fixing the sample carrier from the mounting portion, wherein a clamp disposed so that the mounting portion faces each other, and a distal end portion of the mounting portion of the clamp upward.
  • An elastic member that applies an elastic force to the clamp so as to rotate, the elastic member being set to a force weaker than its own weight of the sample carrier mounted on the mounting portion of the clamp.
  • the sample carrier is a plate-like body having a substantially square or rectangular shape, and a V-shaped groove is formed at a substantially central portion of one of two opposing side surfaces.
  • One set of the clamps is provided, and at least the distal ends of the fixing portions of these clamps are formed in a V-shape to be fitted into the V-shaped grooves of the sample carrier, respectively.
  • the sample carrier may be a plate-like body having a substantially circular or elliptical shape, and V-shaped grooves may be formed in the diametrical direction or in the peripheral edges facing the major axis or minor axis direction, respectively. .
  • the sample carrier may be a plate-like body having a substantially square or rectangular shape, and V-shaped grooves may be formed at substantially central portions of four side surfaces thereof.
  • two sets of the clamps are provided, and at least the tips of the fixing portions of these clamps are formed in a V-shape which fits into the four V-shaped grooves of the sample carrier, respectively.
  • the sample carrier is a plate-like body having a substantially circular or elliptical shape, and has a V-shape on two diametrical directions orthogonal to each other or on four peripheral edges opposed in the major axis and minor axis directions, respectively.
  • a groove may be formed.
  • two sets of the clamps are provided, and at least the distal ends of the fixing portions of these clamps are formed in a V-shape which fits into the four V-shaped grooves of the sample carrier, respectively.
  • the sample carrier is a plate having a substantially square or rectangular shape, and two sets of the clamps are provided, and a fixing portion of each clamp has a vertical wall surface.
  • the clamp is driven by the weight of the sample carrier.
  • the vertical wall surface of the fixing portion of one set of clamps abuts one of the two opposite side surfaces of the sample carrier, and the fixing portion of the other set of clamps.
  • the two sets of clamps are arranged such that the vertical wall faces abut on the other two opposite side surfaces of the sample carrier.
  • the sample carrier is a plate-like member having a substantially square or rectangular shape, and two sets of the clamps are provided, and a fixing portion of each clamp has a vertical wall surface at a substantially right angle.
  • the vertical wall surfaces of the fixing portions of one set of clamps come into contact with the two opposite corners of the sample carrier.
  • the two sets of clamps are arranged so that they come into contact with each other and the vertical walls of the fixing portion of the other set of clamps come into contact with the other two opposite corners of the sample carrier, respectively. .
  • One set of the clamps is provided, and when the clamps are rotated against the elastic force by the weight of the sample carrier, the right-angled vertical wall surfaces of the fixing portions of the clamps are one of two opposite sides of the sample carrier.
  • the pair of clamps may be arranged to face each other so as to be in contact with the two corners.
  • the sample carrier is a plate-like body having a substantially square or rectangular shape, and a V-shaped groove is formed substantially at the center of each of four side surfaces thereof.
  • Two sets of clamps are provided, and the fixing portion of each clamp is a columnar body having a substantially circular cross section. When these clamps are rotated against the natural force by the weight of the sample carrier, one of the sets is set. The column of the clamp fits into the V-shaped groove on one of the two opposite sides of the sample carrier, and the column of the other set of clamps fits the other two opposite sides of the sample carrier.
  • the above two sets of clamps are arranged so as to fit into the V-shaped grooves on the side surfaces, respectively.
  • a V-shaped groove is formed at approximately the center of one of the two opposite sides of the sample carrier, and one set of the clamps is provided. These clamps rotate against the elastic force due to the weight of the sample carrier. Then, the columnar bodies having the circular cross section of the clamps fit into the V-shaped grooves on the opposite side surfaces of the sample carrier, respectively. As described above, the pair of clamps may be arranged to face each other.
  • the sample carrier is a plate-like body having a substantially circular or elliptical shape, and has a V-shaped groove formed in a diametrical direction or a peripheral portion facing the major axis or minor axis direction, respectively. Is also good.
  • each clamp is rotatably attached to the base by a support member, and the support member opposes the column having a V-shaped notch formed on a side surface and the notch.
  • Each of the clamps is rotatably supported on the base by a shaft protruding from a side face thereof being sandwiched between the notch and the spring member. Have been.
  • the sample carrier since the positioning and fixing operation of the sample carrier is performed by at least one set of clamps operated by the weight of the sample carrier, the sample carrier is moved to a predetermined position of the sample carrier fixing mechanism as in the prior art. There is no need to use a drive mechanism such as a motor for fixing, and the sample carrier can be accurately positioned and fixed to the sample carrier fixing mechanism by its own weight with an extremely simple structure.
  • FIG. 1A is a plan view showing a first embodiment of a sample carrier fixing mechanism according to the present invention
  • FIG. 1B is a lower side view of FIG. 1A
  • FIG. It is an outline lower side view shown.
  • FIG. 2A is a plan view of one clamp of the sample carrier fixing mechanism shown in FIG. 1
  • FIG. 2B is a lower side view of FIG. 2A
  • FIG. 2C is a right side view of FIG. 2A.
  • FIG. 3A is a plan view showing an example of a sample carrier fixed to the sample carrier fixing mechanism shown in FIG. 1, and FIG. 3B is a lower side view of FIG. 3A.
  • 4A, 4B, and 4C are schematic side views illustrating the operation of the sample carrier fixing mechanism shown in FIG.
  • FIG. 5 is a plan view showing a state where the sample carrier shown in FIG. 3 is fixed to the sample carrier fixing mechanism shown in FIG.
  • FIG. 6A is a schematic plan view showing a second embodiment of the sample carrier fixing mechanism according to the present invention.
  • 6B is a schematic side view showing a state in which the sample carrier is transferred to the sample carrier fixing mechanism shown in FIG. 6A.
  • FIG. 6C is a sample carrier fixing mechanism in which the sample carrier is shown in FIG. 6A.
  • FIG. 3 is a schematic plan view showing a state fixed to the first embodiment.
  • FIG. 7A is a schematic plan view showing a third embodiment of the sample carrier fixing mechanism according to the present invention
  • FIG. 7B is a schematic diagram showing a state where the sample carrier is transferred to the sample carrier fixing mechanism shown in FIG. 7A
  • FIG. 7C is a schematic plan view showing a state where the sample carrier is fixed to the sample carrier fixing mechanism shown in FIG. 7A.
  • FIG. 8A is a schematic plan view showing a fourth embodiment of the sample carrier fixing mechanism according to the present invention
  • FIG. 8B is a schematic view showing a state where the sample carrier is transferred to the sample carrier fixing mechanism shown in FIG. 8A
  • FIG. 8C is a schematic plan view showing a state where the sample carrier is fixed to the sample carrier fixing mechanism shown in FIG. 8A.
  • FIG. 9 is a diagram showing a schematic configuration of an example of a measuring device using an electron beam.
  • FIG. 1 shows a first embodiment of a sample carrier fixing mechanism according to the present invention.
  • FIG. 1A is a plan view of a sample carrier fixing mechanism
  • FIG. 1B is a lower side view of FIG. 1A
  • FIG. FIG. 2 is a schematic lower side view showing a partially sectioned and enlarged view.
  • the sample carrier fixing mechanism 38 has a plate-like base 21 having a substantially rectangular flat surface, and is opposed to both ends of the base 21 in the longitudinal direction (left-right direction in FIG. 1). It has a set of clamps 22R and 22L arranged.
  • the base 21 has its length at a position slightly closer to the center than at one end in the longitudinal direction (the right end in FIG. 1) and at the other end (the left end in FIG. 1).
  • a flat, substantially rectangular projection 23 protrudes slightly outward from both sides (upper and lower sides in FIG. 1A) on the sides.
  • the clamp 2 2 R disposed at one end of the base 21 is disposed at a position extending from one end of the base 21 toward the center, and the clamp 2 disposed at the other end of the base 21.
  • 2 L is arranged at a position slightly above the center of the other end of the base 21 and extending from the center toward the center.
  • the position of the clamp 22 L disposed on the other end side is determined depending on the dimensions (length) of the sample carrier to be positioned and fixed by the clamps 22 R and 22 L.
  • FIG. 2A is a plan view of the clamp 22R
  • FIG. 2B is a lower side view of FIG. 2A
  • FIG. 2C is a right side view of FIG. 2A.
  • the clamp 22R is a plate-like member having a substantially rectangular shape in a plane, and the clamp 22R is disposed at a position opposite to both sides in the longitudinal direction (vertical direction in FIG. 2A, width direction in this embodiment).
  • a shaft 24 is attached for rotatably attaching the base 21 to the base 21. These shafts 24 are attached to the rear end (right end in FIG. 2A) slightly from the center of both sides. Of course, this is a design problem and is not limited to the positions shown.
  • the length of the clamp 22R in the longitudinal direction is set substantially equal to the length of the base 21 in the width direction (vertical length in FIG. 1A).
  • the length of the base 21 in the width direction is set to about 42 mm
  • the length of the clamp 22 R in the width direction is about the same as the length of the base 21 in the width direction.
  • the length of the clamp 22R in the front-rear direction is set to about 20 mm.
  • the rear end (the end not facing the other clamp 22L, the right end in FIG. 2A) from the center to the front end (facing the other clamp 22L) (A left end in FIG. 2A), and a carrier fixing portion 25 extending a predetermined distance toward the side is formed so as to project slightly upward from the upper surface of the clamp 22R.
  • the tip of the carrier fixing portion 25 is V-shaped.
  • the carrier fixing part 25 is near a straight line (axis) connecting the above two axes 24. To the position. That is, the point of the V-shaped front end of the carrier fixing portion 25 reaches a position near the axis connecting the two shafts 24.
  • a substantially U-shaped concave portion 26 that is slightly concave is formed around the carrier fixing portion 25.
  • the carrier fixing portion 25 has a thickness obtained by adding the thickness of the portion protruding from the upper surface of the clamp 22 R and the thickness of the portion recessed from the upper surface of the clamp 22 R. 5 is to mate with a V-shaped groove formed in the sample carrier to securely fix the sample carrier in a predetermined position, as will be clarified later.
  • the part must be formed into a shape that fits snugly into the V-shaped groove of the sample carrier. In this embodiment, it must be formed into a V-shaped pointed shape.
  • the U-shaped concave portion 26 is formed around the carrier fixing portion 25, and at least a portion of the carrier fixing portion 25 that protrudes from the upper surface of the clamp 22R, such as a burr, is formed around the portion. It is configured such that fine projections do not remain.
  • at least the portion of the carrier fixing portion 25 protruding from the upper surface of the clamp 22R can be formed into a precise shape, and the V-shaped pointed tip of the carrier can be formed into a V-shaped portion of the sample carrier.
  • the sample carrier can be securely positioned and fixed at a predetermined position by fitting exactly into the groove.
  • the upper surface of the portion of the clamp 22 R on the front end side from the carrier fixing portion 25 is a mounting portion 27 on which the sample carrier is mounted.
  • the tip of this mounting part 27 (therefore, the top surface of the front end of the clamp 22R) is rounded to form an arc as shown in Fig. 2B.
  • a step portion 28 having a slightly concave rear end portion is formed substantially at the center of the lower surface of the clamp 22 R, and further, the rear end of the clamp 22 R from the step portion 28 is formed.
  • a tapered surface 29 that is inclined upward toward the portion is formed.
  • the other clamp 22 L has the same shape and structure as the above-mentioned one clamp 22 R, and thus the description thereof is omitted.
  • the pair of clamps 22 R and 22 L having such a shape and structure are rotatably attached to the base 21 via a pair of support members 31 as can be easily understood from FIG. Can be
  • each support member 31 is constituted by a support column 32 having a step at a substantially right angle on the upper portion, and a leaf spring 33 bent in a crank shape.
  • a V-shaped groove 35 is formed in a vertical wall surface facing the step side of the shaft bearing portion of the column 32 projecting upward from the portion.
  • the V-shaped groove 35 is sized to receive about half of the shaft 24 of the associated clamp 22 L or 22 R with its frontage and depth. Therefore, as can be easily understood from FIG. 1C, the shafts 24 of the associated clamps 22 L make line contact with both wall surfaces of the V-shaped groove 35 near the center thereof, respectively.
  • Each pillar 32 is attached to the side surface of the base 21 with an appropriate fixing means while the vertical wall surface opposite to the step portion is in contact with the side surface of the convex portion 23 formed on the base 21.
  • the support post 32 is attached to the side surface of the base 21 by the fixing screw 34.
  • the fixing means is not limited to the screw. Since each post 32 is a very small member, it is difficult to fix the post 32 to the side of the base 21 using two screws to prevent the post 32 from rotating. It is. For this reason, four projections 23 are integrally formed on the base 21, and the vertical wall surface of the pillar associated with one side surface of each projection 23 is brought into contact with the base 21, thereby turning each pillar. In addition to preventing movement, the columns 32 were accurately positioned in the vertical direction, and each column 32 was securely fixed to the side of the base with a single screw.
  • the leaf springs 33 bent in a crank shape are arranged along the substantially right-angled step portions of the columns 32 as clearly shown in FIG. 1C. More specifically, the leaf spring 33 has a central portion arranged in a horizontal direction, and a first extension bent substantially at a right angle from the central portion extends upward to support the shaft support of the column 32. The second extension, which is bent so as to face the V-shaped groove 35 of the section and substantially at a right angle from the central portion, hangs down along the vertical wall surface below the step of the column 32. Is placed. In this embodiment, the leaf spring 33 has a second extension hanging down along the vertical wall below the step of the column 32, for example screwed on the side of the column 32 (indicated by chain lines) As a result, it is fixed to the support 32.
  • the pair of clamps 2 2 R and 2 2 L have their shafts 24 pressed into the V-shaped groove 35 of the shaft support of the associated column 32 by the elastic force of the leaf spring 33.
  • the base 21 is rotatably attached to the base 21.
  • the shaft 24 of the pair of clamps 22R and 22L has a very large diameter. Due to their small size, bearings that rotatably support the shaft 24 are difficult to obtain. For this reason, in this embodiment, the shafts 24 of the clamps 22 R and 22 L are fixed at approximately three points by the two wall surfaces of the V-shaped groove 35 and the first extension of the leaf spring 33.
  • the bearings were constructed so that the shafts 24 of the clamps 22R and 22L could be rotatably supported with the same smoothness as the bearings.
  • the means for rotatably supporting the shafts 24 of the clamps 22R and 22L is not limited to the illustrated example.
  • a substantially rectangular flat recess 37 is formed substantially at the center of the area of the base 21 in which the clamps 22R and 22L are arranged.
  • Attach spring members 36 between the lower surfaces of the front ends of the 22R and 22L and the recesses 37 of the base 21 respectively.
  • a leaf spring is used as the spring member 36.
  • One end of the spring is fixed to the lower surface of the front end of each of the clamps 22R and 22L, for example, by screwing (indicated by a chain line).
  • the intermediate portion is bent by approximately 180 degrees to make contact with the vertical wall surface of the concave portion 37 of the base 21, and the other end is brought into contact with the bottom surface of the concave portion 37. Deploy. Therefore, the rear end of the leaf spring 36 is not fixed.
  • the pair of clamps 22 R and 22 L have their tapered surfaces 29 abutted on the upper surface of the base 21 as shown in FIG. 1C by the elastic force of the spring member 36.
  • the front ends rotate upward until a state is reached.
  • the pair of clamps 22R and 22L are stopped with their fixed portions 25 facing obliquely upward.
  • the sample carrier fixing mechanism 38 having the above configuration is used, for example, in the measuring apparatus shown in FIG. 9, the sample carrier 11 fixed to a predetermined position on the measuring table 16 and carried in is used. Set by the fixed part 2 5 of the set 2 2R and 22 L One.
  • the sample carrier fixing mechanism 38 should be fixed at a predetermined position on the measuring table 16 using fixing screws through counterbore holes 39 formed at four places on the base 21 as shown in Fig. 1A, for example. Can be.
  • FIG. 3 shows an example of a sample carrier which is positioned and fixed by the sample carrier fixing mechanism 38 having the above configuration
  • FIG. 3A is a plan view of the sample carrier
  • FIG. 3B is a lower side view of FIG. 3A.
  • the illustrated sample carrier 41 is a flat, substantially square plate-like member having a side of about 125 mm and a thickness of about 12 mm.
  • a V-shaped tip of a set of clamps 22R and 22L fixedly engaging with the V-shaped tip of the fixed portion 25
  • a U-shaped groove 42 is formed.
  • a pair of clamps 22 R and 22 L for positioning and fixing the sample carrier 41 are formed by a pair of V-shaped tips of the fixing portions 25 facing the sample carrier 41. It is mounted on the base 21 so that it fits snugly into the groove 42.
  • the distance between the tips of the fixing portions 25 of the set of clamps 22 R and 22 L is approximately from 125 mm to the depth of a pair of V-shaped grooves 42 of the sample carrier 41.
  • FIG. 4A a sample carrier 41 transported from a horizontal direction by, for example, a robot in a vacuum chamber (in FIG. 4, a sample mounted on a sample carrier 41 is shown.
  • the transport in the horizontal direction is stopped at a predetermined position above the sample carrier fixing mechanism 38.
  • the sample carrier 41 is lowered and transferred to the sample carrier fixing mechanism 38.
  • the two clamps 22 R and 22 L are lowered by the elastic force of the spring member (leaf spring) 36 because their front ends are biased upward.
  • the lower surface of the sample carrier 41 is placed on the upper surface of the mounting portion 27 of the clamps 22 R and 22 L where R is attached at the tip side. , Contact.
  • the rotation of the clamps 22 R and 22 L is stopped at the horizontal position where the lower surfaces at the front end sides are in contact with the upper surface of the base 21.
  • the rotation of the clamps 22 R and 22 L also rotates their fixing portions 25 to the horizontal position, so that their V-shaped tips are located on the right side of FIG. 4C. as shown in enlarged, their respective fitted into the groove 4 2 of the sample carrier 4 1 of the V-shaped, c two fixed which will sandwich the sample carrier 4 1 at the tip end portions of the fixed part 2 5
  • the tip of the part 25 is precisely V-shaped so as to fit into the corresponding V-shaped groove 42 of the sample carrier 41, so that it faces the sample carrier 41.
  • FIG. 5 shows a state where the sample carrier 41 is clamped and positioned by the V-shaped tip of the fixing portion 25 of both clamps 22R and 22L, and is securely fixed to the sample carrier fixing mechanism 38.
  • the sample carrier fixing mechanism 38 having the above configuration, when the sample carrier 41 is transferred to the mounting portions 27 of the two clamps 22 R and 22 L of the sample carrier fixing mechanism 38, Even if there is a slight misalignment, the misalignment is within a range where the point of the V-shaped tip of the fixing part 25 of both clamps 22 fits into the V-shaped groove 42 of the sample carrier 41. Then, the sample carrier 4 1 is the V-shaped tip of the fixing part 2 5 of both clamps 2 2 The position is adjusted by the ends, and finally the V-shaped tips of both fixing parts 25 fit into the grooves 42 exactly, so that the sample carrier 41 is positioned at the predetermined position and fixed. Will be done. In addition, there is a feature that the positioning and fixing operation of the sample carrier 41 is performed by the weight of the sample carrier 41.
  • the positioning and fixing operations of the sample carrier 41 are performed by a set of clamps operated by the weight of the sample carrier 41, As described above, there is no need to use a drive mechanism such as a motor for fixing the sample carrier 41 to a predetermined position of the sample carrier fixing mechanism 38, and the sample carrier 41 is provided with an extremely simple structure. It can be accurately positioned and fixed to the sample carrier fixing mechanism 38 by its own weight.
  • the sample carrier fixing mechanism 38 having the above configuration is used. Then, since it is not necessary to dispose a drive mechanism for driving the sample carrier fixing mechanism 38 in the vacuum chamber, (1) the vacuum chamber becomes large in the prior art, (2) the motor of the drive mechanism, etc. (3) The inside of the vacuum chamber is easily contaminated, (4) The maintenance of the drive mechanism is necessary, and the service life is long. .
  • the sample carrier fixing mechanism 38 has an advantage that even if the sample carrier 41 has a shape other than a square or a rectangle, such as a circle or an ellipse, the positioning and fixing thereof can be performed reliably.
  • the bearings of the rotating clamps 22 R and 22 L with respect to the shaft 24 are provided with a V-shaped groove 35 and a leaf spring 33 bent in a crank shape.
  • the sample carrier 41 is moved by a pair of clamps 22 R and 22 L opposed to each other in the longitudinal direction on a plate-like base 21 having a substantially rectangular planar shape.
  • the sample carrier 41 It was configured to be positioned and fixed at a predetermined position on the carrier fixing mechanism 38, but two sets of the above-mentioned clamps were arranged on a flat, almost square plate-like base, facing each other, and each side of the sample carrier
  • Each of the V-shaped grooves is formed on the sample carrier, and the sample carrier is sandwiched by two sets of clamps or four clamps, and the sample carrier is more securely positioned at a predetermined position of the sample carrier fixing mechanism 38. It may be configured to be fixed. In this case, since the sample carrier can be more firmly held by the four clamps, the sample carrier can be positioned and fixed more reliably.
  • the sample carrier is clamped by two pairs of clamps or four clamps arranged opposite to each other, and the sample carrier is positioned more securely at a predetermined position of the sample carrier fixing mechanism 38 so as to be fixed.
  • FIG. 6 shows a second embodiment of the sample carrier fixing mechanism according to the present invention
  • FIG. 6A is a schematic plan view of the sample carrier fixing mechanism
  • FIG. 6B is a diagram in which the sample carrier is fixed to the sample carrier fixing mechanism shown in FIG. 6A
  • FIG. 6C is a schematic side view showing a delivered state
  • FIG. 6C is a plan view showing a state where the sample carrier is positioned and fixed to the sample carrier fixing mechanism shown in FIG. 6A.
  • the sample carrier fixing mechanism 38 includes a plate-like base 51 having a substantially square planar shape, and four side edges on the base 51, respectively. It is provided with two sets of clamps 52R, 52L and 52T, 52 ⁇ opposed to each other at the center.
  • clamp 52 R, 52 L, 52 T, 52 ⁇ have the same shape and structure, a representative example is the clamp 52 located at the center of the right edge on the base 51. R will be briefly described.
  • the clamp 52R is a plate-like member having a substantially rectangular plane, and the clamp 52R is rotatably mounted on the base 51 at opposite positions on both sides in the width direction (vertical direction in FIG. 6).
  • a shaft 54 (not shown in Fig. 6 (1)) for mounting on the vehicle is mounted.
  • a substantially rectangular projecting portion 55 that stands upright from the entire surface in the width direction (vertical direction in the figure) is integrally formed.
  • the vertical wall on the front side of the projection 5 5 corresponds to the sample carrier. It functions to accurately position and fix the sample carrier in contact with the side surface to be measured.
  • the upper surface of the clamp 52R on the front end side from the protruding portion 55 becomes the mounting portion 57 on which the sample carrier is mounted, so that the tip portion has an arc shape as in the first embodiment. It is rounded and is constructed so as not to damage the delivered sample carrier.
  • a step portion and a tapered surface are formed on the lower surface of the clamp 52R, as in the first embodiment.
  • the other clamps 52L, 52T, and 52 ⁇ have exactly the same shape and structure as the clamp 52R, and a description thereof will be omitted.
  • the two pairs of clamps 52R, 52L and 52T, 52R having such a shape and structure are rotatably attached to the center of each of four side edges on the base 51.
  • a clamp supporting means for rotatably attaching each clamp to the base 51, and for holding each clamp by a resilient member such as a leaf spring at a position where the front end thereof is always rotated upward by a predetermined angle. Since the same means as the means used in the first embodiment described above can be used, they are not shown in FIG. 6 and the description thereof will be omitted.
  • the two sets of clamps 52R, 52L, 52T, and 52 ⁇ having the above configuration stop at a position where their front ends have been pivoted upward by a predetermined angle due to the elastic force of an elastic member (not shown), as shown in Fig. 6 ⁇ . ing.
  • the two sets of clamps 52R, 52L and 52T, 52mm have their tapered surfaces abutting on the upper surface of the base 51, and the front end faces obliquely upward due to the elastic force of the elastic member. Stopped.
  • FIG. 6A does not show the lower clamp 52A. Therefore, the upper clamp 52 ⁇ overlapping this clamp 52 ⁇ is not shown.
  • the sample carrier 41 transported from the horizontal direction by a robot or the like stops at a predetermined position above the sample carrier fixing mechanism 38, and then the sample carrier 41 is lowered to fix the sample carrier.
  • the sample carrier 41 is transferred to the mechanism 38, the lower surface of the sample carrier 41 is attached to the end of the mounting part 57 of the four clamps (only 52R and 52 are shown) as shown in Fig. 6 6. Contacts the top surface.
  • the sample carrier 41 is marked with; on the tip side of the mounting part 57 of the four clamps. After contacting the upper surface and further descending by its own weight, each clamp rotates downward at its front end against the elastic force of the elastic member, and the lower surface of the four clamps at the front end side is connected to the base 51. Stops its rotation at a horizontal position in contact with the upper surface of the. As the four clamps rotate, the protrusions 55 also rotate to the horizontal position, so that their front vertical walls abut the corresponding side surfaces of the sample carrier 41, respectively, and FIG. As shown in C, the sample carrier 41 is held between the vertical wall surfaces of the four protrusions 55.
  • the sample carrier 41 is mounted on the mounting portions of the four clamps 52 R, 52 L, 52 T, and 52 mm of the sample carrier fixing mechanism 38. Even if there is a slight misalignment when the sample carrier is transferred to the sample carrier, the position of the sample carrier 41 is adjusted by the rotation of the vertical wall of the four clamps 5 and finally the four clamps When the vertical wall surfaces of the projecting portions 55 of the sample carrier 41 abut exactly on the four side surfaces of the sample carrier 41, the sample carrier 41 is accurately positioned and fixed at a predetermined position.
  • the positioning and fixing operations of the sample carrier 41 are performed by four clamps operated by the weight of the sample carrier 41, the prior art As described above, there is no need to use a drive mechanism such as a motor for fixing the sample carrier 41 at a predetermined position of the sample carrier fixing mechanism 38, and the sample carrier 41 is weighted by its own weight with an extremely simple structure. Thus, the sample carrier can be accurately positioned and fixed to the sample carrier fixing mechanism 38. Further, in the second embodiment, since the sample carrier is sandwiched by the four clamps, the positioning and fixing of the sample carrier 41 is more reliable than in the first embodiment.
  • FIG. 7 shows a third embodiment of the sample carrier fixing mechanism according to the present invention
  • FIG. 7A is a schematic plan view of the sample carrier fixing mechanism
  • FIG. 7B is a diagram in which the sample carrier is mounted on the sample carrier fixing mechanism shown in FIG. 7A.
  • FIG. 7C is a schematic side view showing the delivered state.
  • FIG. 7B is a plan view showing a state where the rear is positioned and fixed to the sample carrier fixing mechanism shown in FIG. 7A.
  • the sample carrier fixing mechanism 38 includes a plate-shaped base 51 having a substantially square planar shape and four substantially right angles on the base 51. It has four clamps 62 RT, 62 RB, 62 LT, 62 LB respectively arranged in the section. Clamps 62 RT and 62 LB are arranged facing one diagonal direction, and clamps 62 LT and 62 RB are arranged facing the other diagonal direction.
  • clamp 62RT Since these four clamps 62RT, 62RB, 62LT and 62LB have the same shape and structure, the clamp 62RT arranged at the upper right corner on the base 51 will be briefly described as a representative example.
  • the clamp 62RT is a flat plate-like member having a substantially square shape, and one right-angled corner is arranged in the same direction at one right-angled corner of the base 51. Therefore, each side of the clamp 62RT and each side of the base 51 are in a parallel state.
  • a planar substantially right-angled projecting portion 65 that stands upright from the upper surface of the clamp 62RT is formed integrally with the clamp 62RT.
  • a shaft 64 for attaching the clamp 62RT to the base 51 so as to be rotatable is attached to the outer vertical wall surface forming a right angle of the protrusion 65.
  • These shafts 64 are mounted so as to be parallel to a diagonal line connecting the other two opposite corners of the clamp 62RT which does not include the corners of the protrusion 65. Therefore, the line connecting these axes 64 is parallel to the diagonal line connecting the other two opposing corners of the base 51 where the clamp 62RT is not arranged.
  • the perpendicular vertical inner wall surface of the protrusion 65 of the clamp 62RT comes into contact with a corresponding corner of the sample carrier and functions to accurately position and fix the sample carrier. Accordingly, the substantially square upper surface of the clamp 62RT where the protrusion 65 is not formed becomes the mounting portion 67 on which the sample carrier is mounted. Therefore, the corner side of the clamp 62RT facing the corner where the protrusion 65 is formed ( The upper surface (at the tip side) is rounded so as to form an arc shape, similarly to the first embodiment, so that the delivered sample carrier is not damaged. Although not shown, a step portion and a tapered surface are formed on the lower surface of the clamp 62RT in the same manner as in the first embodiment. You. '
  • the other clamps 62RB, 62LT, and 62LB have exactly the same shape and structure as the clamp 62RT described above, and a description thereof will be omitted.
  • the four clamps 62RT, 62RB, 62LT, and 62LB having such a shape and structure are rotatably attached to four corners on the base 51, respectively.
  • a clamp supporting means for rotatably attaching each clamp to the base 51, and for holding each clamp by a resilient member such as a leaf spring at a position where the tip thereof is always rotated upward by a predetermined angle.
  • the means and the like can be the same as the means used in the first embodiment already described, and are not shown in FIG. 7 and the description thereof is omitted.
  • FIG.7B is a schematic side view of FIG. 7A viewed diagonally connecting the clamps 62RB and 62LT, and the clamp 62RT is shown in cross section. Further, in order to simplify the drawing, FIG. 7B does not show the lower right clamp 62RB and the upper left clamp 62LT overlapping the clamp 62RB.
  • the sample carrier 41 conveyed from a horizontal direction by a robot or the like stops at a predetermined position above the sample carrier fixing mechanism 38, and then the sample carrier 41 is lowered and the sample carrier fixing mechanism 38 is lowered.
  • the lower surface of the sample carrier 41 is attached with the R at the tip of the mounting part 67 of the four clamps (clamps 62RB and 62LT are not shown) as shown in Fig. 7B. Touch the top surface.
  • each of the clamps moves downward with their tip against the elastic force of the elastic member.
  • the rotation stops at a horizontal position where the surface contacts the upper surface of the base 51.
  • the rotation of these four clamps also causes their protrusions 65 to rotate to the horizontal position, so that the right vertical walls of their front sides form the corresponding right angles of the sample carrier 41.
  • the sample carrier 41 is firmly held between the vertical wall surfaces of the four projections 65 at right angles.
  • the sample carrier 41 is provided with the four clamps 6 2 RT, 62 RB, 62 LT, and 62 LB of the sample carrier fixing mechanism 38. Even if there is some misalignment when the sample carrier is transferred to the sample carrier, the position of the sample carrier 41 is adjusted by the rotation of the vertical wall at a right angle to the projections 65 of the four clamps. The right-angled vertical walls of the four clamp projections 65 come into close contact with the four corners of the sample carrier 41 so that the sample carrier 41 can be accurately positioned and fixed in place. Become.
  • the positioning and fixing operations of the sample carrier 41 are performed by four clamps operated by the weight of the sample carrier 41, the prior art As described above, there is no need to use a drive mechanism such as a motor for fixing the sample carrier 41 at a predetermined position of the sample carrier fixing mechanism 38, and the sample carrier 41 is provided with an extremely simple structure. It can be accurately positioned and fixed to the sample carrier fixing mechanism 38 by its own weight. Further, in the third embodiment, since the four corners forming the right angle of the sample carrier are sandwiched by the projections forming the right angles of the four clamps, the positioning and fixing of the sample carrier 41 are performed in the first embodiment. More secure than in the example. In addition, since the four corners of the sample carrier are clamped by the protrusions of each clamp, there is the advantage that it is not necessary to form a precise fitting recess such as a V-shaped groove in the sample carrier.
  • FIG. 8 shows a fourth embodiment of the sample carrier fixing mechanism according to the present invention
  • FIG. 8A is a schematic plan view of the sample carrier fixing mechanism
  • FIG. 8B is a diagram in which the sample carrier is fixed to the sample carrier fixing mechanism shown in FIG. 8A
  • FIG. 8C is a schematic side view showing the transferred state
  • FIG. 8C is a plan view showing a state where the sample carrier is positioned and fixed to the sample carrier fixing mechanism shown in FIG. 8A.
  • the sample carrier fixing mechanism 38 includes a plate-like base 51 having a substantially square planar shape and a base 51 on the base 51. It is provided with two sets of clamps 72R, 72L and ⁇ 72T, 72 ⁇ which are arranged opposite to the center of each of the four side edges.
  • clamp 72R arranged at the center of the right edge on the base 51 will be briefly described as a representative example.
  • the clamp 72R is a plate-like member having a substantially rectangular flat surface.
  • the clamp 72R is rotatably mounted on the base 51 at opposite positions on both sides in the width direction (vertical direction in FIG. 8A).
  • a shaft 74 (not shown in FIG. 8A) is mounted.
  • the upper surface of the clamp 72R on the front end side from the protruding portion 75 becomes the mounting portion 77 on which the sample carrier is mounted, and the tip portion has an arc shape as in the first embodiment. It is rounded so as not to damage the sample carrier to be delivered.
  • a step portion and a tapered surface are formed on the lower surface of the clamp 72R, as in the first embodiment.
  • the other clamps 72L, 72T, 72 ⁇ have exactly the same shape and structure as the clamp 72R described above, and a description thereof is omitted.
  • the two pairs of clamps 72 R, 72 R and 72 B having such a shape and structure are rotatably attached to the center of each of four side edges on the base 51.
  • a clamp supporting means for rotatably attaching each clamp to the base 51, and for holding each clamp by a resilient member such as a leaf spring at a position where the front end thereof is always rotated upward by a predetermined angle. Since means similar to the means used in the above-described first embodiment can be used for the means, etc., they are not shown in FIG. 8 and the description thereof is omitted.
  • the two sets of clamps 72R, 72L, 72T, and 72 ⁇ of the above configuration stop at the position where their front ends have turned upward by a predetermined angle due to the elastic force of an elastic member (not shown) as shown in Fig. 8 ⁇ . are doing. That is, two sets of clamps 72R, 72L In addition, 72 T and 72 B are stopped with their tapered surfaces abutting on the upper surface of the base 51 and the front end portion facing obliquely upward due to the elastic force of the elastic member.
  • FIG. 8B shows a section of a part of the sample carrier, and shows a state in which a cylindrical projection 75 is fitted into the V-shaped groove 42. Also, for simplicity, the lower clamp 72B is not shown in FIG. 8B. Therefore, the upper clamp 72T overlapping with the clamp 72B is not shown.
  • the sample carrier 41 conveyed from a horizontal direction by a robot or the like stops at a predetermined position above the sample carrier fixing mechanism 38, and then the sample carrier 41 is lowered to fix the sample carrier.
  • the lower surface of the sample carrier 41 is connected to the tip of the mounting part 77 of the four clamps (only the 72R and 72R are shown) as shown in Fig. 8B.
  • a V-shaped groove 42 as shown in FIG. 3A is formed at the center of each side.
  • the dimensions of the cylindrical projection 75 of each clamp are set so that approximately the front half of the projection 75 fits into the V-shaped groove 42 of the sample carrier 41.
  • the sample carrier 41 comes into contact with the upper surface of the four clamp mounting parts 77 with the R on the tip side, and then descends by its own weight, the front ends of the clamps resist the elastic force of the elastic member.
  • the four clamps stop rotating at the horizontal position where the lower surfaces of the front ends of the four clamps contact the upper surface of the base 51.
  • the rotation of these four clamps also rotates their protrusions 75 to the horizontal position, so that the front part of the cylinder has a V-shape formed at the center of the corresponding side surface of the sample carrier 41.
  • Each of the sample carriers 41 is inserted into a corresponding one of the grooves 42, and the sample carrier 41 is sandwiched between the cylindrical projections 75 of the four clamps as shown in FIG. 8C.
  • the sample carrier 41 is mounted on the mounting portions of the four clamps 7 2 R, 72 L, 72 T, and 72 mm of the sample carrier fixing mechanism 38. Even if there is some misalignment when the sample carrier is transferred to 7, the position of the sample carrier 41 is adjusted by the rotation of the cylindrical projections 75 of the four clamps, and finally the four The sample carrier 41 is formed by the cylindrical surface of the projection 75 of the clamp abutting exactly on the wall of the corresponding four V-shaped grooves 42 of the sample carrier 41. It will be accurately positioned and fixed at a predetermined position.
  • the positioning and fixing operation of the sample carrier 41 is performed by four clamps operated by the weight of the sample carrier 41, the prior art As described above, there is no need to use a drive mechanism such as a motor for fixing the sample carrier 41 to a predetermined position of the sample carrier fixing mechanism 38, and the sample carrier 41 is weighted by its own weight with an extremely simple structure. Thus, the sample carrier can be accurately positioned and fixed to the sample carrier fixing mechanism 38. Further, in the fourth embodiment, since the sample carrier is sandwiched by the cylindrical protrusions 75 of the four clamps, the positioning and fixing of the sample carrier 41 are different from those in the first embodiment.
  • the sample carrier 41 has a shape other than a square, a rectangle, such as a circle or an ellipse, there is an advantage that the positioning and fixing can be performed reliably.
  • the shape of the protruding portion 75 is not limited to a cylindrical shape, and may be, for example, an inverted truncated cone shape.
  • the sample carrier 41 can be held by its own weight by the sample carrier fixing mechanism 3. It can be positioned at 8 and fixed. In particular, in the third and fourth embodiments, only one pair of opposed clamps is used, and the sample carrier 41 is held by its own weight in the same manner as in the first embodiment. Can be accurately positioned and fixed.
  • the shape, structure, dimensions, etc. of the sample carrier are set on the sample carrier. It changes according to. Therefore, the shape, structure, dimensions, and the like of the sample carrier are not limited to the illustrated example.
  • the positioning and fixing operations of the sample carrier are performed by at least one set of clamps operated by the weight of the sample carrier, as in the prior art, there is no need to use a drive mechanism such as a motor to fix the sample carrier at a predetermined position of the sample carrier fixing mechanism, and the sample carrier is accurately positioned on the sample carrier fixing mechanism by its own weight with an extremely simple structure. And has the advantage that it can be fixed. So, for example, Used to fix the transferred sample carrier in a vacuum chamber, such as a device for measuring or inspecting the length, thickness, appearance, etc. of a sample using an electron beam. A very suitable sample carrier fixing mechanism can be provided.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Cette invention a trait à un mécanisme de fixation de support d'échantillons présentant une structure simple qui ne nécessite pas de dispositif d'entraînement pour amener les fixations en vue du placement et de la fixation d'un support d'échantillons. Une série de fixations est attachée pivotante à une base par le biais d'éléments de support. Chaque fixation comprend une partie de montage servant à monter ledit support, et une partie de fixation dépassant de la partie de montage destinée à positionner et fixer ledit support monté par le mouvement de pivot de chaque fixation. Une force élastique est exercée sur chaque fixation, de telle manière que leurs parties d'extrémité peuvent tourner vers le haut. Lorsque le support d'échantillons est monté aux portions de montage des fixations, celles-ci sont amenées à tourner à l'encontre de la force élastique engendrée par le poids du support d'échantillons. Ainsi, le support d'échantillons est serré et fixé par les parties de fixation.
PCT/JP2001/011079 2000-12-19 2001-12-18 Mecanisme de fixation de support d'echantillons WO2002050863A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002551876A JPWO2002050863A1 (ja) 2000-12-19 2001-12-18 試料キャリア固定機構

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JP2000385175 2000-12-19
JP2000-385175 2000-12-19

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WO2002050863A1 true WO2002050863A1 (fr) 2002-06-27

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011066701A1 (fr) * 2009-12-01 2011-06-09 东莞宏威数码机械有限公司 Dispositif de rotation d'un substrat de type fixation
US20140077431A1 (en) * 2012-09-20 2014-03-20 Varian Semiconductor Equipment Associates, Inc. System and Method for 2D Workpiece Alignment
JP2022168649A (ja) * 2021-04-26 2022-11-08 積水ハウス株式会社 位置決め治具および組立テーブル

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02720U (fr) * 1988-06-15 1990-01-05
JPH07282761A (ja) * 1994-04-05 1995-10-27 Nikon Corp 試料ホルダ
JPH0997583A (ja) * 1995-09-29 1997-04-08 Horon:Kk 真空装置用ウエハ支持装置
JPH11260299A (ja) * 1998-03-06 1999-09-24 Jeol Ltd 試料ホルダ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02720U (fr) * 1988-06-15 1990-01-05
JPH07282761A (ja) * 1994-04-05 1995-10-27 Nikon Corp 試料ホルダ
JPH0997583A (ja) * 1995-09-29 1997-04-08 Horon:Kk 真空装置用ウエハ支持装置
JPH11260299A (ja) * 1998-03-06 1999-09-24 Jeol Ltd 試料ホルダ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011066701A1 (fr) * 2009-12-01 2011-06-09 东莞宏威数码机械有限公司 Dispositif de rotation d'un substrat de type fixation
US20140077431A1 (en) * 2012-09-20 2014-03-20 Varian Semiconductor Equipment Associates, Inc. System and Method for 2D Workpiece Alignment
US9082799B2 (en) * 2012-09-20 2015-07-14 Varian Semiconductor Equipment Associates, Inc. System and method for 2D workpiece alignment
JP2022168649A (ja) * 2021-04-26 2022-11-08 積水ハウス株式会社 位置決め治具および組立テーブル
JP7380641B2 (ja) 2021-04-26 2023-11-15 積水ハウス株式会社 位置決め治具および組立テーブル

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