WO2002023119A8 - Feststellen einer scheiben-kerben/nocken-position (im transportpfad) mit reflektiertem kantenlicht - Google Patents

Feststellen einer scheiben-kerben/nocken-position (im transportpfad) mit reflektiertem kantenlicht

Info

Publication number
WO2002023119A8
WO2002023119A8 PCT/DE2001/003185 DE0103185W WO0223119A8 WO 2002023119 A8 WO2002023119 A8 WO 2002023119A8 DE 0103185 W DE0103185 W DE 0103185W WO 0223119 A8 WO0223119 A8 WO 0223119A8
Authority
WO
WIPO (PCT)
Prior art keywords
wafer
light
notch
cam
determination
Prior art date
Application number
PCT/DE2001/003185
Other languages
English (en)
French (fr)
Other versions
WO2002023119A1 (de
Inventor
Thomas Krause
Original Assignee
Infineon Technologies Ag
Thomas Krause
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag, Thomas Krause filed Critical Infineon Technologies Ag
Publication of WO2002023119A1 publication Critical patent/WO2002023119A1/de
Publication of WO2002023119A8 publication Critical patent/WO2002023119A8/de
Priority to US10/388,026 priority Critical patent/US6710887B2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Die Erfindung ist gerichtet auf eine Prüfvorrichtung zum Feststellen einer Kerben- bzw. Nockenposition bei Scheiben; aufweisend einen Testbereich zum Positionieren zumindest einer zu prüfenden Scheibe (1) mit einer Kante (1a) und einer an der Kante angebrachten Kerbe (2) oder Nocke; eine Lichtquelle (4), die so angeordnet ist, daß sie die Kante der Scheibe (1) beleuchten kann; einen ersten Lichtsensor (8), der so angeordnet ist, daß er von der Kante der Scheibe (1) reflektiertes Licht (7) der Lichtquelle (4) empfangen kann; einen zweiten Lichtsensor (11), der so angeordnet ist, daß er von der Kerbe (2) oder Nocke der Scheibe (1) reflektiertes Licht (10) der Lichtquelle (4) empfangen kann, falls sich die Kerbe (2) oder Nocke innerhalb eines vorgegebenen Positionsbereichs befindet; und eine Bewertungseinheit, die anhand des auf den ersten Lichtsensor (8) einfallenden Lichts feststellen kann, ob eine Scheibe (1) im Testbereich positioniert ist und die anhand des auf den zweiten Lichtsensor (11) einfallenden Lichts feststellen kann, ob sich die Kerbe (2) oder Nocke innerhalb der vorgegebenen Position befindet.
PCT/DE2001/003185 2000-09-13 2001-08-21 Feststellen einer scheiben-kerben/nocken-position (im transportpfad) mit reflektiertem kantenlicht WO2002023119A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/388,026 US6710887B2 (en) 2000-09-13 2003-03-13 Testing device and method for establishing the position of a notch or bump on a disk

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10045203.5 2000-09-13
DE10045203A DE10045203C2 (de) 2000-09-13 2000-09-13 Prüfvorrichtung und Verfahren zum Feststellen einer Kerben- beziehungsweise Nockenposition bei Scheiben

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/388,026 Continuation US6710887B2 (en) 2000-09-13 2003-03-13 Testing device and method for establishing the position of a notch or bump on a disk

Publications (2)

Publication Number Publication Date
WO2002023119A1 WO2002023119A1 (de) 2002-03-21
WO2002023119A8 true WO2002023119A8 (de) 2002-07-18

Family

ID=7656003

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2001/003185 WO2002023119A1 (de) 2000-09-13 2001-08-21 Feststellen einer scheiben-kerben/nocken-position (im transportpfad) mit reflektiertem kantenlicht

Country Status (4)

Country Link
US (1) US6710887B2 (de)
DE (1) DE10045203C2 (de)
TW (1) TW505777B (de)
WO (1) WO2002023119A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102435608B (zh) * 2011-09-21 2013-09-11 艾康生物技术(杭州)有限公司 医用检测分析仪
CN107742613B (zh) * 2012-04-25 2021-03-09 应用材料公司 晶片边缘的测量和控制
US9091532B1 (en) 2013-04-01 2015-07-28 Gregory Jon Lyons Label edge detection using out-of-plane reflection
US9036161B1 (en) * 2013-04-01 2015-05-19 Gregory Jon Lyons Label edge detection using out-of-plane reflection

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4786816A (en) * 1985-11-05 1988-11-22 Canon Kabushiki Kaisha Wafer detecting device wherein light receiver has an effective surface larger than the dimensional range covering all the wafers being detected
US5319216A (en) * 1991-07-26 1994-06-07 Tokyo Electron Limited Substrate detector with light emitting and receiving elements arranged in staggered fashion and a polarization filter
US5308993A (en) * 1993-03-28 1994-05-03 Avalon Engineering, Inc. Semiconductor wafer cassette mapper having dual vertical column of light emitting apertures and a single vertical column of light receiving apertures
US5452078A (en) * 1993-06-17 1995-09-19 Ann F. Koo Method and apparatus for finding wafer index marks and centers
US5418382A (en) * 1993-09-23 1995-05-23 Fsi International, Inc. Substrate location and detection apparatus
JP3035690B2 (ja) * 1994-01-27 2000-04-24 株式会社東京精密 ウェーハ直径・断面形状測定装置及びそれを組み込んだウェーハ面取り機
US5504345A (en) 1994-04-14 1996-04-02 Hama Laboratories, Inc. Dual beam sensor and edge detection system and method
JPH1089904A (ja) * 1996-09-17 1998-04-10 Hitachi Electron Eng Co Ltd Ｖノッチウェハ位置決め装置
DE19728478C2 (de) * 1997-07-03 2003-08-21 Brooks Pri Automation Germany Verfahren zur optoelektronischen Erkennung von scheibenförmigen Objekten unter Nutzung derer Stirnseiten
DE19814046C1 (de) * 1998-03-30 1999-11-18 Jenoptik Jena Gmbh Anordnung zur Detektion von scheibenförmigen Objekten in einer Kassette
US6130437A (en) * 1998-04-24 2000-10-10 Hama Sensors, Inc. Sensor and detection system having wide diverging beam optics
JP3456930B2 (ja) * 1999-07-16 2003-10-14 サンクス株式会社 板状部材検出装置
US6342705B1 (en) * 1999-09-10 2002-01-29 Chapman Instruments System for locating and measuring an index mark on an edge of a wafer
US6346987B1 (en) * 2000-09-27 2002-02-12 The United States Of America As Represented By The Secretary Of The Navy Micro-optical position indicator

Also Published As

Publication number Publication date
WO2002023119A1 (de) 2002-03-21
TW505777B (en) 2002-10-11
DE10045203C2 (de) 2002-08-01
US6710887B2 (en) 2004-03-23
DE10045203A1 (de) 2002-04-04
US20030160971A1 (en) 2003-08-28

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