WO2001053775A1 - Scannen mit positionsgebung zur triggerung der messwertaufnahme - Google Patents
Scannen mit positionsgebung zur triggerung der messwertaufnahme Download PDFInfo
- Publication number
- WO2001053775A1 WO2001053775A1 PCT/DE2001/000089 DE0100089W WO0153775A1 WO 2001053775 A1 WO2001053775 A1 WO 2001053775A1 DE 0100089 W DE0100089 W DE 0100089W WO 0153775 A1 WO0153775 A1 WO 0153775A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sensor
- measuring
- controller
- signals
- measured values
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
Definitions
- the invention relates to a method for measuring, in particular, surface topologies in microscopic resolution, in which a measuring sensor and a sample to be detected are moved relative to one another in the xy direction, the movement being controlled by means of a controller, which records the measured values of the sensor, whereby After starting the sensor and moving the sensor at defined intervals, the sensor is read out and individual detected profiles which are displaced from one another in a dimension perpendicular to the profile direction are combined to form a measuring surface after the measurement has been carried out.
- the invention further relates to a device for carrying out the method with a distance sensor arranged above a sample surface and a sample carrier, which can be moved by motor in the xy direction relative to one another, a controller for the travel movement and a controller which, on the one hand, has the sensor for recording the sensor measured values and on the other hand is connected to the control for the movement.
- Such surface measuring devices are used to inspect technical surfaces in microscopic resolution. During the inspection, surface heights can be measured at defined locations on a sample.
- the measuring device is also equipped with a precise coordinate control.
- the device is used in all areas of microstructure technologies.
- the spatial resolution of the sensor is on the order of 1 ⁇ m.
- the table and sensor are started in quick succession via a software start signal.
- individual profiles which are displaced from one another in a dimension perpendicular to the profile direction, are combined to form a measuring surface after the measurement has been carried out.
- the location x of the i-th measuring point can thus be determined subsequently as follows (the starting point is the reference point):
- the invention is therefore based on the object of carrying out a method of the type mentioned at the outset in such a way that the local accuracy in the measurement of location-related measurement signals is improved.
- the invention solves this problem in accordance with the characterizing part of claim 1 in that the travel control is started via a software command to start the travel movement, position-triggering pulses for location-based reading of the sensor are taken at discrete and constant spatial distances from the moving element. location-based signals derived from the basic signals obtained in this way by means of electronic data processing are used to trigger the measurement recording of the sensor and the measured values obtained are stored and then transmitted asynchronously to the controller.
- a position transmitter is provided on the movable element, the signals of which are transmitted by means of an interface upstream of the sensor and downstream of the travel control into location-based derived trigger signals for triggering the measured value recording of the sensor are converted and that the direction-dependent location increments are summed in a memory, the direction detection being carried out by means of programming logic.
- the problem addressed in the introduction is thus circumvented according to the invention in that only a start signal is required for the traversing movement due to the interposition of the sensor interface and the removal of position signals.
- the measured values determined can be read out asynchronously according to the method according to the invention.
- the sample is preferably arranged on a table which can be moved in the x-y direction.
- the sensor can be moved.
- An incremental angle encoder is provided on the table to take the position-giving trigger pulses, the spatial distances of which are discrete and constant, on the corresponding axis of the motor in whose direction the direction of travel of the measurement profile falls.
- an incremental or absolute measuring position transmitter can also be attached directly to the table, preferably a so-called glass scale.
- the basic signals (primary signals) received by the position transmitters are converted into derived signals by means of electronic data processing, which in turn are location-related.
- a programmable microcontroller is used for this. This micro-controller can also be part of the table control.
- the derived signals serve the absolute (not only incremental) location determination.
- derived signals can be interpreted signals that both by means of digital electronic circuit technology can also be generated using the programming of microprocessors from the input signals present as digital signals. For example, it is possible to digitally divide the basic signal so that only every nth pulse triggers a triggering of the measured value signal (with n> 1). The Ors distance of the measurements is thus enlarged in a defined manner.
- Figure 1 schematic circuit structure of the surface measuring device
- Figure 2 schematic circuit arrangement according to the prior art.
- FIG. 2 The structure of a surface measuring device according to the prior art is shown schematically in Figure 2. It essentially consists of a distance sensor 1 (preferably a laser spot sensor), a controller 2 for the travel movement in the xy direction of a travel table 3 on which a sample to be detected is arranged.
- the sensor 1 is fixed above the sample.
- the table 3 with the sample on it is moved in a continuous movement between two locations, the sensor being read out at defined time intervals at the same time.
- the measured values are transmitted to a controller 4 (primarily a PC) at defined time intervals.
- the controller 4 in each case sends a start signal to the sensor 1 and to the controller 2.
- the table and sensor are hereby started in quick succession. If the travel speed v is assumed to be constant, the location distance can be retrospectively assigned for values measured at defined time intervals.
- Figure 1 shows the schematic structure of a surface measuring device according to the invention.
- This measuring device differs essentially from the known measuring device by a sensor interface 5 interposed between the controller 2 and the sensor 1 and by the fact that the controller 4 only emits a start signal to the controller.
- Position signals are continuously taken at table 3 (for example by means of an angle encoder or a glass scale arranged on table 3), which are fed to interface 5 via the controller.
- the position signals (basic signals) are converted into derived signals that are used to trigger the measurement of the sensor.
- the interface 5 has, in addition to a programming logic, also a memory logic in which the direction-dependent location increments are summed up for the absolute location determination.
- the programming logic includes required for the detection of the directions.
- the stored measured values are then transmitted asynchronously to the controller 4.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/936,827 US6853459B2 (en) | 2000-01-18 | 2001-01-11 | Scanning using position transmission for triggering the recording of measured values |
JP2001554016A JP2003520950A (ja) | 2000-01-18 | 2001-01-11 | 測定値記録をトリガするための位置発生器を用いた走査方法 |
EP01909453A EP1169616A1 (de) | 2000-01-18 | 2001-01-11 | Scannen mit positionsgebung zur triggerung der messwertaufnahme |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10001800A DE10001800C2 (de) | 2000-01-18 | 2000-01-18 | Verfahren und Vorrichtung zur Messung insbesondere von Oberflächentopologien in mikroskopischer Auflösung |
DE10001800.9 | 2000-01-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2001053775A1 true WO2001053775A1 (de) | 2001-07-26 |
Family
ID=7627812
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2001/000089 WO2001053775A1 (de) | 2000-01-18 | 2001-01-11 | Scannen mit positionsgebung zur triggerung der messwertaufnahme |
Country Status (5)
Country | Link |
---|---|
US (1) | US6853459B2 (de) |
EP (1) | EP1169616A1 (de) |
JP (1) | JP2003520950A (de) |
DE (1) | DE10001800C2 (de) |
WO (1) | WO2001053775A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1783454A1 (de) * | 2005-11-08 | 2007-05-09 | Mitutoyo Corporation | Formmessgerät |
CN102538651A (zh) * | 2011-12-30 | 2012-07-04 | 中国航天科技集团公司第六研究院第十一研究所 | 采用有限状态机实现的位移传感器宽度测量方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7167615B1 (en) | 1999-11-05 | 2007-01-23 | Board Of Regents, The University Of Texas System | Resonant waveguide-grating filters and sensors and methods for making and using same |
DK3367053T3 (da) * | 2017-02-27 | 2021-05-10 | Kulzer & Co Gmbh | 3d-scanner med gyroskopsensor |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0404597A1 (de) * | 1989-06-23 | 1990-12-27 | Rank Taylor Hobson Limited | Messtechnische Vorrichtung und Kalibrierverfahren dafür |
DE4402809A1 (de) * | 1993-01-29 | 1994-08-04 | Westvaco Corp | Vorrichtung zur Prüfung der Rauheit einer Papieroberfläche |
DE4315745A1 (de) * | 1993-05-11 | 1994-11-17 | Ba Be D Gmbh | Verfahren zum Bestimmen der Oberflächengüte eines Prüflings |
DE19727123A1 (de) * | 1997-06-26 | 1999-01-07 | Om Engineering Gmbh | Einrichtung zur berührungslosen Vermessung einer Oberfläche insbesondere der Oberfläche der menschlichen Haut |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
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US4705395A (en) * | 1984-10-03 | 1987-11-10 | Diffracto Ltd. | Triangulation data integrity |
US5382806A (en) * | 1991-05-07 | 1995-01-17 | Kensington Laboratories, Inc. | Specimen carrier platform and scanning assembly |
JPH07120250A (ja) * | 1993-10-25 | 1995-05-12 | Olympus Optical Co Ltd | 走査型プローブ顕微鏡 |
DE4429416A1 (de) * | 1994-08-19 | 1996-02-22 | Velzel Christiaan H F | Verfahren und Interferenzmikroskop zum Mikroskopieren eines Objektes zur Erzielung einer Auflösung jenseits der Beugungsgrenze (Superauflösung) |
US5557156A (en) * | 1994-12-02 | 1996-09-17 | Digital Instruments, Inc. | Scan control for scanning probe microscopes |
US5729015A (en) * | 1995-01-30 | 1998-03-17 | Olympus Optical Co., Ltd. | Position control system for scanning probe microscope |
GB2310557B (en) * | 1996-02-21 | 2000-05-10 | Rank Taylor Hobson Ltd | Image processing apparatus |
US5965896A (en) * | 1997-02-26 | 1999-10-12 | Marton & Associates, Inc. | Apparatus and method for scratch wear testing of thin films |
US6034803A (en) * | 1997-04-30 | 2000-03-07 | K2 T, Inc. | Method and apparatus for directing energy based range detection sensor |
DE19821372A1 (de) * | 1998-05-13 | 1999-11-18 | Zeiss Carl Fa | Koordinatenmeßgerät und Verfahren zur Steuerung eines solchen |
US6459823B2 (en) * | 1998-10-28 | 2002-10-01 | Hewlett-Packard Company | Apparatus and method of increasing scanner resolution |
JP4034906B2 (ja) * | 1999-04-27 | 2008-01-16 | 株式会社ミツトヨ | 表面性状測定機 |
-
2000
- 2000-01-18 DE DE10001800A patent/DE10001800C2/de not_active Expired - Lifetime
-
2001
- 2001-01-11 US US09/936,827 patent/US6853459B2/en not_active Expired - Fee Related
- 2001-01-11 EP EP01909453A patent/EP1169616A1/de not_active Withdrawn
- 2001-01-11 WO PCT/DE2001/000089 patent/WO2001053775A1/de not_active Application Discontinuation
- 2001-01-11 JP JP2001554016A patent/JP2003520950A/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0404597A1 (de) * | 1989-06-23 | 1990-12-27 | Rank Taylor Hobson Limited | Messtechnische Vorrichtung und Kalibrierverfahren dafür |
DE4402809A1 (de) * | 1993-01-29 | 1994-08-04 | Westvaco Corp | Vorrichtung zur Prüfung der Rauheit einer Papieroberfläche |
DE4315745A1 (de) * | 1993-05-11 | 1994-11-17 | Ba Be D Gmbh | Verfahren zum Bestimmen der Oberflächengüte eines Prüflings |
DE19727123A1 (de) * | 1997-06-26 | 1999-01-07 | Om Engineering Gmbh | Einrichtung zur berührungslosen Vermessung einer Oberfläche insbesondere der Oberfläche der menschlichen Haut |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1783454A1 (de) * | 2005-11-08 | 2007-05-09 | Mitutoyo Corporation | Formmessgerät |
US7366637B2 (en) | 2005-11-08 | 2008-04-29 | Mitutoyo Corporation | Form measuring instrument |
CN102538651A (zh) * | 2011-12-30 | 2012-07-04 | 中国航天科技集团公司第六研究院第十一研究所 | 采用有限状态机实现的位移传感器宽度测量方法 |
Also Published As
Publication number | Publication date |
---|---|
US20020135782A1 (en) | 2002-09-26 |
JP2003520950A (ja) | 2003-07-08 |
US6853459B2 (en) | 2005-02-08 |
DE10001800A1 (de) | 2001-08-02 |
EP1169616A1 (de) | 2002-01-09 |
DE10001800C2 (de) | 2002-07-18 |
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