WO2001036321A9 - Appareil et procede de formation d"une membrane a pores a l"echelle nanometrique - Google Patents

Appareil et procede de formation d"une membrane a pores a l"echelle nanometrique

Info

Publication number
WO2001036321A9
WO2001036321A9 PCT/US2000/031749 US0031749W WO0136321A9 WO 2001036321 A9 WO2001036321 A9 WO 2001036321A9 US 0031749 W US0031749 W US 0031749W WO 0136321 A9 WO0136321 A9 WO 0136321A9
Authority
WO
WIPO (PCT)
Prior art keywords
layer
base layer
etch stop
sacrificial
forming
Prior art date
Application number
PCT/US2000/031749
Other languages
English (en)
Other versions
WO2001036321A1 (fr
Inventor
Derek Hansford
Mauro Ferrari
Original Assignee
Univ California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ California filed Critical Univ California
Priority to EP00980528A priority Critical patent/EP1233927A4/fr
Priority to JP2001538280A priority patent/JP2003514677A/ja
Priority to AU17781/01A priority patent/AU1778101A/en
Publication of WO2001036321A1 publication Critical patent/WO2001036321A1/fr
Publication of WO2001036321A9 publication Critical patent/WO2001036321A9/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/0058—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by selective elimination of components, e.g. by leaching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B01D67/0062—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0215—Silicon carbide; Silicon nitride; Silicon oxycarbide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/022—Metals
    • B01D71/0221—Group 4 or 5 metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/02—Details relating to pores or porosity of the membranes
    • B01D2325/0283—Pore size
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/04—Characteristic thickness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/08—Patterned membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/06—Bio-MEMS
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/10—Microfilters, e.g. for gas or fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0135—Controlling etch progression
    • B81C2201/014—Controlling etch progression by depositing an etch stop layer, e.g. silicon nitride, silicon oxide, metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/05—Temporary protection of devices or parts of the devices during manufacturing
    • B81C2201/053—Depositing a protective layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

L"invention concerne un procédé de formation d"une membrane à pores à l"échelle nanométrique, qui consiste à former, sur un substrat, une couche (50) d"arrêt de gravure perdue. Sur cette dernière, on construit une couche de base (52), dans laquelle on forme des pores (54) à l"échelle micrométrique. Sur la couche de base, on construit une couche de base perdue, laquelle est enlevée de zones choisies de la couche de base afin d"y définir des pores à l"échelle nanométrique. La membrane résultante présente des pores de 50 nanomètres au maximum.
PCT/US2000/031749 1999-11-17 2000-11-17 Appareil et procede de formation d"une membrane a pores a l"echelle nanometrique WO2001036321A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP00980528A EP1233927A4 (fr) 1999-11-17 2000-11-17 Appareil et procede de formation d'une membrane a pores a l'echelle nanometrique
JP2001538280A JP2003514677A (ja) 1999-11-17 2000-11-17 ナノメートルスケールの細孔のある膜を形成するための装置及び方法
AU17781/01A AU1778101A (en) 1999-11-17 2000-11-17 Apparatus and method for forming a membrane with nanometer scale pores

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16604999P 1999-11-17 1999-11-17
US60/166,049 1999-11-17

Publications (2)

Publication Number Publication Date
WO2001036321A1 WO2001036321A1 (fr) 2001-05-25
WO2001036321A9 true WO2001036321A9 (fr) 2002-07-04

Family

ID=22601590

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/031749 WO2001036321A1 (fr) 1999-11-17 2000-11-17 Appareil et procede de formation d"une membrane a pores a l"echelle nanometrique

Country Status (4)

Country Link
EP (1) EP1233927A4 (fr)
JP (1) JP2003514677A (fr)
AU (1) AU1778101A (fr)
WO (1) WO2001036321A1 (fr)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040247450A1 (en) * 2001-10-02 2004-12-09 Jonatan Kutchinsky Sieve electrooosmotic flow pump
WO2003028861A1 (fr) * 2001-10-02 2003-04-10 Sophion Bioscience A/S Pompe a debit electro-osmotique a disque corbino
FR2844725B1 (fr) * 2002-09-24 2005-01-07 Commissariat Energie Atomique Procede de fabrication d'une membrane biomimetique, membrane biomimetique et ses applications
US7578954B2 (en) * 2003-02-24 2009-08-25 Corium International, Inc. Method for manufacturing microstructures having multiple microelements with through-holes
DE10353894B4 (de) * 2003-07-11 2007-02-15 Nft Nanofiltertechnik Gmbh Filterelement und Verfahren zu dessen Herstellung
US7632406B2 (en) * 2004-04-20 2009-12-15 Lawrence Livermore National Security, Llc Smart membranes for nitrate removal, water purification, and selective ion transportation
NL1026530C2 (nl) * 2004-06-30 2006-01-02 Friesland Brands Bv Membraan op drager, alsmede werkwijze ter vervaardiging van een dergelijk membraan.
JP2007536071A (ja) * 2004-05-03 2007-12-13 フリースランド・ブランズ・ビー・ヴイ 担体上に膜を持つデバイス、そしてそのような膜を製造するための方法
CA2606440A1 (fr) * 2005-04-29 2006-11-09 University Of Rochester Membranes nanoporeuses ultrafines, procede de fabrication et leurs utilisations
EP1721657A1 (fr) * 2005-05-13 2006-11-15 SONY DEUTSCHLAND GmbH Méthode de fabrication d'une membrane polymère ayant au moins un pore
US9114238B2 (en) 2007-04-16 2015-08-25 Corium International, Inc. Solvent-cast microprotrusion arrays containing active ingredient
WO2009048607A1 (fr) 2007-10-10 2009-04-16 Corium International, Inc. Distribution de vaccin par l'intermédiaire de réseaux de micro-aiguilles
JP6327852B2 (ja) 2010-05-04 2018-05-23 コリウム インターナショナル， インコーポレイテッド 微小突起アレイを使用した副甲状腺ホルモンの経皮送達のための方法及びデバイス
EP2517779A1 (fr) * 2011-04-26 2012-10-31 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Membrane composite de nanopores
AU2013364053B2 (en) 2012-12-21 2018-08-30 Corium Pharma Solutions, Inc. Microarray for delivery of therapeutic agent and methods of use
BR122020006959B1 (pt) 2013-03-12 2022-04-26 Corium, Inc Aplicador de microprojeções
JP2016514133A (ja) 2013-03-15 2016-05-19 コリウム インターナショナル， インコーポレイテッド ポリマーを含まない微細構造物を含むマイクロアレイ、製造方法および使用方法
BR112015022625B1 (pt) 2013-03-15 2023-01-31 Corium, Inc Aparelho de microestrutura para entrega de agente terapêutico
CA2903459C (fr) 2013-03-15 2024-02-20 Corium International, Inc. Applicateurs de microprojection d'impacts multiples et procedes d'utilisation
EP2968119B1 (fr) 2013-03-15 2019-09-18 Corium International, Inc. Micro-réseau pour administrer un agent thérapeutique, procédés d'utilisation et procédés de fabrication
EP3188714A1 (fr) 2014-09-04 2017-07-12 Corium International, Inc. Matrice de microstructures, procédé de production et procédés d'utilisation
WO2017004067A1 (fr) 2015-06-29 2017-01-05 Corium International, Inc. Micro-réseau pour l'administration d'un agent thérapeutique, procédés d'utilisation, et procédés de fabrication
CA3100543A1 (fr) * 2018-05-18 2019-11-21 The Regents Of The University Of California Membranes et dispositifs de filtration du sang in vivo

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4801380A (en) * 1987-12-23 1989-01-31 The Texas A&M University System Method of producing a silicon film with micropores
NL9401260A (nl) * 1993-11-12 1995-06-01 Cornelis Johannes Maria Van Ri Membraan voor microfiltratie, ultrafiltratie, gasscheiding en katalyse, werkwijze ter vervaardiging van een dergelijk membraan, mal ter vervaardiging van een dergelijk membraan, alsmede diverse scheidingssystemen omvattende een dergelijk membraan.
US5770076A (en) * 1994-03-07 1998-06-23 The Regents Of The University Of California Micromachined capsules having porous membranes and bulk supports
US5651900A (en) * 1994-03-07 1997-07-29 The Regents Of The University Of California Microfabricated particle filter
US5798042A (en) * 1994-03-07 1998-08-25 Regents Of The University Of California Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
US5919364A (en) * 1996-06-24 1999-07-06 Regents Of The University Of California Microfabricated filter and shell constructed with a permeable membrane
US5938923A (en) * 1997-04-15 1999-08-17 The Regents Of The University Of California Microfabricated filter and capsule using a substrate sandwich
US6405066B1 (en) * 2000-03-17 2002-06-11 The Regents Of The University Of California Implantable analyte sensor

Also Published As

Publication number Publication date
WO2001036321A1 (fr) 2001-05-25
AU1778101A (en) 2001-05-30
EP1233927A1 (fr) 2002-08-28
JP2003514677A (ja) 2003-04-22
EP1233927A4 (fr) 2003-01-08

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