AU1778101A - Apparatus and method for forming a membrane with nanometer scale pores - Google Patents

Apparatus and method for forming a membrane with nanometer scale pores

Info

Publication number
AU1778101A
AU1778101A AU17781/01A AU1778101A AU1778101A AU 1778101 A AU1778101 A AU 1778101A AU 17781/01 A AU17781/01 A AU 17781/01A AU 1778101 A AU1778101 A AU 1778101A AU 1778101 A AU1778101 A AU 1778101A
Authority
AU
Australia
Prior art keywords
membrane
forming
nanometer scale
scale pores
pores
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU17781/01A
Inventor
Mauro Ferrari
Derek Hansford
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California
Original Assignee
University of California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of California filed Critical University of California
Publication of AU1778101A publication Critical patent/AU1778101A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/0058—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by selective elimination of components, e.g. by leaching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B01D67/0062—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0215—Silicon carbide; Silicon nitride; Silicon oxycarbide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/022—Metals
    • B01D71/0221—Group 4 or 5 metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/02—Details relating to pores or porosity of the membranes
    • B01D2325/0283—Pore size
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/04—Characteristic thickness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/08—Patterned membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/06—Bio-MEMS
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/10—Microfilters, e.g. for gas or fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0135—Controlling etch progression
    • B81C2201/014—Controlling etch progression by depositing an etch stop layer, e.g. silicon nitride, silicon oxide, metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/05—Temporary protection of devices or parts of the devices during manufacturing
    • B81C2201/053—Depositing a protective layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
AU17781/01A 1999-11-17 2000-11-17 Apparatus and method for forming a membrane with nanometer scale pores Abandoned AU1778101A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16604999P 1999-11-17 1999-11-17
US60166049 1999-11-17
PCT/US2000/031749 WO2001036321A1 (en) 1999-11-17 2000-11-17 Apparatus and method for forming a membrane with nanometer scale pores

Publications (1)

Publication Number Publication Date
AU1778101A true AU1778101A (en) 2001-05-30

Family

ID=22601590

Family Applications (1)

Application Number Title Priority Date Filing Date
AU17781/01A Abandoned AU1778101A (en) 1999-11-17 2000-11-17 Apparatus and method for forming a membrane with nanometer scale pores

Country Status (4)

Country Link
EP (1) EP1233927A4 (en)
JP (1) JP2003514677A (en)
AU (1) AU1778101A (en)
WO (1) WO2001036321A1 (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE355886T1 (en) * 2001-10-02 2007-03-15 Sophion Bioscience As SCREEN PUMP FOR GENERATING ELECTROOSMOTIC FLOW
CN1585668A (en) 2001-10-02 2005-02-23 索菲昂生物科学有限公司 Corbino disc electroosmotic flow pump
FR2844725B1 (en) * 2002-09-24 2005-01-07 Commissariat Energie Atomique METHOD FOR MANUFACTURING BIOMIMETIC MEMBRANE, BIOMIMETIC MEMBRANE, AND APPLICATIONS THEREOF
US7578954B2 (en) * 2003-02-24 2009-08-25 Corium International, Inc. Method for manufacturing microstructures having multiple microelements with through-holes
DE10353894B4 (en) * 2003-07-11 2007-02-15 Nft Nanofiltertechnik Gmbh Filter element and method for its production
US7632406B2 (en) * 2004-04-20 2009-12-15 Lawrence Livermore National Security, Llc Smart membranes for nitrate removal, water purification, and selective ion transportation
JP2007536071A (en) * 2004-05-03 2007-12-13 フリースランド・ブランズ・ビー・ヴイ Device having a membrane on a carrier and method for producing such a membrane
NL1026530C2 (en) * 2004-06-30 2006-01-02 Friesland Brands Bv Membrane on a support, as well as a method for manufacturing such a membrane.
CA2606440A1 (en) * 2005-04-29 2006-11-09 University Of Rochester Ultrathin porous nanoscale membranes, methods of making, and uses thereof
EP1721657A1 (en) * 2005-05-13 2006-11-15 SONY DEUTSCHLAND GmbH A method of fabricating a polymeric membrane having at least one pore
AU2008241470B2 (en) 2007-04-16 2013-11-07 Corium Pharma Solutions, Inc. Solvent-cast microneedle arrays containing active
WO2009048607A1 (en) 2007-10-10 2009-04-16 Corium International, Inc. Vaccine delivery via microneedle arrays
AU2011248108B2 (en) 2010-05-04 2016-05-26 Corium Pharma Solutions, Inc. Method and device for transdermal delivery of parathyroid hormone using a microprojection array
EP2517779A1 (en) * 2011-04-26 2012-10-31 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Nanosieve composite membrane
KR102265808B1 (en) 2012-12-21 2021-06-16 코리움, 인크. Microarray for delivery of therapeutic agent and methods of use
JP6487899B2 (en) 2013-03-12 2019-03-20 コリウム インターナショナル， インコーポレイテッド Microprojection applicator
AU2014233541B2 (en) 2013-03-15 2018-11-22 Corium Pharma Solutions, Inc. Microarray for delivery of therapeutic agent, methods of use, and methods of making
JP2016514133A (en) 2013-03-15 2016-05-19 コリウム インターナショナル， インコーポレイテッド MICROARRAY CONTAINING FINE STRUCTURE CONTAINING NO POLYMER, MANUFACTURING METHOD AND USE METHOD
MX2015012933A (en) 2013-03-15 2016-09-19 Corium Int Inc Microarray for delivery of therapeutic agent and methods of use.
EP4194028A1 (en) 2013-03-15 2023-06-14 Corium Pharma Solutions, Inc. Multiple impact microprojection applicators
EP3188714A1 (en) 2014-09-04 2017-07-12 Corium International, Inc. Microstructure array, methods of making, and methods of use
US10857093B2 (en) 2015-06-29 2020-12-08 Corium, Inc. Microarray for delivery of therapeutic agent, methods of use, and methods of making
AU2019269683A1 (en) * 2018-05-18 2020-12-10 The Regents Of The University Of California In vivo blood filtration membranes and devices

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4801380A (en) * 1987-12-23 1989-01-31 The Texas A&M University System Method of producing a silicon film with micropores
NL9401260A (en) * 1993-11-12 1995-06-01 Cornelis Johannes Maria Van Ri Membrane for microfiltration, ultrafiltration, gas separation and catalysis, method for manufacturing such a membrane, mold for manufacturing such a membrane, as well as various separation systems comprising such a membrane.
US5770076A (en) * 1994-03-07 1998-06-23 The Regents Of The University Of California Micromachined capsules having porous membranes and bulk supports
US5651900A (en) * 1994-03-07 1997-07-29 The Regents Of The University Of California Microfabricated particle filter
US5798042A (en) * 1994-03-07 1998-08-25 Regents Of The University Of California Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
US5919364A (en) * 1996-06-24 1999-07-06 Regents Of The University Of California Microfabricated filter and shell constructed with a permeable membrane
US5938923A (en) * 1997-04-15 1999-08-17 The Regents Of The University Of California Microfabricated filter and capsule using a substrate sandwich
US6405066B1 (en) * 2000-03-17 2002-06-11 The Regents Of The University Of California Implantable analyte sensor

Also Published As

Publication number Publication date
WO2001036321A9 (en) 2002-07-04
EP1233927A1 (en) 2002-08-28
EP1233927A4 (en) 2003-01-08
WO2001036321A1 (en) 2001-05-25
JP2003514677A (en) 2003-04-22

Similar Documents

Publication Publication Date Title
AU1778101A (en) Apparatus and method for forming a membrane with nanometer scale pores
AU2823900A (en) Apparatus and method for three dimensional printing
AU1333901A (en) Apparatus and method for topography dependent signaling
AU2001286569A1 (en) Method and apparatus for in situ synthesis on a solid support
AU2001282786A1 (en) A sample preparing arrangement and a method
AU2001241524A1 (en) Method and apparatus for a three-dimensional web-navigator
AU2001296006A1 (en) Composite structure and method and apparatus for manufacture thereof
AU2002213024A1 (en) Apparatus and method for providing a suspended agent
EP1068945A3 (en) Micro-shape transcription method, micro-shape transcription apparatus, and optical-component manufacture method
AU2001287572A1 (en) Method and device for carrying out membrane purification
AU2001253685A1 (en) Method and apparatus for unwinding web materials
AU6101500A (en) Method and apparatus for a high-performance hoist
AU2001286829A1 (en) Method and apparatus for implementing a web application
AU6759900A (en) Apparatus and method for pressure management
AU5899099A (en) Porous structures and methods and apparatus for forming porous structures
AU5815700A (en) Method and apparatus for forming a paper web
AU2001245778A1 (en) Method and system for preparing printed matter
AU1965200A (en) A method and a device for providing improved speech intelligibility
AU6592700A (en) Method and apparatus for environmental monitoring
AU2002210845A1 (en) Method and apparatus for providing emergency position report
AU1140501A (en) Films for electrochemical components and a method for production thereof
AU3271801A (en) Dual-stage lithography apparatus and method
AU7283800A (en) A method and apparatus for measuring forces in the presence of external pressure
AU3294400A (en) Method and apparatus for manufacturing coated paper and a coated paper
AU2001242135A1 (en) Pervaporation apparatus and method

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase