WO2001075455A3 - Accelerometre trois axes - Google Patents

Accelerometre trois axes Download PDF

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Publication number
WO2001075455A3
WO2001075455A3 PCT/US2001/010681 US0110681W WO0175455A3 WO 2001075455 A3 WO2001075455 A3 WO 2001075455A3 US 0110681 W US0110681 W US 0110681W WO 0175455 A3 WO0175455 A3 WO 0175455A3
Authority
WO
WIPO (PCT)
Prior art keywords
wafer
polysilicon
aperture
forming
capacitor plate
Prior art date
Application number
PCT/US2001/010681
Other languages
English (en)
Other versions
WO2001075455A2 (fr
Inventor
Xiaofeng Yang
Original Assignee
Rosemount Aerospace Inc
Xiaofeng Yang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Aerospace Inc, Xiaofeng Yang filed Critical Rosemount Aerospace Inc
Priority to JP2001572880A priority Critical patent/JP2004506176A/ja
Priority to AU2001253093A priority patent/AU2001253093A1/en
Publication of WO2001075455A2 publication Critical patent/WO2001075455A2/fr
Publication of WO2001075455A3 publication Critical patent/WO2001075455A3/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape

Abstract

L'invention concerne un procédé pour former un accéléromètre selon lequel on fournit une plaquette de silicium dopé, on y fait croître une couche d'oxyde et on ménage une ouverture dans la couche d'oxyde. Le procédé selon l'invention comprend également la formation d'une couche de silicium polycristallin sur la plaquette de façon qu'une partie du silicium polycristallin traverse l'ouverture et entre en contact avec la plaquette, ainsi que la gravure de la couche de silicium polycristallin pour former un faisceau et une plaque de condensateur. La plaquette est ensuite gravée afin de former une masse de réponse et un support, au moins une partie de la masse de réponse étant située sous la plaque de condensateur. Enfin, la couche d'oxyde est gravée afin de séparer la masse de réponse du support et de la plaque de condensateur, la masse de réponse étant couplée au faisceau par du silicium polycristallin reçu à travers l'ouverture.
PCT/US2001/010681 2000-04-04 2001-04-03 Accelerometre trois axes WO2001075455A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2001572880A JP2004506176A (ja) 2000-04-04 2001-04-03 ３軸加速度計
AU2001253093A AU2001253093A1 (en) 2000-04-04 2001-04-03 Three axis accelerometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US54236300A 2000-04-04 2000-04-04
US09/542,363 2000-04-04

Publications (2)

Publication Number Publication Date
WO2001075455A2 WO2001075455A2 (fr) 2001-10-11
WO2001075455A3 true WO2001075455A3 (fr) 2002-05-16

Family

ID=24163494

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/010681 WO2001075455A2 (fr) 2000-04-04 2001-04-03 Accelerometre trois axes

Country Status (3)

Country Link
JP (1) JP2004506176A (fr)
AU (1) AU2001253093A1 (fr)
WO (1) WO2001075455A2 (fr)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4416460B2 (ja) * 2003-09-16 2010-02-17 トレックス・セミコンダクター株式会社 加速度センサー
US7640805B2 (en) 2006-12-18 2010-01-05 Akustica, Inc. Proof-mass with supporting structure on integrated circuit-MEMS platform
US7520170B2 (en) * 2007-07-10 2009-04-21 Freescale Semiconductor, Inc. Output correction circuit for three-axis accelerometer
TW201034932A (en) * 2009-03-31 2010-10-01 Domintech Co Ltd Capacitor type three-axis accelerometer for microelectromechanical systems (MEMS)
JP2010164569A (ja) * 2010-02-15 2010-07-29 Panasonic Corp 多軸加速度センサ
US8813564B2 (en) 2010-09-18 2014-08-26 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope with central suspension and gimbal structure
DE112011103124T5 (de) 2010-09-18 2013-12-19 Fairchild Semiconductor Corporation Biegelager zum Verringern von Quadratur für mitschwingende mikromechanische Vorrichtungen
US9856132B2 (en) 2010-09-18 2018-01-02 Fairchild Semiconductor Corporation Sealed packaging for microelectromechanical systems
EP2616389B1 (fr) 2010-09-18 2017-04-05 Fairchild Semiconductor Corporation Boîtier de microsystème électromécanique à puces multiples
US9278846B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation Micromachined monolithic 6-axis inertial sensor
EP2616772B1 (fr) 2010-09-18 2016-06-22 Fairchild Semiconductor Corporation Gyroscope à 3 axes monolithiques micro-usinés et à commande unique
KR101332701B1 (ko) 2010-09-20 2013-11-25 페어차일드 세미컨덕터 코포레이션 기준 커패시터를 포함하는 미소 전자기계 압력 센서
KR101311966B1 (ko) 2010-09-20 2013-10-14 페어차일드 세미컨덕터 코포레이션 감소된 션트 커패시턴스를 갖는 관통 실리콘 비아
US9062972B2 (en) 2012-01-31 2015-06-23 Fairchild Semiconductor Corporation MEMS multi-axis accelerometer electrode structure
US8978475B2 (en) 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
EP2647955B8 (fr) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation Annulation du déphasage de quadrature de dispositif MEMS
US9069006B2 (en) 2012-04-05 2015-06-30 Fairchild Semiconductor Corporation Self test of MEMS gyroscope with ASICs integrated capacitors
KR102058489B1 (ko) 2012-04-05 2019-12-23 페어차일드 세미컨덕터 코포레이션 멤스 장치 프론트 엔드 전하 증폭기
EP2647952B1 (fr) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Boucle de commande de gain automatique de dispositif MEMS pour entraînement d'amplitude mécanique
KR101999745B1 (ko) 2012-04-12 2019-10-01 페어차일드 세미컨덕터 코포레이션 미세 전자 기계 시스템 구동기
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
WO2017188514A1 (fr) * 2016-04-26 2017-11-02 (주)스탠딩에그 Procédé permettant de fabriquer un dispositif mems présentant de meilleures caractéristiques de dérive de décalage, boîtier mems comprenant un dispositif mems et système informatique
US10697994B2 (en) 2017-02-22 2020-06-30 Semiconductor Components Industries, Llc Accelerometer techniques to compensate package stress
JP7161178B2 (ja) * 2018-08-03 2022-10-26 国立大学法人東京工業大学 静電容量検出回路
EP4042566A1 (fr) * 2019-10-09 2022-08-17 Gottfried Wilhelm Leibniz Universität Hannover Circuit électrique

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19547642A1 (de) * 1994-12-20 1996-06-27 Zexel Corp Beschleunigungssensor und Verfahren zu dessen Herstellung
EP0810441A2 (fr) * 1996-05-30 1997-12-03 Texas Instruments Incorporated Capteur composite
EP0899574A1 (fr) * 1997-02-21 1999-03-03 Matsushita Electric Works, Ltd. Element detecteur d'acceleration et son procede de production

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19547642A1 (de) * 1994-12-20 1996-06-27 Zexel Corp Beschleunigungssensor und Verfahren zu dessen Herstellung
EP0810441A2 (fr) * 1996-05-30 1997-12-03 Texas Instruments Incorporated Capteur composite
EP0899574A1 (fr) * 1997-02-21 1999-03-03 Matsushita Electric Works, Ltd. Element detecteur d'acceleration et son procede de production

Also Published As

Publication number Publication date
JP2004506176A (ja) 2004-02-26
WO2001075455A2 (fr) 2001-10-11
AU2001253093A1 (en) 2001-10-15

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