WO2001024287A2 - Piezo-actionneur et son procede de production - Google Patents

Piezo-actionneur et son procede de production Download PDF

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Publication number
WO2001024287A2
WO2001024287A2 PCT/DE2000/003227 DE0003227W WO0124287A2 WO 2001024287 A2 WO2001024287 A2 WO 2001024287A2 DE 0003227 W DE0003227 W DE 0003227W WO 0124287 A2 WO0124287 A2 WO 0124287A2
Authority
WO
WIPO (PCT)
Prior art keywords
piezo
electrodes
internal electrodes
layers
alloys
Prior art date
Application number
PCT/DE2000/003227
Other languages
German (de)
English (en)
Other versions
WO2001024287A3 (fr
Inventor
Bertram Sugg
Marianne Hammer
Friedrich Boecking
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2001024287A2 publication Critical patent/WO2001024287A2/fr
Publication of WO2001024287A3 publication Critical patent/WO2001024287A3/fr

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials

Definitions

  • the invention relates to a piezo actuator, for example for actuating a mechanical component such as a valve or the like, according to the generic features of the main claim.
  • a piezo actuator can be constructed from a material with a suitable crystal structure by using the so-called piezo effect.
  • an external electrical voltage is applied, there is a mechanical reaction of the piezo element which, depending on the crystal structure and the contact areas of the electrical voltage, represents a push or pull in a predeterminable direction.
  • Piezo actuators for the construction of actuators, for example for driving switching valves in fuel injection systems in motor vehicles, are provided.
  • the voltage or charge-controlled deflection of the piezo actuator is used to position a control valve, which in turn regulates the stroke of a nozzle needle.
  • a great advantage of the piezo actuators is the implementation of precise and very fast deflections with high forces.
  • Piezo actuators can be metallized ceramic components that are used as control elements in many technical areas.
  • Conventional piezoceramic components can consist of a monolithic ceramic block with dimensions in the mm to cm range, on the end faces of which the internal electrodes are deposited. Typical designs are a cuboid, round disks or rings. These forms have the disadvantage that high voltages (1.6 kV / mm thickness) are required for operation as a piezo actuator.
  • multilayer actuators multilayer actuators
  • a layered composite of thin ceramic layers generally ⁇ 0.1 mm
  • the internal electrodes via which the electrical voltage is applied being arranged between the layers.
  • the ceramic layers are electrically connected in parallel so that the necessary control voltage drops in comparison to the monolithic piezo actuators mentioned above with the same length and number of layers.
  • These piezo actuators are thus constructed in the usual way by stacking a plurality of piezo layers on top of one another, with the risk of cracks in the ceramic of the piezo layers being due to inhomogeneous electrical field distributions.
  • the piezo actuator described at the outset with a multilayer structure of piezo layers and inner electrodes arranged between them, to which an external electrical voltage can be applied and mutual lateral contacting of the inner electrodes with outer electrodes, is advantageously further developed in that the inner electrodes are made of a base metal or whose alloys are.
  • Typical designs of the piezo actuators in a multi-layer structure consist, for example, of up to 500 layers with a ceramic layer thickness of 60 to 120 ⁇ m and an internal electrode thickness of 1 to 5 ⁇ m, so that the control voltage can be reduced to 100 to 200 mV.
  • Ag 7 o / Pd 3 o has generally been used as the electrode material, with one problem being the Ag / Pd migration (diffusion) of the inner electrode material into the ceramic of the piezo layers during the sintering process.
  • the main reason for the Ag migration (diffusion) is the sintering temperature, which is approx. 1100 ° C and is therefore close to the melting temperature of the commonly used electrode material Ag 70 / Pd 30 (melting temperature at 1160 ° C).
  • the piezo actuator can fail.
  • the internal electrodes are made of copper (Cu) or copper alloys or of nickel (Ni) or nickel alloys.
  • the base base electrode materials Cu or Ni contribute to an enormous cost reduction of the entire component.
  • the described damage patterns can be limited when replacing the previously common Ag 70 / Pd 3D internal electrodes with base Cu or Ni internal electrodes or their alloys, since less metal migration (diffusion) into the ceramic of the piezo material can be assumed.
  • the use of nickel as the base material is particularly advantageous here, since the melting temperature of 1453 ° C. is far above the sintering temperature required during production.
  • copper As the base material, a very good resistance to oxidation and the good electrical conductivity in connection with a low reactivity with the Pb-containing ceramic of the piezo material are particularly advantageous.
  • the piezo layers are produced from ceramic piezofilms in a foil casting method and coated with the base metal or its alloys to form the internal electrodes, in a screen printing or similar printing method.
  • the piezo layers are then baked together in a sintering process and the outer electrodes are contacted by soldering with the associated inner electrodes after a previous basic metallization so that the external electrical voltage can be applied.
  • FIG. 1 shows a part of a piezo actuator 1 in which piezo layers 2 can be seen which are formed from laminated piezo films.
  • the piezo foils are constructed from a ceramic material with a suitable crystal structure, so that using the so-called piezo effect when an external electrical voltage is applied to internal electrodes 4 and 5, which are each attached to the end of each piezo layer 2, for example by screen printing, a mechanical one Reaction of the piezo layers 2 and thus of the entire piezo actuator 1 takes place.
  • the internal electrodes 4 and 5 according to FIG. 1 are contacted laterally, alternately on external electrodes 6 and 7, to which the electrical voltage can be applied externally.
  • the non-contacted inner electrode 4 or 5 is somewhat reset within the layer structure to avoid a short circuit.
  • the inner electrodes are made of copper (Cu) or Copper alloys or made of nickel (Ni) or nickel alloys.

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fuel-Injection Apparatus (AREA)

Abstract

L'invention concerne un piézo-actionneur, servant par exemple à actionner un composant mécanique et comprenant une pluralité de couches piézoélectriques (2) ainsi que des électrodes intérieures (4, 5) insérées entre ces dernières. Une tension électrique extérieure peut être appliquée aux bornes de ces électrodes. Ces dernières (4, 5) sont mises en contact, latéralement et de manière alternée, avec des électrodes extérieures (6, 7). Ces électrodes intérieures (4, 5) sont réalisées dans un métal commun ou ses alliages, en particulier en cuivre (Cu) ou ses alliages, ou en nickel (Ni) ou ses alliages.
PCT/DE2000/003227 1999-09-30 2000-09-16 Piezo-actionneur et son procede de production WO2001024287A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19946834.6 1999-09-30
DE19946834A DE19946834A1 (de) 1999-09-30 1999-09-30 Piezoaktor und ein Verfahren zu dessen Herstellung

Publications (2)

Publication Number Publication Date
WO2001024287A2 true WO2001024287A2 (fr) 2001-04-05
WO2001024287A3 WO2001024287A3 (fr) 2002-04-04

Family

ID=7923815

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2000/003227 WO2001024287A2 (fr) 1999-09-30 2000-09-16 Piezo-actionneur et son procede de production

Country Status (2)

Country Link
DE (1) DE19946834A1 (fr)
WO (1) WO2001024287A2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001045138A2 (fr) * 1999-12-16 2001-06-21 Epcos Ag Composant piezoelectrique
WO2003028121A2 (fr) * 2001-09-21 2003-04-03 Elliptec Resonant Actuator Ag Moteurs piezoelectriques pourvus d'elements piezoelectriques, produits selon le procede de production des condensateurs ceramiques

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10141820A1 (de) * 2001-08-27 2003-03-20 Elliptec Resonant Actuator Ag Piezomotor mit Kupferelektroden

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0350941A2 (fr) * 1988-07-15 1990-01-17 Hitachi, Ltd. Elément piézoélectrique à couches empilées et procédé pour sa fabrication
JPH02224283A (ja) * 1989-02-27 1990-09-06 Mitsui Toatsu Chem Inc 積層電歪素子
EP0395018A2 (fr) * 1989-04-26 1990-10-31 Hitachi, Ltd. Elément piézoélectrique à couches empilées et procédé de sa fabrication
JPH04171990A (ja) * 1990-11-06 1992-06-19 Toto Ltd 圧電セラミック焼結体
JPH04324687A (ja) * 1991-04-24 1992-11-13 Onoda Cement Co Ltd 卑金属電極材料

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19753930A1 (de) * 1997-12-05 1999-06-10 Ceramtec Ag Verfahren zur Anbringung von Außenelektroden an Festkörperaktoren

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0350941A2 (fr) * 1988-07-15 1990-01-17 Hitachi, Ltd. Elément piézoélectrique à couches empilées et procédé pour sa fabrication
JPH02224283A (ja) * 1989-02-27 1990-09-06 Mitsui Toatsu Chem Inc 積層電歪素子
EP0395018A2 (fr) * 1989-04-26 1990-10-31 Hitachi, Ltd. Elément piézoélectrique à couches empilées et procédé de sa fabrication
JPH04171990A (ja) * 1990-11-06 1992-06-19 Toto Ltd 圧電セラミック焼結体
JPH04324687A (ja) * 1991-04-24 1992-11-13 Onoda Cement Co Ltd 卑金属電極材料

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 014, no. 528 (E-1004), 20. November 1990 (1990-11-20) & JP 02 224283 A (MITSUI TOATSU CHEMICALS INC), 6. September 1990 (1990-09-06) *
PATENT ABSTRACTS OF JAPAN vol. 016, no. 478 (E-1274), 5. Oktober 1992 (1992-10-05) & JP 04 171990 A (TOTO LTD; NAGATA KUNIHIRO), 19. Juni 1992 (1992-06-19) *
PATENT ABSTRACTS OF JAPAN vol. 017, no. 165 (E-1343), 30. März 1993 (1993-03-30) & JP 04 324687 A (ONODA CEMENT CO LTD), 13. November 1992 (1992-11-13) *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001045138A2 (fr) * 1999-12-16 2001-06-21 Epcos Ag Composant piezoelectrique
WO2001045138A3 (fr) * 1999-12-16 2002-03-14 Epcos Ag Composant piezoelectrique
US7855488B2 (en) 1999-12-16 2010-12-21 Epcos Ag Piezoceramic device
US8209828B2 (en) 1999-12-16 2012-07-03 Epcos Ag Method for making a piezoceramic device
WO2003028121A2 (fr) * 2001-09-21 2003-04-03 Elliptec Resonant Actuator Ag Moteurs piezoelectriques pourvus d'elements piezoelectriques, produits selon le procede de production des condensateurs ceramiques
WO2003028121A3 (fr) * 2001-09-21 2003-11-06 Elliptec Resonant Actuator Ag Moteurs piezoelectriques pourvus d'elements piezoelectriques, produits selon le procede de production des condensateurs ceramiques

Also Published As

Publication number Publication date
DE19946834A1 (de) 2001-05-03
WO2001024287A3 (fr) 2002-04-04

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