WO2001024287A2 - Internal electrodes for a stacked piezoactuator and method for producing the same - Google Patents

Internal electrodes for a stacked piezoactuator and method for producing the same Download PDF

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Publication number
WO2001024287A2
WO2001024287A2 PCT/DE2000/003227 DE0003227W WO0124287A2 WO 2001024287 A2 WO2001024287 A2 WO 2001024287A2 DE 0003227 W DE0003227 W DE 0003227W WO 0124287 A2 WO0124287 A2 WO 0124287A2
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Prior art keywords
piezo
electrodes
internal electrodes
layers
alloys
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PCT/DE2000/003227
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German (de)
French (fr)
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WO2001024287A3 (en
Inventor
Bertram Sugg
Marianne Hammer
Friedrich Boecking
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Robert Bosch Gmbh
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Publication of WO2001024287A2 publication Critical patent/WO2001024287A2/en
Publication of WO2001024287A3 publication Critical patent/WO2001024287A3/en

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials

Definitions

  • the invention relates to a piezo actuator, for example for actuating a mechanical component such as a valve or the like, according to the generic features of the main claim.
  • a piezo actuator can be constructed from a material with a suitable crystal structure by using the so-called piezo effect.
  • an external electrical voltage is applied, there is a mechanical reaction of the piezo element which, depending on the crystal structure and the contact areas of the electrical voltage, represents a push or pull in a predeterminable direction.
  • Piezo actuators for the construction of actuators, for example for driving switching valves in fuel injection systems in motor vehicles, are provided.
  • the voltage or charge-controlled deflection of the piezo actuator is used to position a control valve, which in turn regulates the stroke of a nozzle needle.
  • a great advantage of the piezo actuators is the implementation of precise and very fast deflections with high forces.
  • Piezo actuators can be metallized ceramic components that are used as control elements in many technical areas.
  • Conventional piezoceramic components can consist of a monolithic ceramic block with dimensions in the mm to cm range, on the end faces of which the internal electrodes are deposited. Typical designs are a cuboid, round disks or rings. These forms have the disadvantage that high voltages (1.6 kV / mm thickness) are required for operation as a piezo actuator.
  • multilayer actuators multilayer actuators
  • a layered composite of thin ceramic layers generally ⁇ 0.1 mm
  • the internal electrodes via which the electrical voltage is applied being arranged between the layers.
  • the ceramic layers are electrically connected in parallel so that the necessary control voltage drops in comparison to the monolithic piezo actuators mentioned above with the same length and number of layers.
  • These piezo actuators are thus constructed in the usual way by stacking a plurality of piezo layers on top of one another, with the risk of cracks in the ceramic of the piezo layers being due to inhomogeneous electrical field distributions.
  • the piezo actuator described at the outset with a multilayer structure of piezo layers and inner electrodes arranged between them, to which an external electrical voltage can be applied and mutual lateral contacting of the inner electrodes with outer electrodes, is advantageously further developed in that the inner electrodes are made of a base metal or whose alloys are.
  • Typical designs of the piezo actuators in a multi-layer structure consist, for example, of up to 500 layers with a ceramic layer thickness of 60 to 120 ⁇ m and an internal electrode thickness of 1 to 5 ⁇ m, so that the control voltage can be reduced to 100 to 200 mV.
  • Ag 7 o / Pd 3 o has generally been used as the electrode material, with one problem being the Ag / Pd migration (diffusion) of the inner electrode material into the ceramic of the piezo layers during the sintering process.
  • the main reason for the Ag migration (diffusion) is the sintering temperature, which is approx. 1100 ° C and is therefore close to the melting temperature of the commonly used electrode material Ag 70 / Pd 30 (melting temperature at 1160 ° C).
  • the piezo actuator can fail.
  • the internal electrodes are made of copper (Cu) or copper alloys or of nickel (Ni) or nickel alloys.
  • the base base electrode materials Cu or Ni contribute to an enormous cost reduction of the entire component.
  • the described damage patterns can be limited when replacing the previously common Ag 70 / Pd 3D internal electrodes with base Cu or Ni internal electrodes or their alloys, since less metal migration (diffusion) into the ceramic of the piezo material can be assumed.
  • the use of nickel as the base material is particularly advantageous here, since the melting temperature of 1453 ° C. is far above the sintering temperature required during production.
  • copper As the base material, a very good resistance to oxidation and the good electrical conductivity in connection with a low reactivity with the Pb-containing ceramic of the piezo material are particularly advantageous.
  • the piezo layers are produced from ceramic piezofilms in a foil casting method and coated with the base metal or its alloys to form the internal electrodes, in a screen printing or similar printing method.
  • the piezo layers are then baked together in a sintering process and the outer electrodes are contacted by soldering with the associated inner electrodes after a previous basic metallization so that the external electrical voltage can be applied.
  • FIG. 1 shows a part of a piezo actuator 1 in which piezo layers 2 can be seen which are formed from laminated piezo films.
  • the piezo foils are constructed from a ceramic material with a suitable crystal structure, so that using the so-called piezo effect when an external electrical voltage is applied to internal electrodes 4 and 5, which are each attached to the end of each piezo layer 2, for example by screen printing, a mechanical one Reaction of the piezo layers 2 and thus of the entire piezo actuator 1 takes place.
  • the internal electrodes 4 and 5 according to FIG. 1 are contacted laterally, alternately on external electrodes 6 and 7, to which the electrical voltage can be applied externally.
  • the non-contacted inner electrode 4 or 5 is somewhat reset within the layer structure to avoid a short circuit.
  • the inner electrodes are made of copper (Cu) or Copper alloys or made of nickel (Ni) or nickel alloys.

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fuel-Injection Apparatus (AREA)

Abstract

The invention relates to a piezoactuator, e.g., for actuating a mechanical component. Said piezoactuator comprises a multilayered structure consisting of piezo layers (2) and internal electrodes (4, 5), to which an external electrical voltage can be applied, positioned between them. The internal electrodes (4, 5) are contacted with external electrodes (6, 7) on alternate sides. Said internal electrodes (4, 5) are produced from a base metal or its alloys, copper (Cu) or copper alloys or nickel (Ni) or nickel alloys being particularly suitable.

Description

Piezoaktor und ein Verfahren zu dessen Herstellung Piezo actuator and a method for its production
Stand der TechnikState of the art
Die Erfindung betrifft einen Piezoaktor, beispielsweise zur Betätigung eines mechanischen Bauteils wie ein Ventil oder dergleichen, nach den gattungsgemäßen Merkmalen des Hauptanspruchs .The invention relates to a piezo actuator, for example for actuating a mechanical component such as a valve or the like, according to the generic features of the main claim.
Es ist allgemein bekannt, dass unter Ausnutzung des sogenannten Piezoeffekts einen Piezoaktor aus einem Material mit einer geeigneten Kristallstruktur aufgebaut werden kann. Bei Anlage einer äußeren elektrischen Spannung erfolgt eine mechanische Reaktion des Piezoelements, die in Abhängigkeit von der Kristallstruktur und der Anlagebereiche der elektrischen Spannung einen Druck oder Zug in eine vorgebbare Richtung darstellt . Aufgrund dieses extrem schnellen und genau regelbaren Effektes können sol- che Piezoaktoren zum Bau von Stellern, beispielsweise für den Antrieb von Schaltventilen bei Kraftstoffeinspritzsy- ste en in Kraftfahrzeugen vorgesehen werden. Hierbei wird die spannungs- oder ladungsgesteuerte Auslenkung des Pie- zoaktors zur Positionierung eines Steuerventils genutzt, das wiederum den Hub einer Düsennadel regelt . Ein großer Vorteil der Piezoaktoren ist dabei die Realisierung präziser und sehr schneller Auslenkungen mit hohen Kräften.It is generally known that a piezo actuator can be constructed from a material with a suitable crystal structure by using the so-called piezo effect. When an external electrical voltage is applied, there is a mechanical reaction of the piezo element which, depending on the crystal structure and the contact areas of the electrical voltage, represents a push or pull in a predeterminable direction. Due to this extremely fast and precisely controllable effect, such Piezo actuators for the construction of actuators, for example for driving switching valves in fuel injection systems in motor vehicles, are provided. The voltage or charge-controlled deflection of the piezo actuator is used to position a control valve, which in turn regulates the stroke of a nozzle needle. A great advantage of the piezo actuators is the implementation of precise and very fast deflections with high forces.
Piezoaktoren können hier metallisierte keramische Bauelemente sein, die in vielen technischen Bereichen ihre Anwendung als Stellelemente finden. Herkömmliche piezokera- ische Bauelemente können dabei aus einem monolithischen keramischen Block mit Abmessungen im mm- bis cm-Bereich bestehen, auf dessen Endflächen die Innenelektroden abgeschieden werden. Typische Bauformen sind hier ein Quader, runde Scheiben oder Ringe . Diese Formen haben den Nachteil, dass für den Betrieb als Piezoaktor hohe Spannungen (1,6 kV/mm Dicke) erforderlich sind.Piezo actuators can be metallized ceramic components that are used as control elements in many technical areas. Conventional piezoceramic components can consist of a monolithic ceramic block with dimensions in the mm to cm range, on the end faces of which the internal electrodes are deposited. Typical designs are a cuboid, round disks or rings. These forms have the disadvantage that high voltages (1.6 kV / mm thickness) are required for operation as a piezo actuator.
Um diesen Nachteil zu umgehen wurden Vielschichtaktoren (Multilayer-Aktoren) aus einem Schichtverbund aus dünnen Keramikschichten (in der Regel < 0,1mm) entwickelt, wobei die Innenelektroden, über die die elektrische Spannung aufgebracht wird, jeweils zwischen den Schichten angeordnet werden. Die Keramikschichten werden hierbei elektrisch parallel geschaltet, so daß die notwendige Steuerspannung in Vergleich zu den weiter oben erwähnten monolithischen Piezoaktoren bei gleicher Länge und Anzahl der Schichten sinkt. Der Aufbau dieser Piezoaktoren erfolgt somit in üblicher Weise durch Übereinanderstapeln mehreren Piezolagen, wobei die Gefahr von Rissen in der Keramik der Piezolagen aufgrund inhomogener elektrischer Feldverteilungen gegeben ist . Auch besteht auf rund des notwendigen Herstellungsverfahrens (z.B. Sintern) oder der verwendeten Werkstoffe die Gefahr von Delaminationen zwischen der Keramik und den Innenelektroden, beispielsweise aufgrund verminderter Haftfestigkeit, was zu einer Verkürzung der Lebensdauer des Piezoaktors führen kann.In order to avoid this disadvantage, multilayer actuators (multilayer actuators) were developed from a layered composite of thin ceramic layers (generally <0.1 mm), the internal electrodes via which the electrical voltage is applied being arranged between the layers. The ceramic layers are electrically connected in parallel so that the necessary control voltage drops in comparison to the monolithic piezo actuators mentioned above with the same length and number of layers. These piezo actuators are thus constructed in the usual way by stacking a plurality of piezo layers on top of one another, with the risk of cracks in the ceramic of the piezo layers being due to inhomogeneous electrical field distributions. There is also a risk of delamination due to the necessary manufacturing process (e.g. sintering) or the materials used between the ceramic and the internal electrodes, for example due to reduced adhesive strength, which can lead to a shortening of the life of the piezo actuator.
Vorteile der ErfindungAdvantages of the invention
Der eingangs beschriebene Piezoaktor mit einem Mehr- schichtaufbau von Piezolagen und dazwischen angeordneten Innenelektroden, an die eine äußere elektrische Spannung anlegbar ist und einer wechselseitigen seitlichen Kontak- tierung der Innenelektroden an Außenelektroden wird in vorteilhafter Weise dadurch weitergebildet, dass die Innenelektroden aus einem unedlen Metall oder dessen Legierungen sind.The piezo actuator described at the outset with a multilayer structure of piezo layers and inner electrodes arranged between them, to which an external electrical voltage can be applied and mutual lateral contacting of the inner electrodes with outer electrodes, is advantageously further developed in that the inner electrodes are made of a base metal or whose alloys are.
Typische Bauformen der Piezoaktoren in einem Mehrschichtaufbau bestehen z.B. aus bis zu 500 Schichten mit einer Keramikschichtdicke von 60 bis 120 μm und einer Innene- lektrodendicke von 1 bis 5 μm, so daß die Steuerspannung auf 100 bis 200 mV reduziert werden kann. Als Elektrodenmaterial wurde bisher in der Regel Ag7o/Pd3o angewandt, wobei ein Problem in der während des Sintervorganges ablaufenden Ag/Pd-Migration (Diffusion) des Innenelektroden- materials in die Keramik der Piezolagen bestand. Der Grund für die vor allem Ag-Migration (Diffusion) liegt in der Sintertemperatur, die ca. 1100 °C beträgt und damit nahe der Schmelztemperatur des üblicherweise verwendeten Elektrodenmaterials Ag70/Pd30 (Schmelztemperatur bei 1160°C) liegt.Typical designs of the piezo actuators in a multi-layer structure consist, for example, of up to 500 layers with a ceramic layer thickness of 60 to 120 μm and an internal electrode thickness of 1 to 5 μm, so that the control voltage can be reduced to 100 to 200 mV. Up to now, Ag 7 o / Pd 3 o has generally been used as the electrode material, with one problem being the Ag / Pd migration (diffusion) of the inner electrode material into the ceramic of the piezo layers during the sintering process. The main reason for the Ag migration (diffusion) is the sintering temperature, which is approx. 1100 ° C and is therefore close to the melting temperature of the commonly used electrode material Ag 70 / Pd 30 (melting temperature at 1160 ° C).
Da die eingangs schon erwähnten Nachteile, wie Ablösungen der Innenelektroden vom Keramikmaterial der Piezolagen oder elektrische Durchschläge und abnehmende Leitfähigkeiten innerhalb der Innenelektrodenschichten, können dabei zum Versagen des Piezoaktors führen. Gemäß zweier besonders vorteilhafter Ausführungsformen der Erfindung sind die Innenelektroden aus Kupfer (Cu) bzw. Kupferlegierungen oder aus Nickel (Ni) bzw. Nickellegierungen hergestellt .Since the disadvantages already mentioned at the outset, such as detachment of the internal electrodes from the ceramic material of the piezo layers or electrical breakdowns and decreasing conductivities within the internal electrode layers, the piezo actuator can fail. According to two particularly advantageous embodiments of the invention the internal electrodes are made of copper (Cu) or copper alloys or of nickel (Ni) or nickel alloys.
Mit der erfindungsgemäßen Materialauswahl kann zum einen eine Steigerung der Zuverlässigkeit der Piezoaktoren erreicht werden,- zum anderen tragen die unedlen Innenelek- trodenmaterialien Cu oder Ni zu einer enormen Kostenreduzierung des gesamten Bauteils bei. Die beschriebenen Schadensbilder können bei dem Ersatz der bisher üblichen Ag70/Pd3D Innenelektroden durch unedle Cu- bzw. Ni- Innenelektroden oder deren Legierungen eingeschränkt werden, da von einer geringeren Metall-Migration (Diffusion) in die Keramik des Piezomaterials ausgegangen werden kann. Hierbei ist besonders die Verwendung von Nickel als Grundmaterial vorteilhaft, da die Schmelztemperatur hier mit 1453 °C weit über der während der Herstellung erforderlichen Sintertemperatur liegt. Im Hinblick auf Kupfer als Grundmaterial ist vor allem eine sehr gute Oxidati- onsbeständigkeit und die gute elektrische Leitfähigkeit in Verbindung mit einer geringen Reaktivität mit der Pb- haltigen Keramik des Piezomaterials vorteilhaft.With the selection of materials according to the invention, on the one hand, an increase in the reliability of the piezo actuators can be achieved, - on the other hand, the base base electrode materials Cu or Ni contribute to an enormous cost reduction of the entire component. The described damage patterns can be limited when replacing the previously common Ag 70 / Pd 3D internal electrodes with base Cu or Ni internal electrodes or their alloys, since less metal migration (diffusion) into the ceramic of the piezo material can be assumed. The use of nickel as the base material is particularly advantageous here, since the melting temperature of 1453 ° C. is far above the sintering temperature required during production. With regard to copper as the base material, a very good resistance to oxidation and the good electrical conductivity in connection with a low reactivity with the Pb-containing ceramic of the piezo material are particularly advantageous.
Bei einem vorteilhaften Verfahren zur Herstellung eines Piezoaktor werden die Piezolagen aus keramischen Piezofo- lien in einem Foliengießverfahren hergestellt und mit dem unedlen Metall oder dessen Legierungen, zur Bildung der Innenelektroden, in einem Siebdruck oder ähnlichen Druckverfahren beschichtet. Die Piezolagen werden dann in einem Sinterprozess miteinander verbacken und es werden die Außenelektroden nach einer vorhergegangenen Grundmetallisierung durch Löten mit den jeweils zugehörigen Innenelektroden kontaktiert, damit die äußere elektrische Spannung angelegt werden kann.In an advantageous method for producing a piezo actuator, the piezo layers are produced from ceramic piezofilms in a foil casting method and coated with the base metal or its alloys to form the internal electrodes, in a screen printing or similar printing method. The piezo layers are then baked together in a sintering process and the outer electrodes are contacted by soldering with the associated inner electrodes after a previous basic metallization so that the external electrical voltage can be applied.
Diese und weitere Merkmale von bevorzugten Weiterbildungen der Erfindung gehen außer aus den Ansprüchen auch aus der Beschreibung und den Zeichnungen hervor, wobei die einzelnen Merkmale jeweils für sich allein oder zu mehreren in Form von Unterkombinationen bei der Ausführungs- form der Erfindung und auf anderen Gebieten verwirklicht sein und vorteilhafte sowie für sich schutzfähige Ausführungen darstellen können, für die hier Schutz beansprucht wird.These and other features of preferred developments of the invention also go beyond the claims the description and the drawings, the individual features being realized individually or in groups in the form of sub-combinations in the embodiment of the invention and in other fields and can represent advantageous and protectable embodiments for which protection is claimed here becomes.
Zeichnungdrawing
Ein Ausführungsbeispiel des erfindungsgemäßen Piezoaktors mit wird anhand der einzigen Figur der Zeichnung erläutert, die eine Detailansicht eines Piezoaktors mit einem Schnitt durch die Piezolagen mit Innenelektroden zeigt.An embodiment of the piezo actuator according to the invention is explained with reference to the single figure of the drawing, which shows a detailed view of a piezo actuator with a section through the piezo layers with internal electrodes.
Beschreibung des AusführungsbeispielsDescription of the embodiment
In Figur 1 ist ein Teil eines Piezoaktors 1 gezeigt , bei dem Piezolagen 2 zu erkennen sind, die aus laminierten Piezofolien gebildet sind. Die Piezofolien sind aus einem Keramikmaterial mit einer geeigneten Kristallstruktur aufgebaut, so dass unter Ausnutzung des sogenannten Pie- zoeffekts bei Anlage einer äußeren elektrischen Spannung an Innenelektroden 4 und 5, die jeweils zum Abschluss einer jeden Piezolage 2 beispielsweise durch Siebdruck, angebracht sind, eine mechanische Reaktion der Piezolagen 2 und somit des gesamten Piezoaktors 1 erfolgt.FIG. 1 shows a part of a piezo actuator 1 in which piezo layers 2 can be seen which are formed from laminated piezo films. The piezo foils are constructed from a ceramic material with a suitable crystal structure, so that using the so-called piezo effect when an external electrical voltage is applied to internal electrodes 4 and 5, which are each attached to the end of each piezo layer 2, for example by screen printing, a mechanical one Reaction of the piezo layers 2 and thus of the entire piezo actuator 1 takes place.
Die Innenelektroden 4 und 5 nach der Figur 1 sind seitlich, wechselseitig an Außenelektroden 6 und 7 kontaktiert, an die außen die elektrische Spannung angelegt werden kann. Die jeweils nicht kontaktierte Innenelektrode 4 oder 5 ist dabei innerhalb des Lagenaufbaus zur Vermeidung eines Kurzschlusses etwas zurückgesetzt. Gemäß der Erfindung sind die Innenelektroden aus Kupfer (Cu) bz . Kupferlegierungen oder aus Nickel (Ni) bzw. Nickellegierungen hergestellt. The internal electrodes 4 and 5 according to FIG. 1 are contacted laterally, alternately on external electrodes 6 and 7, to which the electrical voltage can be applied externally. The non-contacted inner electrode 4 or 5 is somewhat reset within the layer structure to avoid a short circuit. According to the invention, the inner electrodes are made of copper (Cu) or Copper alloys or made of nickel (Ni) or nickel alloys.

Claims

Patentansprücheclaims
1) Piezoaktor, mit einem Mehrschichtaufbau von Piezolagen (2) und dazwischen angeordneten Innenelektroden (4,5) an die eine äußere elektrische Spannung anlegbar ist und einer wechselseitigen seitlichen Kontaktierung der Innenelektroden (4,5) an Außenelektroden (6,7), wobei die Innenelektroden (4,5) aus einem unedlen Metall oder dessen Legierungen hergestellt sind.1) Piezo actuator, with a multi-layer structure of piezo layers (2) and inner electrodes (4,5) arranged between them, to which an external electrical voltage can be applied and a mutual lateral contacting of the inner electrodes (4,5) on outer electrodes (6,7), whereby the inner electrodes (4, 5) are made of a base metal or its alloys.
2) Piezoaktor nach Anspruch 1, dadurch gekennzeichnet, dass die Innenelektroden (4,5) aus Kupfer (Cu) oder Kupferlegierungen hergestellt sind. 3) Piezoaktor nach Anspruch 1, dadurch gekennzeichnet, dass die Innenelektroden (4,5) aus Nickel (Ni) oder Nickellegierungen hergestellt sind.2) Piezo actuator according to claim 1, characterized in that the inner electrodes (4,5) are made of copper (Cu) or copper alloys. 3) Piezo actuator according to claim 1, characterized in that the inner electrodes (4,5) are made of nickel (Ni) or nickel alloys.
4) Piezoaktor nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Schichtdicke der Innenelektroden (4,5) ca. 1 bis 5 μm, die Schichtdicke der Piezolagen (2) ca. 60 bis 120 μm bei einer Anzahl der Piezolagen (2) bis 500 beträgt .4) Piezo actuator according to one of the preceding claims, characterized in that the layer thickness of the inner electrodes (4,5) is approximately 1 to 5 μm, the layer thickness of the piezo layers (2) is approximately 60 to 120 μm for a number of the piezo layers (2) is up to 500.
5) Verfahren zur Herstellung eines Piezoaktor nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Piezolagen (2) aus keramischen, laminierten Piezofolien in einem Foliengießverfahren hergestellt und mit dem unedlen Metall oder dessen Legierungen, zur Bildung der Innenelektroden (4,5) in einem Siebdruck oder ähnlichen Druckverfahren beschichtet werden, dass die aus den Piezofolien (3) gebildeten Piezolagen (3) in einem Sinterprozess miteinander verbacken werden und dass die Außenelektroden (6,7) nach einer vorhergegangenen Grundmetallisierung durch Löten mit den jeweils zugehörigen Innenelektroden (4,5) kontaktiert werden. 5) Method for producing a piezo actuator according to one of the preceding claims, characterized in that the piezo layers (2) made of ceramic, laminated piezo films in a film casting process and with the base metal or its alloys, to form the internal electrodes (4, 5) a screen printing or similar printing process, that the piezo layers (3) formed from the piezo films (3) are baked together in a sintering process and that the outer electrodes (6, 7) are soldered to the associated internal electrodes (4, 5) be contacted.
PCT/DE2000/003227 1999-09-30 2000-09-16 Internal electrodes for a stacked piezoactuator and method for producing the same WO2001024287A2 (en)

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DE19946834A DE19946834A1 (en) 1999-09-30 1999-09-30 Piezo actuator and a method for its production
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WO2001045138A2 (en) * 1999-12-16 2001-06-21 Epcos Ag Piezoelectric component
WO2001045138A3 (en) * 1999-12-16 2002-03-14 Epcos Ag Piezoelectric component
US7855488B2 (en) 1999-12-16 2010-12-21 Epcos Ag Piezoceramic device
US8209828B2 (en) 1999-12-16 2012-07-03 Epcos Ag Method for making a piezoceramic device
WO2003028121A2 (en) * 2001-09-21 2003-04-03 Elliptec Resonant Actuator Ag Piezoelectric motor comprising a piezoelectric element arranged in a resonator
WO2003028121A3 (en) * 2001-09-21 2003-11-06 Elliptec Resonant Actuator Ag Piezoelectric motor comprising a piezoelectric element arranged in a resonator

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