WO2001023073A1 - Dispositif de traitement de gaz d'echappement - Google Patents

Dispositif de traitement de gaz d'echappement Download PDF

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Publication number
WO2001023073A1
WO2001023073A1 PCT/JP2000/006726 JP0006726W WO0123073A1 WO 2001023073 A1 WO2001023073 A1 WO 2001023073A1 JP 0006726 W JP0006726 W JP 0006726W WO 0123073 A1 WO0123073 A1 WO 0123073A1
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WO
WIPO (PCT)
Prior art keywords
exhaust gas
section
reaction tube
compartment
substance
Prior art date
Application number
PCT/JP2000/006726
Other languages
English (en)
Japanese (ja)
Inventor
Hidekazu Ina
Yoshihiro Ibaraki
Hideji Kawanaka
Original Assignee
L'air Liquide, Societe Anonyme À Directoire Et Conseil De Surveillance Pour L´Etude Et L´Exploitation Des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by L'air Liquide, Societe Anonyme À Directoire Et Conseil De Surveillance Pour L´Etude Et L´Exploitation Des Procedes Georges Claude filed Critical L'air Liquide, Societe Anonyme À Directoire Et Conseil De Surveillance Pour L´Etude Et L´Exploitation Des Procedes Georges Claude
Priority to AU74482/00A priority Critical patent/AU7448200A/en
Publication of WO2001023073A1 publication Critical patent/WO2001023073A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds

Definitions

  • the present invention relates to an exhaust gas treatment device for removing a substance to be treated in exhaust gas discharged from various devices by thermal decomposition.
  • the present invention has been made in order to meet such a demand, and an object of the present invention is to reduce the amount of nitrogen trifluoride (NF 3 ) contained in exhaust gas.
  • An object of the present invention is to provide an exhaust gas treatment device capable of reliably removing a fluorine compound that causes environmental pollution.
  • a reaction tube for thermally decomposing a substance to be treated in the exhaust gas is provided, and the inside of the reaction tube has a first section arranged at a central portion, and a second section arranged so as to surround the periphery of the first section. It is divided into two sections,
  • the first section is connected at one end to an introduction pipe for exhaust gas introduction, and at the other end to the one end of the second section, and Main heat source for heating exhaust gas
  • the second section is connected at another end to a discharge pipe for exhaust gas discharge, and a sub heat source for heating the inside of the reaction tube is provided around the second section.
  • the exhaust gas is first heated in the first section by the main heat source, and then further heated in the second section by the auxiliary heat source. If the temperature of the exhaust gas at the outlet of the first compartment is controlled so that the thermal decomposition of the substance to be treated in the exhaust gas mainly occurs in the second compartment, The heater in the compartment is prevented from being corroded by the decomposition gas, and at the same time, the substance to be treated can be reliably decomposed in the second compartment.
  • the heat generated from the main heat source in the first compartment is not only used for heating the exhaust gas in the first compartment, but also efficiently transferred to the exhaust gas in the second compartment. Is done. Therefore, the thermal decomposition of the substance to be treated can be performed with high thermal efficiency.
  • the auxiliary heat source provided around the second compartment is configured to exhaust gas in the second compartment. At the same time, heat is released from the reaction tube. Therefore, high thermal efficiency is obtained.
  • the first section is arranged at the center of the reaction tube and the second section is arranged around the first section, the configuration of the entire apparatus becomes compact, and the handling of the apparatus becomes easy. Is also excellent.
  • a substance for example, metal oxide that promotes thermal decomposition of the substance to be treated is filled in the second compartment.
  • the substance to be treated in the exhaust gas heated in the first compartment can be efficiently thermally decomposed, so that the treatment of the exhaust gas can be performed more reliably.
  • the exhaust gas treatment apparatus of the present invention further includes a nitrogen introduction pipe for introducing nitrogen gas into the inside of the reaction tube.
  • a nitrogen introduction pipe for introducing nitrogen gas into the inside of the reaction tube.
  • such a nitrogen introduction pipe may be connected in the middle of the introduction pipe.
  • the exhaust gas treatment device of the present invention further includes a secondary treatment tube connected to a downstream side of the discharge pipe for treating a by-product generated in the reaction tube. Processing in the reaction tube By-products generated by thermal decomposition are treated (captured or made harmless) using this secondary treatment column, thereby enabling the release of exhaust gas into the atmosphere. And can be.
  • the substance to be treated is typically a fluorine compound.
  • the second compartment and a substance that promotes thermal decomposition of ferric oxide (F e 2 0 3
  • the exhaust gas is heated under conditions in which the thermal decomposition of the fluorine compound is suppressed. This prevents the main heat source from being damaged by the cracked gas and allows the equipment to operate continuously for a long time.
  • FIG. 1 is a configuration diagram showing an embodiment of an exhaust gas treatment apparatus according to the present invention.
  • FIG. 2 is a sectional view of a reaction tube used in the exhaust gas treatment device according to the present invention.
  • FIG. 1 shows an embodiment of an exhaust gas treatment device based on the present invention.
  • 3 indicates a reaction tube
  • 4 indicates a secondary treatment tube
  • 7 indicates an inlet tube
  • 9 indicates a discharge tube
  • 13 indicates a nitrogen inlet tube.
  • a housing 2 accommodates the main components in addition to the reaction tube 3 and the secondary processing tube 4.
  • a control panel 5 is attached to the outer wall surface of the housing 2, and the control panel 5 includes an operation unit, a display unit, and the like for controlling the processing device 1.
  • Housing 2 is provided with an exhaust gas inlet 6. Downstream of the inlet 6, a valve V1, a check valve CV1 and a pressure detector 8 (measuring the pressure of the exhaust gas) are installed in this order. Data measured by the pressure detector 8 is displayed on the control panel 5.
  • An inlet pipe 7 is connected downstream of the pressure detector 8.
  • a valve V 3 is provided on the introduction pipe 7. The leading end of the introduction pipe 7 is connected to the reaction tube 3. The exhaust gas is introduced into the reaction tube 3 via the introduction pipe 7.
  • FIG. 2 shows a sectional view of the reaction tube 3.
  • 301 indicates the first section
  • 302 indicates the second section
  • 304 indicates the main heater (main heat source)
  • 308 indicates the sub heater ( ⁇ ij heat source).
  • the top and bottom of the reaction tube 3 are not drawn as sectional views.
  • the inside of the reaction tube 3 is divided into a first section 301 and a second section 302.
  • the first section 301 corresponds to the inside of the inner cylinder 303 arranged at the center of the reaction cylinder 3.
  • an electric resistance type main heater 304 is arranged inside the first section 301.
  • the above-described introduction pipe 7 is connected to the upper end of the inner cylinder 303 (that is, one end of the first section 301).
  • the exhaust gas is introduced into the first section 301 via the introduction pipe 7, where it is heated by the main heater 304.
  • the main heater 304 is inserted from the upper part of the inner cylinder 303, and is bolted to the inner cylinder 303 via a metal gasket. Therefore, maintenance such as replacement of the main heater 304 is easy and handling is excellent.
  • the main heater 304 is provided with a thermocouple 205, which is connected to the main heater 304. Monitor the surface temperature of main heater 304 to detect abnormal overheating.
  • the outer cylinder 303 is arranged so as to surround the inner cylinder 303.
  • the annular space formed between the outer peripheral surface of the inner cylinder 303 and the inner peripheral surface of the outer cylinder 303 corresponds to the second section 302 described above. That is, the second section 302 is formed in a cylindrical shape so as to surround the periphery of the first section 301.
  • the second compartment 302 is filled with a substance that promotes thermal decomposition (hereinafter referred to as a decomposition promoting substance).
  • the first section 301 and the second section 302 are located at the lower end of the inner cylinder 303 (ie, the other end of the first section 301) and the lower end of the outer cylinder 303 (ie, (One end of the second section 302).
  • a discharge pipe 9 for discharging the exhaust gas from the reaction tube 3 is connected to the upper end of the outer tube 303 (that is, the other end of the second section 302).
  • a sub heater 308 is attached to the outer peripheral surface of the outer cylinder 306.
  • the subheater 308 heats the exhaust gas so that the thermal decomposition is efficiently performed in the second section 302, and also functions as a sub-heat source for preventing heat radiation from the reaction tube 3. are doing.
  • thermocouple 307 is attached for detecting the temperature of the exhaust gas discharged from the first section 301.
  • the main heater 304 is turned on / off based on the temperature of the exhaust gas detected by the thermocouple 307, and the temperature of the exhaust gas introduced into the second section 302 is heated. It is maintained at a temperature suitable for decomposition.
  • a thermocouple 3 13 is mounted on the outer peripheral surface of the outer cylinder 3 06.
  • a thermocouple 312 is attached to the outer peripheral surface of the subheater 308.
  • the sub-heater 308 is turned on and off based on the temperature of the outer peripheral surface of the outer cylinder 303 detected by the thermocouple 313, and the temperature in the second section 302 is thermally decomposed. It is maintained at an appropriate temperature. At the same time, heat radiation from inside the second section 302 is prevented.
  • thermocouple 309 is inserted near the lower end of the second section, a thermocouple 3110 is inserted near the middle section, and a thermocouple 311 is inserted near the upper end.
  • the degradation of the decomposition promoting substance is determined based on the temperature in the upper part of the second section 302 detected by the thermocouple 311.
  • thermocouples 3 09, 3 10, 3 11 are connected to the control panel 5.
  • thermocouples 3 1 2 and 3 1 3 are also connected to the control panel 5.
  • An end plate 314 is bolted to the upper portion of the outer cylinder 306 via a metal gasket.
  • the upper end side of the second section 302 is closed by the end plate 314.
  • the second section 302 there is a three-phase nitrogen in the exhaust gas.
  • Bae Les tree bets like metal oxides in this example, contains F e 2 ⁇ 3 as a main component, ⁇ Ka s 4 ⁇ 6 mm ⁇ length Pellet of 5 to; LO mm pellet) is filled.
  • the outside of the outer cylinder 303 is covered from the upper part to the lower part by a cover 321, and a heat insulating material is filled between the outer cylinder 306 and the cover 321.
  • a discharge pipe connected to the outlet side of reaction tube 3 Is connected to the above-mentioned secondary processing tube 4 through a cooler 10 and a valve V 4 in order.
  • the cooler 10 is composed of a radiator tube having a cooling fin mounted on the outer surface thereof, and a fan and a fan for sending cool air to the cooling fin.
  • the cooling fin has a heat radiation area necessary for cooling the temperature of the exhaust gas in the discharge pipe 9 to a predetermined temperature.
  • a ventilation port 12 is provided on the wall of the housing 2 which is close to the cooler 10.
  • the ventilation port 12 is provided with a damper, which is opened and closed by the control panel 5 (or by manual operation).
  • the ventilation port 12 is provided on the upper surface of the housing 2.
  • the secondary treatment tube 4 is a dry room temperature adsorption tower.
  • By-products such as nitrogen oxide (NOX), slightly generated fluorine gas (F 2 ) or hydrogen fluoride (HF) generated by the thermal decomposition in the above-mentioned reaction tube 3 Such as is removed in the secondary processing cylinder 4.
  • the inside of the secondary treatment tube 4 is filled with an adsorbent for removing these by-products.
  • An exhaust pipe 11 is attached to the outlet of the secondary processing cylinder 4, and the exhaust gas from which the harmful substances have been removed is discharged via the exhaust pipe 11.
  • a nitrogen introduction pipe 13 for introducing nitrogen gas into the reaction tube 3 is provided.
  • the nitrogen introduction pipe 13 is connected in the middle of the introduction pipe 7.
  • a pressure regulating valve RG and a check valve CV 11 are installed in the nitrogen introduction pipe 13 in this order from the upstream side, and then branched into two pipes. Branched
  • the solenoid valve SV 1 is provided on one of the pipes after the pipe is opened, and the manual valve NV 1 is provided on the other. After these two pipes are put together again, they are connected to the inlet pipe 7 through the flow meter FI1.
  • the solenoid valve SV 1 is connected to the control panel 5, and is controlled based on a command from the control panel 5.
  • a branch pipe 14 branches from the check valve C V11 on the nitrogen inlet pipe 13 and the solenoid valve SV1 (and the manual valve NV1).
  • the branch pipe 14 is provided for checking the airtight state of the connection when the reaction tube 3 is replaced.
  • a flow meter FI 11 is provided upstream of the branch pipe 14.
  • the branch pipe 14 is further branched into two pipes downstream of the flow meter FI 11, one of which is connected to the inlet pipe 7 (before the reaction tube 3) via the valve VI 2, Is connected to the discharge pipe 10 via the valve VI 3 (in front of the secondary treatment tube 4).
  • the processing apparatus 1 shown in FIG. 1 includes bypass pipes and various devices in addition to the above-described pipes, but detailed descriptions thereof will be omitted.
  • a preliminary operation is performed as follows so that the inside of the reaction tube 3 becomes a predetermined temperature suitable for the treatment of exhaust gas.
  • Nitrogen gas is supplied into the reaction tube 3 via the nitrogen introduction pipe 13, and the heater 304 and the subheater 308 are supplied.
  • the nitrogen gas is decompressed by the pressure regulating valve RG, and then supplied to the inlet pipe 7 via the solenoid valve SV 1 controlled by a command from the control panel 5. .
  • the solenoid valve SV1 on the nitrogen inlet tube 13 is closed.
  • the exhaust gas is introduced into the reaction tube 3 through the introduction pipe 7.
  • the exhaust gas contains nitrogen trifluoride as a substance to be treated.
  • the manual valve NV 1 on the nitrogen inlet pipe 13 is always opened with a slight opening regardless of the opening and closing of the solenoid valve SV 1, and a small amount of nitrogen gas is always It has been supplied to
  • the exhaust gas introduced into the reaction tube 3 first passes through the first section 301, and is heated by the main heater 304 during that time.
  • the main heater 304 is controlled so that the exhaust gas temperature at the outlet of the first section 301 becomes 300 to 350 ° C.
  • the exhaust gas enters the second section 302, where it comes into contact with a decomposition promoting substance, whereby nitrogen trifluoride is thermally decomposed.
  • a decomposition promoting substance whereby nitrogen trifluoride is thermally decomposed.
  • the three full Tsu of nitrogen, decomposition react with decomposition promoting substances (F e 2 0 3), full Kkatetsu, oxygen ( ⁇ 2), nitrogen (N 2) and nitrogen oxide (NO x) Is done.
  • the exhaust gas discharged from the reaction tube 3 is introduced into the cooler 10 through the discharge pipe 9 and is cooled there.
  • the cooled exhaust gas is introduced into the secondary treatment tube 4.
  • By-products (NOX, NF, F2, etc.) generated as a result of the thermal decomposition of nitrogen trifluoride are removed by adsorption in the secondary treatment tube 4.
  • the exhaust gas after the treatment in the secondary treatment tube 4 is released into the atmosphere via the exhaust pipe 11.
  • a detector 15 for nitrogen trifluoride is connected in the middle of the exhaust pipe 11, and this detector 15 determines whether nitrogen trifluoride has been decomposed by heating. Monitoring.
  • the main heater 304 and the sub heater 308 are stopped, and then the solenoid valve SVI is turned off. It is opened, nitrogen gas is introduced into the reaction tube 3, and the inside of the reaction tube 3 is cooled.
  • the control panel 5 monitors whether or not the processing device 1 is functioning normally based on the outputs of the various sensors, and issues an alarm when an abnormality is detected. Perform the prescribed operation.
  • the temperature monitoring in the above processing unit 1 is shown in the following table. This is done based on each indicated temperature. In each monitoring point, if the value exceeds the set upper limit or falls below the lower limit, an abnormality is detected.
  • the stop of the processing device 1 is performed as follows. After the introduction of exhaust gas into the reaction tube 3 was stopped, the reaction tube was stopped.
  • Nitrogen gas is introduced into 3. After a while from the introduction of the nitrogen gas, the main heater 304 and the sub heater 308 are stopped. Thereafter, the supply of nitrogen gas into the reaction tube 3 is continued, and the inside of the reaction tube 3 is gradually cooled. The flow of the nitrogen gas into the reaction tube 3 is based on the following reason. In other words, if the operation of the reaction tube 3 is completely stopped at the same time as the supply of exhaust gas is stopped, there is no place for the heat generated in the reaction tube 3 to escape.
  • the exhaust gas is first heated in the first section 301 by the main heater 304 (main heat source) and then heated in the second section 304. In 2, it is further heated by the subheater 308 (subheat source).
  • the main heater 304 in the first compartment 301 is prevented from being corroded by the decomposition gas, and at the same time, the main heater 304 in the second compartment 302 is prevented from being corroded.
  • the target substance can be decomposed reliably.
  • the heat generated from the main heater 304 in the first section 301 is not only used for heating the exhaust gas in the first section 301 but also used for heating. It is also efficiently transmitted to the exhaust gas in the second section 302. Therefore, the thermal decomposition of the substance to be treated can be performed with high thermal efficiency. Further, the sub-heater 308 provided around the second section 302 heats the exhaust gas in the second section 302 and, at the same time, prevents heat radiation from the reaction tube 3. Therefore, high thermal efficiency is obtained.
  • the configuration of the entire apparatus becomes compact. And the equipment is easy to use. OAV

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)

Abstract

La présente invention concerne un dispositif de traitement de gaz d'échappement permettant d'éliminer de manière sûre des composés fluorés contenus dans un gaz d'échappement. Ce dispositif comprend un cylindre réacteur (3) destiné à décomposer thermiquement des substances, provenant d'objet ou de traitement (par exemple, NF3), présentes dans un gaz d'échappement. Ce cylindre réacteur (3) est divisé, de manière interne, en un premier compartiment (301) disposé au centre et en un second compartiment (302) entourant le premier (301). Le premier compartiment (301) qui contient un chauffage principal (304), est relié, par une de ses extrémités, à un tube d'entrée (7) de gaz d'échappement et, par l'autre extrémité, à une extrémité du second compartiment (302). Le second compartiment (302) est relié, par son autre extrémité, à un tube de sortie de gaz (9) d'échappement, et comporte en périphérie un chauffage auxiliaire (308). Ce second compartiment (302) est rempli d'une substance (par exemple, Fe2O3) qui permet d'accélérer la décomposition thermique de substances provenant d'objet ou de traitement.
PCT/JP2000/006726 1999-09-30 2000-09-28 Dispositif de traitement de gaz d'echappement WO2001023073A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU74482/00A AU7448200A (en) 1999-09-30 2000-09-28 Exhaust gas treating device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11/279646 1999-09-30
JP27964699A JP4545852B2 (ja) 1999-09-30 1999-09-30 排ガス処理装置

Publications (1)

Publication Number Publication Date
WO2001023073A1 true WO2001023073A1 (fr) 2001-04-05

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PCT/JP2000/006726 WO2001023073A1 (fr) 1999-09-30 2000-09-28 Dispositif de traitement de gaz d'echappement

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JP (1) JP4545852B2 (fr)
AU (1) AU7448200A (fr)
WO (1) WO2001023073A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5529374B2 (ja) * 2007-12-26 2014-06-25 中部電力株式会社 ガスの化学的処理方法
JP2010194416A (ja) * 2009-02-23 2010-09-09 Central Glass Co Ltd Ｎｆ３の分解方法およびその方法を用いる装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57206899A (en) * 1981-06-15 1982-12-18 Kawasaki Heavy Ind Ltd Catalyst oxidation reaction tower in tritium removal facility
JPH03181316A (ja) * 1989-12-12 1991-08-07 Ebara Res Co Ltd Ｎｆ↓３の除害方法
JPH11169663A (ja) * 1997-12-09 1999-06-29 Kanken Techno Kk 高温腐食性ガス体の除害装置及び除害方法
JPH11221440A (ja) * 1998-02-09 1999-08-17 Oei Kaihatsu Kogyo Kk 難分解物質の分解処理方法及びその装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0356250Y2 (fr) * 1986-12-27 1991-12-17
JPH0515738A (ja) * 1991-07-11 1993-01-26 Toshiba Corp 排オゾン処理装置
JPH08215566A (ja) * 1995-02-15 1996-08-27 Hitachi Ltd フロンの分解処理方法
JP2000015047A (ja) * 1998-07-06 2000-01-18 Seiko Epson Corp 排ガス除害装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57206899A (en) * 1981-06-15 1982-12-18 Kawasaki Heavy Ind Ltd Catalyst oxidation reaction tower in tritium removal facility
JPH03181316A (ja) * 1989-12-12 1991-08-07 Ebara Res Co Ltd Ｎｆ↓３の除害方法
JPH11169663A (ja) * 1997-12-09 1999-06-29 Kanken Techno Kk 高温腐食性ガス体の除害装置及び除害方法
JPH11221440A (ja) * 1998-02-09 1999-08-17 Oei Kaihatsu Kogyo Kk 難分解物質の分解処理方法及びその装置

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Publication number Publication date
JP4545852B2 (ja) 2010-09-15
JP2001096135A (ja) 2001-04-10
AU7448200A (en) 2001-04-30

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