WO2000068975A3 - Anlage zur fertigung von halbleiterprodukten - Google Patents

Anlage zur fertigung von halbleiterprodukten Download PDF

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Publication number
WO2000068975A3
WO2000068975A3 PCT/DE2000/001453 DE0001453W WO0068975A3 WO 2000068975 A3 WO2000068975 A3 WO 2000068975A3 DE 0001453 W DE0001453 W DE 0001453W WO 0068975 A3 WO0068975 A3 WO 0068975A3
Authority
WO
WIPO (PCT)
Prior art keywords
semiconductor products
manufacturing semiconductor
manufacturing
manufacturing units
gantry crane
Prior art date
Application number
PCT/DE2000/001453
Other languages
English (en)
French (fr)
Other versions
WO2000068975A2 (de
Inventor
Ronald Huber
Rolf-Arno Klaebsch
Original Assignee
Infineon Technologies Ag
Ronald Huber
Klaebsch Rolf Arno
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag, Ronald Huber, Klaebsch Rolf Arno filed Critical Infineon Technologies Ag
Priority to EP00940172A priority Critical patent/EP1192641A2/de
Priority to JP2000617478A priority patent/JP2002544662A/ja
Publication of WO2000068975A2 publication Critical patent/WO2000068975A2/de
Publication of WO2000068975A3 publication Critical patent/WO2000068975A3/de
Priority to US10/014,246 priority patent/US20020119036A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control And Safety Of Cranes (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)

Abstract

Die Erfindung betrifft eine Anlage zur Fertigung von Halbleiterprodukten in wenigstens einem Reinraum (1). Als Transportsystem für die Zuführung der Halbleiterprodukte zu den Fertigungseinheiten (2) ist eine Portalkrananlage vorgesehen, welche wenigstens einen oberhalb der Fertigungseinheiten (2) geführten und zu den Fertigungseinheiten (2) hin absenkbaren Transportbehälter (8) aufweist.
PCT/DE2000/001453 1999-05-07 2000-05-05 Anlage zur fertigung von halbleiterprodukten WO2000068975A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP00940172A EP1192641A2 (de) 1999-05-07 2000-05-05 Anlage zur fertigung von halbleiterprodukten
JP2000617478A JP2002544662A (ja) 1999-05-07 2000-05-05 半導体製品を製造するための装置
US10/014,246 US20020119036A1 (en) 1999-05-07 2001-11-07 Installation for fabricating semiconductor products

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19921246A DE19921246C2 (de) 1999-05-07 1999-05-07 Anlage zur Fertigung von Halbleiterprodukten
DE19921246.5 1999-05-07

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/014,246 Continuation US20020119036A1 (en) 1999-05-07 2001-11-07 Installation for fabricating semiconductor products

Publications (2)

Publication Number Publication Date
WO2000068975A2 WO2000068975A2 (de) 2000-11-16
WO2000068975A3 true WO2000068975A3 (de) 2001-04-05

Family

ID=7907412

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2000/001453 WO2000068975A2 (de) 1999-05-07 2000-05-05 Anlage zur fertigung von halbleiterprodukten

Country Status (7)

Country Link
US (1) US20020119036A1 (de)
EP (1) EP1192641A2 (de)
JP (1) JP2002544662A (de)
KR (1) KR100452713B1 (de)
CN (1) CN1165965C (de)
DE (1) DE19921246C2 (de)
WO (1) WO2000068975A2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10103111A1 (de) * 2001-01-24 2002-08-01 Mattson Wet Products Gmbh Vorrichtung zum Behandeln von Substraten
WO2003105216A1 (ja) * 2002-06-07 2003-12-18 平田機工株式会社 容器搬送システム
KR100541183B1 (ko) * 2003-03-04 2006-01-11 삼성전자주식회사 스토커 및 이를 포함하는 반송 시스템
WO2007056443A2 (en) * 2005-11-07 2007-05-18 Brooks Automation, Inc. Reduced capacity carrier, transport, load port, buffer system
US7281623B1 (en) * 2006-04-18 2007-10-16 Aquest Systems Corporation Transport system including vertical rollers
US20070289843A1 (en) * 2006-04-18 2007-12-20 Barry Kitazumi Conveyor System Including Offset Section
WO2008024225A2 (en) * 2006-08-18 2008-02-28 Brooks Automation, Inc. Reduced capacity carrier, transport, load port, buffer system
US20080050208A1 (en) * 2006-08-25 2008-02-28 Barry Kitazumi High speed transporter including horizontal belt
JP4670808B2 (ja) * 2006-12-22 2011-04-13 ムラテックオートメーション株式会社 コンテナの搬送システム及び測定用コンテナ
US7434678B1 (en) 2007-06-14 2008-10-14 Aquest Systems Corporation Systems and methods for transport through curved conveyance sections
WO2008130389A1 (en) * 2007-04-18 2008-10-30 Aquest Systems Corporation Integrated overhead transport system with stationary drive
US7441648B1 (en) 2007-06-14 2008-10-28 Aquest Systems Corporation Systems and methods for transport through curves
DE102009040555B4 (de) * 2009-09-08 2013-11-21 Grenzebach Maschinenbau Gmbh Verfahren und Vorrichtung zum Archivieren und /oder Zwischenlagern von Glasscheiben in Reinräumen
JP5777423B2 (ja) * 2011-06-30 2015-09-09 ユニ・チャーム株式会社 吸収性物品の製造装置
CN103063035A (zh) * 2012-12-25 2013-04-24 苏占忠 一种碳化硅冶炼炉装炉机
US9921493B2 (en) * 2013-11-14 2018-03-20 Taiwan Semiconductor Manufacturing Co., Ltd. Photolithography system, method for transporting photo-mask and unit therein
CN106185138B (zh) * 2015-07-20 2018-06-01 亚洲硅业（青海）有限公司 一种密闭式硅芯自动存取装置
DE102016120820A1 (de) * 2016-11-02 2018-05-03 Integrated Dynamics Engineering Gmbh Anlage zur Prozessierung von Halbleiterbauelementen sowie Hebeeinrichtung
CN110451409A (zh) * 2019-08-14 2019-11-15 濮阳职业技术学院 一种大数据机房柜体悬吊装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0848413A2 (de) * 1996-12-11 1998-06-17 Applied Materials, Inc. Kompakte Vorrichtung und Methode zum Aufbewahren und Laden von Halbleiterscheibeträgern
WO1998046503A1 (en) * 1997-04-14 1998-10-22 Asyst Technologies, Inc. Integrated intrabay buffer, delivery, and stocker system
WO1999002436A1 (en) * 1997-07-11 1999-01-21 Asyst Technologies, Inc. Smif pod storage, delivery and retrieval system
WO1999017356A1 (en) * 1997-09-30 1999-04-08 Semitool, Inc. Semiconductor processing apparatus having linear conveyor system
WO2000037338A1 (en) * 1998-12-18 2000-06-29 Asyst Technologies, Inc. Integrated intra-bay transfer, storage and delivery system

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3623506A1 (de) * 1986-07-09 1988-01-28 Mannesmann Ag Fuehrung fuer einen industrieroboter
DE3735449A1 (de) * 1987-10-20 1989-05-03 Convac Gmbh Fertigungssystem fuer halbleitersubstrate
JPH0326480A (ja) * 1989-06-21 1991-02-05 Mitsubishi Electric Corp 産業用ロボツト装置及びこの産業用ロボツト装置のロボツト教示方法
JPH0616206A (ja) * 1992-07-03 1994-01-25 Shinko Electric Co Ltd クリーンルーム内搬送システム
ATE157919T1 (de) * 1993-03-24 1997-09-15 Hauni Maschinenbau Ag Robotarm eines flächenportalroboters
JPH07297258A (ja) * 1994-04-26 1995-11-10 Tokyo Electron Ltd 板状体の搬送装置
US6019564A (en) * 1995-10-27 2000-02-01 Advantest Corporation Semiconductor device transporting and handling apparatus
JPH112657A (ja) * 1997-06-13 1999-01-06 Advantest Corp 複合ｉｃ試験装置
DE19736698C2 (de) * 1997-08-22 2001-09-13 Kaspar Walter Maschf Kg Vorrichtung zum Beschicken von Bearbeitungsstationen mit Druckzylindern
US6604624B2 (en) * 1998-09-22 2003-08-12 Hirata Corporation Work conveying system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0848413A2 (de) * 1996-12-11 1998-06-17 Applied Materials, Inc. Kompakte Vorrichtung und Methode zum Aufbewahren und Laden von Halbleiterscheibeträgern
WO1998046503A1 (en) * 1997-04-14 1998-10-22 Asyst Technologies, Inc. Integrated intrabay buffer, delivery, and stocker system
WO1999002436A1 (en) * 1997-07-11 1999-01-21 Asyst Technologies, Inc. Smif pod storage, delivery and retrieval system
WO1999017356A1 (en) * 1997-09-30 1999-04-08 Semitool, Inc. Semiconductor processing apparatus having linear conveyor system
WO2000037338A1 (en) * 1998-12-18 2000-06-29 Asyst Technologies, Inc. Integrated intra-bay transfer, storage and delivery system

Also Published As

Publication number Publication date
CN1165965C (zh) 2004-09-08
CN1350699A (zh) 2002-05-22
EP1192641A2 (de) 2002-04-03
KR20020010640A (ko) 2002-02-04
US20020119036A1 (en) 2002-08-29
WO2000068975A2 (de) 2000-11-16
KR100452713B1 (ko) 2004-10-12
JP2002544662A (ja) 2002-12-24
DE19921246C2 (de) 2003-06-12
DE19921246A1 (de) 2000-11-16

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