WO2000058977A1 - Structure magnetique noyee - Google Patents

Structure magnetique noyee Download PDF

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Publication number
WO2000058977A1
WO2000058977A1 PCT/JP2000/001817 JP0001817W WO0058977A1 WO 2000058977 A1 WO2000058977 A1 WO 2000058977A1 JP 0001817 W JP0001817 W JP 0001817W WO 0058977 A1 WO0058977 A1 WO 0058977A1
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WO
WIPO (PCT)
Prior art keywords
magnetic
substrate
buried
magnetic material
structure according
Prior art date
Application number
PCT/JP2000/001817
Other languages
English (en)
Japanese (ja)
Inventor
Isao Nakatani
Original Assignee
Japan As Represented By Director General Of National Research Institute For Metals
Japan Science And Technology Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan As Represented By Director General Of National Research Institute For Metals, Japan Science And Technology Corporation filed Critical Japan As Represented By Director General Of National Research Institute For Metals
Publication of WO2000058977A1 publication Critical patent/WO2000058977A1/fr

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/85—Coating a support with a magnetic layer by vapour deposition
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851—Coating a support with a magnetic layer by sputtering
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/855—Coating only part of a support with a magnetic layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure

Definitions

  • the invention of this application relates to a magnetic inlay structure. More specifically, the invention of this application relates to a magnetic inlay structure that is useful as a novel magnetically functional element or member, a micromachine, or the like. Background art
  • magnetic materials have been treated as playing a central role in electronics technology, and in recent years, in particular, magnetic materials have become indispensable in information recording technology. Can play a significant role.
  • the fine structure using magnetic material is composed of a continuous thin film of magnetic material, as seen in the technology related to recording media up to now.
  • the formation of recording bits on this thin film by means of magnetic or magneto-optical control has been almost limited.
  • the S / N ratio decreases due to the statistical fluctuation of the number of crystal grains contained in the bit as the bit volume decreases.
  • the invention of this application overcomes the above-mentioned limitations of the prior art, and enables large-capacity, high-accuracy information recording by high-density integration of magnetic materials.
  • the task is to provide a new approach to magnetic microstructuring. Disclosure of the invention
  • a magnetic material is embedded in a surface layer portion of a base plate made of a different material.
  • at least a part of the buried magnetic material is exposed to the substrate surface to provide a magnetic inlay structure characterized by forming a finely arranged structure of the magnetic material. I do.
  • the invention of this application includes, secondly, a magnetic inlay structure in which the exposed portion of the magnetic material forms a flat surface together with the substrate, and thirdly, a different magnetic material is superimposed.
  • a magnetic weather-inlaid structure embedded with a magnetic material and a non-magnetic material superimposed fourth, a magnetic weather-inlaid structure embedded with a magnetic material and a non-magnetic material superimposed, and fifth, a substrate Provided is a magnetic inlay structure in which the same or different magnetic materials, or a combination of a magnetic material and a non-magnetic material, is embedded in a plurality of planar positions on the surface.
  • the planar size of the exposed portion of the embedded material is 1
  • the seventh is a magnetic inlay structure with a buried depth of 10 m or less from the surface of the embedded material.
  • the eighth is a magnetic inlay structure with a buried depth of 10 m or less from the substrate surface.
  • the present invention also provides a magnetic inlay structure in which the plane distance between the exposed portion of the material and the exposed portion of the material buried adjacent thereto is 10 / m or less.
  • the invention of the present application is directed to a ninth aspect of the present invention, in any of the above structures, wherein the exposed portion of the buried material or the exposed portion and the surface
  • a magnetic inlay structure characterized by having a coating layer, and a tenth aspect is a magnetic inlay characterized in that any one of the structures is multi-layered. Structures are also provided.
  • the invention of this application is, in a eleventh aspect, a method of manufacturing a structure according to any one of the first to eighth aspects, wherein a trench is formed by etching a substrate surface.
  • the present invention provides a method for manufacturing a magnetic inlay structure, characterized by forming and embedding a magnetic material in a torch.
  • a magnetic recording medium characterized by comprising the structure of the first or 10th aspect.
  • FIG. 1 is a schematic cross-sectional view illustrating the structure of the present invention.
  • FIG. 2 is a cross-sectional view illustrating the superposition of magnetic materials having different configurations of (A) and (B).
  • 1A and 1B show magnetic materials having different magnetic characteristics.
  • , 2 indicate a substrate.
  • FIG. 3 is a perspective view illustrating the pattern media.
  • FIG. 4 is a diagram illustrating a procedure for forming the structure of the present invention.
  • Fig. 5 shows a specific example of the structure of the present invention using a scanning electron microscope (S
  • FIG. 6 is a diagram exemplifying a specific example of a trench in creating the structure of the present invention as a SEM image.
  • FIG. 7 is a diagram illustrating a specific example of the structure of the present invention as an SEM image.
  • Figure 8 shows a specific example of the structure of the present invention using an atomic force microscope (A
  • FIG. 2 is a diagram exemplarily illustrated as an FM) image.
  • the magnetic inlay structure of the present invention will be described with reference to FIG. That is, in the present invention, as illustrated in the cross-sectional view of FIG. 1, for example, the magnetic material (1) is embedded in the surface layer of the substrate (2) made of a different material. In addition, at least a part of the buried magnetic material (1) is exposed on the surface of the substrate (2) to form a finely arranged structure of the magnetic material. A featured magnetic inlay structure is provided.
  • the magnetic material (1) is embedded and integrated in the substrate (2). Then, at least a part of the magnetic material (1) is exposed as shown in FIG. This exposure may be a flat surface together with the substrate as shown in Fig. 1, or it may be bulging out from the surface of the substrate. It may be good or it may be in a depressed state.
  • the buried structure is considered in various ways. For example, magnetic materials (1A) and (1B) having different magnetic characteristics, such as magnetic materials (A) and (B) having different magnetic characteristics shown in FIGS. 2 (A) and (B), are used. , May be superimposed. It should be noted that one material (1A) may be a non-magnetic material and the other material (1B) may be a magnetic material. Also, as shown in FIG. 1 or FIG. 3, the same or different magnetic material, or a combination of a magnetic material and a non-magnetic material is buried at a plurality of plane positions on the substrate surface. You may be done.
  • the magnetic inlay structure of the present invention as described above is used, for example, for a high-density magnetic recording medium. This provides a new recording medium structure.
  • the binary bits of information are written and read out by magnetic heads for each microparticle of the magnetic material embedded along the track on the magnetic disk surface. It will be.
  • a magnetic recording medium separated by one bit is different from a conventional recording medium using a continuous magnetic thin film, for example, as shown in FIG. It becomes a high-density recording medium called pattern media.
  • the structure of the present invention includes an MRAM (magnetic memory that can be written and read at any time), a spin diode, a spin transistor, and a spin field effect. It gives the basic and rational structure of transistors and their high-density integrated circuits.
  • the invention also provides the basic and rational structure of microtransformers and microcoils, and their high-density integrated circuits.
  • the magnetic inlay structure of the present invention this is constituted.
  • the type of the magnetic material, the non-magnetic material, and the substrate There is no particular limitation on the type of the magnetic material, the non-magnetic material, and the substrate. Basically, it suffices that the magnetic material and the substrate have different substances or different compositions.
  • the magnetic material may be a metal, an alloy, an inorganic substance, an organic or organometallic complex, or one or more of these composites.
  • Permalloy Sendast, Ferrite, and many other things.
  • Non-magnetic materials do not show strong magnetism and have a relative magnetic permeability close to unity, such as metals, alloys, inorganic substances, organic or organic metal complexes, and composites of them. It may be of two or more types, for example, a variety of materials such as an austenitic stainless steel or a titanium alloy.
  • the substrate may be a metal, an alloy, a semiconductor, a ceramic, a glass, a carbon, a resin, or a composite thereof.
  • the combination of magnetic material, non-magnetic material and substrate will be selected according to the use of the magnetic inlay structure and the desired function and performance.
  • the embedding state of the material (1) embedded in the structure of the present invention may vary.
  • the embedded material (1) may be the same magnetic material, a different magnetic material, or a combination of a magnetic material and a non-magnetic material.
  • the plane size (W) of the exposed portion of the buried material (1) must be 1 Om or less.
  • the table of the board (2) An appropriate example is that the burial depth (D) from the surface is less than 10 m and even less than 1 m. It is also appropriate to set the plane distance (L) between the exposed part and the adjacent one to less than 10 ⁇ m and even less than 2 ⁇ m. It is. In magnetic recording and the like, such a size (w) and depth (D) are to better express the characteristics of a single magnetic domain structure.
  • the exposed portion of the buried material (1) may have various planar shapes, such as a circle, an ellipse, and a polygon.
  • the manufacture of the magnetic inlay structure of the present invention as described above is possible as various means.
  • the decorative technique of the craft has been known for a long time.
  • the surface of a metal such as bronze or iron, pottery, or lacquered base material is carved or cut out, and a material (inlay material) different from the base material is set in the decoration.
  • This is the technology to be used.
  • Ornaments manufactured using this technique are called inlays.
  • This method has been known for a long time, and its origin is thought to be the ancient Oriental Damascus. It is called the Damasin Law because of its place name.
  • Inlaying is a method of enhancing the decorative effect of objects by contrasting different materials on the same plane, and has been used for various materials since ancient times.
  • Gold or silver against bronze or iron, gold and silver thin on lacquered base are the most preferred combinations.
  • Raden which embeds shells in wood and sharpens it, is one of the derivative technologies.
  • the main techniques are (1) wire inlay using a wire-like metal wire as an inlay material, and (2) plate-like on a flat carved substrate. (3) Placing a vertical and horizontal stripe on the substrate with a chisel and fixing other metal from above with a metal inlay. There is a law.
  • a trench is formed by etching a substrate surface, and a magnetic material is formed. It is appropriate to bury the inside of the torch by means such as vapor deposition, sputtering or reflow.
  • the etching can be performed, for example, as a dry (gas phase) etching.
  • Electron beam drawing and development are performed according to a predetermined pattern.
  • the surface of the glassy carbon of the substrate, for example, of the magnetic material permalloy, is made flat by chemical mechanical polishing.
  • the magnetic material permalloy is exposed on the surface as having a predetermined plane size.
  • a coating cap layer serving as a protective layer, etc., is provided on the exposed surface of the magnetic material permanent magnet and the substrate.
  • this cap layer may be formed in a gas phase or wet process, in addition to sputtering, or in a spin coat or laminate, depending on the material. Etc. are performed as appropriate.
  • a second substrate layer is provided as a cap layer, and a magnetic material is further buried in the second substrate layer to form a multilayered magnetic inlay structure. May be formed.
  • FIG. 5 shows a magnetic inlay structure of the present invention formed using a glass-like carbon substrate as a substrate and a magnetic material Co—Cr alloy as an example. The case is shown by SEM images.
  • FIG. 6 illustrates an example of the shape of the torch of the magnetic inlay structure of the present invention by using an SEM image.
  • a 0.8-m long, 0.25-m wide, 0.24-m deep torrent is arranged on the glass-carbon substrate, and each torrent is fine.
  • the base of the torch is flat and the slope angle is about 75 degrees.
  • the substrate of the magnetic inlay structure of the present invention is made of an amorphous material having a dense structure, and is provided with accurate reactive ion etching without re-adhesion or residue. As a result, it was confirmed that a trench having such a fine shape can be obtained.
  • Figure 7 shows (a) a damascene structure in which columnar particles of a 21 at% Cr-Co alloy with a diameter of 0.8 m are arranged in a close-packed manner, and (b) a width of about 0.4 / m, 1.6 ⁇ 01, 80% 1 ⁇ 1; — “This is an example of a plan view of a damascene structure in which elliptical particles of the 6 alloy are arranged in an orthogonal lattice by SEM images. Their depth is 0.24 jum, the surface irregularity is a uniform plane in the range of 7 to 15 nm, and the shape and size of each particle are uniform. Was also confirmed.
  • Figure 8 shows a close-packed array of 21 at ⁇ 1 ⁇ 2Cr-Co alloy with magnetic anisotropy perpendicular to the array plane in Fig. 7 (a). They are shown as images.
  • (A) shows the positive remanent magnetization state (+ M r)
  • (b) shows the demagnetization state
  • (c) shows the negative remanence state (one M r).
  • This figure shows that each particle reflects the direction of magnetization of each particle. From this figure, it is confirmed that each particle can be obtained as the minimum unit of a bit.
  • the magnetization is non- It showed simultaneous parallelism, and several magnetization bonoretecs were observed. For particles with a width of 0.25 ⁇ m or less, nearly parallel magnetization was observed, and it was confirmed that the particles were close to a single domain state.
  • a new magnetic microscopic device capable of high-capacity, high-accuracy information recording by high-density integration of magnetic materials. Structure is provided.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

L'invention concerne un procédé de production d'une nouvelle microstructure magnétique capable d'enregistrer des informations haute précision et de gros volume grâce à une intégration haute densité de matières magnétiques. Dans le procédé de formation de la structure magnétique noyée selon l'invention, on forme une structure de matières magnétiques en noyant les matières magnétiques dans la couche antérieure d'un substrat composé de matières différentes des matières magnétiques, puis en mettant à nu au moins une partie des matières magnétiques noyées à la surface antérieure du substrat.
PCT/JP2000/001817 1999-03-29 2000-03-24 Structure magnetique noyee WO2000058977A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11/86118 1999-03-29
JP11086118A JP2000277330A (ja) 1999-03-29 1999-03-29 磁気象嵌構造体

Publications (1)

Publication Number Publication Date
WO2000058977A1 true WO2000058977A1 (fr) 2000-10-05

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WO (1) WO2000058977A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019174787A (ja) * 2018-03-28 2019-10-10 太陽インキ製造株式会社 感光性樹脂組成物、２液型感光性樹脂組成物、ドライフィルムおよびプリント配線板

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4073002B2 (ja) 2002-03-27 2008-04-09 キヤノン株式会社 磁気記録媒体の作製方法
JP4136653B2 (ja) 2002-12-27 2008-08-20 キヤノン株式会社 構造体の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10320772A (ja) * 1997-05-22 1998-12-04 Hitachi Ltd 高密度磁気記録媒体作製法およびこれによる高密度磁気記録媒体

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10320772A (ja) * 1997-05-22 1998-12-04 Hitachi Ltd 高密度磁気記録媒体作製法およびこれによる高密度磁気記録媒体

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019174787A (ja) * 2018-03-28 2019-10-10 太陽インキ製造株式会社 感光性樹脂組成物、２液型感光性樹脂組成物、ドライフィルムおよびプリント配線板
JP2020204774A (ja) * 2018-03-28 2020-12-24 太陽インキ製造株式会社 感光性樹脂組成物、２液型感光性樹脂組成物、ドライフィルムおよびプリント配線板
JP7027496B2 (ja) 2018-03-28 2022-03-01 太陽インキ製造株式会社 感光性樹脂組成物、２液型感光性樹脂組成物、ドライフィルムおよびプリント配線板

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