WO2000052341A1 - Systeme de microclapet - Google Patents

Systeme de microclapet Download PDF

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Publication number
WO2000052341A1
WO2000052341A1 PCT/EP2000/001541 EP0001541W WO0052341A1 WO 2000052341 A1 WO2000052341 A1 WO 2000052341A1 EP 0001541 W EP0001541 W EP 0001541W WO 0052341 A1 WO0052341 A1 WO 0052341A1
Authority
WO
WIPO (PCT)
Prior art keywords
microvalve
chip
valve
housing
seal
Prior art date
Application number
PCT/EP2000/001541
Other languages
German (de)
English (en)
Inventor
Jörg RINGWALD
Heidi Ashauer
Stephan Messner
Josef Vollmer
Jochen Schaible
Original Assignee
Hahn-Schickard Gesellschaft Für Angewandte Forschung E.V.
Speidel & Keller Gmbh & Co. Kg
Hygrama Ag
Schmidt Feintechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hahn-Schickard Gesellschaft Für Angewandte Forschung E.V., Speidel & Keller Gmbh & Co. Kg, Hygrama Ag, Schmidt Feintechnik Gmbh filed Critical Hahn-Schickard Gesellschaft Für Angewandte Forschung E.V.
Publication of WO2000052341A1 publication Critical patent/WO2000052341A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0044—Electric operating means therefor using thermo-electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0049—Electric operating means therefor using an electroactive polymer [EAP]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching

Definitions

  • the present invention relates to a microvalve arrangement and in particular to a microvalve arrangement which has a micromechanically manufactured microvalve chip in a housing.
  • FIG. 10 An example of a known housed microvalve arrangement is shown in FIG. 10.
  • a micromechanically manufactured microvalve is formed from a valve base body 2, which can be referred to as a base body chip due to the micromechanical manufacture thereof, and a chip plate 4, which can also be referred to as a valve plate chip.
  • the valve body chip 2 and the valve plate chip 4 are insulated from each other to prevent a short circuit between them.
  • the valve base body chip 2 and the valve plate chip 4 are connected circumferentially via a spacer layer 8.
  • a movable valve plate 4 is formed in the valve plate chip 4.
  • air feedthroughs 10 are formed in the valve plate chip 4 in the application areas of the valve plate.
  • a valve opening 12 is structured in the valve base body chip.
  • the microvalve designed in this way which can be referred to as a microvalve chip due to its construction from two chips, is introduced into a housing which has a housing base 16, which is usually a ceramic carrier, and a housing cover 18.
  • the valve base body chip 2 is applied flatly to the housing base 16 in such a way that the valve opening 12 in the valve base body chip 2 is in fluid communication with a fluid outlet opening 20 which is formed by the housing base 16.
  • a fluid inlet 22 is formed in the housing cover 18 in the manner shown.
  • the housing base 16 and the housing cover 18 are connected to one another at regions 24 in such a way that a fluid-tight seal is brought about between them.
  • Two contact pins 26 (only one is shown), which penetrate the housing base 16 and / or the housing cover 18, a seal 28 being arranged between each, are provided in order to enable electrical actuation of the microvalve.
  • 16 contact electrodes are provided on the housing base, one of which is electrically conductively connected to the housing basic body chip 2, while a second is connected to the valve plate chip via a wire bond 30.
  • the two contact pins are connected to the electrodes.
  • valve plate moves to the valve opening 12 due to electrostatic forces and closes the same. If the electrical voltage is removed, the valve plate moves back into the position shown in FIG. 10 due to the restoring force which is present due to the elastic suspension.
  • two electrodes are attached to the housing base.
  • the microvalve is glued to an electrode with conductive adhesive.
  • the second contact is realized via a wire bond between the valve plate chip and the second electrode on the housing base.
  • two contact pins are preferably guided outwards through the housing cover.
  • the pressure port of the valve i.e. H. the inlet of the same is integrated in the housing cover.
  • the inlet pressure is on the valve plate side of the valve, while the outlet is integrated in the ceramic carrier.
  • the microvalve shown in FIG. 10 represents a so-called 2/2-way valve, since it allows an inlet and an outlet to be fluidly connected or separated.
  • On Exemplary embodiment for a so-called 3/2-way valve is shown in FIG. 11. 11. 11 are only the
  • Micro valve chip which is formed from three subchips, and a part of the housing bottom is shown.
  • the electrostatic 3/2-way valve consists of three silicon layers, a first valve body chip 32, a valve plate chip 34 and a second valve body chip 36.
  • the first valve body chip 32 is applied flat to the housing base 38 by means of an electrically conductive adhesive, such that a valve opening 40 in the first valve body chip 32 is fluidly connected to a fluid outlet opening 42 in the housing base 38.
  • the valve opening 40 can be closed by a valve plate 44 structured in the valve plate chip 34.
  • a fluid passage opening 46 is also formed in the first valve body chip 32 and communicates with a second fluid outlet opening 48 in the housing base 38.
  • a further structured silicon layer which can be referred to as the second valve base body chip 36, is arranged on the side of the valve plate chip 34 opposite the first valve base body 32.
  • this second valve body chip 36 there is also a valve opening 50 opposite the valve opening 40 in the first valve body chip, such that the valve openings 40 and 50 can be alternately closed and left open by the valve plate 44 of the valve plate chip 34.
  • valve plate chip 34 As can be seen in FIG. 11, no spacer layer is required in the illustrated structuring of the valve plate chip 34, the silicon layers 32 and 34 being electrically insulated 54 from one another. However, a spacer layer can also be present between the valve plate chip 34 and the valve base body chip 32.
  • FIG. 11 An actuation of the 3/2-way valve shown in Fig. 11 takes place, as is shown schematically, by applying a voltage between the first valve body chip 32 and the valve plate chip 34.
  • the 3/2-way valve shown in FIG. 11 has three fluid connections, only two fluid connections 42 and 48 being shown in FIG. 11, while the third connection, which preferably runs through the housing cover and is in fluid communication with the valve opening 50, which is formed in the second valve body chip 36, is not shown.
  • a working volume which is connected to the connection 48 can be vented or vented.
  • the valve shown in FIG. 11 is usually placed in a housing which corresponds to that shown in FIG. 10 for a 2/2-way valve.
  • the electrical contacting is again carried out by means of electrically conductive adhesive and by means of wire bonding in order to implement an electrical connection for the valve plate chip.
  • the housing of a piezoresistive pressure sensor using elastomeric seals is known.
  • the pressure sensor consists of a semiconductor chip in which a membrane is formed and a carrier glass plate on which the semiconductor chip is attached. This pressure sensor is placed between two elastomer seals in a housing.
  • One of the elastomeric seals has electrically conductive areas in order to enable power supply to a resistance bridge circuit arranged on the membrane for pressure detection.
  • the object of the present invention is to provide an inexpensive microvalve arrangement with a simple structure.
  • the present invention provides a microvalve arrangement with a microvalve chip defining a microvalve, which is arranged in a housing section with a fluid passage opening such that a fluid flow through the fluid passage opening through the microvalve can be controlled.
  • An isotropically electrically conductive elastomer seal is provided on a circumferential line of contact between the housing section and the microvalve section to provide a fluid-tight seal.
  • the isotropically electrically conductive seal is also in electrical contact with the microvalve chip, such that an actuating voltage can be applied to the microvalve via the same.
  • two housing halves are provided in which the microvalve is housed, an isotropically electrically conductive elastomer seal being arranged on the circumferential contact lines between the two housing halves and the microvalve chip, each of the isotropically electrically conductive seals having a different area of the microvalve is electrically conductively connected, so that the actuation voltage for the microvalve can only be applied via the electrically conductive elastomer seals.
  • the present invention enables simple assembly of housed microvalves, with low cost Housing parts can be used.
  • the concept according to the invention is suitable for both 2/2-way valves and for 3/2-way valves.
  • the valve chip is clamped between two electrically conductive elastomeric seals, the seals on the one hand sealing the inlet side and the outlet side and on the other hand serving to implement the electrical contacting of the valve.
  • the seals are installed together with the valve in a housing in which electrically conductive contact plates with bushings to the outside are integrated. These bushings to the outside can, for example, be designed as soldering lugs for cables.
  • FIG. 1 shows a schematic view of two housing halves for a microvalve arrangement according to a preferred exemplary embodiment of the present invention
  • FIG. 2 shows a schematic illustration of two seals and a microvalve chip for a microvalve arrangement according to a preferred exemplary embodiment of the present invention
  • FIG. 3 shows a schematic view of an embodiment of a housing half for a microvalve arrangement according to the invention
  • FIG. 4 shows an electrically conductive contact plate for a ne microvalve arrangement according to the invention
  • FIG. 5a shows a schematic perspective view of a seal for a microvalve arrangement according to the invention
  • 5b is a schematic cross-sectional view of the seal
  • FIG. 6 shows a schematic cross-sectional view of an alternative exemplary embodiment of a microvalve arrangement according to the invention
  • FIG. 7 shows a schematic cross-sectional view to illustrate a further exemplary embodiment of a microvalve arrangement according to the invention.
  • FIGS. 8 and 9 are schematic cross-sectional views to illustrate the advantageous use of elastomer seals according to the invention.
  • FIG. 11 shows a schematic illustration of a further known microvalve arrangement.
  • two preferably identical housing halves 100, 102 are provided, which can be produced inexpensively, for example, by injection molding.
  • Each housing half has a fluid connection 104, for example to connect a flexible hose or the like to the same.
  • the fluid connection 104 is in fluid communication with the interior of the housing via a passage opening through the housing wall.
  • the interior of the housing is structured riert to form a support for a contact part 106, which is shown in Fig. 4.
  • the contact part preferably has a projecting section 108 which is guided outwards through a contact bushing in the housing wall.
  • This protruding section 108 may preferably have a soldering eyelet 110 for a cable, as shown in FIG. 1.
  • FIG. 1 As can best be seen in FIG.
  • the plate-like contact part has a sheathing flat 112, which rests on the contact surface provided in the interior of the housing.
  • This jacket surface 112 surrounds an opening 114 which allows fluid flow.
  • a contact part 106 is provided in both housing halves 100 and 102, this contact part preferably being integrated, ie overmolded, during the injection molding of the housing parts. Alternatively, the contact part 106 can be inserted after the housing halves have been produced.
  • An isotropically electrically conductive elastomer seal 116 is now arranged on this contact part 106. This creates an electrically conductive contact between the elastomer seal 116 and the upper-side contact surface 118 of the contact part 106.
  • the outer circumference of the elastomer seal 116 is adapted to the inner circumference of the housing half 102.
  • the elastomeric seal 116 has a recessed central area 120 to allow fluid flow.
  • the valve chip 122 is subsequently arranged on the elastomer seal, which may, for example, be identical to the valve chip that was described with reference to FIG. 10.
  • a second isotropically electrically conductive elastomer seal 124 is then arranged on this valve chip 122, which in turn has a recessed central area.
  • the upper housing half 100 is connected to the lower housing half 102 in order to house the arrangement of seals and valve chip.
  • the housing halves 100 and 102 are preferably connected such that pressure is exerted on the elastomer seals 116 and 124.
  • the outer borders of the elastomer seals which bear against the inner housing walls, are directed outwards pressed against the housing walls to ensure a secure fluid seal. This is explained in more detail below with reference to FIGS. 8 and 9.
  • one of the elastomer seals creates an electrically conductive connection to the valve body chip, while the other elastomer seal creates an electrically conductive connection to the valve plate chip.
  • the elastomer seals are electrically insulated from one another by the valve chip arranged between them.
  • a suitable actuation voltage can be applied between the valve base body chip and the valve plate chip via the contact parts 106 in order to actuate the valve.
  • Fig. 3 shows in more detail another possible embodiment for a housing half for a microvalve arrangement according to the invention.
  • a fluid connection 128 is led out on the underside of the housing half shown in FIG. H. perpendicular to the micro valve chip level.
  • the support surfaces 130 are shown as a support surface for a contact part 106, which is subsequently introduced, such that the projecting section 108 of the same protrudes outward through the contact bushing 132. It should be mentioned here that the contact part 106 can in turn be integrated during the manufacture of the housing half.
  • connecting sections 134 of the housing half are also shown, which match up with complementary connecting sections of a second housing half (not shown), for example in order to implement a clamping connection with the second housing half.
  • any suitable connecting means can be used to connect the two housing halves.
  • FIGS. 5a) and 5b A possible embodiment for a profile elastomer seal device that can be used with the present invention is shown in Figs. 5a) and 5b).
  • the profile seal shown in FIGS. 5a) and 5b) is suitable, for example, for a pressure range up to 1 bar.
  • the seal is designed so that the microvalve is only clamped by the edge region 136 of the seal. Within the edge area, the seal has a recess to ensure that the valve plate is not touched by the seal and thus the function of the valve is guaranteed.
  • 5a) and 5b) also show the passage opening 140 in order to allow fluid flow to and from the microvalve.
  • the underside 142 is intended to rest on a contact part, while the upper side 144 in the edge region 136 thereof makes contact with the microvalve chip.
  • the seal shown in FIG. 5 can be used on the pressure inlet side, while a modified seal is used on the pressure outlet side due to the high pressure, which prevents deflection of the valve body, which would lead to failure of the valve.
  • bending of the valve body can alternatively be prevented by other measures, for example by reinforcing the valve body with a pyrex plate.
  • the housing half arranged on the outlet side can be designed such that it provides support for the valve body.
  • FIG. 6 An alternative exemplary embodiment of a microvalve arrangement according to the invention, which manages with only one isotropically electrically conductive elastomer seal, is shown in FIG. 6.
  • the housing consists of a structured lower housing part 150 and a housing cover 152, which is preferably designed as a plate.
  • the structured lower housing part 150 forms a bearing for a microvalve chip 154. Electrical contacting of the microvalve chip 154 on the underside is achieved solely by pressing the Microvalve chips 154 can be realized on a metal surface (not shown) on the lower housing part 150.
  • An outlet opening 156 is provided in the lower housing part 150 and is in fluid communication with the valve opening (not shown) of the microvalve chip 154.
  • the lower housing part 150 is further structured in order to form a circumferential bearing for an isotropically electrically conductive elastomer seal 158.
  • This seal bearing has an area 160 running parallel to the main surfaces of the microvalve chip 154 and an area 162 running perpendicular to the same.
  • the parallel region 160 is preferably flush with the top of the micro valve chip 154.
  • FIG. 6 shows the microvalve arrangement in an incompletely assembled state, the housing cover 152 being removed from the lower housing part 150.
  • This housing cover 152 is then applied to the lower housing part so that a pressure in the direction of arrows 164 (which is somewhat hidden in the figure in the figure) is exerted on the elastomer seal 158, this pressure due to the compression of the elastomer seal into one after external pressure is implemented in the direction of arrows 166.
  • the elastomer seal is pressed against the vertical region 162 of the seal bearing.
  • a pressure in the direction of arrows 166 is in particular also generated by the application of a pneumatic pressure to the opening 168. This pressure is typically even greater than the pressure that is generated indirectly by the compression by the pressure along the arrows 164.
  • a passage opening 168 is provided, which represents the pressure inlet.
  • bending of the valve body chip is prevented by the design of the lower housing part 150.
  • an electrically conductive elastomer layer of minimal thickness can also be used for this purpose, but this has no sealing effect whatsoever.
  • FIG. 6 also shows two contacts 169a and 169b through which the microvalve chip 154 can be contacted from the outside.
  • the contacts can again be realized by electrically conductive contact plates, which are either inserted or molded, as has been described.
  • the upper contact pin 169a only extends to the central end of the seal, other lengths are equally possible as long as the contact pin is in electrical contact with the seal. 6 thus clearly shows that no wire bonds are required for contacting.
  • the two contacts are electrically isolated from one another by an insulation layer within the valve chip.
  • FIG. 7 shows a schematic cross-sectional view of a microvalve arrangement according to the invention for a 3/2-way valve.
  • the microvalve chip 18 consisting of three levels, preferably three silicon layers, is modified compared to the chip shown in FIG. 11 for the microvalve arrangement according to the invention. So the first valve base body 180 only the valve opening 182, but not the outlet opening 46 shown in FIG. 11.
  • the valve plate chip 184 is modified from the valve plate chip shown in FIG. 11 to define a lateral outlet opening 186 between the first valve body chip 180 and the valve plate chip 184.
  • the second valve main body chip 188 corresponds to the second valve main body chip 36 shown in FIG. 11. Otherwise, the configuration of the microvalve chip corresponds to the valve plate 190, its mountings, the insulation layer with the exception of the area at the lateral outlet opening 186 and the actuation of the valve plate Fig. 11 described micro valve chip.
  • FIG. 7 In the 3/2-way valve shown in FIG. 7, three fluid connections, a fluid connection 182a connected to the valve opening 182, a fluid connection fluidically connected to the lateral outlet opening 186, need only be shown schematically in FIG. 7 as a passage opening in a housing wall 194 as 192 , and a fluid connection 196a connected to the valve opening 196 in the second valve body chip are sealed off from one another.
  • two circumferentially circumferentially isotropically electrically conductive elastomer seals 198 are used, between which, similarly to the exemplary embodiment described with reference to FIGS. 1 and 2, the microvalve is clamped.
  • FIG. 7 only schematically shows outer housing walls 194.
  • the outer housing wall 194 has an opening 192 at which a fluid connection for the outlet opening 186 can be arranged.
  • pressures can occur during operation at the outlet opening 186 or at the fluid connection arranged in fluid communication therewith, which are at most the same size as the inlet Support the lower seal towards the inside by a stop 200.
  • This stop can preferably be realized by a corresponding structuring of the lower housing half, for example by a circumferential circumferential projection on the housing base of the lower housing half.
  • FIG. 7 further shows two contacts 183a and 183b, through which the upper valve body chip 188 and the valve plate chip 184 on the one hand and the valve body chip 180 on the other hand can be contacted.
  • the contacts extend to the opening 196. However, this is optional. It is only necessary that the contacts contact the seals electrically.
  • the contacts themselves can again be platelets, which are either inserted or molded.
  • the lateral outlet opening could also be located next to the lower outlet opening 182, e.g. B. left with respect to the same, be arranged, in this case the housing would be closed laterally, the outlet opening 186 or the passage opening in the housing wall would then no longer exist.
  • the second opening is then arranged approximately as shown at 48 in FIG. 11.
  • FIGS. 8 and 9 schematically shows a microvalve chip 154 and outer housing side walls 202. Furthermore, a lower isotropically electrically conductive elastomer seal 116 and an upper isotropically electrically conductive elastomer seal 124 are shown schematically. As already explained above, an upper and a lower housing half are preferably joined in such a way that a pressure acts on the upper elastomer seal 124 in the direction of the arrows 164, while the lower elastomer seal seal acts in the direction of arrows 204.
  • the conversion of the pressure in the direction of the arrows 166 can be supported by a suitable shaping of the elastomer seals, for example by an inclined inner edge of the elastomer seals, as shown in FIG. 8, such that the width of the elastomer seal on that facing the microvalve chip 154 Side is less than on the side facing away from the same.
  • FIG. 9 A similar schematic illustration to illustrate the pressures in a 3/2-way microvalve is shown in FIG. 9.
  • the elastomer seal 124 arranged in FIG. 9 on the top of a microvalve chip 206, which may have the structure shown in FIG. 7, can be identical to the seals described with reference to FIG. 8. However, on the underside, as was described above with reference to FIG. 7, a stop 200 is provided, against which the inside of the lower elastomer seal 198 bears. If a high pressure is present at the outlet opening 192 as described above, this pressure acts on the lower seal 198 in the direction of the arrow 208, so that it is pressed against the stop 200, so that an internally supported seal takes place here.
  • the lower seal 198 can be pre-pressed between the outer housing wall 194, the stop 200 and the lower housing wall (Not shown) may be introduced so that in addition to the inside supported seal shown in Fig. 9, an externally supported seal is also carried out by the pre-pressing.
  • the stop 200 described with reference to FIGS. 7 and 9, which serves to internally support the seal 198, can also be configured to prevent the first valve body body chip 180 (FIG. 7) from bending. Furthermore, as described above, deflection of the valve body chip can be prevented by providing it with a Pyrex reinforcement.
  • a pre-compression of the elastomer seals and a defined, downward force on the microvalve chip either different elastomer geometries for the lower and the upper seal with the same installation space, different installation space geometries with the same elastomer geometry or different elastomer hardness with the same geometries of the seals and of the installation spaces can be used. It is also possible to use mixed variants of the alternatives mentioned above.
  • the present invention thus creates microvalve arrangements which are simple to assemble and have a simple structure.
  • the microvalve arrangements according to the invention can thus be produced inexpensively and in a material-saving manner.
  • the present invention can be applied to both 2/2-way micro valves and 3/2-way micro valves.
  • electrostatic microvalves have been described above with reference to preferred exemplary embodiments of the present invention, it is obvious that other types of electrically actuated microvalves, for example those with a piezoelectric or thermal actuator, can also be used within the scope of the present invention.
  • the microvalve arrangements described are particularly suitable for a structure in which a plurality of valves are arranged in order to be operated in series or in parallel.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Valve Housings (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Abstract

L'invention concerne un système de microclapet comprenant une puce de microclapet (122, 154, 181, 206) qui définit un microclapet. Cette puce de microclapet est montée dans une section de boîtier (100, 102, 150, 194) comportant un orifice de passage de fluide (104, 156, 182, 186, 196), de manière que ledit microclapet puisse réguler le courant fluidique passant à travers l'orifice de passage de fluide. Sur une ligne de contact périphérique située entre la section de boîtier et la puce de microclapet, il est prévu une garniture d'étanchéité élastomère (116, 158, 198) électroconductrice pour assurer une étanchéité aux liquides. La garniture d'étanchéité élastomère à activité électroconductrice isotrope peut être mise en contact électrique avec la puce du microclapet, de manière à exercer une tension d'actionnement sur le microclapet.
PCT/EP2000/001541 1999-03-02 2000-02-24 Systeme de microclapet WO2000052341A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE29903716U DE29903716U1 (de) 1999-03-02 1999-03-02 Mikroventilanordnung
DE29903716.9 1999-03-02

Publications (1)

Publication Number Publication Date
WO2000052341A1 true WO2000052341A1 (fr) 2000-09-08

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PCT/EP2000/001541 WO2000052341A1 (fr) 1999-03-02 2000-02-24 Systeme de microclapet

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WO (1) WO2000052341A1 (fr)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
DE102008054222A1 (de) * 2008-10-31 2010-09-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikroventil in keramischer Mehrlagentechnik sowie dessen Verwendung

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Publication number Priority date Publication date Assignee Title
DE102009001930B4 (de) * 2009-03-27 2018-01-04 Robert Bosch Gmbh Sensorbaustein

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US5096643A (en) * 1989-05-29 1992-03-17 Burkert Gmbh Werk Ingelfingen Method of manufacturing microvalves
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