DE29903716U1 - Mikroventilanordnung - Google Patents

Mikroventilanordnung

Info

Publication number
DE29903716U1
DE29903716U1 DE29903716U DE29903716U DE29903716U1 DE 29903716 U1 DE29903716 U1 DE 29903716U1 DE 29903716 U DE29903716 U DE 29903716U DE 29903716 U DE29903716 U DE 29903716U DE 29903716 U1 DE29903716 U1 DE 29903716U1
Authority
DE
Germany
Prior art keywords
valve arrangement
micro valve
micro
arrangement
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29903716U
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hygrama AG
Hann-Schickard-Gesellschaft fuer Angewandte Forschung eV
Schmidt Feintechnik GmbH
Speidel and Keller GmbH and Co KG
Original Assignee
Hygrama AG
Hann-Schickard-Gesellschaft fuer Angewandte Forschung eV
Schmidt Feintechnik GmbH
Speidel and Keller GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hygrama AG, Hann-Schickard-Gesellschaft fuer Angewandte Forschung eV, Schmidt Feintechnik GmbH, Speidel and Keller GmbH and Co KG filed Critical Hygrama AG
Priority to DE29903716U priority Critical patent/DE29903716U1/de
Publication of DE29903716U1 publication Critical patent/DE29903716U1/de
Priority to PCT/EP2000/001541 priority patent/WO2000052341A1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0044—Electric operating means therefor using thermo-electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0049—Electric operating means therefor using an electroactive polymer [EAP]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Valve Housings (AREA)
DE29903716U 1999-03-02 1999-03-02 Mikroventilanordnung Expired - Lifetime DE29903716U1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE29903716U DE29903716U1 (de) 1999-03-02 1999-03-02 Mikroventilanordnung
PCT/EP2000/001541 WO2000052341A1 (de) 1999-03-02 2000-02-24 Mikroventilanordnung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE29903716U DE29903716U1 (de) 1999-03-02 1999-03-02 Mikroventilanordnung

Publications (1)

Publication Number Publication Date
DE29903716U1 true DE29903716U1 (de) 1999-06-02

Family

ID=8070169

Family Applications (1)

Application Number Title Priority Date Filing Date
DE29903716U Expired - Lifetime DE29903716U1 (de) 1999-03-02 1999-03-02 Mikroventilanordnung

Country Status (2)

Country Link
DE (1) DE29903716U1 (de)
WO (1) WO2000052341A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009001930B4 (de) * 2009-03-27 2018-01-04 Robert Bosch Gmbh Sensorbaustein

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008054222A1 (de) * 2008-10-31 2010-09-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikroventil in keramischer Mehrlagentechnik sowie dessen Verwendung

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3917423C1 (de) * 1989-05-29 1990-05-31 Buerkert Gmbh & Co Werk Ingelfingen, 7118 Ingelfingen, De
DE4035852A1 (de) * 1990-11-10 1992-05-14 Bosch Gmbh Robert Mikroventil in mehrschichtenaufbau
CA2058916C (en) * 1991-01-28 2000-03-21 Dean Joseph Maurer Piezoresistive pressure transducer with a conductive elastomeric seal
FI98821C (fi) * 1994-02-10 1997-08-25 Neste Oy Sähköä johtava elastomeerikoostumus, sen valmistus ja käyttö
JPH088683A (ja) * 1994-06-23 1996-01-12 Murata Mfg Co Ltd 圧電振動部品
US6117292A (en) * 1998-05-06 2000-09-12 Honeywell International Inc Sensor packaging having an integral electrode plug member

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009001930B4 (de) * 2009-03-27 2018-01-04 Robert Bosch Gmbh Sensorbaustein

Also Published As

Publication number Publication date
WO2000052341A1 (de) 2000-09-08

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 19990715

R156 Lapse of ip right after 3 years

Effective date: 20021001