Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K99/00—Subject matter not provided for in other groups of this subclass
  • F16K99/0001—Microvalves
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
  • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
  • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K99/00—Subject matter not provided for in other groups of this subclass
  • F16K2099/0073—Fabrication methods specifically adapted for microvalves
  • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K99/00—Subject matter not provided for in other groups of this subclass
  • F16K2099/0082—Microvalves adapted for a particular use
  • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T137/00—Fluid handling
  • Y10T137/1624—Destructible or deformable element controlled
  • Y10T137/1632—Destructible element
  • Y10T137/1654—Separable valve coupling or conduit
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T403/00—Joints and connections
  • Y10T403/70—Interfitted members
  • Y10T403/7062—Clamped members

Definitions

• the invention relates to a connection coupling for plate-shaped microcomponents, with at least one line connection for liquid or gaseous substances.
• Plate-shaped microcomponents such as micro isers, micropumps, micro valves or the like, are used to carry out chemical reactions with the lowest mass flows.
• microcomponents enables exact temperature control and thorough mixing, so that much more precise process control with increased safety is made possible.
• microcomponents usually consist of several superimposed plane-parallel plates, which in their superimposed surfaces contain the structures required for the required function. Because of the good thermal conductivity and the structurability, these plates usually consist of silicon (so-called silicon wafers), which contain a geometry that is adapted to the function of the microcomponent. In addition, it is also possible to use other chemically stable materials that are adapted to the conditions of use.
• SPARE BLADE RULE 26 se for the supply and discharge of the liquid or gaseous substances to be mixed or conveyed.
• an exact positioning in relation to the line bores emerging from the plate surface must be ensured; on the other hand, there is a risk that inadmissible bending stresses may be introduced via these line connections when attaching the line connections or during assembly or disassembly of the microcomponent.
• the object of the invention is therefore to provide a connection coupling of the type mentioned at the outset, which makes it possible to produce a line connection in a structurally simple manner without essentially introducing bending stresses into the plate-shaped microcomponent.
• an essentially U-shaped coupling body in cross section in an upper leg plate has a threaded bore that receives the line connection, that an edge web connects the upper leg plate to a parallel and spaced lower leg plate, and that stop means for Positioning of the plate-shaped microcomponent are provided, which can be received between the upper leg plate and the lower leg plate.
• the U-shaped coupling body encompasses the edge of the plate-shaped microcomponent to be connected.
• the line connection is printed on the line hole in the surface of the microcomponent. This ensures a secure and tight connection of the line connection to the microcomponent.
• the exact positioning required is achieved using the slings provided on the connection coupling.
• the inner surface of the edge web forms a transverse stop for an edge of the plate-shaped microcomponent and that at least one further stop means is provided as a long stop.
• the plate-shaped microcomponent to be centered with respect to the connection coupling is fixed in one direction (referred to in this context as "transverse") by the contact of its edge on the edge web of the coupling body.
• the definition in the other, perpendicular to this direction (referred to in this context as “longitudinal") is made by an additional long stop. This ensures safe and unambiguous positioning of the microcomponent in both directions of its plate plane relative to the connection coupling.
• the long stop for the one edge of the plate-shaped microcomponent preferably forms an end wall of the coupling body which extends at right angles to the edge web.
• the end wall forms a force-transmitting connection between the upper leg plate and the lower leg plate. Together with the edge web connecting the two leg plates, a particularly dimensionally stable connection of the two leg plates is achieved, so that due to the force exerted when screwing in the line connection against the received microcomponent, only a slight deflection of the coupling body results.
• Another advantageous embodiment of the inventive concept is that one from the lower leg plate and / or the nose, pin or the like projecting from the edge web can be brought into engagement with a corresponding recess of the plate-shaped microcomponent and forms the long stop.
• FIG. 3 shows a modified embodiment of the connection coupling according to FIG. 1,
• Fig. 5 shows an embodiment of a connection coupling with an end wall as a long stop and transverse stop
• FIG. 6 is a plan view of the connector coupling of FIG .. 4
• connection coupling shown in FIG. 1 serves to bring a line connection (14) with an external thread into tight connection with a connection bore of a plate-shaped microcomponent 1.
• An essentially U-shaped coupling body 2 in cross section which is preferably made in one piece from metal or plastic, has an upper leg plate 3, in which a Gewmdeboh-
• REPLACEMENT BLA ⁇ (RULE 26) tion 4 extends transversely to the plate level of the microcomponents 1.
• the externally threaded line connection (14) is screwed into the threaded bore 4 in order to press its line opening against the connection bore in the surface of the plate-shaped microcomponent 1.
• the upper leg plate 3 is connected at its one edge to a lower leg plate 5, which is parallel and at a distance therefrom, and is rigidly connected via an edge web 6.
• the microcomponent 1 to be connected is received in the intermediate space 7 between the upper leg plate 3 and the lower leg plate 5 in such a way that its one edge 8 lies against the inner surface ⁇ a of the edge web 6. This inner surface 6a thus forms a transverse stop for the microcomponent 1.
• the microcomponent 1 is centered in the embodiment shown in FIG. 1 by a nose 9 or ledge which projects from the top 5a of the lower leg plate 5 and engages with a corresponding recess on the underside of the plate-shaped microcomponent.
• the microcomponent 1 is thus fixed in the longitudinal and transverse directions with respect to the connection body 2, so that an exact positioning of the line connection in relation to the associated connection bore of the microcomponent 1 is ensured.
• a nose or another projection can also be provided on the inner surface 6a of the edge web 6 in order to engage with a correspondingly shaped edge notch of the plate-shaped microcomponent.
• the embodiment shown in FIG. 3 essentially differs from the embodiment shown in FIG. 1 characterized in that from the top 5a of the lower leg plate 5 an elongated pin 10 protrudes, which engages in a corresponding, for example. Etched recess on the underside of the plate-shaped microcomponent 1 and forms the longitudinal stop for the microcomponent 1.
• the pin 10 can also form the transverse stop. Instead, or additionally, the inside 6a of the edge web 6 can also form the transverse stop in the manner already described.
• the engagement of the pin 10 on the microcomponent 1 ensures that the edge 8 is not inadvertently changed when screwing on from the inside 6a.
• stiffening ribs 6b can be provided on the outside of the edge web facing away from the inside 6a.
• stiffening ribs 6b can be provided on the outside of the edge web facing away from the inside 6a.
• the example according to FIG. 4 shows that two threaded bores 4, for example, can also be provided in the upper leg plate 3 of the coupling body 2 in order to make two line connections.
• a plate-shaped insert 11 in the area of the inside 6a of the edge web 6 or an inserted pin 12 are shown as alternatives for the longitudinal stop.
• the cross-sectionally substantially U-shaped coupling body 2 has, in addition to its edge web 6, an end wall 13 running at right angles thereto, which, like the edge web 6, has a force-transmitting connection of the upper leg plate 3 to the lower one Leg plate 5 forms.

Landscapes

• Engineering & Computer Science (AREA)
• General Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Dispersion Chemistry (AREA)
• Computer Hardware Design (AREA)
• Chemical & Material Sciences (AREA)
• Theoretical Computer Science (AREA)
• Physics & Mathematics (AREA)
• Fluid Mechanics (AREA)
• Connection Of Plates (AREA)
• Physical Or Chemical Processes And Apparatus (AREA)
• Micromachines (AREA)
• Standing Axle, Rod, Or Tube Structures Coupled By Welding, Adhesion, Or Deposition (AREA)

Priority Applications (5)

Applications Claiming Priority (2)

Publications (1)

Family

ID=7892769

Family Applications (1)

Country Status (6)

Families Citing this family (2)

Citations (5)

Family Cites Families (4)

• 1998
  • 1998-12-24 DE DE1998160220 patent/DE19860220A1/de not_active Withdrawn
• 1999
  • 1999-12-14 EP EP99963529A patent/EP1141555B1/de not_active Expired - Lifetime
  • 1999-12-14 AU AU19791/00A patent/AU1979100A/en not_active Abandoned
  • 1999-12-14 US US09/868,942 patent/US6632043B1/en not_active Expired - Fee Related
  • 1999-12-14 DE DE59912126T patent/DE59912126D1/de not_active Expired - Fee Related
  • 1999-12-14 JP JP2000591337A patent/JP2002533231A/ja not_active Ceased
  • 1999-12-14 WO PCT/EP1999/009918 patent/WO2000039469A1/de not_active Ceased

Patent Citations (5)

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