WO2000016053A1 - Capteur de force - Google Patents
Capteur de force Download PDFInfo
- Publication number
- WO2000016053A1 WO2000016053A1 PCT/EP1999/006593 EP9906593W WO0016053A1 WO 2000016053 A1 WO2000016053 A1 WO 2000016053A1 EP 9906593 W EP9906593 W EP 9906593W WO 0016053 A1 WO0016053 A1 WO 0016053A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pressure
- layer
- electrodes
- force sensor
- sensitive
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H3/00—Mechanisms for operating contacts
- H01H3/02—Operating parts, i.e. for operating driving mechanism by a mechanical force external to the switch
- H01H3/14—Operating parts, i.e. for operating driving mechanism by a mechanical force external to the switch adapted for operation by a part of the human body other than the hand, e.g. by foot
- H01H3/141—Cushion or mat switches
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/205—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using distributed sensing elements
Definitions
- the present invention relates to a force sensor of the type with variable electrical resistance as a function of the force applied.
- Force or pressure sensors whose electrical resistance varies according to the force applied are known as FSR (force sensing resistor) and allow the value of the force applied to the active surface of the sensor to be detected directly.
- FSR force sensing resistor
- sensors include two flexible support sheets of insulating material, which are arranged face to face at a certain distance by means of an interposed spacer.
- the spacer includes, for example, a double-sided adhesive strip which is cut so as to at least partially surround the active area of the sensor.
- one of the support sheets is provided with two electrode structures of conductive material spaced apart from each other, while the other support sheet is provided with a coating of semi-material conductive or resistive, pressure sensitive.
- the semiconductor or resistive material can either exhibit an internal resistance which decreases when the layer is compressed, or present microsails on the surface, so that the surface resistance between the layer and a conductor decreases when the layer is pressed on the driver.
- the layer of semiconductor material is not in contact with the two electrodes and the electrical resistance between the two electrodes is therefore very high.
- pressure is applied to the sensor, the two support sheets are pressed together and the pressure-sensitive layer comes into contact with the two electrodes. A short circuit is produced in this way between the two electrodes, the electrical resistance of which varies inversely with the value of the pressure applied. The more the pressure on the sensor increases, the more the semiconductor layer is compressed resp. the closer she comes into intimate contact with the electrodes and the more the resistance measured between the two electrodes decreases.
- the resistance measured between the two electrodes therefore consists of the surface resistance between each electrode and the semiconductor layer and the specific resistance of the semiconductor layer between the two points of contact with the electrodes respective.
- the object of the present invention is to provide a force sensor, which is less sensitive to variations in production.
- a force sensor comprising a first electrode and a second electrode of conductive material, which are spaced apart on a first insulating support.
- a contact element of conductive material is placed opposite and at a distance from the two electrodes, said contact element being pressed against said electrodes when a force is exerted on the pressure sensor and at least one of the electrodes. is coated with a layer of pressure-sensitive material.
- the two electrodes are coated with a layer of pressure-sensitive material, the two pressure-sensitive layers being electrically insulated from one another.
- the specific resistance of the contact element is much smaller than the surface resistance between the pressure-sensitive layer and the contact element, the total resistance measured between the two electrodes is no longer dominated by the resistance of the contact element. So the variations in resistance of this contact element due to production variations can no longer have such an important influence on the characteristics of the force sensor. Consequently, the production tolerances for such a sensor may be less strict, which means that production may be faster. In addition, the production of sensors that do not comply with the specifications is significantly reduced, which increases the productivity of the production line.
- Another advantage of the sensor according to the invention lies in better dynamics compared to conventional sensors. Indeed, thanks to the very small resistance of the contact element, the variation of the total resistance between the two electrodes for a certain pressure variation is higher than for a conventional sensor.
- the use of the pressure-sensitive layer to cover the electrodes protects the surfaces of the latter from contact with air. This eliminates a serious problem with the use of electrodes which oxidize slowly when exposed to air.
- the layer of pressure-sensitive material may comprise either micro-projections on the surface, so that the surface resistance between the layer and the contact element decreases with the pressure exerted on the junction between the layer and the contact element.
- contact either a material, the specific resistance of which varies inversely with compression of said material, or a combination of the two. It may for example be a semiconductor polymer or a conductive elastomer.
- each electrode comprises fingers extending from a main conductive structure, said fingers of the two electrodes being arranged so as to mesh with one another.
- each electrode comprises a conductor placed substantially at the periphery of an active area of the sensor, and the layer of pressure-sensitive material covering each electrode extends towards the interior of the active area, the two pressure-sensitive layers being separated by a gap which passes substantially through the center of the active surface.
- a sensor always has a dynamic similar to that of a conventional sensor.
- short-circuits between the electrodes caused by variations in production are significantly reduced compared to the latter. Only short circuits between the two pressure-sensitive layers can occur. But thanks to the very high specific resistance of these short circuits between the pressure-sensitive layers, being located above the operating threshold of the sensor, these possible short circuits do not disturb the proper functioning of the sensor.
- the layer of pressure-sensitive material preferably comprises inclusions of conductive material, said inclusions of conductive material being arranged so as to modify the specific resistance of the layer of pressure-sensitive material.
- each force sensor can therefore be adapted by modifying the geometrical arrangement of its different components.
- the sensitivity is adaptable in a wide range to all needs and above all it becomes easily reproducible, that is to say it will be very easy to reproduce exactly a desired sensitivity.
- the sensitivity of the cell becomes largely independent of the thickness of the layer of pressure-sensitive material, which further increases the manufacturing speed of the sensors.
- the contact element made of conductive material preferably comprises a layer of conductive material, eg graphite, applied to a second flexible support.
- the second support is then placed at a distance from said first support using a spacer located outside of an active area, so that inside said active area, the layer of conductive material faces to said electrodes.
- Said spacer advantageously comprises a printable adhesive which is used to bond said first substrate to said second substrate.
- the adhesive can, for example, be applied by screen printing, like electrodes and layers of pressure-sensitive material, or by spray printing. After printing the adhesive and assembling the two supports, the adhesive is hardened, for example by baking.
- a printable adhesive allows great freedom of design of the force sensors, in particular during the manufacture of a set of sensors on a substrate, such as occupancy detectors. Indeed, until now, a double-sided adhesive tape has generally been used as a retractor. This adhesive strip was cut before assembly so that it had cutouts in the form of active areas at the places which, after assembly of the sensor, corresponded to the active areas of the latter. In order to provide, in the assembled sensor, ventilation channels, which connect the active areas with the environment and which thus allow pressure equalization between the active areas and the environment, these cutouts must in part be connected by cutouts thin.
- spacer particles having a diameter corresponding substantially to the desired spacing of the two substrates are preferably placed inside said printable adhesive. These spacer particles can be mixed into the liquid adhesive and applied together with it, or they can be introduced into the adhesive after it has been applied.
- the force sensor as described above is therefore specially well suited for manufacturing seat occupancy detectors, comprising one or more force sensors. It allows rapid and very productive production of such occupancy detectors while minimizing production losses.
- the manufacturing process having largely eliminated the constraints for the design of the detectors, this can be easily adapted to minimize, for example, the loss of substrate by cutting.
- Fig.1 a cross section through a favorable execution of a force sensor
- Fig.2 a view on the first substrate of two embodiments of a force sensor
- Fig. 3 a schematic view of a seat occupancy detector
- Fig. 4 the arrangement of several seat occupancy detectors during their manufacture.
- the force sensor 10 comprises a first insulating support 12 and a second support 14, eg sheets of PET, PES, PEN, PEI, PI, etc., which are arranged face to face at a certain distance by means of an interposed spacer 16.
- the retractor may comprise a double-sided adhesive strip which is cut so as to at least partially surround the active area 18 of the sensor 10.
- the retractor comprises a printable adhesive, eg ⁇ by screen printing or by spraying, which serves to bond the two supports 12 and 14 together and which solidifies before or after the assembly of the support sheets.
- spacer particles 20 having a diameter substantially equal to the planned spacing of the two supports 12, 14 can be introduced into the adhesive, either before its application or after it.
- the first support sheet 12 is provided with two electrode structures 22, 24 of conductive material, eg silver, spaced from one another, which are preferably printed by screen printing on the support 12.
- the second support sheet 14 is provided with a contact element 26 of conductive material. It is for example simply a layer of graphite or metal which is printed, laminated or engraved on the second support 14.
- the sensitivity of the sensor is based on a surface effect
- the second case it is based on a volume effect. It may, for example, be a semiconductor polymer or a conductive elastomer.
- the two electrodes 22 and 24 are coated with a layer 28 resp. 30 of semiconductor material or resistive, pressure sensitive, the two coatings 28 and 30 being electrically isolated from each other.
- the two support sheets 12 and 14 are pressed together and the conductive element 26 comes into contact with the coatings 28 and 30 of the two electrodes.
- an electrical contact is formed between the two electrodes, the resistance of which depends either on the surface resistance at the junction between the pressure-sensitive layer and the contact element, or on the specific resistance of the semiconductor or resistive material. layers 28 and 30. In both cases, that is to say for the two types of pressure-sensitive material, the resistance concerned decreases when the applied force increases.
- each electrode comprises fingers extending from a main conductive structure, said fingers of the two electrodes being arranged so as to mesh with one another.
- Such a sensor has very good dynamics due to the multiple contact points between the layer of pressure-sensitive material and the fingers of the electrodes.
- FIG. 2 Another embodiment is shown in FIG. 2.
- the two sensors shown include electrodes 22 and 24 in the form of simple conductive lines, which are arranged at the periphery of the active area of the sensor. To these conductive lines are connected the conductors necessary to connect the sensor to a control unit or to connect it in series or in parallel with another sensor.
- these conductors extend on both sides of the sensor because it is a sensor placed in the middle of a tab comprising several sensors connected in parallel, as they are used in detectors seat occupancy.
- the sensor shown in b it is a sensor which is eg arranged at the end of such a tab.
- the layers 28 and 30 of pressure-sensitive material covering the electrodes extend towards the interior of the active area to be separated by a gap 36 which passes substantially through the center of the active surface.
- the distance between the effective contact surfaces can therefore be very small without having to bring the electrodes closer together.
- the electrodes can therefore have a gap between them, which is clearly greater than that in the version with the fingers. This considerably reduces direct short-circuits between the electrodes due to variations in production, and therefore the production of sensors which do not comply with the specifications.
- the layer 28, 30 of pressure-sensitive material preferably includes inclusions of conductive material. These are, for example, dots made of silver or another metal, which are printed simultaneously with the conductors of the electrodes. These inclusions 38 of conductive material are arranged so as to modify the specific resistance of the layer 28, 30 of pressure-sensitive material.
- the metal dots and the electrodes could be etched simultaneously by a chemical attack on a metal layer deposited on the substrate.
- seat occupancy detectors which comprise several force sensors arranged one next to the other on a sheet.
- a detector is schematically represented in FIG. 3. It comprises several force sensors 10 arranged in a plane and connected by their support sheets 12 resp. 14. Depending on the occupancy detection mode, the individual sensors can be connected either in parallel or in a matrix by several row and column conductors.
- the electrodes of the various individual sensors 10 are printed on a first sheet of substrate together with the conductors connecting the sensors to each other and to a connection terminal. denies 40. If necessary, the points 38 are printed simultaneously in silver. Then the pressure sensitive layers are printed on the electrodes in the appropriate places.
- the graphite conductive elements are printed on a second sheet of substrate and then the printable adhesive which serves as a scaffold.
- the adhesive does not include spacer particles, these are introduced immediately after the application of the adhesive.
- the two support sheets are assembled while adjusting their relative position so that the contact elements on the second support exactly face the electrodes and layers of pressure-sensitive material on the first support. Finally the finished detector is cut from the sandwich produced in this way.
- the silver electrodes and the conductive elements are printed simultaneously on two adjacent zones of the same substrate sheet, thus avoiding an additional printing phase.
- the pressure-sensitive layer and the adhesive can then be printed on the support sheet, the pressure-sensitive layer being printed at the appropriate places in the electrode area, the adhesive being printed at the suitable places in the area of the conductive elements.
- the sensor is assembled by folding the two zones one over the other along a line separating the two adjacent zones and the finished detector is cut from this sandwich. It should be noted that the support sheet can be cut along the separation line before folding one zone over the other.
- the sensor according to the present invention allows easy and fast online control of the print quality of the pressure-sensitive layer.
- the fact of printing this layer on the conductors of the electrodes makes it possible to create, without additional printing step, test zones on the support sheet, in which a layer having a determined shape and area is printed between two conductive segments. The test is then reduced to a simple measurement of the resistance of this layer between the two conductive segments and, therefore, it is easy to check compliance with the specifications of the pressure-sensitive layer.
- By creating these test zones at several places on the sheet it is likewise possible to control the uniformity of printing of this layer over the entire surface of the sheet. In this way we can therefore control the quality of the sensors produced before their final assembly.
- the use of silver dots 10 to adjust the sensitivity of the individual sensors it becomes possible to produce seat occupancy detectors which have zones with different sensitivities without having to use different pressure-sensitive materials.
- the sensitivity of each force sensor can be adapted by modifying the number and the geometric arrangement of the inclusions 10 in the layer of material sensitive to the respective pressure.
- the use of an adhesive allows great freedom of design for seat occupancy detectors.
- the shape of the detector can then be optimized in order to reduce material losses when cutting the detector.
- One such form of detector is shown in FIG. 3. It makes it possible to manufacture several detectors on a single sheet of substrate, while minimizing the parings by an adapted arrangement of the detectors on the sheet. Such an arrangement, in which the adjacent detectors mesh with each other, is for example shown in FIG. 4.
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000570541A JP2002525564A (ja) | 1998-09-11 | 1999-09-07 | 力センサ |
AT99969142T ATE285069T1 (de) | 1998-09-11 | 1999-09-07 | Kraftwandler |
EP99969142A EP1116013B1 (fr) | 1998-09-11 | 1999-09-07 | Capteur de force |
DE69922673T DE69922673T2 (de) | 1998-09-11 | 1999-09-07 | Kraftsensor |
US09/801,666 US6531951B2 (en) | 1998-09-11 | 2001-03-09 | Force sensor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
LU90286A LU90286B1 (fr) | 1998-09-11 | 1998-09-11 | Capteur de force |
LU90286 | 1998-09-11 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/801,666 Continuation US6531951B2 (en) | 1998-09-11 | 2001-03-09 | Force sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2000016053A1 true WO2000016053A1 (fr) | 2000-03-23 |
Family
ID=19731767
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1999/006593 WO2000016053A1 (fr) | 1998-09-11 | 1999-09-07 | Capteur de force |
Country Status (8)
Country | Link |
---|---|
US (1) | US6531951B2 (fr) |
EP (1) | EP1116013B1 (fr) |
JP (1) | JP2002525564A (fr) |
AT (1) | ATE285069T1 (fr) |
DE (1) | DE69922673T2 (fr) |
ES (1) | ES2234332T3 (fr) |
LU (1) | LU90286B1 (fr) |
WO (1) | WO2000016053A1 (fr) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6531951B2 (en) | 1998-09-11 | 2003-03-11 | I.E.E. International Electronics & Engineering S.A.R.L. | Force sensor |
NL1019607C2 (nl) * | 2001-12-19 | 2003-06-20 | Dutch Space B V | Sensormat voor het registreren van een drukprofiel. |
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US11797119B2 (en) | 2017-04-14 | 2023-10-24 | Sensel, Inc. | Selectively adhered resistive force sensor |
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LU90286B1 (fr) | 1998-09-11 | 2000-03-13 | Iee Sarl | Capteur de force |
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- 1999-09-07 DE DE69922673T patent/DE69922673T2/de not_active Expired - Fee Related
- 1999-09-07 WO PCT/EP1999/006593 patent/WO2000016053A1/fr active IP Right Grant
- 1999-09-07 EP EP99969142A patent/EP1116013B1/fr not_active Expired - Lifetime
- 1999-09-07 ES ES99969142T patent/ES2234332T3/es not_active Expired - Lifetime
- 1999-09-07 JP JP2000570541A patent/JP2002525564A/ja active Pending
- 1999-09-07 AT AT99969142T patent/ATE285069T1/de not_active IP Right Cessation
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US4314227A (en) * | 1979-09-24 | 1982-02-02 | Eventoff Franklin Neal | Electronic pressure sensitive transducer apparatus |
US4314227B1 (fr) * | 1979-09-24 | 1989-01-24 | ||
US4856993A (en) * | 1985-03-29 | 1989-08-15 | Tekscan, Inc. | Pressure and contact sensor system for measuring dental occlusion |
US5296837A (en) * | 1992-07-10 | 1994-03-22 | Interlink Electronics, Inc. | Stannous oxide force transducer and composition |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6531951B2 (en) | 1998-09-11 | 2003-03-11 | I.E.E. International Electronics & Engineering S.A.R.L. | Force sensor |
NL1019607C2 (nl) * | 2001-12-19 | 2003-06-20 | Dutch Space B V | Sensormat voor het registreren van een drukprofiel. |
WO2003052368A1 (fr) * | 2001-12-19 | 2003-06-26 | Dutch Space B.V. | Tapis-contact permettant d'enregistrer un profil de pression |
EP1882920A1 (fr) * | 2006-07-28 | 2008-01-30 | IEE INTERNATIONAL ELECTRONICS & ENGINEERING S.A. | Procédé de fabrication d'un capteur de type film |
WO2008012351A1 (fr) * | 2006-07-28 | 2008-01-31 | Iee International Electronics & Engineering S.A. | Procédé de production de capteur de type à film |
US11797119B2 (en) | 2017-04-14 | 2023-10-24 | Sensel, Inc. | Selectively adhered resistive force sensor |
Also Published As
Publication number | Publication date |
---|---|
JP2002525564A (ja) | 2002-08-13 |
US6531951B2 (en) | 2003-03-11 |
ES2234332T3 (es) | 2005-06-16 |
LU90286B1 (fr) | 2000-03-13 |
ATE285069T1 (de) | 2005-01-15 |
EP1116013B1 (fr) | 2004-12-15 |
DE69922673D1 (de) | 2005-01-20 |
US20010008389A1 (en) | 2001-07-19 |
DE69922673T2 (de) | 2005-12-22 |
EP1116013A1 (fr) | 2001-07-18 |
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