WO2000004342A1 - Anordnung mit einer vielzahl von sensorgruppen und verfahren zur bestimmung ihrer intaktheit - Google Patents
Anordnung mit einer vielzahl von sensorgruppen und verfahren zur bestimmung ihrer intaktheit Download PDFInfo
- Publication number
- WO2000004342A1 WO2000004342A1 PCT/DE1999/002019 DE9902019W WO0004342A1 WO 2000004342 A1 WO2000004342 A1 WO 2000004342A1 DE 9902019 W DE9902019 W DE 9902019W WO 0004342 A1 WO0004342 A1 WO 0004342A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- arrangement
- sensor
- signals
- sensor group
- test signals
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/007—Malfunction diagnosis, i.e. diagnosing a sensor defect
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D2218/00—Indexing scheme relating to details of testing or calibration
- G01D2218/10—Testing of sensors or measuring arrangements
Definitions
- the invention relates to a method for determining the integrity of an arrangement with a plurality of sensor groups, each of which can be used to supply an electrical signal and to which an evaluation device for evaluating a sum signal summed from all signals is assigned.
- the invention also relates to a corresponding arrangement.
- the invention is based on a known arrangement with a large number of sensor groups, each of which can be used to supply an electrical signal and to which an evaluation device for evaluating a sum signal summed up from all the signals is assigned, and in particular makes reference to such an arrangement, which is implemented on a single semiconductor chip, with each sensor of a sensor group having a pressure sensor implemented in micromechanical technology and an electrical circuit, in which the arrangement is embedded and to which it is connected, implemented in CMOS technology.
- CMOS-compatible pressure sensor such a semiconductor chip structured in this way is sometimes referred to as a "CMOS-compatible pressure sensor", using the word "sensor” that does not quite do justice to the choice of words in the present text.
- a single pressure sensor embodied in micromechanical technology contains as its essential element a membrane etched free in a semiconducting solid body, which can deform under the influence of an external pressure and form a first electrode of a capacitor. Associated with the membrane is an essentially non-deformable second electrode, which forms a capacitor with the first electrode, which has a capacitance which, owing to the bending of the membrane which occurs due to external pressure and the most electrode is changeable. With the help of this membrane, the measurement of an external pressure can thus be traced back to the measurement of a capacitance.
- the capacity of an individual micromechanical pressure sensor of the type described is generally extremely low and accordingly can only be measured while accepting a comparatively high measurement error. It is therefore common to use more or less complex arrangements of many measuring bridges of the type described, which are connected in parallel with one another. The individual capacitances in the measuring bridges thus add up, so that a sum signal is obtained from the summed signals of the individual bridges, which is accessible for precise measurement by means of an evaluation device such as a sigma-delta modulator. In such an arrangement, the entirety of all sensors or measuring bridges can be divided into a more or less large number of sensor groups.
- a correspondingly designed arrangement with a large number of sensor groups is also to be specified.
- a method for determining the intactness of an arrangement with a large number of sensor groups, each of which can supply an electrical signal and which one
- Evaluation device for evaluating one of all signals summed sum signal is assigned, which method comprises the following steps:
- test signals are formed by excluding a single sensor group, comprising a suitably selected number of individual sensors or measuring bridges, from the summation. The test signals are then compared with one another. If all test signals are identical to one another, in the present case "identical to one another” means: “identical to one another within a reasonable tolerance", it can be assumed that all sensor groups are intact.
- each sensor group is preferably additionally determined, the associated test signal of which is different from several other test signals; In this way, the sensor group that is not intact is localized.
- a method is also preferred in which the arrangement of the sensor groups, the evaluation device and a switching arrangement for forming the test signals are implemented in a circuit on a single semiconductor chip and in which the test signals are formed by switching processes within the circuit.
- an arrangement is provided with a large number of sensor groups, each of which can be used to supply an electrical signal and to which an evaluation device for evaluating a sum signal summed from all signals is assigned, in which a switching arrangement is also provided - Is seen with which each sensor group can be switched off to exclude its signal from the summation.
- the switching arrangement preferably contains a switch for each sensor group, by means of which this sensor group can be disconnected from an electrical power supply.
- each sensor group of the arrangement preferably comprises a group of capacitive sensors.
- the evaluation device preferably further comprises a sigma-delta module, and each capacitive sensor is connected as a capacitance measuring bridge. Additionally, each capacitive sensor preferably includes at least one pressure sensitive membrane.
- the arrangement is preferably implemented in a circuit on a single semiconductor chip, with the evaluation device and the switching arrangement also preferably being implemented using CMOS technology.
- a preferred development of the arrangement consists in that a memory is additionally provided, with which information for a permanent state of the switching arrangement can be stored.
- This configuration makes it possible to provide redundant sensor groups in the arrangement in addition to the sensors or sensor groups that are absolutely necessary for the intended function, which sensor groups can take over their function in the presence of intact sensor groups.
- the preferably provided memory performs well for this purpose, because the information for selection of only the intact sensor groups for the intended operation of the arrangement can be stored in this memory.
- a first sensor group comprises two capacitive sensors 2, implemented in micromechanics as explained above, and two reference capacitors 3, each with an unchangeable capacitance.
- the reference capacitors 3 are manufactured using the same technology as the capacitive sensors 2 in order to largely rule out a malfunction due to manufacturing-related asymmetries.
- Capacitive sensors 4 and reference capacitors 5 of a second sensor group are also manufactured and arranged.
- the first sensor group and the second sensor group are connected in parallel to one another in order to increase the precision of the measurement.
- a switching arrangement 6, 7 and 8 is provided, the four switches 6 assigned to the first sensor group, four switches 7 assigned to the second sensor group and a controller 8 for the switches 6 and 7 includes.
- a test signal can thus be generated for each sensor group, which is characterized in that the sensor group concerned is not taken into account in the formation of this test signal by summation, unlike in the case of an intended measurement process in which all sensor groups contribute to a sum signal to be evaluated. If all the corresponding test signals received are identical to one another, it can be assumed that the capacitive sensors of all sensor groups are intact. If there are significant differences between the test signals, it can be concluded that at least one sensor group is not intact, and such a non-intact sensor group can also be determined, by identifying the test signal that differs from the other test signals.
- the semiconductor chip 1 contains a memory 9, in which corresponding information for the controller 8 can be stored.
- the sensor groups are supplied with a reference voltage from a voltage source 10, with individual sensor groups being switched off using switches 6 or 7 to determine the intactness.
- the sum or test signal is carried out by an evaluation device 11, in the present case by a sigma-delta modulator 11. Its structure and function are fundamentally known and do not require any explanation at this point.
- the method according to the invention and the arrangement according to the invention open up arrangements with sensor groups such as conventional “CMOS-compatible pressure sensors”, both an uncomplicated production control and a repeatable operation control as required, and thus contribute significantly to the expansion of the use of corresponding sensor systems.
- sensor groups such as conventional “CMOS-compatible pressure sensors”, both an uncomplicated production control and a repeatable operation control as required, and thus contribute significantly to the expansion of the use of corresponding sensor systems.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Biomedical Technology (AREA)
- Measuring Fluid Pressure (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP99945875A EP1097353A1 (de) | 1998-07-14 | 1999-07-01 | Anordnung mit einer vielzahl von sensorgruppen und verfahren zur bestimmung ihrer intaktheit |
JP2000560412A JP2002520607A (ja) | 1998-07-14 | 1999-07-01 | 複数のセンサ群を備えた装置およびこれらの完全性を突き止める方法 |
US09/761,802 US20010013773A1 (en) | 1998-07-14 | 2001-01-16 | Configuration with a plurality of sensor groups and method of determining its intactness |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19831600A DE19831600C1 (de) | 1998-07-14 | 1998-07-14 | Anordnung mit einer Vielzahl von Sensorgruppen und Verfahren zur Bestimmung ihrer Intaktheit |
DE19831600.3 | 1998-07-14 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/761,802 Continuation US20010013773A1 (en) | 1998-07-14 | 2001-01-16 | Configuration with a plurality of sensor groups and method of determining its intactness |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2000004342A1 true WO2000004342A1 (de) | 2000-01-27 |
Family
ID=7874049
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE1999/002019 WO2000004342A1 (de) | 1998-07-14 | 1999-07-01 | Anordnung mit einer vielzahl von sensorgruppen und verfahren zur bestimmung ihrer intaktheit |
Country Status (5)
Country | Link |
---|---|
US (1) | US20010013773A1 (de) |
EP (1) | EP1097353A1 (de) |
JP (1) | JP2002520607A (de) |
DE (1) | DE19831600C1 (de) |
WO (1) | WO2000004342A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10036935A1 (de) * | 2000-07-28 | 2002-02-07 | Siemens Ag | Verfahren zum Überwachen der Funktion eines Sensors, der zueinander inverse Ausgangssignale liefert, in einem Kraftfahrzeug |
WO2003025514A1 (de) * | 2001-09-14 | 2003-03-27 | Siemens Aktiengesellschaft | Verfahren und vorrichtung zur diagnose eines sensors |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004045987B4 (de) * | 2004-09-22 | 2007-11-08 | Health & Life Co., Ltd. | Verfahren und Vorrichtung zur automatischen Pfüfung eines elektronischen Blutdruckmessers |
GB0715768D0 (en) | 2007-08-14 | 2007-09-19 | Rolls Royce Plc | Sensor arrangement |
KR101012931B1 (ko) * | 2008-11-17 | 2011-02-08 | 신코스모스덴끼 가부시끼가이샤 | 복수개의 확산감지센서를 가지는 이상발열 감지시스템 |
US20140039798A1 (en) * | 2012-07-31 | 2014-02-06 | Chetan K. Gupta | System and methods for grouping similar items within a set |
US10591318B2 (en) | 2017-08-31 | 2020-03-17 | Invensense, Inc. | Half-bridge circuit for a sensor |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1991012507A1 (de) * | 1990-02-12 | 1991-08-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Integrierbarer, kapazitiver drucksensor und verfahren zum herstellen desselben |
US5276400A (en) * | 1989-09-23 | 1994-01-04 | University Of Edinburgh | Test circuit for imaging sensing integrated circuits |
US5329237A (en) * | 1993-02-12 | 1994-07-12 | Micron Semiconductor, Inc. | Method and system for decoupling inoperative passive elements on a semiconductor chip |
EP0774780A1 (de) * | 1995-11-17 | 1997-05-21 | Commissariat A L'energie Atomique | Herstellungsmethode einer mikroelektronischen Schaltung mit vielen Verbindungselementen auf einem Substrat |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4338978C2 (de) * | 1993-11-15 | 1998-05-07 | Sick Ag | Verfahren zur Feststellung defekter Lichtsender und/oder Lichtempfänger eines Lichtgitters und Lichtgitter |
DE19625666C1 (de) * | 1996-06-26 | 1998-01-15 | Siemens Ag | Ausleseschaftung und kapazitiv messender Senser |
-
1998
- 1998-07-14 DE DE19831600A patent/DE19831600C1/de not_active Expired - Lifetime
-
1999
- 1999-07-01 JP JP2000560412A patent/JP2002520607A/ja not_active Withdrawn
- 1999-07-01 WO PCT/DE1999/002019 patent/WO2000004342A1/de not_active Application Discontinuation
- 1999-07-01 EP EP99945875A patent/EP1097353A1/de not_active Withdrawn
-
2001
- 2001-01-16 US US09/761,802 patent/US20010013773A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5276400A (en) * | 1989-09-23 | 1994-01-04 | University Of Edinburgh | Test circuit for imaging sensing integrated circuits |
WO1991012507A1 (de) * | 1990-02-12 | 1991-08-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Integrierbarer, kapazitiver drucksensor und verfahren zum herstellen desselben |
US5329237A (en) * | 1993-02-12 | 1994-07-12 | Micron Semiconductor, Inc. | Method and system for decoupling inoperative passive elements on a semiconductor chip |
EP0774780A1 (de) * | 1995-11-17 | 1997-05-21 | Commissariat A L'energie Atomique | Herstellungsmethode einer mikroelektronischen Schaltung mit vielen Verbindungselementen auf einem Substrat |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10036935A1 (de) * | 2000-07-28 | 2002-02-07 | Siemens Ag | Verfahren zum Überwachen der Funktion eines Sensors, der zueinander inverse Ausgangssignale liefert, in einem Kraftfahrzeug |
WO2003025514A1 (de) * | 2001-09-14 | 2003-03-27 | Siemens Aktiengesellschaft | Verfahren und vorrichtung zur diagnose eines sensors |
US7123021B2 (en) | 2001-09-14 | 2006-10-17 | Siemens Aktiengesellschaft | Method and device for diagnosis of a sensor |
Also Published As
Publication number | Publication date |
---|---|
JP2002520607A (ja) | 2002-07-09 |
DE19831600C1 (de) | 1999-08-19 |
US20010013773A1 (en) | 2001-08-16 |
EP1097353A1 (de) | 2001-05-09 |
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