WO1999060386A1 - Verfahren und vorrichtung zur automatisierten erfassung und prüfung von geometrischen und/oder texturellen merkmalen eines objektes - Google Patents
Verfahren und vorrichtung zur automatisierten erfassung und prüfung von geometrischen und/oder texturellen merkmalen eines objektes Download PDFInfo
- Publication number
- WO1999060386A1 WO1999060386A1 PCT/EP1999/003359 EP9903359W WO9960386A1 WO 1999060386 A1 WO1999060386 A1 WO 1999060386A1 EP 9903359 W EP9903359 W EP 9903359W WO 9960386 A1 WO9960386 A1 WO 9960386A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- image
- partial images
- image recording
- support surface
- views
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/20—Special algorithmic details
- G06T2207/20021—Dividing image into blocks, subimages or windows
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30152—Solder
Definitions
- the invention relates to a method according to the preamble of claim 1 and an apparatus for performing the method.
- the invention is in the technical field of the optical examination of different views of an object, which is to be carried out, for example, in the process of manufacturing and assembling circuits.
- the location of the shadow of a leg to be measured on a base area is not only determined by its distance from the base area (on which the shadow is formed), but also by the location of the leg above it Base area as well as the specific shape of the leg affected, which can result in significant errors.
- this solution requires several individual light sources in order to generate an evaluable shadow image.
- the coplanarity control device SMD9000 from Trigon Adcotech uses five CCD cameras to record the images to be evaluated to check the coplanarity, one for each side view and one for the top view. Disadvantages here are the high technical outlay resulting from the number of cameras required and the fact that the individual views are not connected to one another.
- the object is achieved in terms of its method aspect by a method with the features of claim 1 and in terms of its device aspect by a device with the features specified in claim 8.
- the invention includes the technical teaching of obtaining, from a single viewing position, by means of suitable optical means, an overall image constructed from partial images of different views of the object with sufficient resolution for the simultaneous structure and texture inspection.
- the partial images are recorded essentially simultaneously and at least partially optically combined at the same time to form an overall image showing all the views, in which the boundaries of the partial images can be recognized, and this is separated separately within the boundaries of the partial images - i.e. evaluated with different evaluation means or for different parameters.
- all the partial images are optically combined and recorded by exactly one image recording device, the areas of the partial images being positioned and identified in the overall image, in particular using the storage unit and / or the evaluation unit, in such a way that they are used for evaluating the individual views can be assigned.
- the inspection of the object is facilitated in many applications if, in at least one additional step, the scene is recorded without an object and / or with a reference object that has predetermined parameters with regard to the features, and the corresponding overall image is stored in the memory device for comparison and calibration purposes .
- locations are determined by analyzing the gray value distributions in which parts of the object (to be checked for coplanarity) are very close to a document come.
- the amount of light that passes between the object and the base and is reflected in the pixels as an intensity value is subsequently detected and the local light quantity curve characterizing the width of a gap between the object and the base is determined using the intensity values.
- the light quantity curve can be converted into a gap width using calibration information using calibration information.
- the rule for converting an intensity curve between the object and the support is advantageously based on a spline approximation, the determination of rise values and the calibration such that an area under the spline curve determines the value of the gap width between the object and the support surface.
- the device according to the invention preferably comprises a single image recording device, relative to which the object is positioned in such a way that it fills only a partial area of its field of view, with beam deflection devices being arranged in the remaining parts of the field of view, which image side views of the object onto the image recording device.
- the beam deflection devices are positioned such that they each represent a specific view of the object, but the other views (especially the top view of FIG not affect the object).
- the means for beam deflection have, in particular, prisms or mirrors which can be fixed or adjustable and can have curved surfaces optionally for special applications. In addition or as an alternative to this, they can have a light guide device (one or more glass fiber bundles).
- At least one of the beam deflection devices is assigned means for changing the imaging scale of at least one partial image compared to at least one other partial image, in particular a lens arrangement.
- the device further comprises - especially for coplanarity tests - preferably an illumination device, which in particular has a light scattering device for generating a uniform light flow under the object, which (from the point of view of the beam deflection device) is arranged behind protruding parts of the object.
- an illumination device which in particular has a light scattering device for generating a uniform light flow under the object, which (from the point of view of the beam deflection device) is arranged behind protruding parts of the object.
- a flat support surface is provided for the object, and the beam deflecting means are essentially arranged in the plane of the support surface in such a way that there is a view parallel to the support surface that allows the coplanarity of several parts of the object facing the support surface to be checked. In this case, it can preferably be broken through so that the free spaces allow a view of the underside of the object.
- a further illumination device which is particularly suitable for assessing the recognizability of a surface texture, is then arranged above the object.
- a device is preferred in which the image recording device and the storage and evaluation unit are integrated in one structural unit.
- This can be a so-called “smart camera", for example, which has not yet been used for lead and mark inspection.
- the advantages of using an integrated component are that on the one hand it is easily available and on the other hand it is easily configurable for use in the context of the above.
- FIG. 1 shows a schematic, simplified representation of the overall structure of an embodiment of a device according to the invention
- FIG. 2 shows an overall picture of an example of an object to be checked with side views taken from a viewing position and a top view
- FIG. 3 shows a detail of a further embodiment with advantageously arranged lighting devices for generating top light and relative transmitted light
- FIG. 4 shows the intensity profile of a column cut between a support and a projecting part of an object facing it
- Figure 5 a side and bottom view of a component with L-shaped connections
- Figure 5b side and bottom view of a component with J-shaped connections.
- the device comprises a CCD camera 2 as an image recording device with an objective 2a having a field of view 3, a support surface 4, prisms 5 for beam deflection and lenses 6 for beam shaping of the deflected radiation, and an image evaluation and storage unit 7.
- An illumination device is not shown; the example device accordingly works with diffuse ambient light.
- the camera 2 records an overall image of the object 1, which is composed of several partial images of different views of the object.
- the light reflected from the top 1 a of the object and directly into the lens 2 a generates a partial image of the top view, and the light reflected from the side surfaces 1 b and deflected by the prisms 5 into the camera lens produces partial images corresponding to the side views.
- the lenses 6 cause a change in the imaging scale or the level of detail of the recording in the through them affected parts of the beam path, ie in the partial images of the side views.
- the camera 2 forwards the overall image in the form of an electrical signal pattern to the image evaluation and storage device 7 (not explained in greater detail here), which can be implemented, for example, by a personal computer.
- the image evaluation and storage unit 7 determines the delimitation of the partial images and extracts relevant information and parameters from the partial images using known methods of image processing and image evaluation that are specifically matched to the features to be checked in the partial images and provides this for a comparative evaluation ready.
- FIG. 2 shows a typical overall image 11 of a circuit in the field of view 10 of the camera, recorded by the camera 2 in the device according to FIG. 1 and stored in the image evaluation and storage unit 7.
- the overall image 10 comprises fifth partial images, namely the partial image 1 1 a of the top view and the partial images 1 1 b to 1 1 e of the side views.
- the intensity of an imprint 12 on the top of the circuit clearly differs from the intensity of the ambient light.
- the images of the side view are characterized by overlay structures 13, which comprise elements 14, which are caused by gaps of different widths between the legs of the circuit 1 and the support 4.
- the overlay structures are evaluated by means of special image processing methods already mentioned above and used for checking the coplanarity of the circuit connections.
- FIG. 3 shows a detail of a modified embodiment of the arrangement from FIG. 1, in which, in addition to the components shown there, two lighting devices 8a, 8b for generating top light on the surface of the object 1 and for generating - made diffuse by a light scattering device 9 - Transmitted light for the side views of the legs 1 .1 of the circuit 1 are provided.
- FIG. 4 shows a spline curve S for the intensity curve in the pixels of the digitized partial image of a side view for one of the gaps between the leg and the support.
- Figures 5a and 5b denote those in the context of the so-called lead and mark inspection-tested parameters based on the side view 1 b of an object 1 and on the basis of its bottom view 1 c.
- the object shown in FIG. 5a has L-shaped connections, while the object shown in FIG. 5b has J-shaped connections.
- the parameters to be checked are the coplanarity CP, the housing floor clearance ST, the grid Pl, the rotation SK, the connection or lead width LW, the length LS, the connection or lead position LP, the length deviation LD, the connection dimensions TD, the support points or the FP footprint and case height (not labeled).
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Quality & Reliability (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU43619/99A AU4361999A (en) | 1998-05-15 | 1999-05-17 | Method and device for automatic detection and testing of geometric and/or textural characteristics of an object |
EP99926315A EP1078250A1 (de) | 1998-05-15 | 1999-05-17 | Verfahren und vorrichtung zur automatisierten erfassung und prüfung von geometrischen und/oder texturellen merkmalen eines objektes |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19823358.2 | 1998-05-15 | ||
DE19823358A DE19823358A1 (de) | 1998-05-15 | 1998-05-15 | Verfahren und Vorrichtung zur automatisierten Erfassung und Prüfung von geometrischen und/oder texturellen Merkmalen eines Objekts |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999060386A1 true WO1999060386A1 (de) | 1999-11-25 |
Family
ID=7868883
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1999/003359 WO1999060386A1 (de) | 1998-05-15 | 1999-05-17 | Verfahren und vorrichtung zur automatisierten erfassung und prüfung von geometrischen und/oder texturellen merkmalen eines objektes |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1078250A1 (de) |
AU (1) | AU4361999A (de) |
DE (1) | DE19823358A1 (de) |
WO (1) | WO1999060386A1 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10318580B4 (de) | 2003-04-24 | 2005-08-18 | Eads Astrium Gmbh | Verfahren und Empfänger zur gleichzeitigen Erfassung und Auswertung von mindestens zwei elektromagnetischen Signalen |
WO2005103656A1 (en) * | 2004-04-23 | 2005-11-03 | Advanced Systems Automation Limited | Multiple surface viewer |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5486692A (en) * | 1994-10-19 | 1996-01-23 | Emhart Glass Machinery Investments Inc. | Glassware inspection machine comprising diffused light sources and two-dimensional cameras |
WO1997018461A1 (de) * | 1995-11-15 | 1997-05-22 | Thomas Huhn | Vorrichtung, deren verwendung und verfahren zum inspizieren und prüfen von gefässwänden |
WO1998004882A1 (en) * | 1996-07-12 | 1998-02-05 | Linker Frank V Jr | Split optics arrangement for vision inspection/sorter module |
-
1998
- 1998-05-15 DE DE19823358A patent/DE19823358A1/de not_active Withdrawn
-
1999
- 1999-05-17 EP EP99926315A patent/EP1078250A1/de not_active Withdrawn
- 1999-05-17 WO PCT/EP1999/003359 patent/WO1999060386A1/de not_active Application Discontinuation
- 1999-05-17 AU AU43619/99A patent/AU4361999A/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5486692A (en) * | 1994-10-19 | 1996-01-23 | Emhart Glass Machinery Investments Inc. | Glassware inspection machine comprising diffused light sources and two-dimensional cameras |
WO1997018461A1 (de) * | 1995-11-15 | 1997-05-22 | Thomas Huhn | Vorrichtung, deren verwendung und verfahren zum inspizieren und prüfen von gefässwänden |
WO1998004882A1 (en) * | 1996-07-12 | 1998-02-05 | Linker Frank V Jr | Split optics arrangement for vision inspection/sorter module |
Non-Patent Citations (1)
Title |
---|
STANKE G ET AL: "High-Precision and Versatile Optical Measurement of Different Sides of IC's in the Confectioning Process using only one Viewpoint", PROCEEDINGS OF THE 24TH ANNUAL CONFERENCE OF THE IEEE INDUSTRIAL ELECTRONICS SOCIETY, AACHEN, GERMANY, 31 AUG.-4 SEPT. 1998, vol. 4, pages 2425 - 2427, XP002113208 * |
Also Published As
Publication number | Publication date |
---|---|
EP1078250A1 (de) | 2001-02-28 |
DE19823358A1 (de) | 1999-11-18 |
AU4361999A (en) | 1999-12-06 |
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