WO1996036991A1 - Verfahren zum verbinden eines elektrischen anschlusses eines unverpackten ic-bauelements mit einer leiterbahn auf einem substrat - Google Patents

Verfahren zum verbinden eines elektrischen anschlusses eines unverpackten ic-bauelements mit einer leiterbahn auf einem substrat Download PDF

Info

Publication number
WO1996036991A1
WO1996036991A1 PCT/DE1996/000432 DE9600432W WO9636991A1 WO 1996036991 A1 WO1996036991 A1 WO 1996036991A1 DE 9600432 W DE9600432 W DE 9600432W WO 9636991 A1 WO9636991 A1 WO 9636991A1
Authority
WO
WIPO (PCT)
Prior art keywords
component
substrate
contacted
conductor track
unpacked
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE1996/000432
Other languages
German (de)
English (en)
French (fr)
Inventor
Werner Grünwald
Ralf Haug
Martin Seyffert
Frank-Dieter Hauschild
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to EP96905709A priority Critical patent/EP0771472B1/de
Priority to DE59605642T priority patent/DE59605642D1/de
Priority to US08/727,541 priority patent/US5784779A/en
Priority to KR1019970700304A priority patent/KR970705171A/ko
Priority to JP8534436A priority patent/JPH10503331A/ja
Publication of WO1996036991A1 publication Critical patent/WO1996036991A1/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/072Connecting or disconnecting of bump connectors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/072Connecting or disconnecting of bump connectors
    • H10W72/07231Techniques
    • H10W72/07236Soldering or alloying
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S29/00Metal working
    • Y10S29/012Method or apparatus with electroplating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49133Assembling to base an electrical component, e.g., capacitor, etc. with component orienting
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49144Assembling to base an electrical component, e.g., capacitor, etc. by metal fusion

Definitions

  • the invention relates to a method for connecting an electrical connection of an unpackaged IC component to a conductor track on a substrate in accordance with the preamble of claim 1.
  • WO 94/05139 describes a method for producing finely structured electrically conductive layers on a substrate, in which In order to improve the structure fineness and edge sharpness, a thin activation layer (nucleation) with the desired layer structure is applied, and then a thicker conductive layer of electrically conductive metal, for example copper (Cu) or nickel (Ni), is attached to the nucleation. The deposition takes place by the deposition from a galvanic bath or without current from a reduction bath.
  • Cu copper
  • Ni nickel
  • connection techniques for mounting an IC component on a substrate conductor tracks have been applied to the side of the substrate facing away from the IC component and provided with contact areas.
  • For connecting the IC component to the contact surfaces of the conductor tracks there are through holes in the substrate and the conductor tracks, on which the IC components are positioned with their connection surfaces. Thus, each connection surface covers the associated hole.
  • the contact and connection areas are then chemically reinforced with a metal until the metal layers in the through-hole grow together and the electrical connection is established.
  • a disadvantage of this connection technology is that only thin substrates can be used with moderate temperature loads. The production of the holes in the
  • Substrate material is mechanically complex and expensive. Often only certain substrate materials can be used.
  • the inventive method with the features of the main claim has the advantage that holes in the narrow arrangement of the IC connections in the substrate are omitted.
  • the thickness of the substrate material that can be used is therefore not limited. Unilaterally structured substrates are possible. Thin substrates or film substrates do not suffer any weakening of the substrate workpiece.
  • the method allows the use of all inaccurate integrated circuits (ICs), while other flip-chip techniques are mostly restricted to specially pretreated (bumped) ICs.
  • Very short conductive connections with good thermal conductivity and improved high-frequency properties of substrates connected according to the invention with the associated components can be carried out. Damage to sensitive components due to heating during soldering is eliminated and plastic parts can get closer be arranged lying on the substrate.
  • the process can be automated. By reducing the distance between adjacent connections of the IC component compared to packaged components, substrate material and material for the conductor track and the insulating layers can be saved with a comparable scope of use of the circuit.
  • the contact surfaces of the conductor landing surfaces to be connected have to be pretreated in order to direct the reaction and crystallization preferentially to the parts to be connected and to avoid undesired competitive reactions.
  • the application of large passivating layers improves the subsequent electrical insulation of the product
  • FIG. 1c shows the positioning of the IC component on the substrate
  • FIG. 1d shows an IC component on the substrate.
  • connection 10 of an unpacked IC component 15 is drawn in FIG.
  • the surface of the connection 10 to be contacted has a layer 20 that can be readily metallized.
  • the surface of the connections 10 is surrounded by a passivating layer 25.
  • FIG. 1b shows a substrate 30 with a conductor track 35 partially covering the surface, to which a spacer 40 is applied such that a free, electrically contactable surface remains as a landing surface 45 on the conductor track 35.
  • FIG. 1 c shows an IC component according to FIG. 1 a on a substrate according to FIG. 1 b, the surfaces 20, 45 to be contacted facing one another.
  • Positioning is achieved when substrate 30 and IC component 15 are placed on top of one another in accordance with the arrows in FIGS. 1 a and 1 b in such a way that the surfaces of the metallizable layer 20 and the landing surface 45 face each other without contact.
  • FIG. 1d shows the connection of an IC component 15 to a substrate 30.
  • the electrically conductive material 50 fills the free volume between landing surface 45 and layer 20 that can be metallized. example 1
  • a paste containing palladium seeds is applied to the surface of an electrical connection 10 to be contacted using thick-film technology as a metallizable layer 20.
  • the copper conductor track 35 is covered with an insulating layer, for example an epoxy resin layer, as a spacer 40, the thickness of which is precisely adjusted on the conductor track 35. It is positioned, as drawn in FIG.
  • a conductive substance 50 by simultaneous chemical deposition of nickel on the metallizable layer 20 containing palladium seeds and the copper landing surface 45, according to a method described in WO 94/05139 .
  • the deposition takes place until the opposite nickel deposits grow together and an electrical connection of the connection 10 to the conductor track 35 is created.
  • the end of the growing together is checked, for example, by assessing the drop shape or measuring the resistance of the connection.
  • another electrical component can also be used.
  • Example 3 A plurality of connections 10 of the IC component 15 are connected to conductor tracks 35 at the same time, otherwise the procedure is as in Example 1.
  • Example 3 A plurality of connections 10 of the IC component 15 are connected to conductor tracks 35 at the same time, otherwise the procedure is as in Example 1.
  • the substrate 30 is coated only on one side, the uncoated side, in the case of a sufficiently thick substrate, forming the outer housing wall of a device, on the inner wall of which the IC component 15 is attached, otherwise production is carried out as in Example 1.
  • the paste for germinating the metallizable layer 20 is applied with very small connection grids using the pad printing process.
  • Precious metals such as Pt, Rh, Pd, Ru, Rh, Au, Ag, Ir, Os, Re or precious metal alloys can be used for seeding, otherwise the procedure is as in Example 1.
  • electrical connection 10 AI, Cu, Ni, Ag, Au, Ag / Au-20 or alloy, graphite, Pd conductor 35 conductive plastic Ag / Pd, Sn, Pt, Rh, Ru, Ir, Os, Re
  • Spacer 40 PVC, polyurethane, epoxy resin, insulating varnish, polyimide, acrylic resin, acrylic epoxy systems
  • Substrate 30 aluminum oxide ceramic, epoxy, ceramic, polyamide, aramid, porcelain, Si, Pertinax, polyester, polyimide, circuit board material, ALN ceramic

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)
PCT/DE1996/000432 1995-05-20 1996-03-12 Verfahren zum verbinden eines elektrischen anschlusses eines unverpackten ic-bauelements mit einer leiterbahn auf einem substrat Ceased WO1996036991A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP96905709A EP0771472B1 (de) 1995-05-20 1996-03-12 Verfahren zum verbinden eines elektrischen anschlusses eines unverpackten ic-bauelements mit einer leiterbahn auf einem substrat
DE59605642T DE59605642D1 (de) 1995-05-20 1996-03-12 Verfahren zum verbinden eines elektrischen anschlusses eines unverpackten ic-bauelements mit einer leiterbahn auf einem substrat
US08/727,541 US5784779A (en) 1995-05-20 1996-03-12 Method for joining an electrical connection of a non-packaged IC component with a conductive strip on a substrate
KR1019970700304A KR970705171A (ko) 1995-05-20 1996-03-12 집적회로의 구성 소자의 전기접속부의 접속방법(Method for electrical connection of ic's components)
JP8534436A JPH10503331A (ja) 1995-05-20 1996-03-12 基板上に導体路を有する包装されていないic構成素子の電気接続部を接続させる方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19518659.1 1995-05-20
DE19518659A DE19518659A1 (de) 1995-05-20 1995-05-20 Verfahren zum Verbinden eines elektrischen Anschlußes eines unverpackten IC-Bauelements mit einer Leiterbahn auf einem Substrat

Publications (1)

Publication Number Publication Date
WO1996036991A1 true WO1996036991A1 (de) 1996-11-21

Family

ID=7762506

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1996/000432 Ceased WO1996036991A1 (de) 1995-05-20 1996-03-12 Verfahren zum verbinden eines elektrischen anschlusses eines unverpackten ic-bauelements mit einer leiterbahn auf einem substrat

Country Status (8)

Country Link
US (1) US5784779A (https=)
EP (1) EP0771472B1 (https=)
JP (1) JPH10503331A (https=)
KR (1) KR970705171A (https=)
DE (2) DE19518659A1 (https=)
ES (1) ES2149454T3 (https=)
TW (1) TW297937B (https=)
WO (1) WO1996036991A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU4688699A (en) * 1998-06-22 2000-01-10 Loctite Corporation Thermosetting resin compositions useful as underfill sealants
US20020104576A1 (en) * 2000-08-30 2002-08-08 Howland Charles A. Multi-layer and laminate fabric systems
US7626262B2 (en) * 2006-06-14 2009-12-01 Infineon Technologies Ag Electrically conductive connection, electronic component and method for their production

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3811186A (en) * 1972-12-11 1974-05-21 Ibm Method of aligning and attaching circuit devices on a substrate
DE4008624A1 (de) * 1989-04-05 1990-10-11 Bosch Gmbh Robert Verfahren zur herstellung einer hybriden halbleiterstruktur und nach dem verfahren hergestellte halbleiterstruktur
US5056215A (en) * 1990-12-10 1991-10-15 Delco Electronics Corporation Method of providing standoff pillars
EP0463297A1 (de) * 1990-06-23 1992-01-02 ANT Nachrichtentechnik GmbH Anordnung aus Substrat und Bauelement und Verfahren zur Herstellung
EP0475022A1 (en) * 1990-09-13 1992-03-18 International Business Machines Corporation Direct attachment of semiconductor chips to a substrate with a thermoplastic interposer
EP0493131A1 (en) * 1990-12-26 1992-07-01 Nec Corporation Method of connecting an integrated circuit chip to a substrate having wiring pattern formed thereon

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5586130A (en) * 1978-12-25 1980-06-28 Hitachi Ltd Connection of semiconductor element
US4642889A (en) * 1985-04-29 1987-02-17 Amp Incorporated Compliant interconnection and method therefor
DE3843984A1 (de) * 1988-12-27 1990-07-05 Asea Brown Boveri Verfahren zum loeten eines drahtlosen bauelementes sowie leiterplatte mit angeloetetem, drahtlosem bauelement
JP2709499B2 (ja) * 1989-02-25 1998-02-04 新日本製鐵株式会社 半導体素子接続構造
JP2657429B2 (ja) * 1990-04-09 1997-09-24 株式会社ミクロ技術研究所 基板の回路実装方法及びその方法に使用する回路基板
JP2756184B2 (ja) * 1990-11-27 1998-05-25 株式会社日立製作所 電子部品の表面実装構造
JPH04320089A (ja) * 1991-04-18 1992-11-10 Cmk Corp プリント配線板の製造方法
US5203075A (en) * 1991-08-12 1993-04-20 Inernational Business Machines Method of bonding flexible circuit to cicuitized substrate to provide electrical connection therebetween using different solders
US5245750A (en) * 1992-02-28 1993-09-21 Hughes Aircraft Company Method of connecting a spaced ic chip to a conductor and the article thereby obtained
DE4227085A1 (de) * 1992-08-17 1994-02-24 Bosch Gmbh Robert Verfahren zur Herstellung fein strukturierter elektrisch leitfähiger Schichten
US5386624A (en) * 1993-07-06 1995-02-07 Motorola, Inc. Method for underencapsulating components on circuit supporting substrates

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3811186A (en) * 1972-12-11 1974-05-21 Ibm Method of aligning and attaching circuit devices on a substrate
DE4008624A1 (de) * 1989-04-05 1990-10-11 Bosch Gmbh Robert Verfahren zur herstellung einer hybriden halbleiterstruktur und nach dem verfahren hergestellte halbleiterstruktur
EP0463297A1 (de) * 1990-06-23 1992-01-02 ANT Nachrichtentechnik GmbH Anordnung aus Substrat und Bauelement und Verfahren zur Herstellung
EP0475022A1 (en) * 1990-09-13 1992-03-18 International Business Machines Corporation Direct attachment of semiconductor chips to a substrate with a thermoplastic interposer
US5056215A (en) * 1990-12-10 1991-10-15 Delco Electronics Corporation Method of providing standoff pillars
EP0493131A1 (en) * 1990-12-26 1992-07-01 Nec Corporation Method of connecting an integrated circuit chip to a substrate having wiring pattern formed thereon

Also Published As

Publication number Publication date
DE19518659A1 (de) 1996-11-21
EP0771472A1 (de) 1997-05-07
JPH10503331A (ja) 1998-03-24
KR970705171A (ko) 1997-09-06
US5784779A (en) 1998-07-28
TW297937B (https=) 1997-02-11
EP0771472B1 (de) 2000-07-26
ES2149454T3 (es) 2000-11-01
DE59605642D1 (de) 2000-08-31

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