WO1996024869A1 - Verbindungsaufspalter aus streifen-wellenleitern und verwendungen - Google Patents
Verbindungsaufspalter aus streifen-wellenleitern und verwendungen Download PDFInfo
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- WO1996024869A1 WO1996024869A1 PCT/EP1996/000493 EP9600493W WO9624869A1 WO 1996024869 A1 WO1996024869 A1 WO 1996024869A1 EP 9600493 W EP9600493 W EP 9600493W WO 9624869 A1 WO9624869 A1 WO 9624869A1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/31—Digital deflection, i.e. optical switching
- G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12164—Multiplexing; Demultiplexing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/1218—Diffusion
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
- G02B2006/2865—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers couplers of the 3x3 type
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/31—Digital deflection, i.e. optical switching
- G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
- G02F1/3132—Digital deflection, i.e. optical switching in an optical waveguide structure of directional coupler type
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/31—Digital deflection, i.e. optical switching
- G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
- G02F1/3137—Digital deflection, i.e. optical switching in an optical waveguide structure with intersecting or branching waveguides, e.g. X-switches and Y-junctions
Definitions
- the invention relates to a connection splitter which is used for the spatial merging or splitting of light of different wavelengths or different wavelength ranges from a comparatively large wavelength spectrum. If required, this broadband connection splitter is used for switching, deflecting or for modulating light. The invention further relates to uses of this broadband connection splitter
- the single-mode strip waveguides used for the broadband connection splitter are single-mode integrated-optical broadband strip waveguides or white light strip waveguides, which are described in the patent application filed on the same day “Strip waveguides and uses”.
- the invention is furthermore in Relation to the same day patent application "Color Imaging Systems and Uses"
- light means visible and invisible (infrared and ultraviolet) electromagnetic radiation, but in particular discrete wavelengths or wavelength ranges of visible radiation in the wavelength spectra from 400 nm to 760 nm.
- Stripe waveguides are waveguides that are based on the principle of total reflection of light, caused by an increase in the refractive index in the waveguiding area, based on the surrounding medium 3 State of the art
- Connection splitters for a bandwidth of less than 95 nm (information applies to short-wave visible light) are known.
- Discrete strip waveguides are combined for the purpose of combining light by the principle of two-mode interference known per se
- an integrated optical switching or distribution element such as an X-coupler, directional coupler, parallel strip coupler or BOA
- BOA is a French-language term (bifurcation optique active) for a group of integrated optical components (see M Papuchon, A Roy, DB Ostrowsky, "Elect ⁇ cally active optical bifurcation BOA", Appl Phys Lett, Vol 31 (1977) pp 266-267)
- connection splitting - with simultaneous demand for efficient modulability and / or switchability of the light - is dependent on the single-mode of the strip waveguide, which form the inputs and outputs of the connection splitter, single-mode is in known strip waveguides for wavelength ranges with a bandwidth large about 130 nm (information applies to short-wave visible light) not given
- connection splitting based on known strip waveguides, for example the titanium-diffused strip waveguide in L ⁇ Nb ⁇ 3, the usable wavelength range is reduced by about 35 nm compared to that of the associated single-mode strip waveguide, since in connection splitters based on two-mode interference, such as Y-splitters, directional couplers, parallel-strip couplers, X-couplers or BOA, the oscillation of the second mode in the lateral direction in the connection or splitting area must be avoided. This is the prerequisite for a constant division ratio of the light output during splitter operation in the entire
- the use of one and the same single-mode strip waveguide is necessary, which technically, effectively transmits all wavelengths with a bandwidth greater than about 130 nm (information applies to short-wave visible light)
- Technically sufficient effectiveness means that the effective refractive index N e ⁇ j of the mode guided in the strip waveguide must be at least 5x10 " ⁇ above the refractive index of the surrounding material n s .
- an interferometric tunable optical filter is known.
- the optical filter splits an input signal into several waveguide branches.
- the amplitude and the phase of the signal are individually controlled in each branch.
- the signals are then recombined in a waveguide
- the filter element serves as a demultiplexer for wavelength division multiplexing in communications technology for wavelengths between 800 nm and 1.6 ⁇ m with a comparatively small bandwidth
- the present invention has for its object to spatially merge or split light radiation of a wide wavelength spectrum or a plurality of discrete wavelengths with a large wavelength distance and, if necessary, to modulate, deflect and / or switch the radiation s light before it is merged or when merging or after merging contain several wavelengths or wavelength ranges, in particular all wavelengths or specific wavelength ranges of a bandwidth ⁇ > 95 from the spectrum of visible light.
- broadband connection splitters broadband strip waveguides are also necessary which have an emmodem controllable wavelength range of at least 130 nm (information applies to short-wave visible light)
- connection splitter made of strip waveguides with the features of main claim 1.
- Subclaims 2 to 6 characterize geometric and optical configurations of the connection splitter according to the features of main claim 1.
- Subclaims 7 to 20 are advantageous configurations of main claim 1.
- the broadband connection splitter is used according to the invention according to the features of claims 21, 22, 23, 27 , 34, or 35.
- Subclaims 24 to 26 are configurations of main claim 23.
- Subclaims 28 to 33 are configurations of main claim 27.
- Subclaim 36 is a configuration of main claim 35.
- At least two single-mode integrated optical strip waveguides which do not necessarily have to be broadband, but should advantageously be, are brought together in such a way that a subsequent single-mode integrated broadband optical waveguide - hereinafter referred to as EOBSW - spatially merges Light passes on.
- the EOBSW is structured according to the patent application filed on the same day "Strip Waveguides and Uses".
- This EOBSW is able to transmit light broadband and single mode.
- Broadband means that radiation of different wavelengths, in particular of visible light, with a bandwidth
- One mode means that for any given wavelength, one and only one effective refractive index, namely the effective refractive index NQQ of the basic mode in the EOBSW. is assignable (Figure 9).
- An effective refractive index ie the effective refractive index of the basic mode NQO ', can be assigned to any given wavelength in the range between ⁇ a and ⁇ a + ⁇ w .
- the range of the single mode is characterized, on the one hand, by the technically efficient oscillation of the basic mode NQQ at the wavelength ⁇ a + ⁇ w and, technically, by the efficient oscillation of the first mode i lateral direction NQ -
- Wavelength ⁇ a determined on the other hand.
- the values of ⁇ a and ⁇ a + ⁇ w are determined by the geometrical-material parameters of the strip waveguide itself and of the media surrounding the strip waveguide. In principle, the minimum
- Wavelength ⁇ max determined by the optical transmission range of the materials used.
- the minimum value of the transmission range is about 350 nm and the maximum value is about 4 ⁇ m.
- the waveguide attenuation and the efficiency of the optical coupling between the EOBSW and an emmode optical fiber should not change by more than 30% in the entire single-mode wavelength range, since light with the aid of emmode optical fibers is generally used in the EOBSW Coupling is not possible with conventional stripe waveguides e.g.
- red and blue light can be guided in one and the same stripe waveguide with one single mode and with sufficient technical effectiveness
- the refractive index profile of the EOBSW, cross-sectional shape (for example width and depth) and position of the EOBSW in or on the substrate are dimensioned in such a way that single-mode operation of the EOBSW is ensured in a large wavelength range, especially in the entire range of visible light (see general dimensioning requirements) for integrated optical strip waveguides in W Karthe, R Muller, Integrated Optik, Akademische Verlagsgesellschaft Geest & Portig K -G, Leipzig, 1991)
- the novel EOBSW are by specifically adapted method - ⁇ their preparation and by their specific properties characterized Physical requirements of the Substratmate ⁇ al consist narrowly limited in the Feasible e • lateral stripe waveguide structures (for example, by utilizing em - diffusion anisotropy in ion exchange), and / or a wavelength dependent * " • (dispersion) of the refractive index increase necessary for the waveguide (and related to the material surrounding the EOBSW) - n s according to ⁇ e formula
- the EOBSW is manufactured using one of the following processes:
- KTiOP ⁇ 4 KTP
- LiNbOß LiNbOß
- LiTaÜß LiNbOß
- EOBSW in II-VI or III-V semiconductor materials produced by epitaxial deposition processes on suitable substrates, such as S1O2,
- EOBSW in and on a suitable substrate material, preferably Si, by combining Si, S1O2 and SiON and / or other oxidic and / or nitride layers,
- optical strip waveguides in particular ion exchange or ion diffusion in dielectric crystals or ion exchange in glass, can advantageously be combined with the method of ion implantation in order to obtain narrowly limited structures.
- At least three strip waveguides, of which at least one EOBSW, are brought together in such a way that a bringing together, splitting, switching, deflection or modulation of light is possible.
- This can be done using integrated optical components based on two-mode interference such as Y-splitters, X-couplers, directional couplers, parallel-strip couplers or BOA (in: W. Karthe, R Müller. Integnerte Optik, Akademische Verlagsgesellschaft Geest & Portig K -G. , Stuttgart, 1991).
- integrated optical or micro-optical reflectors can be used to split the connections.
- the at least one EOBSW of the broadband splitter must be designed so that light corresponds to a wide wavelength range
- ⁇ and ⁇ in nm are performed in one mode, in particular light of discrete wavelengths or discrete narrow wavelength ranges from the entire visible spectrum.
- the broadband connection splitter is dimensioned by its geometric and optical parameters so that an efficient function over a wide wavelength range accordingly
- broadband connection splitters it is preferably possible to split the light of the entire visible wavelength range efficiently, especially blue and red light at the same time.
- a bandwidth which can be split up and which corresponds to the entire visible wavelength range of light there is a real white light splitter.
- a second criterion with regard to the determination of the broadband bandwidth compared to the EOBSW occurs, which limits the usable bandwidth.
- the oscillation of the second lateral mode NQ2 in the broadened coupling area must be prevented.
- of the connection splitter is consequently determined by the smaller value of the difference in the wavelengths of the oscillation of the basic mode NQQ in the strip waveguide and the first lateral or depth mode (NQI or N ⁇ Q).
- the broadband connection splitter according to the invention is advantageously used to combine light from a wide spectral range, in particular the total visible spectral range of light, in a common EOBSW.
- all the strip waveguides of the Breitb connection splitter are EOBSW
- the coupling point controllable unit is designed for beam combination and / or beam deflection.
- the broadband connection splitter contains a modulation device for converting a suitable, generally electrical input signal into an optical amplitude or intensity signal, which has a separate active one Control of the light of two or more light sources or wavelengths up to very high control frequencies (according to the current state of the art up to the GHz range)
- the amplitude or intensity modulation of the light is carried out according to one of the following principles
- thermo-optical modulation of the light with the help of an integrated optical interferometer structure
- controllable polarization rotation in connection with a polarizing component or polarizing waveguide
- a spatial merging and / or splitting and / or deflection of light components and / or beam deflection takes place in the passive case and, in the active case, there is additionally modulation or switching of the light components
- the broadband connection splitter can advantageously be operated in such a way that light from light sources of different wavelengths is coupled successively into the respective strip waveguide or EOBSW, the light components are spatially combined in the coupling point and the temporally successive light components are modulated in the common EOBSW (time-division multiplex operation)
- EOBSW time-division multiplex operation
- the invention relates to the use of the broadband splitter in arrangements which require simultaneous guidance of light of several wavelengths within a usable wavelength range of a few 100 nm in an EOBSW and in which a control possibility of the light amplitude or the intensity is required for the purpose of Color mixing, the measuring technology, the Senso ⁇ k, the photomet ⁇ e and the spectroscopy, eg using interferometric methods, whereby the basis for a new multifunctional microsystem component family is given
- EOBSW in connection with the modulation mechanisms lays the foundation for new integrated optical detection and spectroscopy methods, which work eg interferometrically, and creates the possibility of the simultaneous or sequential use of several wavelengths from a wide wavelength range in an EOBSW, the application is not limited to the visible range of electromagnetic radiation.
- the advantages of the invention consist in the possibility of producing devices and, for example, electro-optical modules that can be manufactured using mass production processes and that can be miniaturized in their dimensions. With the help of the invention, light sources, connection splitting and / or to integrate connection, control and detection monolithically or hybrid on a carrier
- the integrated optical implementation of the measuring arrangements favors a miniaturized structure in analytical measuring devices, in addition, the smallest sample quantities are sufficient for analysis These smallest sample quantities can be used with high measuring accuracy since the measuring window only has to be a little wider than the EOBSW and the length of the measuring window can be in the millimeter range
- FIGS. 1 to 4 show basic arrangements of the broadband connection splitter.
- FIG. 5 shows the structure and the refractive index curve in a Ti LiNbOß strip waveguide.
- Figure 7 Representation of the structure and the refractive index curve in one
- FIG. 12 broadband connection splitter with Mach-Zehnder
- Interferometer modulators Figure 13 broadband connection splitter from parallel strip couplers with controllable light sources
- Figure 18 broadband connection splitter with controllable units for
- FIG. 30 broadband connection splitter with frequency converters for the spatial convergence of light components.
- FIG. 31 broadband connection splitter for generating light components of different wavelengths from light of one wavelength.
- FIG. 32 broadband connection splitter for generating light components of different wavelengths from light of a wavelength with spatial convergence.
- FIGS. 33 to 35 sensors for measuring long and crushed-tooth landings
- FIGS 1 to 4 show basic embodiments of a broadband
- Strip waveguide in LiNbOß and a conventional connection splitter based on such strip waveguides are illustrated in FIG. 5 and FIG. 6.
- the characteristics of a single-mode integrated optical broadband strip waveguide (EOBSW) according to the invention and a broadband according to the invention are illustrated -Connector splitter with regard to their bandwidths using a Rub ⁇ d ⁇ um ⁇ Kal ⁇ um ion-exchanged strip waveguide in
- Refractive index N e ff 2 of the mode in the strip waveguide based on the value of the
- Refractive index of the substrate n- j chosen as a function of the wavelength ⁇ everyone
- N e f The value of N e f depends on the wavelength, the substrate, superstrate and
- Each mode with the index ik (i, k> 0, integer) is thus represented in the diagrams with its effective refractive index as line Nj
- the strip waveguide is single-mode, if at a given wavelength there is a wavelength range and only one effective refractive index - namely the effective one
- Refractive index NQQ of the basic mode - can be assigned.
- Refractive index of the respective mode is at least 5 x 10 " ⁇ over n
- the bandwidth can thus be read directly.
- FIG. 9 is a generalized representation of the technically, single-mode, efficiently feasible wavelength range in the strip waveguide and the
- FIG. 10 shows the wavelength range of the strip waveguide which can be carried out in one mode and the wavelength range of the efficient splitting of the connection for the case of the EOBSW according to the invention in Rubidiurr ⁇ ⁇ potassium ion-exchanged KT ⁇ OPO4
- LiNbO 3 depending on the wavelength ⁇ itself.
- the area of the EOBSW and broadband connection splitters according to the invention is generally delimited in FIG. 10 in the general form of strip waveguides and connection splitters which correspond to the prior art.
- Figures 1 to 4 first show basic embodiments of a broadband connection splitter.
- FIGS. 1 to 4 show single-mode integrated optical broadband strip waveguides (hereinafter referred to as EOBSW) 2, 3 and 5, which are introduced into a substrate material 1.
- EOBSW 2 and 3 each have an input E-
- the coupling point is designed in the Y-shape. The Y shape is not mandatory.
- Other devices for two-mode interference, such as parallel strip couplers according to FIG. 2, X-couplers according to FIG. 3, directional couplers or BOA can also be implemented. If necessary, the coupling point 6 can be actively influenced.
- the coupling point 6 is designed as a controllable unit for beam combination and / or beam deflection 7.
- all stripe waveguides (EOBSW) 2, 3 and 5 are of the same type and carry light over a large wavelength range, greater than approximately 130 nm (specification applies to short-wave visible light), single-mode, in order to light with a wavelength range greater than approximately 95 nm to be able to split connections efficiently (see FIGS. 3, 5 and 6).
- the property of the coupling-in strip waveguide 2 and 3 to be EOBSW is not mandatory, but is advantageous for an application in any case.
- the first EOBSW 2 is at its input E-
- the second EOBSW 3 is exposed to light of the wavelength ⁇ 2 or the wavelength range ⁇ at its input E.
- spatially combined light is available, which is referred to as a mixed signal M.
- the broadband connection splitter can also be operated in the opposite direction, that is to say in the splitting direction, in order to split a light signal into light portions which can be individually controlled in EOBSW 2 and 3 if necessary.
- the EOBSW is combined by integrated optical reflectors R.
- the EOBSW 2 is deflected into the EOBSW 8 via a 90 ° reflector R.
- second reflector R2 which spatially combines the light components in EOBSW 2 and 3 and / o ⁇ - - (coupling point 6) and forwards them in EOBSW 5.
- 3 * ⁇ reflectors R can be designed as controllable reflectors.
- FIGS. 5 and 6 first explain the conditions using the example of a conventional titanium-diffused strip waveguide in LiNbO 3 .
- FIG. 5 shows a conventional strip waveguide 17 in a substrate material 1.
- a titanium strip 18 is found on the substrate surface! At temperatures above 950 ° C, the titanium diffuses into the LiNb ⁇ 3 crystal, which increases the refractive index in the substrate material.
- the diffusion constant is approximately twice as large as in the depth direction, which is why the concentration distribution of the titanium widens considerably in the crystal.
- the resulting refractive index profile has a shape after the diffusion time t ⁇ j and the initial stripe width w, which is described by the following formulas.
- Titanium-diffused strip waveguides in LiNbO 3 are not able to guide light with a bandwidth of several 100 nm in one mode.
- the waveguide 17 is designed as a geometrically limited trench with the width a and the depth t.
- the diagrams in FIG. 5 show the qualitative course of the refractive index in the x direction and in the y direction. Typical is the continuous transition of the refractive index curve in the x direction (the direction x "is shown ) and in the y direction (the direction y '" is shown ).
- FIG. 6 shows the wavelength range (bandwidth) of efficient connection splitting of a Ti: LiNbO connection splitter and the wavelength range (bandwidth) of single-mode guidance of light in a titanium-diffused strip waveguide in LiNbO by way of example and without restriction of the generality for a reference wavelength of the calculation of 500 nm .
- Z crystallographic Z axis, corresponds to the x axis in FIG. 5) of the basic mode N and the first mode N j i in the lateral direction for the width a of the strip waveguide itself and the second mode NQ2 in the lateral direction for the double width 2a of a strip waveguide, ie corresponding to the increased width of the waveguiding region at the branching point of a Y splitter, BOA or X coupler.
- a w 3.0 ⁇ m wide, 15 nm thick sputtered titanium strip serves as the diffusion source, which widens in the branching region down to 2w (6.0 ⁇ m).
- the diffusion temperature is 1000 ° C, the diffusion time 3 hours.
- the ratio of the diffusion constants of the titanium ions in LiNbO 3 is D x / D y «2.
- is less than zero.
- the strip waveguide described leads in the wavelength range from 490 nm to
- the effective refractive indices were determined using the effective index method (GB Hocker, WK Bums "Mode dispersion in diffused Channel waveguides by the effective index method ". Appl. Optics. Vol. 16 (1977). No. 1, pp. 113-118).
- the substrate material 1 is provided with a mask which leaves a gap free only at the future position of the strip waveguide.
- the ion exchange takes place in a melt of rubidium nitrate with parts of barium nitrate and potassium nitrate. Diffusion occurs almost exclusively in the depth direction, with the refractive index profile described below being formed. In the lateral direction, this results in a step profile of the refractive index.
- the manufacturability of laterally sharply delimited narrow structures is ensured, since the transfer from the mask into the waveguide takes place in a ratio of 1: 1 due to the almost lack of side diffusion.
- the EOBSW 2 is designed as a geometrically sharply defined trench with the width a and the depth t.
- the diagrams in FIG. 7 show the qualitative course of the refractive index in the x direction and in the y direction.
- Typical is the sharp jump in the refractive index curve in the x direction (the direction x "is shown ) and the comparatively strong increase ⁇ e refractive index from n- j to n2 in the y direction (the direction y 'is shown ).
- FIG. 8 shows the wavelength range (bandwidth) of efficient connection splitting of an Rb: KTP splitter as well as the wavelength range (bandwidth) of single-mode guidance of light in a rubidium ⁇ potassium ion-exchanged strip waveguide in KTP as an example and without restriction of generality for a reference wavelength of the calculation of 500 nm.
- FIG. 9 shows a general illustration of the technically relevant, usable wavelength range for the single-mode waveguide in a strip waveguide and for an efficient connection splitting in a connection splitter.
- Refractive index N e ff must be at least 5x10 " ⁇ over n s , where n s denotes the larger value of the substrate index n-
- the stripe waveguide is only one effective refractive index, that is, the effective refractive index NQQ of
- the range of the single-mode of the stripe waveguide is determined by the technically efficient oscillation of the basic mode NQO at the wavelength ⁇ a + ⁇ w and the technically efficient oscillation of the first mode in the lateral direction NQ-J or the first mode in the depth direction N-
- Wavelength ranges of efficient connection splitting of the connection splitter corresponding to the prior art and of the broadband connection splitter according to the invention in each case as a function of the wavelength ⁇ .
- at least that strip waveguide which is intended to transmit a broad wavelength range must be an EOBSW.
- the effective refractive indices used to determine the single-mode transmissible wavelength ranges were calculated using the effective index method.
- the increase in refractive index required for the waveguide and the wavelength dependency (dispersion) of the substrate index, the waveguide depth, then the waveguide width, were first used in the calculation, based on the specific reference wavelength ⁇ a , until the first mode started to oscillate and finally the wavelength varies until the basic mode disappears.
- the upper limit of the single-mode transmissible wavelength range ⁇ w is therefore
- the wavelength ⁇ a + ⁇ w at which the effective refractive index NQQ of the basic mode of the strip waveguide 5 ⁇ 10 "5 lies above the substrate index.
- the single-mode transmissible wavelength range of an EOBSW according to the invention lies in FIG. 10 above the straight line with the equation
- Limit ( ⁇ max ) of the optical transmission range of the waveguide material is limited (see FIG. 9).
- the two inequalities can also be calculated for shorter or longer wavelengths than for ⁇ mjn or ⁇ max of the and
- FIGS. 11 to 17 show first exemplary embodiments of broadband connection splitters.
- light from three light sources of different wavelengths ⁇ - j , ⁇ 2 and ⁇ is coupled into one of three EOBSW 2, 3 and 4, combined at the coupling points 6 and spatially combined in the EOBSW 8 and EOBS 5 , forwarded and made available at output A ⁇ of EOBSW 5 as mixed signal M.
- the light of each light source can be selectively modulated to control the amplitude or the intensity of the light components in the individual EOBSW. In the example, this is done by the signals S ⁇
- , AM2 and AM are arranged on the individual EOBSW 2, 3, and 4.
- the modulated intensities of the individual wavelengths result in a mixed signal M from the spatially superimposed light components, the intensity of which can be adjusted by means of the amplitude modulators of the individual wavelengths.
- the mixed signal M is perceptible as a subjective color impression in the wavelength range of visible light. Due to the possibility of electro-optical modulation up to the GHz range (current state of the art), the arrangement can be used to generate rapidly changing light intensities and by combining light spatially to rapidly change the physiological mixture of colors in the human eye.
- FIG. 12 shows an embodiment of a broadband connection splitter in a KTiOPÜ4 (KTP) substrate 1 with amplitude modulators or intensity modulators, which are designed as Mach-Zehnder interferometer modulators MZI- j , MZI2 and MZI.
- amplitude modulators or intensity modulators which are designed as Mach-Zehnder interferometer modulators MZI- j , MZI2 and MZI.
- the broadband connection splitter has coupling points 6, which are designed here as parallel strip couplers
- FIGS. 14 to 17 represent broadband connection splitters ar, the coupling points 6 or 6 'of which split more than twice or merge more than twice.
- the solutions described in the preceding figures can also be applied to broadband connection splitters whose coupling points have more than 2 inputs or outputs .
- the light is not necessarily split into equal amounts of light in the direction of splitting
- FIG. 14 shows broadband connection splitters in which the input EOBSW in the coupling point 6 ' in the form of a Y splitter is split into three EOBSW 2 ' , 3 ' and 4 ' or in the coupling point 6 in the form of a Y- Connector three EOBSW 2, 3, 4, are merged
- FIG. 15 shows triple wide band splitter, the coupling points of which is constructed with parallel strip couplers, in splitter or connector operation.
- FIG. 16 shows triple broad band splitter, the coupling points of which is constructed with integrated optical reflectors, in principle in splitter or connector operation it is possible to combine or split any number of waveguides in a coupling point 6 ( Figure 17) Limits are set by the technological controllability of the manufacturing processes and the design of the coupling point.
- the splitter operation of the broadband connection splitter the light of the wavelength Q or the wavelength range is set ⁇ divided into each EOBSW There is coherent light in each EOBSW, provided that the incident light is coherent
- the light components of the same or different waves are spatially combined.
- the light components do not influence each other
- FIGS. 18 to 20 show further integrated optical implementation variants of the broadband connection splitter, in which the coupling points 6 are generated by waveguide crossings
- the crossing points behave, as required, as completely passive crossing points or they are coupling points 6 for the spatial combination of light components or they are controllable units for spatial beam combination and / or beam deflection 7, i.e. as elements that switch, modulate or deflect light and can merge spatially, trained.
- the controllable units for spatial beam combination and / or beam deflection 7 operate on the basis of the two-mode interference as an X-coupler, directional coupler or BOA.
- Figure 18 shows the crossing of two EOBSW 2 and 3 with another EOBSW 5 as a 2x1 matrix.
- the intersections (coupling points 6) are constructed as controllable units for spatial beam combination and / or beam deflection 7 ' and 7 " .
- Light of two wavelengths ⁇ ⁇ and ⁇ is coupled into one of the EOBSW 2 and 3 each.
- the active coupling points act as selective light gates, which allow the light in the common EOBSW 5 to pass completely unaffected in the direction of the mixed signal M, but the light components of the wavelengths ⁇ - j and ⁇ 2 in the EOBSW 2 and 3, depending on the applied control signals S-
- Each controllable unit for spatial beam combination and / or beam deflection 7 ' and 7 " is dimensioned such that it acts as a modulator for the respectively selected wavelength ⁇ ⁇ or ⁇ 2 and at the same time deflects the light component and spatially combines it with the other light component.
- the other Wavelength is not or only slightly influenced by the modulator.
- controllable units for spatial beam combination and / or beam deflection 7 ' and 7 " still have mutual influence, the degree of mutual influence is compensated for by active control of the control signals and / or the light sources.
- This arrangement can advantageously be operated in a time-multiplexed manner, so that the problems with the decoupling of the controllable units for spatial beam unification 7 ' and 7 " are eliminated. As a result of the possible very high control frequency, this can be easily achieved.
- a third light component with the wavelength ⁇ 3 can be coupled into an input E 3 of the EOBSW 5.
- This light component can be spatially combined with the light components which are guided in the EOBS and 3
- FIG. 19 shows a further integrated-optical implementation variant of the broadband connection splitter as a 3x1 matrix.
- the EOBSW 2, 3 and 4 cross another EOBSW 5.
- the crossings are passive coupling points 6, the light components in the EOSBW bringing together modulators AM-
- the coupling points 6 act as a light beam combiner and light deflector.
- the spatially combined light is coupled out from the EOBSW 5 as a mixed signal M.
- the EOBSW 2, 3 and 4 have electro-optical modulators AM - j , AM2 and AM 3 arranged, which the light components of the wavelengths ⁇ -
- one of the EOBSW 2, 3, or 4 with the associated modulators and coupling points can alternatively be dispensed with
- FIG. 20 shows a further integrated optical implementation variant of the broadband connection splitter as a 3x4 matrix.
- the intersections are either locations that Lic transmits in the EOBSW completely unaffected (passive intersection) or passive coupling points 6 or controllable units for spatial beam union and / or beam deflection 7
- the EOBSW 2, 3 and 4 cross the four EOBSW 8 ' , 8 " , 8 '" and 5
- the crossing points are shown in the form of a matrix to explain the function.
- actively controllable units for spatial beam union and / or beam deflection 7 are arranged. These units are used to modulate the three light components.
- Passive coupling points 6 which spatially unite and / or deflect light components, are arranged in the column rows 1-4, 2-4 and 3-4.
- the coupling points 6 are not controlled here. They are used for the spatial combination of the light components to form the mixed signal M in the common EOBSW 5.
- the light components that are not required are fed into the blind outputs B of the EOBSW 2, 3, 4, 8 ' , 8 " and 8 “” .
- light components can be coupled and controlled into the inputs E4, E5 and E5 of the EOBSW 8 ' , 8 " and 8 '” .
- These light components can be spatially combined with the light components that are used in EOBSW 2, 3 and 4.
- FIGS. 21 and 22 show arrangements for determining the concentration of a specific substance by means of a photometric measurement.
- the integrated optical implementation of the measuring arrangement with the aid of broadband connection splitters enables a miniaturization of the sample quantity, while at the same time increasing the bandwidth that can be used for the measurement compared to conventional solutions.
- the absorption of a measuring medium 16 located in a separate measuring cell 14 is determined with a photoreceiver 12.
- These measurements in transmission can also be carried out on a solid body (not shown). Reflection measurements are also possible (not shown).
- Light of three different wavelengths is coupled into an EOBSW 2, 3 and 4, spatially combined and then shines through a measuring cuvette 14 in which a measuring liquid 16 is located between the output AM of the common EOBSW 5 and the photoreceiver 12.
- a measuring liquid 16 is located between the output AM of the common EOBSW 5 and the photoreceiver 12.
- REPLACEMENT BLADE (RULE 26)
- the measurement can be carried out according to one of the methods described below: a) The individual light components at the waveguide output A ⁇ are time-multiplexed out. There is a direct measurement (without filter) of the absorption of the respective wavelength.
- filters Fi are advantageously located between the measuring cell 14 and the photoreceiver 12 in order to separate the excitation light and the measuring light. b) There is a simultaneous coupling of all light components into the respective inputs of the EOBSW and a simultaneous coupling of the light components at the output of the EOBSW A
- Amplitude modulation of the light components is advantageous in itself for all measurements, since higher measurement accuracies can generally be achieved with dynamic measurement methods.
- the number of wavelengths used is not necessarily three, but the number can be two or more depending on the intended use.
- the absorbing effect of measuring media 16 (gaseous, solid) on the evanescent field of the guided wave located in the superstrate is measured
- the covered common EOBSW 5 is provided with a defined measuring window r to which the measuring medium 16 is applied.
- , ⁇ 2 and ⁇ 3 are represented by the
- REPLACEMENT SHEET (REGE 26) These field components can therefore be reached and influenced from outside the EOBSW. If there is an absorbing medium on the EOBSW, the evanescent field itself, depending on the absorption, is damped or the surface scatter of the EOBSW is changed by the presence of a medium that is not necessarily absorbent. Both have the consequence that the waveguide attenuation changes, which can be measured with the photoreceiver 12. With the exception of the measurement window 15, the surface of the substrate which comes into contact with the measurement medium is covered with a buffer layer (eg SiÜ2) so that the evanescent field is only accessible in the area of the measurement window. In addition, a precisely defined measuring length is determined (since the total absorption depends on the length of the measuring window).
- a buffer layer eg SiÜ2
- the measurement of, for example, absorption, refractive index or scattering makes it possible to determine the influence of physical, biological and chemical quantities of gases, liquids and solids, which cause a change in the behavior of the guided light or the strip waveguide itself.
- a further implementation variant consists in coating the measuring window 15 with a substance which reacts to physical, chemical or biological external influences and which influences the behavior of the guided light or the EOBSW itself when an external influence occurs.
- the integrated optical implementation of the measuring arrangement favors a miniaturized structure.
- the smallest sample quantities can be used, since the measuring window only has to be a little wider than the waveguide and the length can be in the millimeter range.
- FIG. 23 shows a broadband connection splitter which is operated in a time-multiplexed manner. Signals are applied to inputs E j and E2 mutually constant amplitude and, after the spatial association of the light components corresponding to the plitudenmodulator to the AM A
- the left diagram shows the amplitude profile of the time-multiplexed signal of the wavelengths ⁇ - j and ⁇ 2-
- the middle diagram shows the profile of the signal S for modulating the light components.
- FIGS. 24 to 26 show broadband connection splitters according to the invention, at least one EOBSW 2 and / or 3 having an electrode structure 10 for
- the electrodes 10 have an effective electrode length L of a few millimeters to a few centimeters and an electrode distance d of a few ⁇ m
- Substrate material met, which allows a possibility to influence the phase of an optical mode guided in a strip waveguide
- KT1OPO4 KTP
- the input signal is a discrete wavelength ⁇ or a wavelength range ⁇
- FIG. 24 shows a broadband connection splitter, the EOBSW 2 of which is provided with an electrode 10 for phase modulation
- the effective electrode length in the single waveguide 2 is L here
- FIG. 25 shows a broadband connection splitter, the two EOBSW 2 and 3 of which are each provided with electrodes 10 for phase modulation, which operate in push-pull mode when the inputs E-
- the effective electrode length in each individual waveguide 2 or 3 is U2 when input E-
- the phase position can be controlled with the modulation voltage U. Using EOBSW the function is over ensures a wide wavelength range
- a broadband connection splitter in the splitting direction can be used to provide the interference-capable light required in the coupling point 6 in FIG. 24 or in FIG. 25 (FIG. 26)
- E of an EOBSW 5 ' Light of a wavelength ⁇ or a wavelength range ⁇ is fed to an input E of an EOBSW 5 '.
- the EOBSW 5 ' is split into the EOBSW 2 and 3 in the coupling point 6 '. Each of the EOBSW 2 and 3 then conducts interference-capable light
- FIG. 26 thus represents a Mach-Zehnder interferometer (MZI) modulator from EOBSW.
- MZI Mach-Zehnder interferometer
- FIG. 27 shows the broadband connection splitter from FIG. 26 with the provision of interference-capable light by a broadband connection splitter in the splitting direction.
- An MZI structure is produced from EOBSW, which is used as a wavelength sensor due to its broadband nature.
- Light of the wavelength ⁇ to be determined is input E of the EOBSW 5 ' , to which the integrated optical MZI structure is connected.
- Both branches are provided with phase modulators that work in push-pull (electrodes 10). This results in the possibility of phase modulation of the light components carried in the interferometer arms when one is changed the electrodes 10 applied voltage U changes due to the electro-optical effect, the phase of the light in the interferometer arms and thus the amplitude or intensity of the outcoupled light at the output A.
- the modulated light is detected by a measuring device 9
- the light falls on a photo receiver 12, with the aid of which the guided light output is determined.
- the measuring device consists of a decoupling arrangement 11, which bundles the modulated light onto the photo receiver 12.
- a display device 13 shows the light output which is measured by means of the photo receiver 12
- Z-cut KTP and TM light (ie the surface normal of the substrate, the direction of the electric field vector of the guided linearly polarized light correspond to the stallographic Z axis) is determined by
- the half-wave voltage U ⁇ corresponds to a phase shift of ⁇
- U ⁇ (voltage between a minimum of guided power and an adjacent maximum) or a multiple of U ⁇ can be determined.
- Half-wave voltage determine the wavelength of light - in connection with the use of the broadband connection splitter according to the invention - the photo element must ensure detectability over the entire wavelength range.
- the light source must not emit broadband light, because the line width determines the resolution of the measuring arrangement, i.e. if if the resolution is to be fully utilized, the line width must be in or below the order of magnitude of the resolution.
- integrated optical interferometer structures for example Michelson interferometers, can also be used. The functional principle is analog
- FIG. 28 shows a broadband optical filter which filters out a part from a wavelength range ⁇ ⁇ . This is due to the wavelength selectivity of the Mach-Zehnder interferometer structure used in the example.
- the wavelength range ⁇ ⁇ coupled out at the output contains the remaining part of the wavelength range ⁇ ⁇ If the wavelength range ⁇ ⁇ is white light, the decoupled wavelength range ⁇ corresponds to the complementary color of the filtered light component.
- FIG. 29 shows a miniaturized sensor for the spectral determination of refractive indices, which can be operated over a wide band.
- Light of different wavelengths is spatially combined using a broadband connection splitter and then guided through a Mach-Zehnder interferometer structure.
- the amplitude or intensity modulators AM j are used to select the desired wavelength.
- One arm of the Mach-Zehnder interferometer MZI is provided, analogously to FIG. 22, with a measuring window 15, the length of which determines the amount of the phase shift when the measuring medium is applied; the other branch can be provided with a phase modulator to increase the measuring accuracy and to determine the direction of the refractive index difference between the superstrate without or with measuring medium 16.
- the propagation constant of the guided wave is changed due to the changed refractive index of the superstrate, which causes a phase change that can be determined interferometrically.
- the interferometer converts the phase change into an amplitude signal or intensity signal.
- the differences in refractive index can also be used to infer substances or their concentration.
- the number of inputs is determined by the number of different wavelengths of permanently coupled light sources. When using a light source that can selectively provide light of several wavelengths, only one input is required
- Figures 30 to 32 show arrangements with EOBSW, which are suitable for generating light components of different wavelengths and their spatial combination.
- the blue and green light cannot currently be provided in this form.
- the principle of generating the second harmonic can be used for this purpose, if non-linear optically active materials are used (e.g. KTP). Phase matching must be achieved between the pump wave and the second harmonic.
- the principle of quasi-phase matching (QPM) is used in KTP.
- SPARE BLADE For this purpose, a piece of the waveguide is segmented in order to bring about a ferroelectric domain reversal. In this way, a phase adjustment between pump light wave and harmonic light wave is achieved. Pump light of sufficient power can then generate light of half the wavelength, ie, for example, the laser diode of the wavelength 830 nm becomes light of the wavelength 415 nm. Further higher harmonics can be generated, for example light of the wavelength ⁇ / 4.
- Another variant for frequency conversion is the sum (Sum frequency generation (SFG)) or difference frequency formation. Both variants can be carried out in KTP (e.g. ML Sundheimer, A.
- elements for frequency conversion FU are used in one EOBSW 3 and 4 each.
- the wavelength ⁇ 2 is transformed to the wavelength ⁇ 4, the wavelength ⁇ 3 is transformed to the wavelength ⁇ 5.
- , ⁇ 4 and ⁇ $ are available at the mixed signal output A ⁇ as spatially combined light.
- light of the wavelength ⁇ g reaches broadband connection splitters which are operated in the splitter mode.
- Light components with the wavelength ⁇ 0 reach the EOBSW 2 ' , 3 ' and 4 ' .
- An element for frequency conversion FU is arranged in each of the EOBSW 2 ' , 3 ' and 4 ' .
- One element for frequency conversion FU generates the wavelength ⁇ -
- , ⁇ and ⁇ can be coupled out.
- these light components are spatially combined in the following broadband connection splitter in the connector operation.
- FIGS. 33 to 35 represent integrated optical sensors for measuring changes in length and / or changes in refractive index.
- the sensors are implemented with an integrated optical Michelson interferometer structure, which EOBSW uses as a waveguide.
- Figure 33 uses two individual Y broadband link splitters.
- Figure 34 uses a directional coupler and Figure 35 uses an X-coupler or a BOA.
- the principle of operation of the sensor for measuring changes in length is the same in each of the examples.
- Light of a wavelength ⁇ * is coupled into the input E of the EOBSW 2 ' .
- the coupling point 6 ' (FIG. 33) or in the coupling point 6 (FIGS. 34 and 35)
- the light is divided into two waveguide arms and coupled out at the detector outputs D- j and D 2 .
- This light is directed onto two mirrors by means of the decoupling optics 11.
- a mirror Sp (f) is stationary. Instead of this mirror, a waveguide end surface can also be mirrored or an integrated optical reflector can be arranged in the EOBSW in front of the waveguide output.
- the second mirror Sp (b) is attached to the movable measurement object.
- the light components are transferred to the waveguide outputs D-
- the superimposed light is split up again and can be coupled out at output A and input E.
- the light that can be coupled out from output A is directed onto a photoreceiver 12, in which a photocurrent L ⁇ is generated. If the optical path length in the coupling-out branch between D and Sp (b) is now changed, the phase position between the two reflected and coupled-in light components also changes, and thus also the amplitude and the intensity of the signal applied to the photoreceiver.
- a change in position of ⁇ / 2 of the mirror Sp (b) in the beam direction corresponds to full modulation of the photocurrent l pn .
- REPLACEMENT BLADE (RULE 26)
- a phase modulator in the waveguide branches provided in FIGS. 33 to 35 which is implemented in the example by the electrode arrangement 10 applied to the EOBS, and / or simultaneous coupling in of light of two wavelengths ⁇ ⁇
- a direction detection of the phase change is made possible.
- the resolution can be increased further by using shorter wavelengths. So far, no strip waveguide is known in which light of the wavelength range of blue light or even shorter wavelengths can be guided and modulated in one mode.
- Initial width of the titanium strip during diffusion t, j Diffusion time xyz coordinate system n w Refractive index distribution in the waveguiding area n w f (x, y) n ⁇ Refractive index of the substrate n2 Refractive index of the waveguiding area on the surface n 3 Refractive index of the superstrate n s Refractive index of the Substrates if n-
- Wavelength range in the stripe waveguide corresponds to ⁇ D wavelength at which in the broadened coupling range of
- Connection splitter ⁇ j s j efficiently usable wavelength range of
- Connection splitter ⁇ j bandwidth (spectrum) of light at the waveguide output
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/718,362 US5832155A (en) | 1995-02-07 | 1996-02-06 | Combination splitting device composed of strip waveguides and uses thereof |
EP96904002A EP0754310A1 (de) | 1995-02-07 | 1996-02-06 | Verbindungsaufspalter aus streifen-wellenleitern und verwendungen |
JP8523978A JPH09511847A (ja) | 1995-02-07 | 1996-02-06 | チャネル導波管から成る接合スプリッタおよび用途 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19503930.0 | 1995-02-07 | ||
DE19503930A DE19503930A1 (de) | 1995-02-07 | 1995-02-07 | Verbindungsaufspalter aus Streifen-Wellenleitern und Verwendungen |
Publications (1)
Publication Number | Publication Date |
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WO1996024869A1 true WO1996024869A1 (de) | 1996-08-15 |
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PCT/EP1996/000493 WO1996024869A1 (de) | 1995-02-07 | 1996-02-06 | Verbindungsaufspalter aus streifen-wellenleitern und verwendungen |
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US (1) | US5832155A (de) |
EP (1) | EP0754310A1 (de) |
JP (1) | JPH09511847A (de) |
CN (1) | CN1150479A (de) |
CA (1) | CA2187213A1 (de) |
WO (1) | WO1996024869A1 (de) |
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CN110376821A (zh) * | 2019-07-11 | 2019-10-25 | 军事科学院系统工程研究院网络信息研究所 | 一种基于光学克尔效应的芯片集成全光相位调制方法 |
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TWI806042B (zh) * | 2020-04-29 | 2023-06-21 | 新加坡商光子智能私人有限公司 | 光電處理設備、系統及方法 |
CN111505766B (zh) * | 2020-05-08 | 2021-08-06 | 电子科技大学 | 一种基于硅基集成磁光环行器的光学全双工收发组件 |
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1996
- 1996-02-06 US US08/718,362 patent/US5832155A/en not_active Expired - Fee Related
- 1996-02-06 CA CA002187213A patent/CA2187213A1/en not_active Abandoned
- 1996-02-06 WO PCT/EP1996/000493 patent/WO1996024869A1/de not_active Application Discontinuation
- 1996-02-06 EP EP96904002A patent/EP0754310A1/de not_active Withdrawn
- 1996-02-06 JP JP8523978A patent/JPH09511847A/ja active Pending
- 1996-02-06 CN CN96190243A patent/CN1150479A/zh active Pending
Patent Citations (3)
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US4917451A (en) * | 1988-01-19 | 1990-04-17 | E. I. Dupont De Nemours And Company | Waveguide structure using potassium titanyl phosphate |
US5146533A (en) * | 1991-08-01 | 1992-09-08 | E. I. Du Pont De Nemours And Company | Ion exchanged crystalline waveguides and processes for their preparation |
US5291576A (en) * | 1992-06-18 | 1994-03-01 | Ibiden Co., Ltd. | Single mode optical waveguide |
Non-Patent Citations (1)
Title |
---|
SPIE PROCEEDINGS, Band 2213, 13-14 April 1994, ROTTSCHALK M. et al. "Fabrication and Character- ization of Singlemode Channel Waveguides and Modulators in KTIOPO4 for the Short Visible Wavelength Region", Seiten 152-163, Kap. 1,3,4,6 (in der Beschreibung ge- nannt). * |
Also Published As
Publication number | Publication date |
---|---|
CN1150479A (zh) | 1997-05-21 |
JPH09511847A (ja) | 1997-11-25 |
EP0754310A1 (de) | 1997-01-22 |
US5832155A (en) | 1998-11-03 |
CA2187213A1 (en) | 1996-08-15 |
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