WO1995014209A1 - Instrument pour la mesure de coordonnees - Google Patents

Instrument pour la mesure de coordonnees Download PDF

Info

Publication number
WO1995014209A1
WO1995014209A1 PCT/JP1993/001702 JP9301702W WO9514209A1 WO 1995014209 A1 WO1995014209 A1 WO 1995014209A1 JP 9301702 W JP9301702 W JP 9301702W WO 9514209 A1 WO9514209 A1 WO 9514209A1
Authority
WO
WIPO (PCT)
Prior art keywords
measurement table
air pad
coordinate measuring
guide
measuring machine
Prior art date
Application number
PCT/JP1993/001702
Other languages
English (en)
Japanese (ja)
Inventor
Hiroki Yoshioka
Hiroshi Miyamoto
Original Assignee
Tokyo Seimitsu Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co., Ltd. filed Critical Tokyo Seimitsu Co., Ltd.
Priority to PCT/JP1993/001702 priority Critical patent/WO1995014209A1/fr
Publication of WO1995014209A1 publication Critical patent/WO1995014209A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines

Definitions

  • the present invention relates to a coordinate measuring machine, and more particularly to a coordinate measuring machine that measures a shape of an object by moving a probe in two directions of X and Y axes and three directions of X, Y and ⁇ axes.
  • the coordinate measuring machine measures the shape of the object by moving the probe in the directions of two axes, X and ⁇ , and in the directions of three axes, X, ⁇ and ⁇ .
  • the conventional coordinate measuring machine has a gate-shaped carriage 10, and the carriage 10 has a pair of columns 1 OA and 10 B and their columns. It has an X guide 10 C that connects the top of the column.
  • the Y carriage 10 moves in the Y axis direction along the upper surface of the measurement table 14 and the guide member 12. That is, the guide member 12 is attached to the upper surface (FIG. 5) or the side surface (FIG. 6) of the measurement table 14 via the bolts 16, 16,..., And the bolts 16, 16, 16,. Are screwed into the screw holes 14 A, 14 A ... formed in the measuring table 14.
  • One column 10A of the Y carriage 10 is provided with air pads 18 and 18 facing the side surface of the guide member 12, and further, one column 1A of the Y carriage 10 is provided. 0 A is provided with an air pad 19 facing the upper surface of the measurement table 14. As a result, one column 10A is moved along the upper surface of the measurement table 14 through the air pads 18, 18 and 19 along the Y axis. It can be moved in any direction.
  • the other column 10 B of the Y carriage 10 is provided with an air pad 20, and the other column 10 B is provided along the upper surface of the measurement table 14 via the air pad 20. It becomes movable. As a result, the Y carriage 10 moves along the guide member 12 in the Y axis direction.
  • the measuring table 14 is usually made of stone to prevent thermal expansion, forming the screw holes 14A and 14A on it increases the processing cost.
  • the guide members 1 and 2 are also required, and the cost of the product cannot be reduced.
  • the guide member 12 is mounted via the bolts 16, 16..., there is a problem that the accuracy of the guide member 12 is deteriorated due to loosening of the bolts 16, 16.... .
  • a coordinate measuring machine using the upper surface and both side surfaces of a measuring table as guide surfaces of a Y carriage Japanese Utility Model Application Laid-Open No. 61-123913.
  • legs are respectively connected to the lower portions of a pair of columns of the Y carriage, and each leg is disposed so as to surround one side and the other side of the measurement table.
  • Each leg is connected by a connecting member that crosses below the measurement table.
  • an air pad facing the upper surface of the measurement table is provided at a lower portion of the pair of columns, and an air pad facing one side and the other side of the measurement table is provided on a pair of legs, respectively.
  • the Y carriage moves in the Y-axis direction with the upper surface and both side surfaces of the measurement table as guide surfaces.
  • the guide member 12 is bolted with the bolts 16 as in the example of FIGS. 5 and 6. Since there is no need to attach, loosening bolts 16 Further, deterioration of the accuracy of the guide members 12 can be eliminated.
  • the present invention has been made in view of such circumstances, and a coordinate measuring machine capable of reducing costs, stabilizing accuracy, and maintaining the straightness of the X guide constant.
  • the purpose is to provide. Disclosure of the invention
  • the present invention provides a Y carriage in which the upper parts of a pair of columns erected on both ends of a measurement table are connected by a traversing member along the upper surface of the measurement table.
  • a leg extended to one side surface of the measurement table is provided below the one column, and one of the measurement tables is provided on the leg.
  • a side guide air pad facing the side surface is provided, and an upper surface guide air pad facing the upper surface of the measurement table is provided below each of the one and other columns, and is connected to the legs.
  • the side air pad support member extended to the other side surface of the measurement table across the lower side of the measurement table, and extended to the other side surface of the measurement table.
  • a space is provided between the end and the lower part of the other column, and the side air pad support member extending to the other side of the measurement table has a side guide for the side guide facing the other side of the measurement table.
  • An air pad is provided.
  • the distance between the lower end of the other column and the extended end of the side air pad supporting member is connected by an elastic connecting member which is deformable in the X axis direction. It is characterized by the following.
  • the present invention provides one of an air pad for a side guide provided on the side air pad support member and an air pad for a side guide provided on the leg. Is urged to the side surface of the measurement table by an urging means.
  • a leg is provided at a lower portion of one column of the Y carriage, and the leg is provided with a side guide air pad facing one side of the measurement table. Further, a side guide air pad facing the other side surface of the measurement table is provided at an extended end of the side air pad support member connected to the leg. In addition, an air pad for upper surface guide facing the upper surface of the measurement table is provided at the lower part of the pair of columns.
  • a space is provided between the extension end of the side air pad support member extending to the other side of the measurement table and the lower part of the other column so that the extension end is not connected to the lower part of the other column.
  • the gap between the lower portion of the other column and the extended end of the side air pad support member is linked by an elastic connecting member that can be deformed only in the X-axis direction.
  • one of the side guide air pad provided on the side air pad support member and the side guide air pad provided on the leg portion is measured by the urging means.
  • the bias is applied to the side of the table.
  • the gap between the air pad and the measurement table can be kept constant, and the reaction force of the side guide air pad against the measurement table can be kept constant.
  • FIG. 1 is a cross-sectional view of a coordinate measuring machine according to the present invention
  • FIG. 2 is a view taken in the direction of arrows AA in FIG. 1
  • FIG. FIG. 4 is an enlarged view of a main part of the coordinate measuring machine according to the present invention
  • FIGS. 5 and 6 are explanatory views of a conventional coordinate measuring machine.
  • FIG. 1 shows an enlarged view of a main part of a coordinate measuring machine 50 according to the present invention
  • FIG. 2 shows a view taken in the direction of arrows AA.
  • the coordinate measuring machine 50 includes a Y carriage 52, legs 54, side air pad support members 55, and the like.
  • the Y carriage 52 has a right Y column 52 A and a left Y column 52 B, and an upper part of the Y columns 52 A and 52 B is an X guide 52. It is connected in 2C to form a portal.
  • Leg 54 is the lower end of Y column 52 A on the right A bolt 56 A is screwed into the upper end of the leg 54.
  • a ball 58 is fixed to the tip of the bolt 56A.
  • the ball 58A is rotatably fitted into the groove 60A, and the groove 60A is formed on the back surface of the upper guide air pad 60.
  • the moving surface 60 B of the upper surface guide air pad 60 is movably supported along the upper surface on the right side of the measurement table 64.
  • the upper surface on the right side of the measurement table 64 is used as a guide surface of the upper surface guide air pad 60.
  • a bolt 56B is screwed into a substantially central portion of the leg portion 54, and a ball 58B is fixed to the tip of the bolt 56B in the same manner as the bolt 56A.
  • the ball 58B is rotatably fitted in a groove 66 formed on the back of the reference air pad (air pad for side guide) 66, and the moving surface 6 of the reference air pad 66.
  • Reference numeral 6B is movably supported along the right side of the measurement table 64. As a result, the right side surface of the measurement table 64 is used as a guide surface of the reference air pad 66.
  • the side air pad support member 55 is formed in a generally L-shape as a whole at the transverse portion 55A and the vertical portion 55B, and the right end of the transverse portion 55A is a lower end of the leg 54. It is fixed to.
  • the traversing portion 55A extends so as to cross along the bottom surface of the measurement table 64, and a vertical portion 55B is formed upright at the left end of the traversing portion 55A.
  • the vertical portion 55B is disposed along the left side of the measurement table '64.
  • a shaft 68 is supported on the vertical portion 55B so as to be movable in the left-right direction (axial direction), and a flange 68A is provided at the tip of the shaft 68. Is formed.
  • a spring member (biasing means) 69 such as a disc spring or a coil spring is disposed on the shaft 68 between the vertical portion 55B and the flange 68A, and the spring member 69 is a flange. 6 8 A is urged to the right. Ball 5 8 D for flange 6 8 A The ball 58D is rotatably fitted into a groove 7OA formed on the back surface of the reaction force air pad 70 (side guide air pad).
  • the moving surface 70B of the reaction force air pad 70 is movably supported along the left side surface of the measuring table 64.
  • the left side surface of the measurement table 64 is used as a guide surface of the reaction force air pad 70.
  • the reaction force air pad 70 is provided on the left side of the measurement table 64, a reaction force is applied to the reference air pad 66 provided on the right side of the measurement table 64.
  • the reaction force air pad 70 was urged toward the left side of the measurement table 64 by the spring member 69, the spring member 69 was thermally expanded and contracted between the traversing portion 55A and the like and the measurement table 64. Absorb the differences. Therefore, the reaction force applied to the reference air pad 66 can be kept substantially constant. In this case, the spring constant of the spring member 69 is set smaller than the spring constant of the reference air pad 66.
  • a bolt 56 C is screwed into the lower end of the left Y column 52 B, and a ball 58 C is fixed to the tip of the bolt 56 C in the same manner as the bolt 56 A.
  • the ball 58C is rotatably fitted into a groove 74A formed on the back surface of the upper guide air pad 74, and the moving surface 74B of the upper guide air pad 74 is It is movably supported along the upper surface of the left end of the measurement table 64.
  • the upper surface of the left end of the measurement table 64 is used as a guide surface of the upper surface guide air pad 74.
  • a leaf spring (elastic connecting member) 76 is attached to the lower end of the left Y column 52B, and the lower end of the leaf spring 76 is connected to the upper end of the vertical portion 55B. I have. Therefore, the vertical portion 55B is held by the left Y column 52B via the leaf spring 76. This allows for side air Since the displacement in the X-axis direction of the transverse section 55 A of the pad support member 55 is absorbed by the leaf spring 76, the displacement in the X-axis direction of the transverse section 55 A affects the left Y column 52B. Do not give.
  • the displacement of the traversing portion 55A is absorbed by the leaf spring 76, and the left Y column 52B is displaced by the displacement of the traversing portion 55A. Since no reaction force is generated, the deformation of the X guide 52 is prevented. As a result, the straightness of the X guide 52 is maintained constant, and the measurement accuracy in the X direction can be maintained constant. Furthermore, since the lower end of the left Y-column 52B and the upper end of the vertical part 55B are connected by a leaf spring 76 which is deformable only in the X-axis direction, the rigidity in the Y-direction can be increased.
  • a reading head 78 is provided on the leg 54, and the reading head 78 reads the Y-axis scale 80. This allows the Y carriage 52 to move in the Y-axis direction. Is detected.
  • the Y-axis scale 80 is provided on the measurement table 64 so as to face the reading head 78.
  • the measuring table 64 is mounted on the gantry 84 via bolts 82, 82,... With a space through which the arm member 54B passes.
  • the bolts 56 A, 56 B and 56 C adjust the bolts 56 A, 56 B and 56 C to position the air pads 60, 66 and 74 at the appropriate positions. That is, the distance between the moving surfaces 60 B, 66 B, 74 B of the air pads 60, 66, 74 and the opposing surface of the measurement table 64 is properly set.
  • the reaction force air pad 70 is provided on the left side surface of the measurement table 64, and is urged by a spring member 69 toward the left side surface of the measurement table 64.
  • the upper surface on the right end, the upper surface on the left end, the right side and the left side of the measurement table 64 are guided in the Y direction. It plays a role as a surface.
  • reaction force air pad 70 is urged toward the left side of the measurement table 64 by the spring member 69, the reaction air pad 70 is applied to the reference air pad 66 provided on the left side of the measurement table 64. A reaction force is applied and the X-axis direction is restricted. Further, the downward direction of the Z axis is restrained by the weight of the Y carriage 52. As a result, the Y carriage 52 is restricted from moving in the X-axis direction and the Z-axis direction, and moves only in the Y-axis direction.
  • the displacement in the X-axis direction of the traversing portion 55 A of the side air pad support member 55 is absorbed by the leaf spring 76, the displacement in the X-axis direction of the traversing portion 55 A is the left Y column Does not affect Therefore, for example, even if the transverse section 55 A thermally expands and contracts, no reaction force is generated in the left Y column 52 B due to thermal expansion and contraction, so that deformation of the X guide 52 is prevented and the X guide 52 Straightness can be kept constant.
  • reaction force air pad 70 is urged toward the left side of the measurement table 64 by the spring member 69, the measurement table 64 and the traversing portion 55A of the side air pad support member 55 are provided. Absorbs the thermal expansion and contraction difference in the X-axis direction and the parallelism error on both sides of the measurement table 64, and keeps the gap between the air pads 66, 70 to the measurement table 64 constant.
  • the reaction force against the measurement tables 64 of 6, 70 can be kept constant.
  • the left Y column 52B and the vertical portion 55B of the side air pad support member 55 are connected by the leaf spring 76, but the present invention is not limited to this, and other elastic connecting members such as wires may be used.
  • the left Y column 52B and the vertical part 55B may be connected.
  • the left Y column 52B and the vertical portion 55B of the side air pad support member 55 are connected by the leaf spring 76, but the invention is not limited thereto. Do not connect the vertical part 55B of the air pad support member 55. It is good.
  • the air pad 70 supported by the vertical portion 55B is configured to be urged toward the left side of the measurement table 64 by the spring member 69, but is not limited thereto.
  • the air pad 66 supported by the leg 54 may be urged toward the right side of the measurement table 64 by a spring member 69.
  • the upper guide air pad 60 is provided at the lower end of the right Y column 52 A via the leg portion 54.
  • the present invention is not limited to this, and the upper guide air pad 60 is provided. May be provided directly on the right Y column 52A.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

Instrument peu coûteux pour la mesure de coordonnées. Il assure une précision de mesure stable et peut maintenir constante la linéarité d'un guide des abscisses (52C). Il serait superflu de monter individuellement des éléments de guidage sur une table de mesure (64) car la face supérieure et les deux faces latérales de la table de mesure (64), servent de faces de guidage. Un espace est ménagé entre une extrémité saillante d'un élément support latéral à coussin d'air (55) et une partie inférieure d'une autre colonne (52B) afin de séparer l'une de l'autre l'extrémité saillante et la partie inférieure de l'autre colonne (52B), et la dilatation et le retrait thermiques des éléments supports latéraux à coussin d'air (66, 70) dans le sens de l'axe des abscisses ne sont pas transmis au guide des abscisses (52C) par l'intermédiaire des colonnes (52A, 52B). Par conséquent, le guide des abscisses (52C) ne subit aucune déformation.
PCT/JP1993/001702 1993-11-19 1993-11-19 Instrument pour la mesure de coordonnees WO1995014209A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP1993/001702 WO1995014209A1 (fr) 1993-11-19 1993-11-19 Instrument pour la mesure de coordonnees

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1993/001702 WO1995014209A1 (fr) 1993-11-19 1993-11-19 Instrument pour la mesure de coordonnees

Publications (1)

Publication Number Publication Date
WO1995014209A1 true WO1995014209A1 (fr) 1995-05-26

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ID=14070670

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1993/001702 WO1995014209A1 (fr) 1993-11-19 1993-11-19 Instrument pour la mesure de coordonnees

Country Status (1)

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WO (1) WO1995014209A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006242863A (ja) * 2005-03-04 2006-09-14 Mitsutoyo Corp 駆動装置
JP2006287098A (ja) * 2005-04-04 2006-10-19 Nsk Ltd 位置決め装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61123913U (fr) * 1985-01-22 1986-08-04
JPS63172902U (fr) * 1987-04-28 1988-11-10

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61123913U (fr) * 1985-01-22 1986-08-04
JPS63172902U (fr) * 1987-04-28 1988-11-10

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006242863A (ja) * 2005-03-04 2006-09-14 Mitsutoyo Corp 駆動装置
JP2006287098A (ja) * 2005-04-04 2006-10-19 Nsk Ltd 位置決め装置

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