JPS63172902U - - Google Patents

Info

Publication number
JPS63172902U
JPS63172902U JP6569687U JP6569687U JPS63172902U JP S63172902 U JPS63172902 U JP S63172902U JP 6569687 U JP6569687 U JP 6569687U JP 6569687 U JP6569687 U JP 6569687U JP S63172902 U JPS63172902 U JP S63172902U
Authority
JP
Japan
Prior art keywords
axis
sliding guide
slider
measuring machine
axis slider
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6569687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6569687U priority Critical patent/JPS63172902U/ja
Publication of JPS63172902U publication Critical patent/JPS63172902U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP6569687U 1987-04-28 1987-04-28 Pending JPS63172902U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6569687U JPS63172902U (fr) 1987-04-28 1987-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6569687U JPS63172902U (fr) 1987-04-28 1987-04-28

Publications (1)

Publication Number Publication Date
JPS63172902U true JPS63172902U (fr) 1988-11-10

Family

ID=30903007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6569687U Pending JPS63172902U (fr) 1987-04-28 1987-04-28

Country Status (1)

Country Link
JP (1) JPS63172902U (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995014209A1 (fr) * 1993-11-19 1995-05-26 Tokyo Seimitsu Co., Ltd. Instrument pour la mesure de coordonnees

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995014209A1 (fr) * 1993-11-19 1995-05-26 Tokyo Seimitsu Co., Ltd. Instrument pour la mesure de coordonnees

Similar Documents

Publication Publication Date Title
JPH0439011B2 (fr)
WO2005116783A1 (fr) Dispositif de mesure fonde sur des echelles lineaires permettant de mesurer une cible qui se deplace perpendiculairement a l'axe de mesure
EP0568120B1 (fr) Sonde de palpage de position
US20200309500A1 (en) Load bearing structure
JP6168344B2 (ja) 測定機、及び、測定機の移動ガイド機構
JPH0760191B2 (ja) 精密位置決め装置
GB2163256A (en) Surface tracer
JP2776427B2 (ja) 座標測定機
JPS63172902U (fr)
JPS63171726U (fr)
JPH0525789Y2 (fr)
KR100280870B1 (ko) 원자간력 현미경용 초정밀 3축 스테이지
JP4209983B2 (ja) ステージ機構
JPH0360938A (ja) 直進ガイドユニット
JPH04258711A (ja) スケール装置
JP2007033052A (ja) 石材定盤を備える装置及び座標測定機
JPH044170Y2 (fr)
JP3472481B2 (ja) 測定機
CN219368698U (zh) X轴运动平台及三坐标测量机
CN219262984U (zh) 高承载高精度气浮支座装置及三坐标测量机
JP7206577B2 (ja) 三次元座標測定装置
US11536303B2 (en) Coupling element for a positioning device, positioning device having a coupling element, and method of manufacture
JPH06137852A (ja) 直線運動体の運動誤差測定装置
JPS62277592A (ja) X−y移動テ−ブル
JP6390070B2 (ja) 三次元測定機