JPH0525789Y2 - - Google Patents

Info

Publication number
JPH0525789Y2
JPH0525789Y2 JP1986050820U JP5082086U JPH0525789Y2 JP H0525789 Y2 JPH0525789 Y2 JP H0525789Y2 JP 1986050820 U JP1986050820 U JP 1986050820U JP 5082086 U JP5082086 U JP 5082086U JP H0525789 Y2 JPH0525789 Y2 JP H0525789Y2
Authority
JP
Japan
Prior art keywords
sliding guide
carriage
air
air pads
axis direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986050820U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62161938U (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986050820U priority Critical patent/JPH0525789Y2/ja
Publication of JPS62161938U publication Critical patent/JPS62161938U/ja
Application granted granted Critical
Publication of JPH0525789Y2 publication Critical patent/JPH0525789Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986050820U 1986-04-07 1986-04-07 Expired - Lifetime JPH0525789Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986050820U JPH0525789Y2 (fr) 1986-04-07 1986-04-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986050820U JPH0525789Y2 (fr) 1986-04-07 1986-04-07

Publications (2)

Publication Number Publication Date
JPS62161938U JPS62161938U (fr) 1987-10-15
JPH0525789Y2 true JPH0525789Y2 (fr) 1993-06-29

Family

ID=30874524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986050820U Expired - Lifetime JPH0525789Y2 (fr) 1986-04-07 1986-04-07

Country Status (1)

Country Link
JP (1) JPH0525789Y2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4547562B2 (ja) * 2005-01-17 2010-09-22 レーザーテック株式会社 検査装置
JP2014059035A (ja) * 2012-09-19 2014-04-03 Takenori Kawazoe 移動機構および高さ測定器
JP6099290B2 (ja) * 2015-01-30 2017-03-22 株式会社東京精密 三次元座標測定装置
JP7206577B2 (ja) * 2021-03-16 2023-01-18 株式会社東京精密 三次元座標測定装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5058454A (fr) * 1973-09-21 1975-05-21
JPS5419283A (en) * 1977-07-11 1979-02-13 Dea Spa Machine tool or measuring machine having sliding portion by pneumatic shoe and magnetic shoe
JPS58177245A (ja) * 1982-04-12 1983-10-17 Toyoda Mach Works Ltd 静圧軸受を用いた可動台のバ−ガイド装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5058454A (fr) * 1973-09-21 1975-05-21
JPS5419283A (en) * 1977-07-11 1979-02-13 Dea Spa Machine tool or measuring machine having sliding portion by pneumatic shoe and magnetic shoe
JPS58177245A (ja) * 1982-04-12 1983-10-17 Toyoda Mach Works Ltd 静圧軸受を用いた可動台のバ−ガイド装置

Also Published As

Publication number Publication date
JPS62161938U (fr) 1987-10-15

Similar Documents

Publication Publication Date Title
US6058618A (en) Coordinate measuring machine
JPH0439011B2 (fr)
US5760564A (en) Dual guide beam stage mechanism with yaw control
JPS6327710A (ja) 直角座標測定機
US4520700A (en) Tailstock for rotatably mounting a workpiece in precision machinery
US10718602B2 (en) Bearing mount
JP2776427B2 (ja) 座標測定機
JPH02234009A (ja) 直角座標測定機
GB2163256A (en) Surface tracer
JPH0525789Y2 (fr)
JP2001183128A (ja) 座標測定装置
JP2019060894A (ja) 三次元座標測定装置
JP4268269B2 (ja) 直動案内ユニット
US4887360A (en) Way bearing arrangement for a horizontal arm coordinate measuring machine
JPS59105502A (ja) 三次元測定機
JPH05166B2 (fr)
JP2007033052A (ja) 石材定盤を備える装置及び座標測定機
JP5717914B1 (ja) 三次元座標測定機
JP6025905B2 (ja) 三次元座標測定機
JP5676045B2 (ja) 三次元座標測定機
JPH0548087Y2 (fr)
JPS62238407A (ja) ３次元測定装置
JP5677360B2 (ja) 三次元座標測定機
JPH0131566B2 (fr)
JP7324900B2 (ja) 内径測定装置