JPH0525789Y2 - - Google Patents

Description

[Detailed description of the invention] [Field of industrial application] The present invention relates to a sliding guide device that constitutes the sliding part of a portal-shaped carriage in, for example, a machine tool or a measuring machine. The present invention relates to a device for relatively guiding rectangular members.

[Prior Art] In a configuration in which a portal-shaped carriage is relatively guided by a horizontal sliding guide portion having a rectangular cross-section, each sliding member provided on both the left and right sides of the portal-shaped carriage is guided by the above-mentioned sliding guides. A configuration is known in which air pads are arranged opposite to each other in correspondence with the upper surface of the guide part.

[Problems to be Solved by the Invention] In the conventional configuration as described above, it is difficult to prevent the carriage from tilting slightly when the load moves to either the left or right side of the carriage.

[Means for Solving the Problem] In view of the above-mentioned conventional problems, the present invention provides first and second sliding slides having a rectangular cross-sectional shape and a hollow interior on both left and right sides of the base. A guide part is provided extending in the front-rear direction, and the four sides, top, bottom, left, and right of the sliding guide part are provided on both left and right sides of the portal-shaped carriage that is guided back and forth along the first and second sliding guide parts. A sliding guide member is provided with an inner surface facing the first sliding guide member, one sliding guide member is provided with air pads corresponding to the upper and lower surfaces of the first sliding guide part, and the other sliding guide member is provided with air pads corresponding to the upper and lower surfaces of the first sliding guide part. First, second, third, and fourth air pads are arranged facing each other on the upper, lower, left, and right sides of the second sliding guide, and the first and third air pads are connected to the second sliding guide. The second,
A fourth air pad is arranged close to the corner where the lower surface and the right side surface of the second sliding guide intersect, and the motor for moving the carriage back and forth is connected to the other sliding guide. It is provided on the member side.

[Example] Hereinafter, an example of the present invention will be described in detail based on the drawings.

Referring to FIGS. 1, 2, and 3, a box-shaped hollow base 3 of a three-dimensional measuring device 1, which is an example of a sliding machine, is placed on a floor or the like. Box-shaped sliding guide portions 5 and 7, each having a hollow interior, are provided on the left and right sides of the base 3 in FIG. 1, extending back and forth.

A gate-shaped main carriage 9 is supported on the sliding guide portions 5 and 7 so as to be movable in the front and rear directions. At the lower left and right of the main carriage 9,
Sliding guide members 11 and 13 are respectively mounted so as to be movable along the X-axis direction. Sliding guide member 13
An X-axis motor 15 is provided at the rear of the slider 1, and a guide rail 17 is provided on the sliding guide portion 7.

With the above configuration, the sliding guide members 11 and 13 are moved by the X-axis motor 15 to the sliding guide parts 5 and 13 on the base 3, respectively.
7, the main carriage 9 is moved in the X-axis direction while being guided by the guide rail 17.

On the upper beam 9U of the main carriage 9, there is a central carriage 1 which is movable in the left-right direction, that is, in the Y-axis direction in FIGS. 1 and 2.
9 is provided. Furthermore, as shown in FIGS. 1 and 3, a Y-axis motor 21 is provided at the rear of the central carriage 19, and a guide rail 23 is provided at the rear of the upper beam 9U of the main carriage 9. It is provided.

With the above configuration, the central carriage 19 is guided by the guide rail 23 along the Y-axis direction of the upper beam 9U of the gate-shaped main carriage 9 and moved by the Y-axis motor 21.

In the front of the central carriage 19, there is a
As shown in FIGS. 2 and 3, a spindle 25 is provided so as to be movable in the vertical direction, that is, in the Z-axis direction. The probe 2 is attached to the tip of the spindle 25 through the adapter 27 toward the lower part of the spindle 25.
9 is removably attached. At the rear of the spindle 25, a Z-axis motor 31 is installed as shown in FIGS.
As shown in the figure, the central carriage 19 is provided with a guide rail 33 extending in the Z-axis direction.

With the above configuration, the spindle 25 is guided by the guide rail 33 and moved by the Z-axis motor 31.

The movement of the main carriage 9 in the X-axis direction is controlled by a linear scale 35 that is attached to the outside of the sliding guide part 7 and extends in the X-axis direction, as shown in FIGS. 2 and 3. Moving guide member 1
This is done by a sensor 37 attached to a part of the inside of the housing. Central storage 19
Movement control in the Y-axis direction of and spindle 2
The movement control of the main carriage 9 in the Z-axis direction is performed by a linear scale and a sensor (not shown), similarly to the movement control of the main carriage 9 in the X-axis direction.

A workpiece support table 39 is placed on the base 3 between the sliding guide parts 5 and 7 in the X-axis direction, and the object to be measured is placed on the workpiece support table 39. A workpiece (not shown) is placed thereon. The probe 29, which is controlled to move along the X, Y, and Z axes, comes into contact with the workpiece and various measurement data are measured.

The sliding guide members 11 and 13 movably attached to the left and right lower portions of the main carriage 9 mentioned above are as follows.
They are provided to correspond to the upper, lower, left, and right surfaces of the sliding guide portions 5 and 7, and various air pads are provided on each corresponding surface.

More specifically, as shown in FIG. 1 and FIG. 3, on the lower surface of the upper right side of the sliding guide member 11, opposite to the upper surface of the sliding guide section 5, there are arranged at regular intervals along the X-axis direction. A plurality of air pads 41 are provided for each. Further, on the upper surface of the lower left side of the sliding guide member 11, opposite to the lower surface of the sliding guide part 5,
A plurality of air pads 43 are provided at regular intervals along the X-axis direction. Further, a plurality of air pads 45 are provided on the lower surface of the upper left side of the sliding guide member 13, facing the upper surface of the sliding guide portion 7, at regular intervals along the X-axis direction. Sliding guide member 1
A plurality of air pads 47 are provided on the upper surface of the lower right side of the slider 3, facing the lower surface of the sliding guide portion 7, at regular intervals along the X-axis direction. Similarly, a plurality of air pads 49 are provided on the right surface of the upper left side of the sliding guide member 13, facing the left side surface of the sliding guide portion 7, at regular intervals along the X-axis direction. Further, on the left side of the lower right side of the sliding guide member 13, an X
A plurality of air pads 5 are provided at regular intervals along the axial direction.
1 is provided.

With the above configuration, by supplying dry air to the air pads 49 and 51 from an air supply device (not shown), an air film is formed between the air pads 49 and the left outer side of the sliding guide portion 7, and , an air film is formed between the air pad 51 and the right outer side of the sliding guide portion 7. As a result, when the central carriage 19 is located almost in the middle of the upper beam 9U of the main carriage 9, the sliding guide members 11 and 13 move smoothly in the X-axis direction with respect to the sliding guide parts 5 and 7. It will be in a state where it is

By supplying dry air to the air pads 41, 43, 45, and 47 from an air supply device (not shown), an air film is formed between the air pad 41 and the upper surface of the sliding guide portion 5, and the air pads are An air film is formed between 43 and the lower surface of the sliding guide portion 5. Further, an air film is formed between the air pad 45 and the upper surface of the sliding guide section 7, and an air film is also formed between the air pad 47 and the lower surface of the sliding guide section 7.

As a result, when the central carriage 19 moves to the left side of the upper beam 9U of the main carriage 9 and the main carriage 9 itself tries to tilt downward to the left, the air pads 47 and 45 on the right side prevent the tilt and improve accuracy. maintain.
Further, when the central carriage 19 moves to the right side of the upper beam 9U of the main carriage 9, for example, and the main carriage 9 itself tries to tilt downward to the right, the air pad 43 on the left side and the air pads 49, 51 on the right side prevent the above tilt. and maintain accuracy. That is, each air pad 45, 4 on the right side
7, 49, and 51 effectively prevent rotation around the sliding guide portion 7.

Therefore, the central carriage 19 moves in the Y-axis direction of the upper beam 9U of the main carriage 9, and the air pads 43 and 47 act at any position to maintain the accuracy of the straightness and parallelism of the main carriage 9. Therefore, errors caused by the machine itself during measurement are eliminated.

Since the gate-shaped main carriage 9 is made of ceramic such as alumina ceramic, the weight of the main carriage 9 itself is extremely light. As a result, the load applied to the sliding guide portions 5, 7 provided at both left and right ends of the base 3 is reduced, and the effects of the air pads 43, 47 described above are more effectively exerted.

Since the main carriage 9 itself is lighter,
In addition to the above-mentioned effects, it is easy to handle during assembly, and there is no delay from the other party during acceleration or deceleration.

The central carriage 19 is movably moved in the Y-axis direction relative to the upper beam 9U of the gate-shaped main carriage 9, and the spindle 25 is movably movable in the Z-axis direction relative to the central carriage 19. Ru. More specifically, as shown in FIG. 4, on the front side of the upper beam 9U of the gate-shaped main carriage 9, holes are bored at the left and right ends of the front part 19F of the central carriage 19. A female thread is formed in the hole. The male threaded portions of the support members 53 and 55 are screwed into the female threaded portions of the holes. Air pads 61, 63 are provided on the support members 53, 55 via balls 57, 59. Therefore, by adjusting the support members 53 and 55, the upper beam 9U and the air pad 6
1 and 63 are adjusted in advance and fixed. The gap becomes an air film, and the front part 19F of the central carriage 19 slides in the Y-axis direction with respect to the upper beam 9U.

On the other hand, on the rear side of the upper beam 9U, in the rear part 19B of the central carriage 19, a female screw part is formed in a hole bored at the left and right end sides of the rear part 19B of the central carriage 19. be. The male threaded portions of the support members 65 and 67 are screwed into the female threaded portions of the holes. The supporting members 65, 67
Springs 69, 71 and ball seats 73, 75 are interposed in this order in the drilled groove, and air pads 81, 83 are provided on the ball seats 73, 75 via balls 77, 79. . Therefore, by adjusting the support members 65, 67,
The gap between the upper beam 9U and the air buds 81, 83 is adjusted and fixed in advance. The gap becomes an air film, and the central carriage 1 is attached to the upper beam 9U.
9 is slid in the Y-axis direction. At this time, since the air pads 81 and 83 on the preload side are fixed via springs 69 and 71 whose spring constant is slightly smaller than the rigidity of the air film,
Even if there is a change in the thickness of the upper beam 9U, the positions of the air pads 81 and 83 will remain the same as the springs 69 and 71.
This means that smooth sliding can be achieved without changing the thickness of the air film.

A spindle 25 is provided in the front section 19F of the central carriage 19, and the spindle 25 is movably moved in the Z-axis direction with respect to the front section 19F of the central carriage 19. More specifically, in FIG. 4, a support member 85 is provided at the front portion 19F of the central carriage 19 facing the left side surface portion on the rear side of the spindle 25.
An air pad 89 is fixed via a ball 87 with the air film adjusted in advance. A female thread is formed in a hole bored in the front part 19F of the central carriage 19 facing the lower right surface part on the right side of the spindle 25. The male threaded portion of the support member 91 is screwed into the female threaded portion of the hole. An air pad 95 is provided on the support member 91 via a ball 93. Therefore, by adjusting the support member 91, the central carriage 19
The gap between the front portion 19F of the air pad 95 and the air pad 95 is adjusted and fixed in advance. The gap becomes an air film, and the right side portion of the spindle 25 slides in the Z-axis direction with respect to the front portion 19F of the central carriage 19.

The front part 19F of the central carriage 19 facing the right side part on the front side of the spindle 25
A female thread is formed in the hole. The male threaded portion of the support member 97 is screwed into the female threaded portion of the hole. A spring 99 and a ball seat 101 are interposed in this order in the groove formed in the support member 97.
An air pad 105 is provided via the air pad 03. Therefore, by adjusting the support member 97,
The gap between the lower surface of the spindle 25 and the air pad 105 is adjusted in advance and fixed. The gap becomes an air film, and the lower surface of the spindle 25 is in a state of sliding against the front part 19F of the central carriage 19.

Furthermore, the front part 1 of the central carriage 19 facing the left upper surface part on the left side of the spindle 25
A female thread is formed in the hole drilled at 9F.
The male threaded portion of the support member 107 is screwed into the female threaded portion of the hole. A spring 109, a ball seat 1
11 are interposed in order, and the ball seat 111
An air pad 115 is provided through a ball 113. Therefore, by adjusting the support member 105, the gap between the left side surface of the spindle 25 and the air pad 115 is adjusted in advance and fixed.
The gap becomes an air film, and the left side surface of the spindle slides against the front part 19F of the central carriage 19. Therefore, spindle 2
5 is slid relative to the central carriage 19 in the Z-axis direction.

At this time, the air pad 10 on the preload side
5, 115 are fixed via springs 99, 109 having a spring constant slightly smaller than the rigidity of the air film, so even if the thickness of the spindle 25 varies, the positions of the air pads 105, 115 will remain the same as the springs 99, 109. Changes against the urging force of 109,
Smooth sliding can be achieved without changing the thickness of the air film.

Note that a sliding portion similar to that explained in FIG. 4 is also arranged in the upper part of the central carriage 19, but since it is the same as that in FIG. 4, the explanation will be omitted. Furthermore, sliding guide members 11 and 13 provided at the left and right lower portions of the main carriage 9 move in the X-axis direction relative to the sliding guide members 5 and 7 provided on the left and right sides of the base as described above. The detailed structure of the air pad is the same as that shown in FIG. 4.

Instead of supporting the air pad 61 on the support member 53 via the ball 57, the support member 65 is provided with a spring 69, a ball seat 73, and a ball 77.
It is also possible to support the air pad 81 by increasing the strength of the spring on the reference side. Similarly, the above-mentioned means may be used instead of the support members 55, 85 and 91.

Further, air pads 89 and 115, 95 and 10 are provided opposite to adjacent surfaces of the spindle 25.
5 is disposed close to the corner formed by the adjacent surfaces, rotation of the axis of the spindle 25 is suppressed, and sliding of the spindle 25 is performed smoothly.

[Effects] As can be understood from the above description of the embodiment, the present invention has a first structure having a rectangular cross-sectional shape and a hollow interior on both left and right sides of the base 3.
Second sliding guide portions 5 and 7 are provided extending in the front-rear direction, and are provided on both left and right sides of the portal-shaped carriage 9 that is guided back and forth along the first and second sliding guide portions 5 and 7. , 4 on the top, bottom, left and right of the sliding guide parts 5 and 7.
Sliding guide member 11, 1 with an inner surface facing the surface
3, one sliding guide member 11 is provided with air pads 41, 43 corresponding to the upper and lower surfaces of the first sliding guide part 5, and the other sliding guide part 13 is provided with air pads 41, 43 corresponding to the upper and lower surfaces of the first sliding guide part 5,
First, second, third, and fourth air pads 45 are provided on the upper, lower, left, and right sides of the second sliding guide portion 7, respectively.
47, 49, and 51 are arranged facing each other, and the first and third
The air pads 45, 49 are arranged close to the corner where the upper surface and the left side surface of the second sliding guide part 7 intersect, and the air pads 47, 51
is arranged close to the corner where the lower surface and the right side surface of the second sliding guide member 7 intersect, and a motor for moving the carriage back and forth is placed on the other sliding guide member side. Because of this, it is possible to effectively prevent the carriage 9 from tilting in the left-right direction, and also to prevent rotation around the sliding guide portion 7, so that the carriage 9 can always be held horizontally. It is something. In other words, the carriage 9 can be guided accurately without causing any inclination.

Furthermore, since the insides of the first and second sliding guide parts 5 and 7 are hollow, the sliding guide parts 5 and 7 respond to external temperature changes from the outside and inside. , the overall temperature is always the same, and changes in external temperature will not cause parts with different temperature distributions in the sliding guide parts 5 and 7, and guide accuracy will not deteriorate due to differences in temperature distribution. There is no such thing.

Furthermore, by providing the motor on the other sliding guide portion side, the effect of the weight of the motor is less than when it is provided on one sliding guide portion side having a smaller number of air pads, and movement with high accuracy can be achieved.

[Brief explanation of the drawing]

FIG. 1 is a front view of a three-dimensional measuring device, which is an example of a sliding machine. FIG. 2 is a view taken along the arrows in FIG. FIG. 3 is a view taken along the arrows in FIG. 2. FIG. 4 is a sectional view taken along the - line in FIG. 1. Explanation of the symbols representing the main parts of the drawings: 1... Three-dimensional measuring device, 3... Base, 5, 7... Sliding guide section, 9... Main carriage, 11, 13... Sliding guide member, 19... ...Central storage, 2
5...Spindle, 41-59, 61, 63, 8
1,83,89,95,105,115... air pad, 53,55,65,67,85,91,
97, 107...Supporting member, 69, 71, 99,
109...Spring.

Claims (1)

[Scope of utility model registration request] First and second sliding guide portions 5, 7 each having a rectangular cross-sectional shape and a hollow interior are provided on the left and right sides of the base 3.
are provided extending in the front-rear direction, and are provided on both left and right sides of the portal-shaped carriage 9 which is guided back and forth along the first and second sliding guide parts 5, 7. Sliding guide members 11 and 13 having inner surfaces facing each other on four sides (top, bottom, left and right) are provided, and one of the sliding guide members 11 has air pads 41 and 43 corresponding to the top and bottom surfaces of the first sliding guide section 5. The other sliding guide member 13 has first, second, third, and fourth air pads 45, 47, 49, and 51 on the upper, lower, left, and right surfaces of the second sliding guide part 7, respectively. are arranged facing each other, and the first and third air pads 45,
49 is disposed close to the corner where the upper surface and the left side surface of the second sliding guide part 7 intersect, and
Fourth air pads 47 and 51 are arranged close to the corner where the lower surface and the right side surface of the second sliding guide section 7 intersect, and a motor 15 for moving the carriage 9 back and forth is provided. the other sliding guide member 1
A sliding guide device characterized in that it is provided on three sides.